Number | Name | Date | Kind |
---|---|---|---|
4394670 | Sugitani et al. | Jul 1983 | |
4456371 | Lin | Jun 1984 | |
4789425 | Drake et al. | Dec 1988 | |
5160577 | Deshpande | Nov 1992 | |
5198834 | Childers et al. | Mar 1993 | |
5278584 | Keefe et al. | Jan 1994 | |
5331344 | Miyagawa et al. | Jul 1994 | |
5376483 | Rolfson | Dec 1994 | |
5658471 | Murthy et al. | Aug 1997 | |
5686224 | O'Neill | Nov 1997 | |
6045215 | Coulman | Apr 2000 |
Number | Date | Country |
---|---|---|
0244214A1 | Nov 1987 | EPX |
Entry |
---|
Arnost Reiser, Photoreactive Polymers: The Science and Technology of Resists, John Wiley & Sons, Feb. 1989, ISBN: 0471855502, pp 184-187. |