Number | Date | Country | Kind |
---|---|---|---|
2-418142 | Dec 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4495218 | Azuma et al. | Jan 1985 | |
4568565 | Gupta et al. | Feb 1986 | |
5100832 | Khagawa et al. | Mar 1992 |
Number | Date | Country |
---|---|---|
61-1213375 | Sep 1986 | JPX |
61-1217575 | Sep 1986 | JPX |
Entry |
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G. A. West et al., "Laser Induced Chemical Vapor Deposition of Titanium Silicide Films", Nov. 1985. |
P. K. Beyer et al., "Laser Induced Chemical Vapor Deposition of SiO.sub.2 ", Apr. 1985. |