Lithographic processes using patterning methods other than those involving the exposure to radiation

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation

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Patents Grantslast 30 patents

Information Patent Grant
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Method for fabricating pattern of cured product and methods for man...
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Imprint apparatus, imprint method and article manufacturing method
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Method of replicating a microstructure pattern
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Substrate conveyance method, substrate conveyance apparatus, moldin...
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Molding apparatus for molding composition on substrate using mold,...
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Enhanced directed self-assembly in the presence of low Tg oligomers...
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Method of replicating a microstructure pattern
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Resin composition and flow cells incorporating the same
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Systems, devices, and methods for generating drop patterns
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Method of shaping a surface, shaping system, and method of manufact...
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Imprint method and article manufacturing method
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- Hiroshi Sato
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Patents Applicationslast 30 patents

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SLANTED OPTICAL GRATINGS
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- Publication number 20250226218
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IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
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- Canon Kabushiki Kaisha
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IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
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RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE AND METHOD...
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TEMPLATE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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LIQUID EJECTION METHOD, LIQUID EJECTION APPARATUS, IMPRINT METHOD,...
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QUALITY CONTROL METHOD FOR IMPRINT LITHOGRAPHY
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SYSTEMS, DEVICES, AND METHODS FOR DISPENSING DROPS OF FLUID ACCORDI...
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CLEANING APPARATUS, IMPRINT APPARATUS, CLEANING METHOD, AND ARTICLE...
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SHAPING APPARATUS, SHAPING METHOD, AND ARTICLE MANUFACTURING METHOD
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STAMPS FOR MICRO-TRANSFER-PRINTING WITH CURVED STAMP POST ENDS
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FILM FORMING METHOD, ARTICLE MANUFACTURING METHOD AND FILM FORMING...
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IMPRINTING METHOD, PRE-PROCESSING APPARATUS, SUBSTRATE FOR IMPRINTI...
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- Hiroshi SATO
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Lithographic processes using patterning methods other than those involving the exposure to radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing display device, and transfer substrate for...

Structured substrates for improving detection of light emissions an...

Method for fabricating pattern of cured product and methods for man...

Imprint apparatus, imprint method and article manufacturing method

Method of replicating a microstructure pattern

Substrate conveyance method, substrate conveyance apparatus, moldin...

Imprint apparatus, imprint method, and method of manufacturing article

Molding apparatus for molding composition on substrate using mold,...

Configuring optical layers in imprint lithography processes

Superstrate including a body and layers and methods of forming and...

Detection apparatus, lithography apparatus, and article manufacturi...

Pattern forming method, combined processing apparatus, and recordin...

Diffractive backlight fabrication method

Method of removing photoresist, laminate, method of forming metalli...

System and method of generating a set of illumination patterns for...

Display control method, editing support method and information proc...

Enhanced directed self-assembly in the presence of low Tg oligomers...

Imprint apparatus, method of controlling imprint apparatus, and sto...

Evaluation apparatus, computer-readable storage medium, evaluation...

Herringbone microstructure surface pattern for flexographic printin...

Imprint method, imprint apparatus, and method of manufacturing article

Method and device for producing micro- and/or nanostructures

Imprint apparatus, imprint method, and article manufacturing method

Pressure control valve, a fluid handling structure for lithographic...

Method of replicating a microstructure pattern

Resin composition and flow cells incorporating the same

Systems, devices, and methods for generating drop patterns

Method of shaping a surface, shaping system, and method of manufact...

Systems and methods for micropatterning objects

Imprint method and article manufacturing method

Patents Applicationslast 30 patents

FILM FORMING APPARATUS, FILM FORMING METHOD, AND ARTICLE MANUFACTUR...

METHOD AND DEVICE FOR PRODUCING MICRO- AND/OR NANOSTRUCTURES

SLANTED OPTICAL GRATINGS

FILM FORMING METHOD, ARTICLE MANUFACTURING METHOD, AND CURABLE COMP...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE AND METHOD...

TEMPLATE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

METHOD OF SHAPING A SURFACE, SHAPING SYSTEM, AND METHOD OF MANUFACT...

LIQUID EJECTION METHOD, LIQUID EJECTION APPARATUS, IMPRINT METHOD,...

QUALITY CONTROL METHOD FOR IMPRINT LITHOGRAPHY

SYSTEMS, DEVICES, AND METHODS FOR DISPENSING DROPS OF FLUID ACCORDI...

CLEANING APPARATUS, IMPRINT APPARATUS, CLEANING METHOD, AND ARTICLE...

SHAPING APPARATUS, SHAPING METHOD, AND ARTICLE MANUFACTURING METHOD

STAMPS FOR MICRO-TRANSFER-PRINTING WITH CURVED STAMP POST ENDS

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...

PLANARIZATION APPARATUS AND ARTICLE MANUFACTURING METHOD

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...

APPARATUS AND METHOD FOR CALIBRATING A FLUID DISPENSER

MULTI-LEVEL OPTICAL STRUCTURES

Method of Using and Fabricating a Nanoimprint Template with a Mesa...

IMPRINT METHODS FOR FORMING A PATTERN OF AN IMPRINT MATERIAL ON A S...

IMPRINTING DEVICE, IMPRINTING METHOD, AND METHOD FOR MANUFACTURING...

FILM FORMING METHOD, ARTICLE MANUFACTURING METHOD AND FILM FORMING...

SURFACE RELIEF WAVEGUIDES WITH HIGH REFRACTIVE INDEX RESIST

METHOD OF TRANSFERRING AN OBJECT USING A STAMP WITH SHAPE MEMORY PO...

METHOD FOR PRODUCING STRUCTURE HAVING PHASE-SEPARATED STRUCTURE

MEDICAL IMPLANT

STAMP FOR IMPRINT LITHOGRAPHY

IMPRINTING METHOD, PRE-PROCESSING APPARATUS, SUBSTRATE FOR IMPRINTI...