Number | Date | Country | Kind |
---|---|---|---|
90 06792 | May 1990 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
4508970 | Ackerman | Apr 1985 | |
4886646 | Carter et al. | Dec 1989 | |
4919899 | Hermann et al. | Apr 1990 | |
4969745 | Ibe | Nov 1990 |
Number | Date | Country |
---|---|---|
0265319 | Apr 1988 | EPX |
0289200 | Nov 1988 | EPX |
0129690 | Feb 1978 | DEX |
3904858 | Sep 1989 | DEX |
Entry |
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Journal of Crystal Growth, vol. 73, No. 2, Nov., 1985, pp. 364-368, R. F. Karlicek et al., "Remote Optical Monitoring of Reactants in a Vapor Phase Epitaxial Reactor." |