Patent Grant
10405106
This application relates to microphones, and more specifically, differential microphones.
Different types of acoustic devices have been used through the years. One type of device is a microphone. In a microelectromechanical system (MEMS) microphone, a MEMS die includes a diagram and a back plate. The MEMS die is supported by a substrate and enclosed by a housing (e.g., a cup or cover with walls). A port may extend through the substrate (for a bottom port device) or through the top of the housing (for a top port device). In any case, sound energy traverses through the port, moves the diaphragm and creates a changing potential of the back plate, which creates an electrical signal. Microphones are deployed in various types of devices such as personal computers and cellular phones.
Various types of problems can arise as microphones are operated. Total harmonic distortion (THD) can be thought of as the level of distortion or nonlinearity of output signals. Output signal can be considered linear if the input signal can be represented by using the output signal by multiplying the output signal with a constant value. More specifically, THD can be defined as the ratio of the sum of the powers of all harmonic components of a signal to the power of the fundamental frequency of the output signal. The less the THD, the better the signal quality of the microphone.
Previous approaches have not always proven satisfactory for reducing THD and this has resulted in some user dissatisfaction with these previous approaches.
In general, one aspect of the subject matter described in this specification can be embodied in a microphone. The microphone comprises a base, a first micro electro mechanical system (MEMS) device disposed on the base, and a second MEMS device disposed on the base. The first MEMS device includes a first diaphragm and a first back plate. The second MEMS device includes a second diaphragm and a second back plate. The first MEMS device and the second MEMS device are arranged such that positive pressure moves the first diaphragm towards the first back plate, and the positive pressure simultaneously moves the second diaphragm of the from second back plate.
Another aspect of the subject matter can be embodied in a microphone. The microphone comprises a base, a first micro electro mechanical system (MEMS) device disposed on the base, and a second MEMS device disposed on the base. The first MEMS device comprises a first diaphragm, a first back plate, and a first substrate supporting the first diaphragm and the first back plate. The first diaphragm is between the first back plate and the base. The second MEMS comprises a second diaphragm, a second back plate, and a second substrate supporting the second diaphragm and the second back plate. The second back plate is between the second diaphragm and the base.
Yet another aspect of the subject matter can be embodied in a microphone. The microphone comprises a base, a substrate disposed on the base, a first MEMS device and a second MEMS device supported by the substrate. The first MEMS device comprises a first diaphragm and a first back plate. The first diaphragm is between the first back plate and the base. The second MEMS device comprises a second diaphragm, and a second back plate. The second back plate is between the second diaphragm and the base.
The foregoing summary is illustrative only and is not intended to be in any way limiting. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features will become apparent by reference to the following drawings and the detailed description.
The foregoing and other features of the present disclosure will become more fully apparent from the following description and appended claims, taken in conjunction with the accompanying drawings. Understanding that these drawings depict only several embodiments in accordance with the disclosure and are, therefore, not to be considered limiting of its scope, the disclosure will be described with additional specificity and detail through use of the accompanying drawings.
In the following detailed description, reference is made to the accompanying drawings, which form a part hereof. In the drawings, similar symbols typically identify similar components, unless context dictates otherwise. The illustrative embodiments described in the detailed description, drawings, and claims are not meant to be limiting. Other embodiments may be utilized, and other changes may be made, without departing from the spirit or scope of the subject matter presented here. It will be readily understood that the aspects of the present disclosure, as generally described herein, and illustrated in the figures, can be arranged, substituted, combined, and designed in a wide variety of different configurations, all of which are explicitly contemplated and make part of this disclosure.
The present approaches provide differential microphones with improved performance characteristics. In aspects, two micro electro mechanical system (MEMS) devices (or motors) are provided. A first MEMS device includes a first diaphragm and a first back plate, and a second MEMS device includes a second diaphragm and a second back plate. Positive pressure moves the first diaphragm closer to the first back plate. This positive pressure simultaneously moves the second diaphragm further away from the second back plate. In so doing, total harmonic distortion is significantly reduced and the performance of the microphone is improved.
Referring now to
The first MEMS device 102, the second MEMS device 108, and the integrated circuit 116 are disposed on a base or substrate 118. In one example, the base 118 may be a printed circuit board. Other examples are possible. A first port 120 and second port 122 extend through the base 118 and allow sound pressure to reach the first MEMS 102 and the second MEMS 108. A cover 124 couples to the base 118 and encloses the MEMS devices 102, 108 and integrated circuit 116 creating a back volume 126. The cover 124 may be constructed of any conducting material such as copper, nickel, or gold or layers of conducting materials.
In this example, the second MEMS device 108 is flip chip connected to the base 118 and the base contain conducting traces, 124, that electrically connects to the MEMS and allow lead wire, 114, attachment and connection to the ASIC, 116. As connected the diaphragms and back plates of the first and second MEMS devices are disposed in reverse order, i.e., the diaphragm of one is on the top relative to the back plate, and the diaphragm of the other is on the bottom relative to its back plate.
It will be appreciated that the back plates and diaphragms of each of the MEMS devices in the absence of sound pressure are the same or approximately the same distance apart. In operation, positive sound pressure 170 moves the first diaphragm 104 closer to the first back plate 106 (relative to the starting position) as indicated by the arrow labeled 172. This positive pressure 170 simultaneously moves the second diaphragm 110 further away from the second back plate 112 (relative to the starting position) as indicated by the arrow labeled 174. In so doing, total harmonic distortion is reduced and the performance of the microphone is improved.
The signals from the two MEMS devices are obtained and the difference is taken from each signal and produces a sinusoidal or near sinusoidal signal with significantly reduced THD. In this example, this may occur at the integrated circuit 116, but it will also be appreciated the difference can be obtained by routing the signals to outside the microphone and the difference obtained by an external circuit.
Referring now to
The MEMS device 202 and the integrated circuit 216 are disposed on a base or substrate 218. In one example, the base 218 may be a printed circuit board. Other examples are possible. A port 220 extends through the base 218 and allows sound pressure to reach the MEMS 202 and its two motors, 207 and 208. A cover 224 couples to the base 218 and encloses the MEMS device 202 and integrated circuit 216 creating a back volume 226. The cover 224 may be constructed of any conducting material such as copper, nickel, or gold or layers of conducting materials.
It will be appreciated that the back plates and diaphragms of each of the MEMS devices in the absence of sound pressure are the same or approximately the same distance apart. In operation, positive sound pressure 270 moves the first diaphragm 204 closer to the first back plate 206 as indicated by the arrow labeled 272. This positive pressure 270 simultaneously moves the second diaphragm 210 further away from the second back plate 212 as indicated by the arrow labeled 274. In so doing, total harmonic distortion is reduced and the performance of the microphone is improved.
The signals from the two MEMS devices are obtained and the difference is taken from each signal and produces a sinusoidal or near sinusoidal signal with significantly reduced THD. In this example, this may occur at the integrated circuit 216, but it will also be appreciated the difference can be obtained by routing the signals to outside the microphone and the difference obtained by an external circuit.
Referring now to
Using the approaches described herein, a first curve 302 is produced by a first MEMS device (positive pressure moves the diaphragm of this MEMS or motor towards its back plate), and the second curve 304 is produced by the second MEMS device (positive pressure moves the diaphragm of this MEMS or motor away from its back plate). The difference 344 is obtained by taking the outputs (after being amplified) and this produces the waveform 306. It will be appreciated that the difference obtained is a nearly sinusoidal signal back (the input signal, i.e. the sound pressure, was sinusoidal). Non-linearities are cancelled or substantially eliminated.
It will be appreciated that any of the above examples produces these results or similar results as shown in
The herein described subject matter sometimes illustrates different components contained within, or connected with, different other components. It is to be understood that such depicted architectures are merely exemplary, and that in fact many other architectures can be implemented which achieve the same functionality.
With respect to the use of substantially any plural and/or singular terms herein, those having skill in the art can translate from the plural to the singular and/or from the singular to the plural as is appropriate to the context and/or application. The various singular/plural permutations may be expressly set forth herein for sake of clarity.
It will be understood by those within the art that, in general, terms used herein, and especially in the appended claims (e.g., bodies of the appended claims) are generally intended as “open” terms (e.g., the term “including” should be interpreted as “including but not limited to,” the term “having” should be interpreted as “having at least,” the term “includes” should be interpreted as “includes but is not limited to,” etc.).
It will be further understood by those within the art that if a specific number of an introduced claim recitation is intended, such an intent will be explicitly recited in the claim, and in the absence of such recitation no such intent is present. For example, as an aid to understanding, the following appended claims may contain usage of the introductory phrases “at least one” and “one or more” to introduce claim recitations. However, the use of such phrases should not be construed to imply that the introduction of a claim recitation by the indefinite articles “a” or “an” limits any particular claim containing such introduced claim recitation to inventions containing only one such recitation, even when the same claim includes the introductory phrases “one or more” or “at least one” and indefinite articles such as “a” or “an” (e.g., “a” and/or “an” should typically be interpreted to mean “at least one” or “one or more”); the same holds true for the use of definite articles used to introduce claim recitations. In addition, even if a specific number of an introduced claim recitation is explicitly recited, those skilled in the art will recognize that such recitation should typically be interpreted to mean at least the recited number (e.g., the bare recitation of “two recitations,” without other modifiers, typically means at least two recitations, or two or more recitations).
Furthermore, in those instances where a convention analogous to “at least one of A, B, and C, etc.” is used, in general such a construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B, and C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). In those instances where a convention analogous to “at least one of A, B, or C, etc.” is used, in general such a construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B, or C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). It will be further understood by those within the art that virtually any disjunctive word and/or phrase presenting two or more alternative terms, whether in the description, claims, or drawings, should be understood to contemplate the possibilities of including one of the terms, either of the terms, or both terms. For example, the phrase “A or B” will be understood to include the possibilities of “A” or “B” or “A and B.” Further, unless otherwise noted, the use of the words “approximate,” “about,” “around,” “substantially,” etc., mean plus or minus ten percent.
The foregoing description of illustrative embodiments has been presented for purposes of illustration and of description. It is not intended to be exhaustive or limiting with respect to the precise form disclosed, and modifications and variations are possible in light of the above teachings or may be acquired from practice of the disclosed embodiments. It is intended that the scope of the invention be defined by the claims appended hereto and their equivalents.
This application is a National Stage Application of PCT/US2016/061902, filed Nov. 14, 2016, which claims the benefit of and priority to U.S. Provisional Patent Application No. 62/257,483, filed Nov. 19, 2015, the entire contents of which are incorporated herein by reference.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/US2016/061902 | 11/14/2016 | WO | 00 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO2017/087332 | 5/26/2017 | WO | A |
| Number | Name | Date | Kind |
|---|---|---|---|
| 7190038 | Dehe et al. | Mar 2007 | B2 |
| 7473572 | Dehe et al. | Jan 2009 | B2 |
| 7781249 | Laming et al. | Aug 2010 | B2 |
| 7795695 | Weigold et al. | Sep 2010 | B2 |
| 7825484 | Martin et al. | Nov 2010 | B2 |
| 7829961 | Hsiao | Nov 2010 | B2 |
| 7856804 | Laming et al. | Dec 2010 | B2 |
| 7903831 | Song | Mar 2011 | B2 |
| 8582788 | Leidl et al. | Nov 2013 | B2 |
| 20050207605 | Dehe et al. | Sep 2005 | A1 |
| 20070278501 | MacPherson et al. | Dec 2007 | A1 |
| 20080175425 | Roberts et al. | Jul 2008 | A1 |
| 20080267431 | Leidl et al. | Oct 2008 | A1 |
| 20080279407 | Pahl | Nov 2008 | A1 |
| 20080283942 | Huang et al. | Nov 2008 | A1 |
| 20090001553 | Pahl et al. | Jan 2009 | A1 |
| 20090116669 | Song | May 2009 | A1 |
| 20090180655 | Tien et al. | Jul 2009 | A1 |
| 20100046780 | Song | Feb 2010 | A1 |
| 20100052082 | Lee et al. | Mar 2010 | A1 |
| 20100128914 | Khenkin | May 2010 | A1 |
| 20100183181 | Wang | Jul 2010 | A1 |
| 20100246877 | Wang et al. | Sep 2010 | A1 |
| 20100290644 | Wu et al. | Nov 2010 | A1 |
| 20100322443 | Wu et al. | Dec 2010 | A1 |
| 20100322451 | Wu et al. | Dec 2010 | A1 |
| 20110013787 | Chang | Jan 2011 | A1 |
| 20110075875 | Wu et al. | Mar 2011 | A1 |
| 20110158449 | Tanaka et al. | Jun 2011 | A1 |
| 20110248364 | Huang et al. | Oct 2011 | A1 |
| 20120300969 | Tanaka | Nov 2012 | A1 |
| 20130044899 | Barber et al. | Feb 2013 | A1 |
| 20130108074 | Reining | May 2013 | A1 |
| 20140008740 | Wang et al. | Jan 2014 | A1 |
| 20150296307 | Shao et al. | Oct 2015 | A1 |
| 20160165357 | Morishita | Jun 2016 | A1 |
| 20180041840 | Zheng | Feb 2018 | A1 |
| 20180041842 | Zheng | Feb 2018 | A1 |
| Number | Date | Country |
|---|---|---|
| 102726065 | Oct 2012 | CN |
| 104902414 | Sep 2015 | CN |
| 104902415 | Sep 2015 | CN |
| WO-2015142893 | Sep 2015 | WO |
| Entry |
|---|
| International Search Report and Written Opinion, PCT/US2016/061902, Knowles Electronics, LLC, 7 pages (dated Jan. 19, 2017). |
| Number | Date | Country | |
|---|---|---|---|
| 20180270587 A1 | Sep 2018 | US |
| Number | Date | Country | |
|---|---|---|---|
| 62257483 | Nov 2015 | US |
