Claims
- 1. A device for treating fine particles, comprising:
- a plurality of adjacently positioned chambers having partitions therebetween, the environment in each chamber existing at a desired pressure, said chambers including at least one reaction chamber and a collecting chamber;
- each of said partitions having an opening to connect adjacently positioned chambers, said openings being aligned along a linear axis;
- a convergent-divergent nozzle for directing fine particles under pressure through said openings along said linear axis such that said fine particles may be acted upon in one of said reaction chambers by chemical treatment therein and be directed to said collecting chamber;
- means for adjusting the pressure under which said fine particles are directed through said nozzle relative to the pressures of each of said chambers such that said fine particles are projected from said nozzle in a beam having a substantially consistent cross-section in each of said chambers; and
- means for adjusting the pressures of each of said chambers relative to one another such that the pressures of adjacently positioned chambers are substantially equal.
- 2. A device for treating fine particles according to claim 1, wherein at least one reaction chamber includes a means for introducing a reacting gas to effect said chemical treatment of said fine particles in said at least one reaction chamber.
- 3. A device for treating fine particles according to claim 1, wherein at least one reaction chamber includes a means for imparting energy to effect said chemical treatment of said fine particles in said at least one reaction chamber.
- 4. A device for treating fine particles according to claim 1, wherein at least one of said chambers communicates with an evacuating means to maintain the pressure of said at least one chamber at a desired level.
- 5. A device for treating fine particles according to claim 4, wherein a means of cleaning is provided between said at least one chamber and said evacuating means.
- 6. A device for treating fine particles, comprising:
- a starting material chamber for forming said fine particles;
- a plurality of adjacently positioned chambers having partitions therebetween, the environment in each chamber existing at a desired pressure, said chambers including at least one reaction chamber and a collecting chamber;
- each of said partitions having an opening to connect adjacently positioned chambers, said openings being aligned along a linear axis;
- a convergent-divergent nozzle for directing fine particles under pressure from said starting material chamber through said openings along said linear axis such that said fine particles may be acted upon in one of said reaction chambers by chemical treatment therein and be directed to said collecting chamber;
- means for adjusting the pressure under which said fine particles are directed from said starting material chamber and through said nozzle relative to the pressures of each of said chambers such that said fine particles are projected from said nozzle in a beam having a substantially consistent cross-section in each of said chambers; and
- means for adjusting the pressures of each of said chambers relative to one another such that the pressures of adjacently positioned chambers are substantially equal.
- 7. A device for treating fine particles according to claims 6, wherein at least one reaction chamber includes a means for introducing a reacting gas to effect said chemical treatment of said fine particles in said at least one reaction chamber.
- 8. A device for treating fine particles according to claims 6, wherein at least one reaction chamber includes a means for imparting energy to effect said chemical treatment of said fine particles in said at least one reaction chamber.
- 9. A device for treating fine particles according to claim 6, wherein at least one of said chambers communicates with an evacuating means to maintain the pressure of said at least one chamber at a desired level.
- 10. A device for treating fine particles according to claim 9, wherein a means for cleaning is provided between said at least one chamber and said evacuating means.
- 11. A device for treating fine particles according to claim 6, wherein said starting material chamber is includes a microwave-introducing means.
- 12. A device for treating fine particles, comprising:
- a plurality of adjacently positioned chambers having partitions therebetween, the environment in each chamber existing at a desired pressure, said chambers including at least one reaction chamber and a collecting chamber, at least one of said reaction chambers including a means for introducing a reaction gas and an evacuating means for maintaining the pressure in said at least one reaction chamber at a desired level;
- each of said partitions having an opening to connect adjacently positioned chambers, said openings being aligned along a linear axis;
- a convergent-divergent nozzle for directing fine particles under pressure through said openings along said linear axis such that said fine particles may be acted upon in one of said reaction chambers by chemical treatment therein and be directed to said collecting chamber;
- means for adjusting the pressure under which said fine particles are directed through said nozzle relative to the pressures of each of said chambers such that said fine particles are projected from said nozzle in a beam having a substantially consistent cross-section in each of said chambers; and
- means for adjusting the pressures of each of said chambers relative to one another such that the pressures of adjacently positioned chambers are substantially equal.
Priority Claims (1)
Number |
Date |
Country |
Kind |
61-224929 |
Sep 1986 |
JPX |
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Parent Case Info
This application is a continuation of application Ser. No. 07/099,749 filed Sept. 22, 1987, now abandoned.
US Referenced Citations (22)
Foreign Referenced Citations (1)
Number |
Date |
Country |
51725 |
Mar 1985 |
JPX |
Non-Patent Literature Citations (2)
Entry |
Ono, Jap. J. Ap. Phys., vol. 23, No. 8, Aug. 1984, pp. L534-L536. |
Maissel, Handbook of Thin Film Technology, McGraw Hill Book Co., .COPYRGT.1970, chapter 2, pp. 5-7. |
Continuations (1)
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Number |
Date |
Country |
Parent |
99749 |
Sep 1987 |
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