Dielectric window for plasma processing device

Information

  • Patent Grant
  • D672377
  • Patent Number
    D672,377
  • Date Filed
    Friday, September 10, 2010
    14 years ago
  • Date Issued
    Tuesday, December 11, 2012
    11 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D15 138
    • D15 144
    • D15 1441
    • D15 1442
    • 118 723000
    • 156 345000
    • 156 345360
    • 156 345410
    • 156 345480
    • 204 298060
    • 204 298080
    • 204 298110
    • 204 298340
    • 336 232000
  • International Classifications
    • 1509
    • Term of Grant
      14Years
Abstract
Description


FIG. 1 is a perspective view of a dielectric window for plasma processing device showing our new design;



FIG. 2 is a front view thereof;



FIG. 3 is a rear view thereof;



FIG. 4 is a right side view thereof;



FIG. 5 is a top plan view thereof; and,



FIG. 6 is a cross-sectional view taken along line 6-6 of FIG. 2.


The broken lines are shown for illustrative purposes only and form no part of the claimed design.


Claims
  • The ornamental design for a dielectric window for plasma processing device, as shown and described.
Priority Claims (1)
Number Date Country Kind
2010-008110 Mar 2010 JP national
US Referenced Citations (9)
Number Name Date Kind
4391034 Stuby Jul 1983 A
6280563 Baldwin et al. Aug 2001 B1
7694651 Vikharev et al. Apr 2010 B2
20010007302 Hong Jul 2001 A1
20060110546 Vikharev et al. May 2006 A1
20080102538 Chang et al. May 2008 A1
20090068934 Hong et al. Mar 2009 A1
20090314434 Song et al. Dec 2009 A1
20100230273 Kawamata Sep 2010 A1