Known lithographic approaches for manufacturing integrated circuits having high precision may be costly. As the scale of features decreases, optical lithography may require increasingly expensive masks for patterning along with complex exposure tools including high powered excimer lasers and stacks of precision ground lens elements to achieve desired resolution. For metallization processes, optical lithography may require eight processing steps (substrate metallization, photoresist deposition, photoresist cure, mask alignment, extreme ultraviolet exposure, photoresist development, metal etch, and photoresist removal) and associated manufacturing equipment. Nanoimprint lithography is a competing technology for creating smaller scale integrated circuits. But with metallization processes, nanoimprint lithography may require six process steps (substrate metallization, photoresist deposition, photoresist cure, stamp positioning/impression transfer, metal etch, and photoresist removal).
This Summary is provided to introduce a selection of some concepts in a simplified form as a prelude to the Detailed Description. This Summary is not intended to identify key or essential features.
Catalyst ink may be directly printed onto a substrate using a stamp. The printed catalyst ink may then be converted, by plating, to a pattern of one or more metal traces. The pattern may comprise micrometer scale features. The steps may be repeated an arbitrary number of times to replicate the pattern in different locations and/or on different substrates. To promote transfer of catalyst ink from the stamp to the substrate, materials for a stamp and/or a substrate, and/or components of a catalyst ink, may be selected so that attraction of one or more of components of the catalyst ink to one or more print surfaces of the substrate is greater than attraction of those one or more ink components to one or more write surfaces of the stamp. Metal traces and/or patterns may be formed by such steps in connection with fabrication of integrated circuits, system-on-chip assemblies, printed circuit boards, conformal patterns (e.g., for antenna arrays), and/or other articles.
These and other features are described in more detail below.
Some features are shown by way of example, and not by way of limitation, in the figures of the accompanying drawings and in which like reference numerals refer to similar elements.
A patterned stamp may be used to replicate patterns of catalyst ink on a substrate. One or more write surfaces of the stamp may be coated with a layer of catalyst ink. The catalyst ink coating the stamp write surface(s) may be brought into contact with one or more print surfaces of a substrate. When in contact, the catalyst ink may transfer from the stamp write surface(s) to the substrate print surface(s), thereby creating a reverse version of the stamp pattern on a surface of the substrate. Attraction of one or more components of the catalyst ink (e.g., catalyst nanoparticles, one or more ink additives) to the substrate print surface(s) may be greater than attraction of the catalyst ink component(s) to the stamp write surface(s). The stamping process may be repeated an arbitrary number of times on a substrate (and/or on multiple substrates) for replicating the pattern in different locations. Subsequent electroless plating of the catalyst ink patterns on the substrate(s) may transform those catalyst ink patterns into metal traces. Direct printing using a stamp allows creation of catalyst ink patterns, and corresponding conductive regions after plating, having features at micrometer (μm) or nanometer (nm) scales.
The write surfaces 32 may be part of a pattern 35, an approximate boundary of which is indicated in
The stamp 30 may comprise a main body formed from one or more parent materials, examples of which are described below. The write surfaces 32 may comprise a parent material of the main body, and/or may comprise one or more surface treatments and/or coatings, examples of which are also described below. The pattern 35 and/or other patterns may, for example, be formed using electron beam lithography, nanoimprint lithography, or other fabrication methods.
The catalyst ink 40 may comprise a catalyst ink such as one or more of the catalyst inks described in U.S. Pat. No. 10,619,059, which patent is incorporated by reference herein. The catalyst ink 40 may be a colloidal solution. Components of the catalyst ink 40 may, for example, comprise catalyst nanoparticles and/or catalyst molecules, one or more solvents, and one or more binders and/or other additives. The catalyst nanoparticles may be palladium (Pd) nanoparticles and/or nanoparticles of one or more other catalyst materials. Examples of other catalyst materials comprise platinum (Pt) and rhodium (Rh). Sizes of the catalyst nanoparticles may, for example, range from 15 nm to 500 nm. A size of a catalyst nanoparticle may, for example, be a largest linear dimension of that nanoparticle (e.g., a diameter of a spherical nanoparticle). A size range of catalyst nanoparticles for a particular catalyst ink may be selected based on resolution of features of a pattern to be printed with that catalyst ink. In general, nanoparticles for a catalyst ink should be smaller than the smallest feature dimension of a pattern to be printed. Although smaller nanoparticle sizes allow for printing of smaller features, larger-sized nanoparticles may be less costly to process and/or handle. Example ranges of catalyst nanoparticle sizes may comprise 5 nm to 100 nm, 5 nm to 50 nm, 5 nm to 10 nm, 15 nm to 500 nm, 15 nm to 400 nm, 15 nm to 300 nm, 15 nm to 200 nm, 15 nm to 100 nm, 15 nm to 50 nm, 50 nm to 500 nm, 50 nm to 400 nm, 50 nm to 300 nm, 50 nm to 200 nm, 50 nm to 100 nm, 100 nm to 500 nm, 100 nm to 400 nm, 100 nm to 300 nm, 100 nm to 200 nm, 200 nm to 500 nm, 200 nm to 400 nm, 200 nm to 300 nm, 300 nm to 500 nm, 300 nm to 400 nm, and 400 nm to 500 nm.
The concentration of catalyst nanoparticles in a catalyst ink may be selected based on a desired viscosity, thickness, and/or other characteristics of a catalyst ink. A catalyst ink formulated for printing may have a higher concentration of catalyst nanoparticles (e.g., to increase reaction rate during electroless plating) than a catalyst ink formulated for application via aerosol jet. A catalyst ink may, for example, contain from 0.1 weight percent (wt %) to 5.0 wt % catalyst nanoparticles. Example ranges of catalyst nanoparticle concentration for a catalyst ink may comprise 0.1 wt % to 5.0 wt %, 0.1 wt % to 4.0 wt %, 0.1 wt % to 3.0 wt %, 0.1 wt % to 2.2 wt %, 0.1 wt % to 1.5 wt %, 0.1 wt % to 0.5 wt %, 0.5 wt % to 5.0 wt %, 0.5 wt % to 4.0 wt %, 0.5 wt % to 3.0 wt %, 0.5 wt % to 2.2 wt %, 0.5 wt % to 1.5 wt %, 1.5 wt % to 5.0 wt %, 1.5 wt % to 4.0 wt %, 1.5 wt % to 3.0 wt %, 1.5 wt % to 2.2 wt %, 2.2 wt % to 5.0 wt %, 2.2 wt % to 4.0 wt %, 2.2 wt % to 3.0 wt %, 3.0 wt % to 5.0 wt %, 3.0 wt % to 4.0 wt %, and 4.0 wt % to 5.0 wt %.
A solvent used for a catalyst ink may comprise any suitable solvent (or combination of solvents) that yields, when mixed with other ingredients, a colloidal solution of the catalyst nanoparticles that is suitable for application to write surface(s) of a stamp and transfer to substrate print surface(s) from the write surface(s). Such solvents include, without limitation, toluene, dimethylformamide, tetrahydrofuran, xylenes, and combinations thereof. Also or alternatively, water may be used as a solvent in some catalyst inks.
One or more binders and/or other additives may be included in a catalyst ink to affect interaction between the catalyst ink and stamp write surfaces and/or between the catalyst ink and substrate print surfaces, to increase viscosity, to minimize wetting, and/or to affect other properties of the catalyst ink. Examples of additives comprise polyvinyl alcohols, cellulose acetate, carboxymethyl cellulose, polyvinylidene fluoride (PVDF), and polyvinyl acetate (PVA). Additives may, for example, have molecular weights in ranges of 10K to 180K.
The components of a catalyst ink may be mixed just prior to application to write surfaces and/or periodically remixed. The mixing and/or remixing may, for example, comprise sonification to disperse catalyst nanoparticles in the solution and/or prevent aggregation and/or settling. For example, sonification may be applied to the bath 42 prior to placement of the write surfaces 32 into contact with the surface 41, after the write surfaces 32 are removed from contact with the surface 41 and prior to a subsequent placement of the write surfaces 32 into contact with the surface 41, etc. Also or alternatively, sonification may be applied continuously to the bath 42.
In step 12 (
To achieve the relative motions shown in
In step 14, electroless plating may be performed to plate the catalyst ink 40 of the printed pattern 36. During the plating of step 14, the catalyst ink 40 may be metallized with a plating metal (e.g., with copper (Cu), gold (Au), silver (Ag), Aluminum (Al), Nickel (Ni), or Iron (Fe)). The plating of step 14 may comprise immersing the print surface 51 in an electroless plating bath containing an electroless plating solution. Also or alternatively, microdroplets of an electroless plating solution may be applied to the catalyst ink 40 in the printed pattern 36. Electroless plating solutions to plate copper to a Pd catalyst, as well as to plate any of a variety of other plating metals to Pd or to other catalysts, are known. After a plating time has elapsed, which time may be determined based on plating solution chosen, the print surface 51 may be removed from the electroless plating bath and/or the electroless plating solution otherwise removed (e.g., with compressed air or other drying process).
In step 15 one or more additional processes may be performed. The one or more additional processes may, for example, comprise washing (e.g., with water, with acid, etc.), application of anti-tarnish compounds, application of other materials, etc. Also or alternatively, step 15 may comprise repeating one or more of steps 11 through 14. For example, additional catalyst ink may be printed (e.g., using the stamp 30 or another stamp) on some or all of the metal trace 53a and/or the metal trace 53b. Electroless plating may subsequently be performed on the additional catalyst ink. Multiple printing and plating steps may be performed, for example, to obtain a thicker layer of plating metal in one or more regions.
Also or alternatively, one or more other materials (e.g., a layer of non-conductive material) may be applied onto some or all of the metal trace 53a and/or the metal trace 53b. Additional catalyst ink may then be printed onto those one or more other materials, and electroless plating subsequently performed on that additional catalyst ink. The resulting article may comprise layers of metal traces separated by an insulating material.
Stamps and/or substrates may comprise any of a variety of materials. Those materials, and/or components of a catalyst ink, may be selected to improve adherence of catalyst ink to a write surface, release of catalyst ink from a write surface, transfer of catalyst ink from a write surface to a print surface, adherence of catalyst ink to a print surface, wettability of a print surface by a catalyst ink (e.g., to inhibit a catalyst ink from spreading beyond desired regions of a printed pattern), and/or other interactions between the catalyst ink and the write surface and/or print surface. Although several specific examples are described below, other materials, combinations of materials, and/or surface treatments may also or alternatively be used.
A print surface of a substrate may comprise a surface of a parent material forming some or all of the remaining structure of the substrate. Also or alternatively, a substrate print surface may comprise a material (e.g., a coating) applied to the substrate parent material and/or to another material (e.g., an intermediate coating) fixed to the substrate parent material. For example,
A stamp may be formed from metallic, ceramic, or organic parent materials. For example, a stamp parent material may comprise steel or other metal or metal alloy, a metallic and/or inorganic silicate, a ceramic (e.g., (ZnMg)TiO3), a dielectric such as a polyimide-based polymer (e.g., such as is found in KAPTON film), and/or other materials. To promote capture of catalyst ink by a write surface, the write surface may comprise a coating or a monolayer with chemical properties selected to enhance temporary catalyst ink bonding. Examples of materials for such coatings and monolayers comprise surface modifying compounds such as those described below.
Substrates may also be formed from any of a variety of parent materials. Examples of substrate parent materials comprise ceramic dielectric materials, organic dielectric materials, metals or metal alloys, polymers, and/or other materials. A substrate print surface may comprise a coating or monolayer of one more materials that are different from a parent material of the substrate. For example, print surfaces of substrates formed from more rigid parent materials may comprise a coating of a more flexible material. Such flexible materials may, for example, comprise a polyimide material (e.g., KAPTON film), PVA, cellulose acetate, PVDF, and/or another polymer material. A flexible print surface material may promote more complete catalyst ink transfer from write surface(s) of a stamp by, for example, facilitating embedding of catalyst nanoparticles in the print surface and/or compensating for minute imperfections in stamp write surface(s). Also or alternatively, a substrate print surface may comprise a coating or a monolayer with chemical properties selected to enhance temporary catalyst attraction to the print surface.
To promote and/or enhance transfer of catalyst ink from a stamp write surface to a substrate print surface, one or more stamp write surface materials, one or more substrate print surface materials, and/or one or more catalyst ink components may be selected so that attraction of one or more components of the catalyst ink to the substrate print surface is greater than attraction of the catalyst ink component(s) to the stamp write surface. For example, a substrate print surface may comprise a coating and/or monolayer (e.g., a self-assembled monolayer (SAM)) formed from one or more surface modifying compounds applied to a parent material of the substrate. A surface modifying compound may comprise a chemical having a terminating functional group that binds to the substrate parent material and a tail functional group that attracts a component of the catalyst ink more strongly than such catalyst ink component is attracted by material of a stamp write surface.
A surface modifying compound may be selected so that a tail functional group of that compound attracts the catalyst nanoparticles of the catalyst ink. For example, Pd nanoparticles are attracted by tail functional groups that comprise amines. Tail functional groups that comprise sulfur and/or phosphorous may also be used to attract a variety of metals, including Pd and Pt. Phosphorus- and/or phosphine-based tail functional groups may be used to attract Rh. Attraction of Pd, Pt, and/or Rh nanoparticles to such tails would be greater than attraction to steel, other metals and metal alloys, and inorganic silicates that may be used as substrate or stamp parent materials.
Selection of a surface modifying compound may also be based on a substrate parent material to which the compound will be applied. For example, amine and sulfur functional groups bond to iron- and copper-based materials. As another example, carboxylate functional groups bond to zinc-based materials.
A surface modifying compound may, for example, comprise a silane-based surface modifying compound. Silane surface modifying compounds known to bond to a large variety of materials, having known chemical structures, and/or having other properties (e.g., hydrophobicity, hydrophilicity) are commercially available. A surface modifying compound need not be a silane. For example, a surface modifying compound may comprise graphene oxide. Table 1 comprises a non-exhaustive list of example surface modifying compounds for various combinations of parent materials (to which a surface modifying compound may be applied) and catalyst nanoparticle materials.
Also or alternatively, materials may be selected so that attraction of one or more other catalyst ink components to a substrate print surface is greater than attraction of the other catalyst ink component(s) to a stamp write surface. For example, and for catalyst inks comprising organic solvents, PVDF and/or PVA may be added. PVDF and/or PVA will promote adhesion to organic substrate print surface materials, and may lessen adhesion to metallic and inorganic stamp write surface materials.
Also or alternatively, write surface materials, print surface materials, and/or catalyst ink components may be selected so that attraction of one or more catalyst ink components to a write surface is enhanced and/or greater than attraction of such catalyst ink component(s) to a print surface. For example, materials such as those described above for a print surface may be used for a write surface, and/or materials such as those described above for a write surface may be used for a print surface. Moreover, write surface materials, print surface materials, and/or catalyst ink components may also or alternatively be selected based on wettability of a print surface and/or write surface by a catalyst ink. Increased hydrophobicity/reduced wettability may reduce the tendency of printed catalyst ink to spread beyond print surface regions where that catalyst ink is initially deposited by a stamp write surface.
Also or alternatively, metallic stamp write surfaces and/or metallic substrate print surfaces may be laser or plasma treated. Laser surface treatment may, for example, create microscopic pitting and/or other surface features that increase retention of catalyst ink. Plasma surface treatment may, for example, activate a surface by ionizing atoms of the surface material, thereby increasing the tendency of the surface to retain catalyst ink.
As indicated above, catalyst ink may be treated with laser or UV light to cure that catalyst ink. Such curing may increase the adhesion of the catalyst ink to a print surface and/or accelerate evaporation of solvent from the catalyst ink. Such laser or UV treatment may be performed after catalyst ink has been applied to stamp write surface(s) and before transfer to substrate print surface(s), and/or may be performed as catalyst ink is being transferred from a stamp to a substrate.
As indicated above, sonification may be used to promote transfer of catalyst ink from stamp write surface(s) to substrate print surface(s).
The configurations of
A stamp may also be used to transfer catalyst ink from and/or to surfaces that are not flat. For example, one or more stamp write surfaces be portions of a complex surface, which surface also corresponds to one or substrate print surfaces. Catalyst ink may be applied to non-flat write surfaces using, e.g., a roller or porous body that conforms to the non-flat write surfaces. Also or alternatively, a stamp may be flexible and, after application of catalyst ink to write surfaces of that stamp in a flat configuration, able to conform to a non-flat substrate print surface.
Write surfaces of a stamp need not be fixed. For example, a stamp working face may comprise one or more pins or other structures that can be extended or retracted to create a desired pattern.
The foregoing has been presented for purposes of example. The foregoing is not intended to be exhaustive or to limit features to the precise form disclosed. The examples discussed herein were chosen and described in order to explain principles and the nature of various examples and their practical application to enable one skilled in the art to use these and other implementations with various modifications as are suited to the particular use and/or uses contemplated. The scope of this disclosure encompasses, but is not limited to, any and all combinations, subcombinations, and permutations of structure, operations, materials, and/or other features described herein and in the accompanying drawing figures.
This invention was made with Government support under Contract No. N00178-04-D-4119-FC46 awarded by the United States Navy. The Government has certain rights in this invention.