Display device having front illuminator with turning features

Information

  • Patent Grant
  • 8872085
  • Patent Number
    8,872,085
  • Date Filed
    Wednesday, September 26, 2007
    16 years ago
  • Date Issued
    Tuesday, October 28, 2014
    9 years ago
Abstract
In various embodiments described herein, a display device includes a front illumination device that comprises a light guide disposed forward of an array of display elements, such as an array of interferometric modulators, to distribute light across the array of display elements. The light guide panel may include a turning layer to deliver uniform illumination from a light source to the array of display elements. For many portable display applications, the light guide panel comprises the substrate used in fabricating the display elements. The light guide panel may include additional films as well. The light guide panel, for example, may include a diffuser and/or an optical isolation layer to further enhance the optical imaging characteristics of the display.
Description
BACKGROUND

1. Field


The present invention relates to microelectromechanical systems (MEMS).


2. Description of the Related Art


Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.


SUMMARY

Various embodiments described herein comprise light guides for distributing light across an array of display elements. The light guide may include surface relief features to turn light propagating in a light guide onto the array of display elements. The surface relief features may comprise facets that reflect light. To protect these facets, the facets are embedded within the light guide. Other embodiments are also disclosed.


One embodiment of the invention discloses a display device comprising a substrate having front and rear sides, a plurality of display elements on the rear side of the substrate, a plurality of turning features on the front side of the substrate and a diffuser on the front side of the substrate between the turning features and the substrate.


In one embodiment, a method of fabricating a display device is disclosed. The method of fabricating comprises providing a substrate having front and rear sides, forming a plurality of display elements on the rear side of the substrate, disposing a plurality of turning features on the front side of the substrate and disposing a diffuser on the front side of the substrate between the turning features and the substrate.


Another embodiment of the invention discloses a display device comprising means for displaying an image, means for supporting the displaying means during fabrication, the supporting means having front and rear sides, the displaying means disposed on the rear side of the supporting means, the supporting means configured to guide light between the front and rear sides. The display device further comprises means for turning the light guided in the supporting means toward the displaying means, the light turning means disposed on the front side of the supporting means and means for diffusing light disposed on the front side of the supporting means between the turning means and the supporting means.


An embodiment of the invention discloses a display device comprising a substrate having front and rear sides, a plurality of display elements on the rear side of the substrate, a plurality of turning features on the front side of the substrate and a diffuser between the substrate and the plurality of display elements.


In one embodiment, a method of fabricating a display device is disclosed comprising providing a substrate having front and rear sides, forming a plurality of display elements on the rear side of the substrate, disposing a plurality of turning features on the front side of the substrate and disposing a diffuser between the substrate and the plurality of display elements.


Another embodiment of the invention discloses a display device comprising means for displaying an image, means for supporting the displaying means during fabrication, the supporting means having front and rear sides, the displaying means disposed on the rear side of the supporting means, the supporting means configured to guide light between the front and rear sides. The display device further comprises means for turning the light guided in the supporting means toward the displaying means, the turning means disposed on the front side of the supporting means and means for diffusing light, the means for diffusing light disposed between the supporting means and the displaying means.


An alternate embodiment of the invention discloses a display device comprising a substrate having front and rear sides, a plurality of display elements on the rear side of the substrate, a plurality of turning features on the rear side of the substrate between the substrate and the plurality of display elements and a diffuser on the rear side of the substrate between the turning features and the plurality of display elements.


In one embodiment, a method of fabricating a display device is disclosed comprising providing a substrate having front and rear sides, forming a plurality of display elements on the rear side of the substrate, disposing plurality of turning features on the rear side of the substrate between the substrate and the plurality of display elements and disposing a diffuser on the rear side of the substrate between the turning features and the plurality of display elements.


Another embodiment of the invention discloses a display device comprising means for displaying an image, means for supporting the displaying means during fabrication, the supporting means having front and rear sides, the displaying means disposed on the rear side of the supporting means, the supporting means configured to guide light between the front and rear sides. The display device further comprises means for turning the light guided in the supporting means toward the displaying means, the turning means disposed on the rear side of the supporting means between the supporting means and the displaying means and means for diffusing said light, the diffusing means disposed on the rear side of the supporting means between the turning means and the displaying means.


One embodiment of the invention discloses a display device comprising a substrate having front and rear sides, a plurality of display elements on the rear side of the substrate, a plurality of turning features on the rear side of the substrate between the substrate and the plurality of display elements and an optical isolation layer on the rear side of the substrate between the turning features and the plurality of display elements.


In another embodiment, a method of fabricating a display device is disclosed comprising providing a substrate having front and rear sides, forming a plurality of display elements on the rear side of the substrate, disposing plurality of turning features on the rear side of the substrate between the substrate and the plurality of display elements and disposing an optical isolation layer on the rear side of the substrate between the turning features and the plurality of display elements.


Another embodiment of the invention discloses a display device comprising means for displaying an image, means for supporting the displaying means during fabrication, the supporting means having front and rear sides, the displaying means disposed on the rear side of the supporting means, the supporting means configured to guide light between the front and rear sides. The display device further comprises means for turning the light guided in the supporting means toward the displaying means, the turning means disposed on the rear side of the supporting means between the supporting means and the displaying means and means for optical isolating the displaying means from the supporting means, the means for optically isolating on the rear side of the supporting means between the turning means and the displaying means.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is an isometric view depicting a portion of one embodiment of an interferometric modulator display in which a movable reflective layer of a first interferometric modulator is in a relaxed position and a movable reflective layer of a second interferometric modulator is in an actuated position.



FIG. 2 is a system block diagram illustrating one embodiment of an electronic device incorporating a 3×3 interferometric modulator display.



FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of an interferometric modulator of FIG. 1.



FIG. 4 is an illustration of a set of row and column voltages that may be used to drive an interferometric modulator display.



FIG. 5A illustrates one exemplary frame of display data in the 3×3 interferometric modulator display of FIG. 2.



FIG. 5B illustrates one exemplary timing diagram for row and column signals that may be used to write the frame of FIG. 5A.



FIGS. 6A and 6B are system block diagrams illustrating an embodiment of a visual display device comprising a plurality of interferometric modulators.



FIG. 7A is a cross section of the device of FIG. 1.



FIG. 7B is a cross section of an alternative embodiment of an interferometric modulator.



FIG. 7C is a cross section of another alternative embodiment of an interferometric modulator.



FIG. 7D is a cross section of yet another alternative embodiment of an interferometric modulator.



FIG. 7E is a cross section of an additional alternative embodiment of an interferometric modulator.



FIG. 8 is a cross section of a portion of a display device comprising a turning layer and a diffuser disposed on an opposite side of a substrate on which display elements are formed.



FIG. 8A is a cross section of a portion of an alternative embodiment of a display device comprising a turning layer and a diffuser on one side of a substrate and an optical isolation layer disposed on the opposite side of the substrate where the display elements are formed.



FIG. 9 is a cross section of a portion of an alternative embodiment of a display device comprising a turning layer on one side of a substrate and an optical isolation layer and a diffuser disposed on the opposite side of a substrate where the display elements are formed.



FIG. 10 is a cross section of a portion of an embodiment of a display device comprising a turning layer, an optical isolation layer and a diffuser disposed the same side of a substrate on which display elements are formed.





DETAILED DESCRIPTION OF THE DRAWINGS

The following detailed description is directed to certain specific embodiments of the invention. However, the invention can be embodied in a multitude of different ways. In this description, reference is made to the drawings wherein like parts are designated with like numerals throughout. As will be apparent from the following description, the embodiments may be implemented in any device that is configured to display an image, whether in motion (e.g., video) or stationary (e.g., still image), and whether textual or pictorial. More particularly, it is contemplated that the embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry). MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.


In various embodiments described herein, the display device includes a front illumination device that comprises a light guide disposed forward of an array of display elements, such as an array of interferometric modulators, to distribute light across the array of display elements. For example, a light guide panel that includes a turning layer may be disposed in front of the array of display elements to deliver uniform illumination from a light source to the array of display elements while allowing for the option of illumination from ambient lighting of the array of display elements. For many portable display applications, however, it is important that the display be very thin. Accordingly, in various embodiments described herein, the light guide panel comprises the substrate used in fabricating the display elements. The light guide panel may include additional films as well. The light guide panel, for example, may include a turning layer deposited or laminated on the top or bottom surface of the glass substrate supporting the array of display elements. As a consequence, the overall thickness of the entire display is only slightly increased beyond that of the display elements themselves which are necessarily formed on a substrate. Certain embodiments include additional optical layers, such as a diffuser and/or an optical isolation layer to further enhance the optical imaging characteristics of the display.


One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in FIG. 1. In these devices, the pixels are in either a bright or dark state. In the bright (“on” or “open”) state, the display element reflects a large portion of incident visible light to a user. When in the dark (“off” or “closed”) state, the display element reflects little incident visible light to the user. Depending on the embodiment, the light reflectance properties of the “on” and “off” states may be reversed. MEMS pixels can be configured to reflect predominantly at selected colors, allowing for a color display in addition to black and white.



FIG. 1 is an isometric view depicting two adjacent pixels in a series of pixels of a visual display, wherein each pixel comprises a MEMS interferometric modulator. In some embodiments, an interferometric modulator display comprises a row/column array of these interferometric modulators. Each interferometric modulator includes a pair of reflective layers positioned at a variable and controllable distance from each other to form a resonant optical gap with at least one variable dimension. In one embodiment, one of the reflective layers may be moved between two positions. In the first position, referred to herein as the relaxed position, the movable reflective layer is positioned at a relatively large distance from a fixed partially reflective layer. In the second position, referred to herein as the actuated position, the movable reflective layer is positioned more closely adjacent to the partially reflective layer. Incident light that reflects from the two layers interferes constructively or destructively depending on the position of the movable reflective layer, producing either an overall reflective or non-reflective state for each pixel.


The depicted portion of the pixel array in FIG. 1 includes two adjacent interferometric modulators 12a and 12b. In the interferometric modulator 12a on the left, a movable reflective layer 14a is illustrated in a relaxed position at a predetermined distance from an optical stack 16a, which includes a partially reflective layer. In the interferometric modulator 12b on the right, the movable reflective layer 14b is illustrated in an actuated position adjacent to the optical stack 16b.


The optical stacks 16a and 16b (collectively referred to as optical stack 16), as referenced herein, typically comprise several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent, and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.


In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16a, 16b) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device.


With no applied voltage, the gap 19 remains between the movable reflective layer 14a and optical stack 16a, with the movable reflective layer 14a in a mechanically relaxed state, as illustrated by the pixel 12a in FIG. 1. However, when a potential difference is applied to a selected row and column, the capacitor formed at the intersection of the row and column electrodes at the corresponding pixel becomes charged, and electrostatic forces pull the electrodes together. If the voltage is high enough, the movable reflective layer 14 is deformed and is forced against the optical stack 16. A dielectric layer (not illustrated in this Figure) within the optical stack 16 may prevent shorting and control the separation distance between layers 14 and 16, as illustrated by pixel 12b on the right in FIG. 1. The behavior is the same regardless of the polarity of the applied potential difference. In this way, row/column actuation that can control the reflective vs. non-reflective pixel states is analogous in many ways to that used in conventional LCD and other display technologies.



FIGS. 2 through 5B illustrate one exemplary process and system for using an array of interferometric modulators in a display application.



FIG. 2 is a system block diagram illustrating one embodiment of an electronic device that may incorporate aspects of the invention. In the exemplary embodiment, the electronic device includes a processor 21 which may be any general purpose single- or multi-chip microprocessor such as an ARM, Pentium®, Pentium II®, Pentium III®, Pentium IV®, Pentium® Pro, an 8051, a MIPS®, a Power PC®, an ALPHA®, or any special purpose microprocessor such as a digital signal processor, microcontroller, or a programmable gate array. As is conventional in the art, the processor 21 may be configured to execute one or more software modules. In addition to executing an operating system, the processor may be configured to execute one or more software applications, including a web browser, a telephone application, an email program, or any other software application.


In one embodiment, the processor 21 is also configured to communicate with an array driver 22. In one embodiment, the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30. The cross section of the array illustrated in FIG. 1 is shown by the lines 1-1 in FIG. 2. For MEMS interferometric modulators, the row/column actuation protocol may take advantage of a hysteresis property of these devices illustrated in FIG. 3. It may require, for example, a 10 volt potential difference to cause a movable layer to deform from the relaxed state to the actuated state. However, when the voltage is reduced from that value, the movable layer maintains its state as the voltage drops back below 10 volts. In the exemplary embodiment of FIG. 3, the movable layer does not relax completely until the voltage drops below 2 volts. Thus, there exists a window of applied voltage, about 3 to 7 V in the example illustrated in FIG. 3, within which the device is stable in either the relaxed or actuated state. This is referred to herein as the “hysteresis window” or “stability window.” For a display array having the hysteresis characteristics of FIG. 3, the row/column actuation protocol can be designed such that during row strobing, pixels in the strobed row that are to be actuated are exposed to a voltage difference of about 10 volts, and pixels that are to be relaxed are exposed to a voltage difference of close to zero volts. After the strobe, the pixels are exposed to a steady state voltage difference of about 5 volts such that they remain in whatever state the row strobe put them in. After being written, each pixel sees a potential difference within the “stability window” of 3-7 volts in this example. This feature makes the pixel design illustrated in FIG. 1 stable under the same applied voltage conditions in either an actuated or relaxed pre-existing state. Since each pixel of the interferometric modulator, whether in the actuated or relaxed state, is essentially a capacitor formed by the fixed and moving reflective layers, this stable state can be held at a voltage within the hysteresis window with almost no power dissipation. Essentially no current flows into the pixel if the applied potential is fixed.


In typical applications, a display frame may be created by asserting the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to the row 1 electrode, actuating the pixels corresponding to the asserted column lines. The asserted set of column electrodes is then changed to correspond to the desired set of actuated pixels in the second row. A pulse is then applied to the row 2 electrode, actuating the appropriate pixels in row 2 in accordance with the asserted column electrodes. The row 1 pixels are unaffected by the row 2 pulse, and remain in the state they were set to during the row 1 pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new display data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce display frames are also well known and may be used in conjunction with the present invention.



FIGS. 4, 5A, and 5B illustrate one possible actuation protocol for creating a display frame on the 3×3 array of FIG. 2. FIG. 4 illustrates a possible set of column and row voltage levels that may be used for pixels exhibiting the hysteresis curves of FIG. 3. In the FIG. 4 embodiment, actuating a pixel involves setting the appropriate column to −Vbias, and the appropriate row to, +ΔV, which may correspond to −5 volts and +5 volts, respectively Relaxing the pixel is accomplished by setting the appropriate column to +Vbias, and the appropriate row to the same +ΔV, producing a zero volt potential difference across the pixel. In those rows where the row voltage is held at zero volts, the pixels are stable in whatever state they were originally in, regardless of whether the column is at +Vbias, or −Vbias. As is also illustrated in FIG. 4, it will be appreciated that voltages of opposite polarity than those described above can be used, e.g., actuating a pixel can involve setting the appropriate column to +Vbias, and the appropriate row to −ΔV. In this embodiment, releasing the pixel is accomplished by setting the appropriate column to −Vbias, and the appropriate row to the same −ΔV, producing a zero volt potential difference across the pixel.



FIG. 5B is a timing diagram showing a series of row and column signals applied to the 3×3 array of FIG. 2 which will result in the display arrangement illustrated in FIG. 5A, where actuated pixels are non-reflective. Prior to writing the frame illustrated in FIG. 5A, the pixels can be in any state, and in this example, all the rows are at 0 volts, and all the columns are at +5 volts. With these applied voltages, all pixels are stable in their existing actuated or relaxed states.


In the FIG. 5A frame, pixels (1,1), (1,2), (2,2), (3,2) and (3,3) are actuated. To accomplish this, during a “line time” for row 1, columns 1 and 2 are set to −5 volts, and column 3 is set to +5 volts. This does not change the state of any pixels, because all the pixels remain in the 3-7 volt stability window. Row 1 is then strobed with a pulse that goes from 0, up to 5 volts, and back to zero. This actuates the (1,1) and (1,2) pixels and relaxes the (1,3) pixel. No other pixels in the array are affected. To set row 2 as desired, column 2 is set to −5 volts, and columns 1 and 3 are set to +5 volts. The same strobe applied to row 2 will then actuate pixel (2,2) and relax pixels (2,1) and (2,3). Again, no other pixels of the array are affected. Row 3 is similarly set by setting columns 2 and 3 to −5 volts, and column 1 to +5 volts. The row 3 strobe sets the row 3 pixels as shown in FIG. 5A. After writing the frame, the row potentials are zero, and the column potentials can remain at either +5 or −5 volts, and the display is then stable in the arrangement of FIG. 5A. It will be appreciated that the same procedure can be employed for arrays of dozens or hundreds of rows and columns. It will also be appreciated that the timing, sequence, and levels of voltages used to perform row and column actuation can be varied widely within the general principles outlined above, and the above example is exemplary only, and any actuation voltage method can be used with the systems and methods described herein.



FIGS. 6A and 6B are system block diagrams illustrating an embodiment of a display device 40. The display device 40 can be, for example, a cellular or mobile telephone. However, the same components of display device 40 or slight variations thereof are also illustrative of various types of display devices such as televisions and portable media players.


The display device 40 includes a housing 41, a display 30, an antenna 43, a speaker 45, an input device 48, and a microphone 46. The housing 41 is generally formed from any of a variety of manufacturing processes as are well known to those of skill in the art, including injection molding and vacuum forming. In addition, the housing 41 may be made from any of a variety of materials, including, but not limited to, plastic, metal, glass, rubber, and ceramic, or a combination thereof. In one embodiment, the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.


The display 30 of exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein. In other embodiments, the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device, as is well known to those of skill in the art. However, for purposes of describing the present embodiment, the display 30 includes an interferometric modulator display, as described herein.


The components of one embodiment of exemplary display device 40 are schematically illustrated in FIG. 6B. The illustrated exemplary display device 40 includes a housing 41 and can include additional components at least partially enclosed therein. For example, in one embodiment, the exemplary display device 40 includes a network interface 27 that includes an antenna 43, which is coupled to a transceiver 47. The transceiver 47 is connected to a processor 21, which is connected to conditioning hardware 52. The conditioning hardware 52 may be configured to condition a signal (e.g., filter a signal). The conditioning hardware 52 is connected to a speaker 45 and a microphone 46. The processor 21 is also connected to an input device 48 and a driver controller 29. The driver controller 29 is coupled to a frame buffer 28 and to an array driver 22, which in turn is coupled to a display array 30. A power supply 50 provides power to all components as required by the particular exemplary display device 40 design.


The network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one or more devices over a network. In one embodiment, the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21. The antenna 43 is any antenna known to those of skill in the art for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.11 standard, including IEEE 802.11(a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS, or other known signals that are used to communicate within a wireless cell phone network. The transceiver 47 pre-processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21. The transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43.


In an alternative embodiment, the transceiver 47 can be replaced by a receiver. In yet another alternative embodiment, network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21. For example, the image source can be a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.


Processor 21 generally controls the overall operation of the exemplary display device 40. The processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data. The processor 21 then sends the processed data to the driver controller 29 or to frame buffer 28 for storage. Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.


In one embodiment, the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40. Conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45, and for receiving signals from the microphone 46. Conditioning hardware 52 may be discrete components within the exemplary display device 40, or may be incorporated within the processor 21 or other components.


The driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22. Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30. Then the driver controller 29 sends the formatted information to the array driver 22. Although a driver controller 29, such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware, embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22.


Typically, the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming From the display's x-y matrix of pixels.


In one embodiment, the driver controller 29, array driver 22, and display array 30 are appropriate for any of the types of displays described herein. For example, in one embodiment, driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller). In another embodiment, array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display). In one embodiment, a driver controller 29 is integrated with the array driver 22. Such an embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In yet another embodiment, display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).


The input device 48 allows a user to control the operation of the exemplary display device 40. In one embodiment, input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, or a pressure- or heat-sensitive membrane. In one embodiment, the microphone 46 is an input device for the exemplary display device 40. When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40.


Power supply 50 can include a variety of energy storage devices as are well known in the art. For example, in one embodiment, power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery. In another embodiment, power supply 50 is a renewable energy source, a capacitor, or a solar cell including a plastic solar cell, and solar-cell paint. In another embodiment, power supply 50 is configured to receive power from a wall outlet.


In some embodiments, control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some embodiments, control programmability resides in the array driver 22. Those of skill in the art will recognize that the above-described optimizations may be implemented in any number of hardware and/or software components and in various configurations.


The details of the structure of interferometric modulators that operate in accordance with the principles set forth above may vary widely. For example, FIGS. 7A-7E illustrate five different embodiments of the movable reflective layer 14 and it's supporting structures. FIG. 7A is a cross section of the embodiment of FIG. 1, where a strip of metal material 14 is deposited on orthogonally extending supports 18. In FIG. 7B, the moveable reflective layer 14 is attached to supports at the corners only, on tethers 32. In FIG. 7C, the moveable reflective layer 14 is suspended from a deformable layer 34, which may comprise a flexible metal. The deformable layer 34 connects, directly or indirectly, to the substrate 20 around the perimeter of the deformable layer 34. These connections are herein referred to as support posts. The embodiment illustrated in FIG. 7D has support post plugs 42 upon which the deformable layer 34 rests. The movable reflective layer 14 remains suspended over the gap, as in FIGS. 7A-7C, but the deformable layer 34 does not form the support posts by filling holes between the deformable layer 34 and the optical stack 16. Rather, the support posts are formed of a planarization material, which is used to form support post plugs 42. The embodiment illustrated in FIG. 7E is based on the embodiment shown in FIG. 7D, but may also be adapted to work with any of the embodiments illustrated in FIGS. 7A-7C, as well as additional embodiments not shown. In the embodiment shown in FIG. 7E, an extra layer of metal or other conductive material has been used to form a bus structure 44. This allows signal routing along the back of the interferometric modulators, eliminating a number of electrodes that may otherwise have had to be formed on the substrate 20.


In embodiments such as those shown in FIG. 7, the interferometric modulators function as direct-view devices, in which images are viewed from the front side of the transparent substrate 20, the side opposite to that upon which the modulator is arranged. In these embodiments, the reflective layer 14 optically shields the portions of the interferometric modulator on the side of the reflective layer opposite the substrate 20, including the deformable layer 34. This allows the shielded areas to be configured and operated upon without negatively affecting the image quality. Such shielding allows the bus structure 44 in FIG. 7E, which provides the ability to separate the optical properties of the modulator from the electromechanical properties of the modulator, such as addressing and the movements that result from that addressing. This separable modulator architecture allows the structural design and materials used for the electromechanical aspects and the optical aspects of the modulator to be selected and to function independently of each other. Moreover, the embodiments shown in FIGS. 7C-7E have additional benefits deriving from the decoupling of the optical properties of the reflective layer 14 from its mechanical properties, which are carried out by the deformable layer 34. This allows the structural design and materials used for the reflective layer 14 to be optimized with respect to the optical properties, and the structural design and materials used for the deformable layer 34 to be optimized with respect to desired mechanical properties.


As described above, the interferometric modulators are reflective and rely on ambient lighting in daylight or well-lit environments. In addition, an internal source of illumination is often provided for illumination of interferometric modulators in dark ambient environments. The illumination source for interferometric modulator displays may, for example, comprise a front light that uses a light guide to collect light through a narrow rectangular edge of the light guide and redirect it towards the interferometric modulators, preferably spreading light uniformly across the array of display elements. In certain embodiments, the light guide may comprise a plastic or glass slab, sheet, or plate that is then disposed in front of the interferometric modulators. A turning layer may be laminated to or deposited on the slab or sheet to redirect light propagating along the light guide toward the display elements. In various designs, such light guides comprise a slab of plastic approximately 1 mm thick. However, for certain applications, the light guide should have a reduced or minimal thickness, for example, of less than about one-half a millimeter, to keep the overall display device thin.


One way to reduce or minimize the overall thickness of the display is to incorporate the turning layer on a structural component of the interferometric modulators, such as the substrate on which the interferometric modulators are formed. This substrate may comprise glass. Alternatively the substrate may comprise plastic or another substantially optically transmissive material. By depositing the turning layer on a structural component of the interferometric modulators, such as the glass substrate, the light from the artificial light source can be coupled into the glass substrate layer of the interferometric modulators and turned toward the interferometric modulators by the turning layer. The separate glass or plastic slab or sheet is no longer necessary and thus the thickness of the overall display device can be significantly reduced. In certain embodiments, one or more additional optical layers, such as a diffuser or an optical isolation layer may also be disposed on the substrate of the interferometric modulators to enhance the efficiency of the light guiding portion of the display or to otherwise improve the optical performance of the display. For example, a diffuser layer may be provided to scatter light incident on the interferometric modulators providing more uniform light to the interferometric modulators and thereby reducing or minimizing bright spots. A diffuser can also provide a more diffuse look to the display which may otherwise be too mirror-like. Alternatively or in addition, an optical isolation layer may be provided between the light guiding portion of the display and the interferometric modulators to prevent the interferometric modulators from absorbing light propagating through the light guiding portion. As described herein, the geometric arrangement of the turning layer and additional optical films on the substrate relative to the interferometric modulator may be selected to further enhance the optical performance of the overall display.


The display device may be formed using any of a variety of manufacturing processes known to those skilled in the art to adhere one or more of the optical layers described herein on the glass or plastic substrate of the array of display elements. The glass or plastic substrate comprises a support layer upon which the display elements, such as an array of interferometric modulators, are fabricated. As disclosed herein, the substrate may be further used to support one or more optical layers of the display device. In one embodiment, a turning layer may be deposited or laminated to the substrate. For example, the turning layer may be laminated to a top surface of substrate using a pressure sensitive adhesive. Alternatively, the turning layer may be deposited on the substrate using techniques known in the art or other techniques yet to be developed. The turning layer may be disposed on the opposite surface of the substrate from the array of display elements or alternatively, the turning surface may be disposed in between the glass substrate and the array of display elements. A diffuser may also be adhered to the glass substrate at any one of several locations relative to the array of display elements and the turning layer. For example, in certain embodiments the diffuser may be disposed on the substrate, with the diffuser being between the array of display elements and the substrate. Alternatively, the diffuser may be disposed between the turning layer and the substrate. The diffuser may be coated, deposited or laminated or etched on the substrate using any suitable techniques known in the art or yet to be developed. For example, the diffuser may be spin cast, or alternatively the diffuser may comprise a thin film grown directly on the surface of the substrate. In some embodiments the diffuser comprises adhesive with particulates therein for scattering, for example a pressure-sensitive adhesive with diffusing features, used to laminate the turning layer to the substrate, while in other embodiments it may be a volume diffuser sheet laminated to the substrate. In certain embodiments, an optical isolation layer may be disposed between the glass substrate and the array of display elements. For example, the optical isolation layer may be laminated or deposited on the surface of the substrate between the glass substrate and the array of display elements or alternatively between the glass substrate and the diffuser. Moreover, a wide variety of variation is possible. Films, layers, components, and/or elements may be added, removed, or rearranged. Additionally, processing steps may be added, removed, or reordered. Also, although the terms film and layer have been used herein, such terms as used herein include film stacks and multilayers. Such film stacks and multilayers may be adhered to other structures using adhesive or may be formed on other structures using deposition techniques or in other manners. Thus, it is apparent that any one of several geometric arrangements of the multiple optical layers can be produced on the substrate of the display elements using known manufacturing techniques to provide a thin display device having certain desired optical characteristics.



FIG. 8 illustrates one embodiment of a portion of a display device 80 in which a turning layer 82 is placed on the top surface of a glass substrate 85 for an array of display elements 86, for example a reflective display including an array of interferometric modulators (IMODs). Here, the light guiding portion 81 of the display device 80 comprises the turning layer 82, a pressure sensitive adhesive layer (PSA) 83, a diffuser 84 and the glass substrate 85 of the display elements 86. However, the overall thickness of the display device 80 due to the light guide is only increased by the addition of the turning layer and the pressure sensitive adhesive, since the glass substrate 85 is a structural component of the display elements 86 and the diffuser 84 is an element of the display device 80 used to address the specular nature of the display elements 86. The need for a separate glass or plastic slab or sheet for the light guide has been eliminated by adhering the turning layer 82 directly to the glass substrate 85 of the display elements 86. Consequently, the overall thickness of the display device 80 is only increased by the thickness of the turning layer 82, which is generally between about 100-300 microns, and the pressure sensitive adhesive 83, which is generally about 25-50 microns. There may be more layers than illustrated in the Figures, for example there may be a PSA (not shown) between the diffuser 84 and the glass 85 of FIG. 8.


A light injection system, not shown here, transforms light from a point source (e.g., a light emitting diode (LED)) into a line source. This light injection system may, for example, comprise a light bar. The light 5 from the linear light source 2 is injected in to an edge of the light guiding portion 81 of the display device 80. Thus, the light 5 is injected into the edge of the turning layer 82, the PSA layer 83, the diffuser 84 and the glass substrate 85. The light 5 is propagated along the length, L, of the light guiding portion 81 at least in part through total internal reflection due to the difference in index of refraction between the turning layer 82 and air. For example, the turning layer typically comprises a material such as polycarbonate, acrylics such as polymethylmethacrylate (PMMA), or acrylate copolymers such as poly(styrene-methylmethacrylate) polymers (PS-PMMA, sold under the name of Zylar), and other optically transparent plastics. The index of refraction of polycarbonate is approximately 1.59 and for Zylar is approximately 1.54 for wavelengths in the visible spectrum. Since the index of refraction is greater than that of air, which is 1.0, light incident on the turning layer/air interface at an angle greater than the critical angle will be reflected back into the light guiding portion and will continue to propagate along the length of the light guiding portion 81. The light may also reflect from the display elements 86 additionally supporting propagation of the light along the length of the light guide. The display elements 86, such as IMODs, may however, be absorbing and thus may absorb some of the light incident thereon as is discussed more fully below. In certain embodiments, the indices of refraction of the multiple optical layers comprising the light guiding portion 81, here the turning layer 82, the PSA 83, the diffuser 84 and the glass substrate 85, are advantageously close such that light may be transmitted through the multiple optical layers without being substantially reflected or refracted.


The turning layer 82 further comprises a plurality of turning features for turning light normally guided in the light guide 81 such that said light is redirected towards the display elements 86 and such that the propagation direction of said turned light forms an angle smaller than 45 degrees from the normal to the surface of the display elements. Accordingly, light is redirected through the thickness, T, of the light guiding portion 81 substantially normal to the light guide and the array of display elements 86 and is transmitted to the display elements 86 preferably at normal incidence. In certain embodiments, the turning features may comprise a plurality of surface features or volume features. In some embodiments, the turning layer 82 comprises diffractive optical elements extending across the length of the turning layer 82. In alternative embodiments, the turning layer 82 comprises holograms, such as holographic volume gratings, extending across the length of the turning layer 82. In one example, as illustrated in FIG. 8, the turning features may comprise a plurality of microprisms 88 extending along the length of the turning layer 82. The microprisms 88 may be configured to receive light 5 propagating along the length, L, of the turning layer 82 and turn the light 5 through a large angle, usually between about 70-90°. The prismatic microstructures 88 may comprise two or more turning facets 88a and 88b angled with respect to one another for reflecting the light at the air/facet interface via total internal reflection and causing the light to be turned toward the array of display elements 86 at near normal incidence thereto. The plurality of pairs of adjacent facets 88a and 88b may comprise, for example, one shallow, long facet and a much shorter but more steeply inclined facet. If light strikes the first, shallow facet 88a and then the second steeper facet 88b sequentially, total internal reflection occurs at both facet/air interfaces and the light is turned through a large angle. The light following this path is then transmitted through the thickness, T, of the light guiding portion 81 toward the display elements 86 where it may be modulated and reflected back through the light guiding portion 81 towards a viewer disposed in front of the display device 80 to provide an image on the display device 80.


Note that the size and separation of the turning features has been exaggerated for illustrative purposes. Other arrangement of facets can be used with varying tilt angles and lengths. Additionally, different shapes and configuration may be employed.


In an alternative embodiment, the turning features may comprise one or more diffractive optical elements configured to receive light normally guided in the light guide 81 and turn the light such that said light is redirected towards the display elements 86 and such that the propagation direction of said turned light forms an angle smaller than 45 degrees from the normal to the surface of the display elements 86. Alternatively, the turning features may comprise one or more holograms (e.g., volume holograms) configured to receive light normally guided in the light guide 81 and turn the light such that said light is redirected towards the display elements 86 and such that the propagation direction of said turned light forms an angle smaller than 45 degrees from the normal to the surface of the display elements. For example, as shown in FIG. 9, which is discussed more fully below, a holographic turning layer 82 with a flat-surface layer may be used. As described above, the light is preferably directed at normal or near normal incidence to the display elements 86.


Referring back to FIG. 8, the light guiding portion 81 further comprises a pressure sensitive adhesive (PSA) layer 83 and a diffuser 84. The PSA layer 83 is used to adhere the turning layer 82 to the diffuser layer 84 and glass substrate 85. The PSA layer 83 is preferably transparent with an index of refraction of between about 1.47-1.53 such that the index of refraction matches the index of refraction of glass substrate 85, generally about 1.52 for wavelengths in the visible spectrum. For example, in certain embodiments, the index of refraction of the PSA layer 83 is about 1.53. As discussed above, matching the indices of refraction of the PSA layer 83 and the glass substrate 85 is advantageous in preventing unwanted reflections at the interface between the PSA layer 83 and the glass substrate 85 for light rays originating from the ambient or from the light source of the light guide. Such unwanted reflections may prevent guided light inside the glass from entering the turning layer 82 at the critical angle and being turned towards the display elements 86.


In an alternative embodiment, the PSA layer 83 and the diffuser 84 may be merged into a single optical layer. For example, the PSA/diffuser layer may comprise a transparent adhesive with light diffusing filler material interspersed therein to provide the light diffusing characteristics. This design may further decrease the thickness of the overall display device 80 by removing the need for a separate diffuser layer 84, which may be between about 25-100 microns thick in some embodiments.


In an alternative embodiment, as depicted in FIG. 8A, the display device may further comprise an optical isolation layer disposed between the glass substrate 85 and the array of display elements 86. In some embodiments the display elements 86 may be absorptive structures, for light rays guided at an angle of 45-90 degrees measured from the normal to the display elements. Thus, some of the light propagating through the light guiding portion 81 and incident on the display elements 86 at an oblique angle may be substantially absorbed by the display elements 86 after a sufficient number of reflections. In order to reduce, minimize, or prevent this loss of light due to absorption, an optical isolation layer 97 may be disposed between the glass substrate 85 and the display elements 86. The optical isolation layer 97, as discussed in more detail below, advantageously has an index of refraction substantially lower than the glass substrate 85, such that light traveling through the light guiding portion 81 and striking the glass/optical isolation film interface at an oblique or grazing angle, for example, greater than the critical angle (e.g., greater than 60° or 80°), will be totally internally reflected back into the light guiding portion 81 of the display device 80. However, light propagating through the light guiding portion 81 at steep angles (closer to the display elements' normal), such as light turned substantially normal to the light guiding portion 81 by the turning layer 82, or ambient light, will be transmitted through the glass/optical isolation film interface. This normally incident light or near normally incident light preferably looses less than about 0.5% of its power or flux, and more preferably looses less than about 0.1% of its power or flux. Thus the optical isolation layer 97 forms a boundary for the light guiding portion 81 such that the light propagating through the light guiding portion 81 at oblique or grazing angles prior to being turned by the turning layer 82 may reflect back into, and continue to propagate through the light guiding portion 81 until it is turned toward the display elements 86 by the turning features of the turning layer 82, thereby providing a more illuminated display device.


As discussed above, for example, with reference to FIG. 8, the light guiding portion 81 comprises the turning layer 82, glass substrate 85, and a diffuser 84. Here, due to the arrangement of the optical stack in the display device 80 such that the diffuser layer 84 is part of the light guiding portion 81, some of the light 5 propagating through the light guiding portion 81 that should be reflected within the light guiding portion 81 via total internal reflection may be scattered by the diffuser 84 and therefore lost. In addition, the display elements 86 may be absorptive. Thus, some of the light propagating through the light guiding portion and incident on the display elements at an oblique angle may be absorbed by the display elements 86. Furthermore, the diffuser layer 84 may compound the loss to the display elements 86 by directing some of the light propagating through the light guiding portion 81 towards the oblique angles that are absorbed by the display elements 86. As such, some light propagating through the light guiding portion 81 is lost when it could more advantageously be internally reflected to provide more light to display elements 86 at the distal end of the display device 80.


To reduce this loss in the light guided by total internal reflection in the light guiding portion 81 as described above, it may be advantageous in certain embodiments to use an anisotropic diffuser. The anisotropic diffuser may have stronger diffusing ability to light traveling substantially normal to the surface of the substrate reflected from the display elements compared to the light guided within the light guiding portion 81 via total internal reflection and compared to light normally incident on the display elements. The anisotropic diffuser may be implemented in a variety of ways. For example, in some embodiments, the anisotropic diffuser may be formed by disposing non-spherical particles inside a PSA matrix. In other embodiments, the anisotropic diffuser may be implemented by forming one or more holograms such as holographic diffusers, for example, volume holographics based on diffractive optics. The anisotropic diffuser may diffuse light reflected from the array of display elements at normal or near normal incidence. The anisotropic diffuser, however, may substantially reduce the loss for light guided within the light guiding portion 81. The diffuser may have also be less diffusing for ambient light directed at normal incidence onto the substrate and the display elements, thereby illuminating a portable reflective display like an array of IMO Ds.


In certain other embodiments, to reduce the loss due to the presence of a diffuser present inside the light guiding path it may be advantageous to use a diffuser that can be electrically switched on. The diffuser may be switched on when the supplementary light source is on and the diffuser may be switched off when the supplementary artificial light source (e.g., LED light source) is off. When a display is viewed under ambient light the supplementary light source may not be used, however, a diffuser may be helpful for viewing the display clearly when the viewer is not positioned in the specular reflecting angle of the ambient illumination. Thus, the diffuser may be electrically switched on when the display is viewed under ambient light and the supplementary light source is not being used.


When the display is used, for example, in dark ambient conditions, the supplementary illumination may be turned on. The viewability of the display will likely not be affected by a reduction in diffusing properties of the diffuser when the display is viewed within the viewing cone of the supplementary light source. Thus in such cases the supplementary light source may be turned on while the diffuser may be turned off. An electrically switchable diffuser may be implemented, for example, by polymer dispersed liquid crystal or other electro-optical material and/or configuration. A hologram for example may comprise polymer dispersed liquid crystal and be switched by applying a voltage thereto. Electrodes (e.g., substantially optically transmissive or transparent electrodes) may be disposed with respect to the diffuser layer to apply the electrical signal.


In another embodiment, the optical layers comprising the display device may be arranged such that the diffuser layer is optically decoupled from the light guiding portion. One way to increase the internal reflection of light propagating at oblique angles is to create an air gap between the diffuser and the light guide. However, this configuration requires a separate substrate for the turning layer which thereby increases the thickness of the display device. Alternatively, as shown in FIG. 9, an optical isolation layer 97 may be provided between the light guiding portion 91 of the display device 90 and the diffuser 84 to optically isolate the light guiding portion 91 from the diffuser 84 and the display elements 86.


With reference to FIG. 9, the display device 90 comprises a turning layer 82 laminated or otherwise disposed on the glass substrate 85, an optical isolation layer 97 and a diffuser 84 disposed between the glass substrate 85 and the display elements 86. The light guiding portion 91 of the display device comprises the turning layer 82 and the glass substrate 85.


Light 5, for example, from a linear light source 2 is injected into the edges of the turning layer 82 and the glass substrate 85. As discussed above, the light is propagated along the length, L, of the light guiding portion 91 through total internal reflection. For example, when the light 5 strikes the air/turning layer interface at an angle greater than the critical angle, the light is totally internally reflected at oblique angles such that it remains propagating along the length of the light guiding portion 91. In addition, when the light 5 strikes the glass substrate/optical isolation layer interface at an angle greater than the critical angle, the light is totally internally reflected at oblique angles such that it remains propagating along the length of the light guiding portion 91. As the light propagates along the length of the light guiding portion 91, portions of the light are redirected towards the display elements 86 by the turning features such that the propagation direction of said turned light forms an angle smaller than 45 degrees from the normal to the surface of the display elements 86.


Additionally, the optical isolation layer 97 substantially reduces the guided light from being scattered by the diffuser 84 and/or absorbed by the display elements 86 as it propagates along the length of the light guiding portion. As illustrated, this optical isolation layer 97 is disposed between the light guiding portion 91 and the diffuser 84 and display elements 86. Thus, light propagating through the light guiding portion 91 at oblique angles is not incident on an adjacent diffuser 84 or display elements 86. Rather the light may reflect back into, and continue to propagate through the light guiding portion 91 until it is turned toward the display elements 86 by the turning features of the turning layer 82, thereby providing a more illuminated and more uniform display device 80.


Accordingly, the optical isolation film 97 is configured such that light propagating through the light guiding portion 91 at oblique angles does not interact with the diffuser 84 and display elements 86, but also such that light propagating through the light guiding portion 91 at steep angles normal to the glass substrate and/or array of display elements 86 (e.g., due to being turned towards the array of display elements 86 by the turning layer 82 or from the ambient light) may interact with the diffuser 84 and the array of display elements 86.


In one example embodiment, the optical isolation film may comprise a low index layer, such as silicon dioxide which has an index of refraction of approximately 1.46, fluorinated SiO2 with index of refraction of approximately 1.4 or fluoropolymers (e.g., amorphous fluoropolymers such as DuPont NC-211) having good adhesion to glass and plastics and indices of refraction between about 1.3 and 1.4, and any other suitable material with an index of refraction substantially lower than the index of refraction of the glass substrate layer 85, generally about 1.52 at visible wavelengths. By providing an optical isolation layer 97 with an index of refraction substantially lower than the glass substrate 85, light traveling through the light guiding portion 91 and striking the glass/optical isolation film interface at an oblique angle, greater than the critical angle (e.g., greater than about 60° or 80°), will be totally internally reflected back into the light guiding portion 91 of the display device 90. In contrast, light propagating through the light guiding portion 91 at steep angles (e.g., less than 20°, 10°, or 5°), such as light turned substantially normal to the light guiding portion 91 by the turning layer 82 or ambient light, is transmitted through the glass/optical isolation film interface and loses less than about 0.5% of its intensity in certain embodiments, and more preferably loses less than about 0.1% of its intensity in other embodiments. Values outside these ranges, however, are also possible.


In an alternative embodiment, the optical isolation layer 97 may comprise a dielectric thin film stack configured to cause interference such that the light propagating through the light guiding portion 91 does not penetrate into the diffuser 84 or display elements 86. For example, the optical isolation film 97 may comprise an interference stack of alternating optical layers having high and low indices of refraction, such that the oblique light from the light guiding portion 91 is effectively prevented from being transmitted therethrough yet normal incident light is transmitted therethrough. The design and fabrication of multilayer interference filters is well known in the art.


In an alternative embodiment, as depicted in FIG. 10, the turning layer 102 may be disposed below and in particular on the bottom surface of the glass substrate 85, such that the turning layer 102 is located in between the glass substrate 85 and the display elements 86. The display device 110 may further comprise a diffuser 84 disposed in between the turning layer 102 and the display elements 86. Additionally, the display device 110 may include an optical isolation layer 97 to optically decouple the light guiding portion 111 from the optical loss layers, e.g. the diffuser 84 and the display elements 86.


Here, the light guiding portion 111 comprises the turning layer 102 and the glass substrate 85. Light 5 from a linear light source 2 is injected into the edges of the turning layer 102 and the glass substrate 85. As discussed above, the light 5 is propagated through the light guiding portion 111 via total internal reflection. Here, the glass substrate 85 has a higher index of refraction, typically about 1.52 for light in the visible spectrum, than air which is 1.0, such that light striking the glass/air interface at an oblique angle greater than the critical angle will be totally internally reflected back into the light guiding portion 111, similar to as described above with respect to light striking the turning layer/air interface. The turning layer 102 also has a higher index of refraction than the optical isolation layer 97 and the glass substrate, such that light striking the turning layer/optical isolation layer interface at an oblique angle greater than the critical angle will be totally internally reflected back into the light guiding portion 111. The light 5 will then continue to propagate along the length of the light guiding portion 111 until it is turned towards the display elements 86 by the turning features of the turning layer 102. As discussed above, the turning layer 102 comprises a plurality of turning features, such as surface relief or volume features, features forming one or more diffractive optical elements or holograms (e.g., holographic volume gratings) extending along the film, that are configured to redirect incident light over a large angle such that the propagation direction of said redirected light forms an angle smaller than 45 degrees from the normal to the surface of the display elements 86.


For example, as shown in FIG. 10, the turning layer 102 comprises a plurality of microprisms 106 extending along the surface of the turning layer 102. When the contoured surface of the turning layer 102 is disposed on the planar surface of the glass substrate 85, a plurality of air pockets 104 are embedded therebetween. In use, light striking an interface between one of the facets of the microprisms 106 and the embedded air pocket 104 will undergo total internal reflection at that interface and thereby be redirected though a large angle, such that the propagation direction of said redirected light forms an angle smaller than 45 degrees from the normal to the surface of the display elements. The shape and size of the microprisms 106, and thus the resulting air pockets 104, may also be chosen to provide the optimum or desired turning angle. In other embodiments holographic light turning elements or other light turning means based on diffractive optics can be used.


As described above, the display device 110 further comprises the optical isolation film 97 disposed between the turning layer 102 and the diffuser 84 and display elements 86. The optical isolation layer 97 provides a lower boundary for the light guiding portion 111 of the display device 110 by totally internally reflecting light propagating through the light guide at oblique angles back into the light guiding portion 111 at the turning layer/optical isolation film interface. For example, as discussed above, the optical isolation film 97 may comprise an optical film, such as silicon dioxide or fluorinated SiO2, that has an index of refraction substantially lower than the index of refraction of the turning layer 102, typically about 1.54-1.59 at visible wavelengths. Thus, light incident on the turning layer/optical isolation film interface at an oblique angle greater than the critical angle will be reflected back into the light guiding portion 111 and will not be transmitted through to the diffuser 84 or the display elements 86 where it would be scattered and/or absorbed. However, light incident on the turning layer/optical isolation film interface at a steep (more normal) angle, such as light turned towards the display elements 86 by the turning layer or ambient light, will be transmitted through the interface towards the display elements 86 where it will be modulated and reflected back through the optical layers of the display device 110 to create an image on the display device.


As discussed above, since the turning layer 102 is disposed directly on the glass substrate 85 of the spatial light modulator 86 in the embodiment shown, the overall thickness of the display device is reduced or minimized. Here, the glass substrate, generally about 700 microns thick or less is a structural component of the display elements 86. Thus, the light guiding portion 111 of the display only increases the total thickness of the display device 80 by the thickness of the turning layer 102, generally about 100-300 microns thick, and the optical isolation film 97, generally about 1000 nanometers thick. Thus, the total thickness of the display device 111 may be maintained relatively thin.


A wide variety of alternative configurations are possible. For example, components (e.g., layers) may be added, removed, or rearranged. Similarly, processing and method steps may be added, removed, or reordered. Also, although the terms film and layer have been used herein, such terms as used herein include film stacks and multilayers. Such film stacks and multilayers may be adhered to other structures using adhesive or may be formed on other structures using deposition or in other manners.


Although this invention has been disclosed in the context of certain preferred embodiments and examples, it will be understood by those skilled in the art that the present invention extends beyond the specifically disclosed embodiments to other alternative embodiments and/or uses of the invention and obvious modifications and equivalents thereof. In addition, while several variations of the invention have been shown and described in detail, other modifications, which are within the scope of this invention, will be readily apparent to those of skill in the art based upon this disclosure. It is also contemplated that various combinations or sub-combinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the invention. It should be understood that various features and aspects of the disclosed embodiments can be combined with, or substituted for, one another in order to form varying modes of the disclosed invention. Thus, it is intended that the scope of the present invention herein disclosed should not be limited by the particular disclosed embodiments described above, but should be determined only by a fair reading of the claims that follow.

Claims
  • 1. A display device comprising: a substrate having front and rear sides and a plurality of edges between the front and rear sides;a plurality of display elements on the rear side of the substrate and supported by the substrate;a plurality of turning features on the front side of the substrate; a diffuser on the front side of the substrate between the turning features and the substrate; anda light source configured to inject light into the substrate through at least one edge of the substrate.
  • 2. The display device of claim 1, wherein the substrate includes glass or plastic.
  • 3. The display device of claim 1, wherein the plurality of display elements includes interferometric modulators.
  • 4. The display device of claim 1, wherein the plurality of turning features is disposed in a film on the front side of the substrate.
  • 5. The display device of claim 1, wherein the diffuser includes adhesive with particulates therein.
  • 6. The display device of claim 1, wherein the diffuser includes an anisotropic diffuser.
  • 7. The display device of claim 6, wherein the diffuser includes one or more volume holograms.
  • 8. The display device of claim 1, wherein the diffuser can be electrically controlled.
  • 9. The display device of claim 8, wherein the diffuser includes polymer dispersed liquid crystal.
  • 10. The display device of claim 1, further comprising an optical isolation layer between the substrate and the display elements.
  • 11. The display device of claim 10, wherein the optical isolation layer is directly adjacent the substrate.
  • 12. The display device of claim 1, wherein the diffuser is directly adjacent the substrate or directly adhered to the substrate with an adhesive.
  • 13. The display device of claim 1, wherein the turning features are included in a film directly adjacent the diffuser or directly adhered to the diffuser with an adhesive.
  • 14. The display device of claim 1 further comprising: a processor that is in electrical communication with at least one of the plurality of display elements, the processor being configured to process image data; and a memory device in electrical communication with the processor.
  • 15. The display device of claim 14, further comprising: a driver circuit configured to send at least one signal to the at least one of the plurality of display elements.
  • 16. The display device of claim 15, further comprising: a controller configured to send at least a portion of the image data to the driver circuit.
  • 17. The display device of claim 14, further comprising: an image source module configured to send the image data to the processor.
  • 18. The display device of claim 17, wherein the image source module includes at least one of a receiver, transceiver, and transmitter.
  • 19. The display device of claim 14, further comprising: an input device configured to receive input data and to communicate the input data to the processor.
  • 20. The display device of claim 1, wherein the light is reflected by the turning features toward the plurality of display elements.
  • 21. A display device comprising: a substrate having front and rear sides and a plurality of edges between the front and rear sides;a plurality of display elements on the rear side of the substrate, wherein the plurality of display elements is supported by the substrate;a plurality of turning features on the front side of the substrate;a diffuser between the substrate and the plurality of display elements; anda light source configured to inject light into the substrate through at least one edge of the substrate.
  • 22. A display device comprising: a substrate having front and rear sides;a plurality of display elements on the rear side of the substrate, the plurality of display elements being supported by the substrate;a plurality of turning features on the rear side of the substrate between the substrate and the plurality of display elements;a diffuser on the rear side of the substrate between the turning features and the plurality of display elements, and a light source configured to inject light into the substrate through at least one edge of the substrate.
  • 23. A display device comprising: a substrate having front and rear sides;a plurality of display elements on the rear side of the substrate;a plurality of turning features on the rear side of the substrate between the substrate and the plurality of display elements;an optical isolation layer on the rear side of the substrate between the turning features and the plurality of display elements, anda light source configured to inject light into the substrate through at least one edge of the substrate.
CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority under 35 U.S.C. §119(e) to U.S. Provisional Application Ser. No. 60/850,025 filed on Oct. 6, 2006, which is hereby expressly incorporated by reference in its entirety.

PCT Information
Filing Document Filing Date Country Kind 371c Date
PCT/US2007/020736 9/26/2007 WO 00 1/11/2010
Publishing Document Publishing Date Country Kind
WO2008/045207 4/17/2008 WO A
US Referenced Citations (860)
Number Name Date Kind
2518647 Teeple et al. Aug 1950 A
2534846 Ambrose et al. Dec 1950 A
2677714 Auwarter May 1954 A
3247392 Thelen Apr 1966 A
3439973 Bernt et al. Apr 1969 A
3443854 Weiss May 1969 A
3448334 Frost Jun 1969 A
3653741 Marks Apr 1972 A
3656836 Baudoin et al. Apr 1972 A
3679313 Rosenberg Jul 1972 A
3725868 Malmer et al. Apr 1973 A
3813265 Us May 1974 A
3886310 Guldberg et al. May 1975 A
3924929 Holmen et al. Dec 1975 A
3955880 Lierke May 1976 A
4099854 Decker et al. Jul 1978 A
4200472 Chappell et al. Apr 1980 A
4228437 Shelton Oct 1980 A
4287449 Takeda et al. Sep 1981 A
4377324 Durand et al. Mar 1983 A
4378567 Mir Mar 1983 A
4389096 Hori et al. Jun 1983 A
4400577 Spear Aug 1983 A
4403248 Te Velde Sep 1983 A
4421381 Ueda et al. Dec 1983 A
4441789 Pohlack Apr 1984 A
4441791 Hornbeck Apr 1984 A
4445050 Marks Apr 1984 A
4459182 Te Velde Jul 1984 A
4519676 Te Velde May 1985 A
4531126 Sadones Jul 1985 A
4633031 Todorof Dec 1986 A
4663083 Marks May 1987 A
4681403 Te Velde et al. Jul 1987 A
4681406 Naito et al. Jul 1987 A
4748366 Taylor May 1988 A
4786128 Birnbach Nov 1988 A
4790635 Apsley Dec 1988 A
4832459 Harper et al. May 1989 A
4850682 Gerritsen Jul 1989 A
4859060 Katagiri et al. Aug 1989 A
4863224 Afian et al. Sep 1989 A
4878741 Fergason Nov 1989 A
4915479 Clarke Apr 1990 A
4918577 Furudate Apr 1990 A
4947291 McDermott Aug 1990 A
4961617 Shahidi et al. Oct 1990 A
4974942 Gross et al. Dec 1990 A
4980775 Brody Dec 1990 A
4982184 Kirkwood Jan 1991 A
5022745 Zayhowski et al. Jun 1991 A
5037173 Sampsell et al. Aug 1991 A
5038224 Martulli et al. Aug 1991 A
5042921 Sato et al. Aug 1991 A
5044736 Jaskie et al. Sep 1991 A
5075796 Schildkraut et al. Dec 1991 A
5110370 Vogeli et al. May 1992 A
5124834 Cusano et al. Jun 1992 A
5142414 Koehler Aug 1992 A
5151585 Siebert Sep 1992 A
5151801 Hiroshima Sep 1992 A
5153771 Link et al. Oct 1992 A
5164858 Aguilera, Jr. et al. Nov 1992 A
5168406 Nelson Dec 1992 A
5192946 Thompson et al. Mar 1993 A
5206747 Wiley et al. Apr 1993 A
5221982 Faris Jun 1993 A
5226099 Mignardi et al. Jul 1993 A
5231532 Magel et al. Jul 1993 A
5233385 Sampsell Aug 1993 A
5261970 Landis et al. Nov 1993 A
5272496 Nicolas et al. Dec 1993 A
5278680 Karasawa et al. Jan 1994 A
5283600 Imai Feb 1994 A
5287215 Warde et al. Feb 1994 A
5289300 Yamazaki et al. Feb 1994 A
5291314 Agranat Mar 1994 A
5293272 Jannson et al. Mar 1994 A
5311360 Bloom et al. May 1994 A
5326426 Tam et al. Jul 1994 A
5327263 Katagiri et al. Jul 1994 A
5339179 Rudisill et al. Aug 1994 A
5341242 Gilboa et al. Aug 1994 A
5345322 Fergason Sep 1994 A
5356488 Hezel Oct 1994 A
5361190 Roberts et al. Nov 1994 A
5365283 Doherty et al. Nov 1994 A
5381253 Sharp et al. Jan 1995 A
5387953 Minoura et al. Feb 1995 A
5387991 Mitsutake et al. Feb 1995 A
5398125 Willett et al. Mar 1995 A
5398170 Lee Mar 1995 A
5401983 Jokerst et al. Mar 1995 A
5418631 Tedesco May 1995 A
5446510 Mitsutake et al. Aug 1995 A
5448314 Heimbuch et al. Sep 1995 A
5448659 Tsutsui et al. Sep 1995 A
5452385 Izumi et al. Sep 1995 A
5459610 Bloom et al. Oct 1995 A
5467417 Nakamura et al. Nov 1995 A
5474865 Vasudev Dec 1995 A
5481385 Zimmerman et al. Jan 1996 A
5497172 Doherty et al. Mar 1996 A
5500635 Mott Mar 1996 A
5500761 Goossen et al. Mar 1996 A
5515184 Caulfield et al. May 1996 A
5517347 Sampsell May 1996 A
5517366 Togino May 1996 A
5550373 Cole et al. Aug 1996 A
5555186 Shioya Sep 1996 A
5579149 Moret et al. Nov 1996 A
5594830 Winston et al. Jan 1997 A
5601351 Van den Brandt Feb 1997 A
5604607 Mirzaoff Feb 1997 A
5606441 Florence et al. Feb 1997 A
5615024 May et al. Mar 1997 A
5619059 Li et al. Apr 1997 A
5619365 Rhoads et al. Apr 1997 A
5619366 Rhoads et al. Apr 1997 A
5626408 Heynderickx et al. May 1997 A
5633739 Matsuyama et al. May 1997 A
5636052 Arney et al. Jun 1997 A
5638084 Kalt Jun 1997 A
5647036 Deacon et al. Jul 1997 A
5650865 Smith Jul 1997 A
5659410 Koike et al. Aug 1997 A
5671314 Gregory et al. Sep 1997 A
5671994 Tai et al. Sep 1997 A
5673128 Ohta et al. Sep 1997 A
5703667 Ochiai Dec 1997 A
5703710 Brinkman et al. Dec 1997 A
5706134 Konno et al. Jan 1998 A
5710656 Goossen Jan 1998 A
5712694 Taira et al. Jan 1998 A
5731857 Neijzen Mar 1998 A
5735590 Kashima et al. Apr 1998 A
5739945 Tayebati Apr 1998 A
5745281 Yi et al. Apr 1998 A
5749642 Kimura et al. May 1998 A
5751492 Meyers May 1998 A
5754260 Ooi et al. May 1998 A
5771124 Kintz et al. Jun 1998 A
5771321 Stern Jun 1998 A
5772299 Koo et al. Jun 1998 A
5782993 Ponewash Jul 1998 A
5782995 Nanya et al. Jul 1998 A
5783614 Chen et al. Jul 1998 A
5805117 Mazurek et al. Sep 1998 A
5808708 Oyama et al. Sep 1998 A
5810464 Ishikawa et al. Sep 1998 A
5815229 Shapiro Sep 1998 A
5816677 Kurematsu et al. Oct 1998 A
5818095 Sampsell Oct 1998 A
5835255 Miles Nov 1998 A
5835256 Huibers Nov 1998 A
5845035 Wimberger-Friedl Dec 1998 A
5853240 Tanaka et al. Dec 1998 A
5853310 Nishimura et al. Dec 1998 A
5854872 Tai Dec 1998 A
5868480 Zeinali Feb 1999 A
5877874 Rosenberg Mar 1999 A
5883684 Millikan et al. Mar 1999 A
5886688 Fifield et al. Mar 1999 A
5892598 Asakawa et al. Apr 1999 A
5894359 Suzuki et al. Apr 1999 A
5895851 Kano et al. Apr 1999 A
5913594 Iimura Jun 1999 A
5914804 Goossen Jun 1999 A
5920417 Johnson Jul 1999 A
5933183 Enomoto et al. Aug 1999 A
5959763 Bozler et al. Sep 1999 A
5975703 Holman et al. Nov 1999 A
5982540 Koike et al. Nov 1999 A
5986796 Miles Nov 1999 A
5991073 Woodgate et al. Nov 1999 A
5999239 Larson Dec 1999 A
6002829 Winston et al. Dec 1999 A
6008449 Cole Dec 1999 A
6014192 Lehureau et al. Jan 2000 A
6023373 Inoguchi et al. Feb 2000 A
6028649 Faris et al. Feb 2000 A
6028690 Carter et al. Feb 2000 A
6031653 Wang Feb 2000 A
6040937 Miles Mar 2000 A
6046840 Huibers Apr 2000 A
6048071 Sawayama Apr 2000 A
6049317 Thompson et al. Apr 2000 A
6055090 Miles Apr 2000 A
6072620 Shiono et al. Jun 2000 A
6073034 Jacobsen et al. Jun 2000 A
6074069 Chao-Ching et al. Jun 2000 A
6088102 Manhart Jul 2000 A
6088941 Inbar et al. Jul 2000 A
6091469 Naito Jul 2000 A
6094285 Wickham et al. Jul 2000 A
6099134 Taniguchi et al. Aug 2000 A
6100952 Marvin et al. Aug 2000 A
6113239 Sampsell et al. Sep 2000 A
6147728 Okumura et al. Nov 2000 A
6151089 Yang et al. Nov 2000 A
6166834 Taketomi et al. Dec 2000 A
6167761 Hanzawa et al. Jan 2001 B1
6195196 Kimura et al. Feb 2001 B1
6196691 Ochiai Mar 2001 B1
6199989 Maeda et al. Mar 2001 B1
6201633 Peeters et al. Mar 2001 B1
6208466 Liu et al. Mar 2001 B1
6211976 Popovich et al. Apr 2001 B1
6213606 Holman et al. Apr 2001 B1
6232937 Jacobsen et al. May 2001 B1
6243149 Swanson et al. Jun 2001 B1
6259082 Fujimoto et al. Jul 2001 B1
6273577 Goto et al. Aug 2001 B1
6282010 Sulzbach et al. Aug 2001 B1
6285424 Yoshida Sep 2001 B1
6288824 Kastalsky Sep 2001 B1
6292504 Halmos Sep 2001 B1
6300558 Takamoto et al. Oct 2001 B1
6301000 Johnson Oct 2001 B1
6301026 Ueda Oct 2001 B1
6322236 Campbell et al. Nov 2001 B1
6323415 Uematsu et al. Nov 2001 B1
6323892 Mihara Nov 2001 B1
6323923 Hoshino et al. Nov 2001 B1
6323987 Rinaudo et al. Nov 2001 B1
6342970 Sperger et al. Jan 2002 B1
6356378 Huibers Mar 2002 B1
6359668 Iijima et al. Mar 2002 B1
6368885 Offenberg et al. Apr 2002 B1
6375327 Holman et al. Apr 2002 B2
6377233 Colgan et al. Apr 2002 B2
6377535 Chen et al. Apr 2002 B1
6381022 Zavracky Apr 2002 B1
6399257 Shirota et al. Jun 2002 B1
6400738 Tucker et al. Jun 2002 B1
6402325 Yamamoto Jun 2002 B1
6407785 Yamazaki Jun 2002 B1
6411423 Ham Jun 2002 B2
6412969 Torihara et al. Jul 2002 B1
6421103 Yamaguchi Jul 2002 B2
6431716 Kusakabe Aug 2002 B1
6442124 Chung et al. Aug 2002 B1
6448709 Chuang et al. Sep 2002 B1
6454452 Sasagawa et al. Sep 2002 B1
6456279 Kubo et al. Sep 2002 B1
6466354 Gudeman Oct 2002 B1
6466358 Tew Oct 2002 B2
6470115 Yonekubo Oct 2002 B1
6478432 Dyner Nov 2002 B1
6480634 Corrigan Nov 2002 B1
6483613 Woodgate et al. Nov 2002 B1
6492065 Nakagaki et al. Dec 2002 B2
6493475 Lin Dec 2002 B1
6494588 Okada Dec 2002 B1
6518944 Doane et al. Feb 2003 B1
6519073 Goossen Feb 2003 B1
6520643 Holman et al. Feb 2003 B1
6522373 Hira et al. Feb 2003 B1
6522792 Sugamata et al. Feb 2003 B1
6522794 Bischel et al. Feb 2003 B1
6527410 Yamaguchi Mar 2003 B2
6538813 Magno et al. Mar 2003 B1
6540368 Akaoka Apr 2003 B2
6545734 Cornelissen et al. Apr 2003 B2
6549338 Wolverton et al. Apr 2003 B1
6561661 Egawa May 2003 B2
6565225 Mabuchi et al. May 2003 B2
6574033 Chui et al. Jun 2003 B1
6577429 Kurtz et al. Jun 2003 B1
6580496 Bamji et al. Jun 2003 B2
6582095 Toyoda Jun 2003 B1
6592234 Epstein et al. Jul 2003 B2
6597419 Okada et al. Jul 2003 B1
6597490 Tayebati Jul 2003 B2
6598987 Parikka Jul 2003 B1
6603520 Umemoto Aug 2003 B2
6624944 Wallace et al. Sep 2003 B1
6630786 Cummings et al. Oct 2003 B2
6630968 Tsuchihashi et al. Oct 2003 B1
6631998 Egawa et al. Oct 2003 B2
6636283 Sasagawa et al. Oct 2003 B2
6636322 Terashita Oct 2003 B1
6636358 Umemoto et al. Oct 2003 B2
6636653 Miracky et al. Oct 2003 B2
6642913 Kimura et al. Nov 2003 B1
6642976 Umemoto et al. Nov 2003 B2
6643067 Miyamae et al. Nov 2003 B2
6643069 Dewald Nov 2003 B2
6646772 Popovich et al. Nov 2003 B1
6650455 Miles Nov 2003 B2
6652109 Nakamura Nov 2003 B2
6655820 Jung et al. Dec 2003 B2
6657700 Sako et al. Dec 2003 B2
6659615 Umemoto Dec 2003 B2
6660997 Laberge et al. Dec 2003 B2
6667782 Taira et al. Dec 2003 B1
6669350 Yamashita et al. Dec 2003 B2
6674562 Miles Jan 2004 B1
6677709 Ma et al. Jan 2004 B1
6680792 Miles Jan 2004 B2
6683693 O Tsuka et al. Jan 2004 B1
6687040 Kimura Feb 2004 B2
6693690 Umemoto Feb 2004 B2
6696140 Suzuki Feb 2004 B2
6706339 Miyatake et al. Mar 2004 B1
6709123 Flohr et al. Mar 2004 B2
6738194 Ramirez et al. May 2004 B1
6741377 Miles May 2004 B2
6742907 Funamoto et al. Jun 2004 B2
6742921 Umemoto et al. Jun 2004 B2
6747801 Umemoto et al. Jun 2004 B2
6751023 Umemoto et al. Jun 2004 B2
6760135 Payne et al. Jul 2004 B1
6760146 Ikeda et al. Jul 2004 B2
6761461 Mizutani et al. Jul 2004 B2
6768555 Chen et al. Jul 2004 B2
6773126 Hatjasalo et al. Aug 2004 B1
6774962 Yoon Aug 2004 B2
6778746 Charlton et al. Aug 2004 B2
6784948 Kawashima et al. Aug 2004 B2
6792293 Awan et al. Sep 2004 B1
6794119 Miles Sep 2004 B2
6806924 Niiyama et al. Oct 2004 B2
6811267 Allen et al. Nov 2004 B1
6819380 Wen et al. Nov 2004 B2
6822745 De Groot et al. Nov 2004 B2
6822780 Long, Jr. Nov 2004 B1
6825895 Nakano et al. Nov 2004 B2
6826000 Lee et al. Nov 2004 B2
6829258 Carlisle Dec 2004 B1
6841787 Almogy Jan 2005 B2
6844953 Reboa Jan 2005 B2
6844959 Huibers et al. Jan 2005 B2
6852396 Mineo Feb 2005 B1
6853418 Suzuki et al. Feb 2005 B2
6862141 Olczak Mar 2005 B2
6863428 Lundin Mar 2005 B2
6864882 Newton Mar 2005 B2
6865312 Niv et al. Mar 2005 B2
6866393 Yano et al. Mar 2005 B2
6867896 Miles Mar 2005 B2
6870581 Li et al. Mar 2005 B2
6871982 Holman et al. Mar 2005 B2
6879354 Sawayama Apr 2005 B1
6880959 Houston Apr 2005 B2
6882421 Opsal et al. Apr 2005 B2
6882458 Lin et al. Apr 2005 B2
6882461 Tsai et al. Apr 2005 B1
6883924 Maeda et al. Apr 2005 B2
6883934 Kawakami et al. Apr 2005 B2
6885377 Lim et al. Apr 2005 B2
6891530 Umemoto et al. May 2005 B2
6897855 Matthies et al. May 2005 B1
6897923 Kanesaka et al. May 2005 B2
6912022 Lin et al. Jun 2005 B2
6917469 Momose et al. Jul 2005 B2
6927387 Viktorovitch Aug 2005 B2
6930816 Mochizuki Aug 2005 B2
6940653 Favalora et al. Sep 2005 B2
6951401 Van Hees et al. Oct 2005 B2
6960010 Matsumoto et al. Nov 2005 B2
6964484 Gupta et al. Nov 2005 B2
6967779 Fadel et al. Nov 2005 B2
6970031 Martin et al. Nov 2005 B1
6972827 Mi Dec 2005 B2
6982820 Tsai Jan 2006 B2
6995890 Lin Feb 2006 B2
6998196 Rich et al. Feb 2006 B2
6999225 Lin et al. Feb 2006 B2
6999235 Nakamura Feb 2006 B2
6999236 Lin et al. Feb 2006 B2
7002726 Patel et al. Feb 2006 B2
7004610 Yamashita et al. Feb 2006 B2
7006272 Tsai Feb 2006 B2
7009754 Huibers Mar 2006 B2
7010212 Emmons et al. Mar 2006 B2
7012659 Smith et al. Mar 2006 B2
7016095 Lin Mar 2006 B2
7018088 Yu et al. Mar 2006 B2
7019734 Cross et al. Mar 2006 B2
7025461 Veligdan et al. Apr 2006 B2
7030949 Kashima Apr 2006 B2
7034981 Makigaki Apr 2006 B2
7038752 Lin May 2006 B2
7041344 Kusume et al. May 2006 B2
7042444 Cok May 2006 B2
7042643 Miles May 2006 B2
7046409 Kihara May 2006 B2
7050219 Kimura May 2006 B2
7054045 McPheters et al. May 2006 B2
7056001 Chuang Jun 2006 B2
7064875 Kawano et al. Jun 2006 B2
7068948 Wei et al. Jun 2006 B2
7072093 Piehl et al. Jul 2006 B2
7072096 Holman et al. Jul 2006 B2
7092163 Bastawros et al. Aug 2006 B2
7099058 Takemori et al. Aug 2006 B2
7110158 Miles Sep 2006 B2
7113339 Taguchi et al. Sep 2006 B2
7123216 Miles Oct 2006 B1
7126738 Miles Oct 2006 B2
7128459 Igarashi et al. Oct 2006 B2
7130104 Cummings Oct 2006 B2
7133022 Grabert Nov 2006 B2
7136213 Chui Nov 2006 B2
7138984 Miles Nov 2006 B1
7142346 Chui et al. Nov 2006 B2
7142347 Islam Nov 2006 B2
7156546 Higashiyama Jan 2007 B2
7161728 Sampsell et al. Jan 2007 B2
7161730 Floyd Jan 2007 B2
7172915 Lin et al. Feb 2007 B2
7187489 Miles Mar 2007 B2
7210806 Holman et al. May 2007 B2
7218429 Batchko May 2007 B2
7218812 Maxwell et al. May 2007 B2
7221418 Lee et al. May 2007 B2
7223010 Min et al. May 2007 B2
7236663 Wakita et al. Jun 2007 B2
7256922 Chui et al. Aug 2007 B2
7262754 Yamazaki Aug 2007 B1
7262916 Kao et al. Aug 2007 B2
7264389 Sado et al. Sep 2007 B2
7304784 Chui et al. Dec 2007 B2
7324248 Brotherton-Ratcliffe et al. Jan 2008 B2
7327510 Cummings et al. Feb 2008 B2
7335780 Annis Feb 2008 B2
7336329 Yoon Feb 2008 B2
7342705 Chui et al. Mar 2008 B2
7342709 Lin Mar 2008 B2
7349139 Chui et al. Mar 2008 B2
7349141 Tung et al. Mar 2008 B2
7352501 Chopra et al. Apr 2008 B2
7352940 Charters et al. Apr 2008 B2
7355780 Chui Apr 2008 B2
7359011 Hamada Apr 2008 B2
7360899 McGuire, Jr. et al. Apr 2008 B2
7366393 Cassarly et al. Apr 2008 B2
7369292 Xu et al. May 2008 B2
7369294 Gally et al. May 2008 B2
7372449 Kodama et al. May 2008 B2
7372631 Ozawa May 2008 B2
7374327 Schexnaider May 2008 B2
7375779 Lee et al. May 2008 B2
7376308 Cheben et al. May 2008 B2
7377678 Huang et al. May 2008 B2
7380970 Hwang et al. Jun 2008 B2
7385748 Miles Jun 2008 B2
7388181 Han et al. Jun 2008 B2
7388706 Miles Jun 2008 B2
7389476 Senda et al. Jun 2008 B2
7400439 Holman Jul 2008 B2
7403180 Silverstein et al. Jul 2008 B1
7417735 Cummings et al. Aug 2008 B2
7417784 Sasagawa et al. Aug 2008 B2
7420638 Tasaka et al. Sep 2008 B2
7420725 Kothari Sep 2008 B2
7450295 Tung et al. Nov 2008 B2
7456805 Ouderkirk et al. Nov 2008 B2
7463421 Miles Dec 2008 B2
7477809 Tan et al. Jan 2009 B1
7494830 Liu et al. Feb 2009 B2
7498621 Seitz Mar 2009 B2
7502081 Umemoto et al. Mar 2009 B2
7515336 Lippey Apr 2009 B2
7520642 Holman et al. Apr 2009 B2
7557935 Baruch Jul 2009 B2
7561323 Gally Jul 2009 B2
7564612 Chui Jul 2009 B2
7603001 Wang et al. Oct 2009 B2
7630123 Kothari Dec 2009 B2
7643203 Gousev et al. Jan 2010 B2
7663714 Haga et al. Feb 2010 B2
7684126 Eckhardt Mar 2010 B2
7688494 Xu et al. Mar 2010 B2
7692844 Miles Apr 2010 B2
7701029 Mabuchi Apr 2010 B2
7706050 Sampsell Apr 2010 B2
7710632 Cummings May 2010 B2
7710636 Chui May 2010 B2
7719500 Chui May 2010 B2
7719747 Tung et al. May 2010 B2
7733439 Sampsell Jun 2010 B2
7750886 Sampsell Jul 2010 B2
7766498 Sampsell Aug 2010 B2
7766531 Anderson et al. Aug 2010 B2
7768690 Sampsell Aug 2010 B2
7777954 Gruhlke Aug 2010 B2
7807488 Gally et al. Oct 2010 B2
7813029 Kothari et al. Oct 2010 B2
7843061 Poli et al. Nov 2010 B2
7845841 Sampsell Dec 2010 B2
7848001 Miles Dec 2010 B2
7855824 Gally Dec 2010 B2
7855827 Xu et al. Dec 2010 B2
7864395 Chui Jan 2011 B2
7872394 Gritters et al. Jan 2011 B1
7876397 Krijn et al. Jan 2011 B2
7880954 Sampsell Feb 2011 B2
7898521 Gally et al. Mar 2011 B2
7907319 Miles Mar 2011 B2
7911428 Gally et al. Mar 2011 B2
7916378 Wang Mar 2011 B2
7928928 Gally et al. Apr 2011 B2
7933475 Wang et al. Apr 2011 B2
7944602 Chui May 2011 B2
7949213 Mienko et al. May 2011 B2
7986451 Gally et al. Jul 2011 B2
8031133 Gally et al. Oct 2011 B2
8045252 Chui et al. Oct 2011 B2
8045256 Kothari Oct 2011 B2
8059326 Miles Nov 2011 B2
8068710 Bita et al. Nov 2011 B2
8072402 Xu Dec 2011 B2
8111445 Chui et al. Feb 2012 B2
8111446 Gally et al. Feb 2012 B2
8169689 Sampsell May 2012 B2
8300304 Gally et al. Oct 2012 B2
8408775 Coleman Apr 2013 B1
20010003487 Miles Jun 2001 A1
20010003504 Ishihara et al. Jun 2001 A1
20010010952 Abramovich Aug 2001 A1
20010019240 Takahashi Sep 2001 A1
20010019380 Ishihara Sep 2001 A1
20010019479 Nakabayashi et al. Sep 2001 A1
20010022636 Yang et al. Sep 2001 A1
20010026001 Yagi Oct 2001 A1
20010030861 Oda et al. Oct 2001 A1
20010055076 Ochi et al. Dec 2001 A1
20010055208 Kimura Dec 2001 A1
20020006036 Egawa et al. Jan 2002 A1
20020034071 Mabuchi Mar 2002 A1
20020039155 Umemoto Apr 2002 A1
20020044445 Bohler et al. Apr 2002 A1
20020050286 Kubota May 2002 A1
20020050764 Koga et al. May 2002 A1
20020051103 Faris et al. May 2002 A1
20020054258 Kondo May 2002 A1
20020057399 Ishitaka May 2002 A1
20020060907 Saccomanno May 2002 A1
20020075245 Kawashima et al. Jun 2002 A1
20020075555 Miles Jun 2002 A1
20020080465 Han et al. Jun 2002 A1
20020081089 Min et al. Jun 2002 A1
20020106182 Kawashima Aug 2002 A1
20020131151 Engler et al. Sep 2002 A1
20020149584 Simpson et al. Oct 2002 A1
20020153486 Ishizuya et al. Oct 2002 A1
20020154256 Gotoh et al. Oct 2002 A1
20020167730 Needham et al. Nov 2002 A1
20020172039 Inditsky Nov 2002 A1
20020172810 Murata et al. Nov 2002 A1
20020176035 Yamazaki Nov 2002 A1
20020180910 Umemoto Dec 2002 A1
20030001985 Doe Jan 2003 A1
20030006730 Tachibana Jan 2003 A1
20030011864 Flanders Jan 2003 A1
20030012009 Suzuki et al. Jan 2003 A1
20030016930 Inditsky Jan 2003 A1
20030058069 Schwartz et al. Mar 2003 A1
20030067760 Jagt et al. Apr 2003 A1
20030081154 Coleman et al. May 2003 A1
20030083429 Smith et al. May 2003 A1
20030086030 Taniguchi et al. May 2003 A1
20030086031 Taniguchi May 2003 A1
20030095401 Hanson et al. May 2003 A1
20030098957 Haldiman May 2003 A1
20030099118 Saitoh May 2003 A1
20030103177 Maeda et al. Jun 2003 A1
20030103344 Niida et al. Jun 2003 A1
20030107692 Sekiguchi Jun 2003 A1
20030136759 Mikolas Jul 2003 A1
20030137617 Cornelissen et al. Jul 2003 A1
20030142247 Nishiyama et al. Jul 2003 A1
20030161040 Ishii et al. Aug 2003 A1
20030165067 Imamura et al. Sep 2003 A1
20030169385 Okuwaki Sep 2003 A1
20030169386 Goto et al. Sep 2003 A1
20030184690 Ogiwara et al. Oct 2003 A1
20030193630 Chiou Oct 2003 A1
20030206281 Jain Nov 2003 A1
20030210222 Ogiwara et al. Nov 2003 A1
20030210363 Yasukawa et al. Nov 2003 A1
20030210366 Huang et al. Nov 2003 A1
20030210367 Nakano et al. Nov 2003 A1
20030213514 Ortabasi Nov 2003 A1
20030214621 Kim et al. Nov 2003 A1
20030222857 Abileah Dec 2003 A1
20030222980 Miyagaki et al. Dec 2003 A1
20030231483 Higashiyama Dec 2003 A1
20040001169 Saiki et al. Jan 2004 A1
20040017599 Yang Jan 2004 A1
20040027339 Schulz Feb 2004 A1
20040032401 Nakazawa Feb 2004 A1
20040032659 Drinkwater Feb 2004 A1
20040051929 Sampsell et al. Mar 2004 A1
20040061946 Yoshikawa et al. Apr 2004 A1
20040066477 Morimoto et al. Apr 2004 A1
20040071937 Chien et al. Apr 2004 A1
20040080807 Chen et al. Apr 2004 A1
20040085748 Sugiura May 2004 A1
20040100796 Ward May 2004 A1
20040109303 Olczak Jun 2004 A1
20040109305 Chisholm Jun 2004 A1
20040114242 Sharp Jun 2004 A1
20040115339 Ito Jun 2004 A1
20040125048 Fukuda et al. Jul 2004 A1
20040135494 Miyatake Jul 2004 A1
20040170373 Kim Sep 2004 A1
20040174583 Chen et al. Sep 2004 A1
20040175577 Lin et al. Sep 2004 A1
20040188150 Richard et al. Sep 2004 A1
20040207605 Mackey et al. Oct 2004 A1
20040207995 Park et al. Oct 2004 A1
20040217264 Wood et al. Nov 2004 A1
20040217919 Piehl et al. Nov 2004 A1
20040228109 Leu et al. Nov 2004 A1
20040233357 Fujimori et al. Nov 2004 A1
20040246743 Lee et al. Dec 2004 A1
20040248524 Flegeo Dec 2004 A1
20050002082 Miles Jan 2005 A1
20050002175 Matsui et al. Jan 2005 A1
20050010568 Nagatomo et al. Jan 2005 A1
20050024849 Parker et al. Feb 2005 A1
20050024890 Yamamoto et al. Feb 2005 A1
20050035699 Tsai Feb 2005 A1
20050036095 Yeh et al. Feb 2005 A1
20050041175 Akiyama et al. Feb 2005 A1
20050042117 Lin Feb 2005 A1
20050057442 Way Mar 2005 A1
20050069209 Damera-Venkata et al. Mar 2005 A1
20050069254 Schultheis et al. Mar 2005 A1
20050073507 Richter et al. Apr 2005 A1
20050088719 Patel Apr 2005 A1
20050101059 Yang et al. May 2005 A1
20050117088 Van Jun 2005 A1
20050117623 Shchukin et al. Jun 2005 A1
20050120553 Brown et al. Jun 2005 A1
20050133761 Thielemans Jun 2005 A1
20050141065 Masamoto Jun 2005 A1
20050146897 Mimura Jul 2005 A1
20050180145 Okuwaki Aug 2005 A1
20050195175 Anderson Sep 2005 A1
20050195370 Gore et al. Sep 2005 A1
20050195462 Lin Sep 2005 A1
20050206802 Creemers Sep 2005 A1
20050207016 Ando Sep 2005 A1
20050213346 Kao et al. Sep 2005 A1
20050224694 Yaung Oct 2005 A1
20050225686 Brummack et al. Oct 2005 A1
20050231977 Hayakawa Oct 2005 A1
20050231981 Hoelen et al. Oct 2005 A1
20050242693 Hayashi et al. Nov 2005 A1
20050248524 Feng et al. Nov 2005 A1
20050259302 Metz et al. Nov 2005 A9
20050259939 Rinko Nov 2005 A1
20050271325 Anderson et al. Dec 2005 A1
20060002141 Ouderkirk et al. Jan 2006 A1
20060002655 Smits Jan 2006 A1
20060002675 Choi et al. Jan 2006 A1
20060007510 Nishide et al. Jan 2006 A1
20060012733 Jin et al. Jan 2006 A1
20060012739 Shibazaki Jan 2006 A1
20060022966 Mar Feb 2006 A1
20060024017 Page et al. Feb 2006 A1
20060024880 Chui et al. Feb 2006 A1
20060044523 Teijido et al. Mar 2006 A1
20060044928 Chui et al. Mar 2006 A1
20060050032 Gunner et al. Mar 2006 A1
20060051048 Gardiner et al. Mar 2006 A1
20060056000 Mignard Mar 2006 A1
20060056166 Yeo et al. Mar 2006 A1
20060062016 Dejima et al. Mar 2006 A1
20060065940 Kothari Mar 2006 A1
20060066503 Sampsell et al. Mar 2006 A1
20060066504 Sampsell et al. Mar 2006 A1
20060066557 Floyd Mar 2006 A1
20060066560 Gally et al. Mar 2006 A1
20060066586 Gally Mar 2006 A1
20060066595 Sampsell et al. Mar 2006 A1
20060066596 Sampsell et al. Mar 2006 A1
20060066598 Floyd Mar 2006 A1
20060066600 Palmateer Mar 2006 A1
20060066601 Kothari et al. Mar 2006 A1
20060066641 Gally et al. Mar 2006 A1
20060066863 Cummings et al. Mar 2006 A1
20060066936 Chui et al. Mar 2006 A1
20060066937 Chui Mar 2006 A1
20060066938 Chui Mar 2006 A1
20060067028 Floyd Mar 2006 A1
20060073623 Conley, Jr. et al. Apr 2006 A1
20060076631 Palmateer et al. Apr 2006 A1
20060076632 Palmateer et al. Apr 2006 A1
20060077123 Gally Apr 2006 A1
20060077126 Kothari Apr 2006 A1
20060077127 Sampsell et al. Apr 2006 A1
20060077146 Palmateer Apr 2006 A1
20060077148 Gally et al. Apr 2006 A1
20060077149 Gally et al. Apr 2006 A1
20060077504 Floyd Apr 2006 A1
20060077505 Chui et al. Apr 2006 A1
20060077518 Chui et al. Apr 2006 A1
20060077520 Chui et al. Apr 2006 A1
20060077521 Gally et al. Apr 2006 A1
20060077523 Cummings et al. Apr 2006 A1
20060077524 Palmateer Apr 2006 A1
20060077528 Floyd Apr 2006 A1
20060077529 Chui et al. Apr 2006 A1
20060077533 Miles et al. Apr 2006 A1
20060077617 Floyd Apr 2006 A1
20060079048 Sampsell Apr 2006 A1
20060091824 Pate et al. May 2006 A1
20060103613 Chui May 2006 A1
20060103643 Mathew et al. May 2006 A1
20060103912 Katoh et al. May 2006 A1
20060109682 Ko et al. May 2006 A1
20060109686 Sugiura May 2006 A1
20060110090 Ellwood Jr. May 2006 A1
20060114244 Saxena et al. Jun 2006 A1
20060126142 Choi Jun 2006 A1
20060130889 Li et al. Jun 2006 A1
20060132383 Gally et al. Jun 2006 A1
20060176241 Sampsell Aug 2006 A1
20060176487 Cummings et al. Aug 2006 A1
20060181903 Okuwaki Aug 2006 A1
20060187676 Ishikura Aug 2006 A1
20060209012 Hagood Sep 2006 A1
20060209385 Liu et al. Sep 2006 A1
20060215958 Yeo Sep 2006 A1
20060227532 Ko et al. Oct 2006 A1
20060246233 Fukuda Nov 2006 A1
20060250335 Stewart et al. Nov 2006 A1
20060250350 Kothari et al. Nov 2006 A1
20060250676 Hagood, IV et al. Nov 2006 A1
20060262562 Fukasawa et al. Nov 2006 A1
20060265919 Huang Nov 2006 A1
20060274243 Iijima et al. Dec 2006 A1
20060279558 Van Delden et al. Dec 2006 A1
20060286381 Naito et al. Dec 2006 A1
20060290253 Yeo et al. Dec 2006 A1
20060291769 Spoonhower et al. Dec 2006 A1
20070018585 Ijzerman et al. Jan 2007 A1
20070036492 Lee Feb 2007 A1
20070042524 Kogut et al. Feb 2007 A1
20070064294 Hoshino et al. Mar 2007 A1
20070070270 Yu et al. Mar 2007 A1
20070097694 Faase et al. May 2007 A1
20070114523 Oumi et al. May 2007 A1
20070116424 Ting et al. May 2007 A1
20070125415 Sachs Jun 2007 A1
20070132843 Miles Jun 2007 A1
20070133935 Fine Jun 2007 A1
20070134438 Fabick et al. Jun 2007 A1
20070146887 Ikeda et al. Jun 2007 A1
20070147087 Parker et al. Jun 2007 A1
20070171330 Hung et al. Jul 2007 A1
20070187852 Parker et al. Aug 2007 A1
20070201056 Cok et al. Aug 2007 A1
20070201234 Ottermann Aug 2007 A1
20070210163 Han Sep 2007 A1
20070229737 Takeda Oct 2007 A1
20070229936 Miles Oct 2007 A1
20070241340 Pan Oct 2007 A1
20070247704 Mignard Oct 2007 A1
20070279727 Gandhi et al. Dec 2007 A1
20070279935 Gardiner et al. Dec 2007 A1
20070291362 Hill et al. Dec 2007 A1
20080030650 Kitagawa et al. Feb 2008 A1
20080037281 Chang Feb 2008 A1
20080042154 Wano Feb 2008 A1
20080084600 Bita et al. Apr 2008 A1
20080089063 Chen Apr 2008 A1
20080090025 Freking et al. Apr 2008 A1
20080137175 Lin Jun 2008 A1
20080192259 Sumiyama Aug 2008 A1
20080192484 Lee et al. Aug 2008 A1
20080232135 Kinder et al. Sep 2008 A1
20080239216 Miyamoto et al. Oct 2008 A1
20080266333 Silverstein et al. Oct 2008 A1
20080278796 Roosendaal et al. Nov 2008 A1
20080285308 Clary et al. Nov 2008 A1
20090050454 Matsukawa et al. Feb 2009 A1
20090073540 Kothari et al. Mar 2009 A1
20090086301 Gally et al. Apr 2009 A1
20090086466 Sugita et al. Apr 2009 A1
20090090611 Zeijlon et al. Apr 2009 A1
20090096956 Uehara et al. Apr 2009 A1
20090101192 Kothari et al. Apr 2009 A1
20090101623 Bita et al. Apr 2009 A1
20090103161 Kothari et al. Apr 2009 A1
20090103165 Kothari et al. Apr 2009 A1
20090103166 Khazeni et al. Apr 2009 A1
20090103311 Wu et al. Apr 2009 A1
20090126777 Khazeni et al. May 2009 A1
20090126792 Gruhlke May 2009 A1
20090151771 Kothari et al. Jun 2009 A1
20090168459 Holman et al. Jul 2009 A1
20090190373 Bita et al. Jul 2009 A1
20090196068 Wang et al. Aug 2009 A1
20090199893 Bita et al. Aug 2009 A1
20090199900 Bita et al. Aug 2009 A1
20090201565 Bita et al. Aug 2009 A1
20090201571 Gally et al. Aug 2009 A1
20090213298 Mimura et al. Aug 2009 A1
20090225394 Chui et al. Sep 2009 A1
20090225396 Sampsell Sep 2009 A1
20090231275 Odgers Sep 2009 A1
20090231877 Mienko et al. Sep 2009 A1
20090242024 Kothari et al. Oct 2009 A1
20090244690 Lee Oct 2009 A1
20090251752 Gruhlke et al. Oct 2009 A1
20090255569 Sampsell et al. Oct 2009 A1
20090257108 Gruhlke et al. Oct 2009 A1
20090293955 Kothari et al. Dec 2009 A1
20090293995 Tanaka et al. Dec 2009 A1
20090294785 Cok Dec 2009 A1
20090296193 Bita et al. Dec 2009 A1
20090303417 Mizushima et al. Dec 2009 A1
20090323144 Gruhlke et al. Dec 2009 A1
20090323153 Sampsell Dec 2009 A1
20100026727 Bita et al. Feb 2010 A1
20100033988 Chiu et al. Feb 2010 A1
20100039832 Ahlgren et al. Feb 2010 A1
20100052880 Laitinen et al. Mar 2010 A1
20100096006 Griffiths et al. Apr 2010 A1
20100096011 Griffiths et al. Apr 2010 A1
20100110340 Mather et al. May 2010 A1
20100118239 Roosendaal et al. May 2010 A1
20100172012 Sampsell Jul 2010 A1
20100182308 Holman et al. Jul 2010 A1
20100188367 Nagafuji et al. Jul 2010 A1
20100195310 Baar Aug 2010 A1
20100214642 Miles Aug 2010 A1
20100226118 Baar Sep 2010 A1
20100238529 Sampsell et al. Sep 2010 A1
20100245370 Narayanan et al. Sep 2010 A1
20100245975 Cummings Sep 2010 A1
20100278480 Vasylyev Nov 2010 A1
20100302616 Bita et al. Dec 2010 A1
20100302802 Bita et al. Dec 2010 A1
20100302803 Bita et al. Dec 2010 A1
20100309103 Sampsell Dec 2010 A1
20100309540 Miles Dec 2010 A1
20110025727 Li et al. Feb 2011 A1
20110032214 Gruhlke et al. Feb 2011 A1
20110043889 Mignard Feb 2011 A1
20110075246 Wang Mar 2011 A1
20110157058 Bita et al. Jun 2011 A1
20110157093 Bita et al. Jun 2011 A1
20110199667 Wang et al. Aug 2011 A1
20110199669 Chui Aug 2011 A1
20110316861 Gally et al. Dec 2011 A1
20120002265 Kothari Jan 2012 A1
20120069031 Bita et al. Mar 2012 A1
20120081406 Li et al. Apr 2012 A1
20120099177 Chui et al. Apr 2012 A1
20120154881 Gruhlke et al. Jun 2012 A1
20120206788 Sampsell Aug 2012 A1
20130106712 Cummings et al. May 2013 A1
20130127922 Poliakov et al. May 2013 A1
Foreign Referenced Citations (336)
Number Date Country
2490975 Jan 2004 CA
1158182 Aug 1997 CN
1272922 Nov 2000 CN
1286424 Mar 2001 CN
1381752 Nov 2002 CN
1384392 Dec 2002 CN
1409157 Apr 2003 CN
1420703 May 2003 CN
1447887 Oct 2003 CN
2624220 Jul 2004 CN
1517743 Aug 2004 CN
1559000 Dec 2004 CN
1639596 Jul 2005 CN
1643439 Jul 2005 CN
1670593 Sep 2005 CN
1744163 Mar 2006 CN
1795403 Jun 2006 CN
1811549 Aug 2006 CN
3402746 Aug 1985 DE
19622748 Dec 1997 DE
19942513 Mar 2001 DE
10228946 Jan 2004 DE
10329917 Feb 2005 DE
102007025092 Dec 2008 DE
0223136 May 1987 EP
0278038 Aug 1988 EP
0389031 Sep 1990 EP
0539099 Apr 1993 EP
0590511 Apr 1994 EP
0621500 Oct 1994 EP
0667548 Aug 1995 EP
0786911 Jul 1997 EP
0822441 Feb 1998 EP
0830032 Mar 1998 EP
0855745 Jul 1998 EP
0867747 Sep 1998 EP
0 879 991 Nov 1998 EP
0895274 Feb 1999 EP
0907050 Apr 1999 EP
0957392 Nov 1999 EP
0 984 314 Mar 2000 EP
1003062 May 2000 EP
1014161 Jun 2000 EP
1081633 Mar 2001 EP
1089115 Apr 2001 EP
1093105 Apr 2001 EP
1116987 Jul 2001 EP
1 122 586 Aug 2001 EP
1127984 Aug 2001 EP
1143270 Oct 2001 EP
1 199 512 Apr 2002 EP
1231757 Aug 2002 EP
1251454 Oct 2002 EP
1 279 892 Jan 2003 EP
1271223 Jan 2003 EP
1296094 Mar 2003 EP
1298635 Apr 2003 EP
1306609 May 2003 EP
1 329 664 Jul 2003 EP
1336876 Aug 2003 EP
1 347 315 Sep 2003 EP
1341025 Sep 2003 EP
1389775 Feb 2004 EP
1413543 Apr 2004 EP
1437610 Jul 2004 EP
1450418 Aug 2004 EP
1519218 Mar 2005 EP
1531302 May 2005 EP
1544537 Jun 2005 EP
1577701 Sep 2005 EP
1670065 Jun 2006 EP
1698918 Sep 2006 EP
1734401 Dec 2006 EP
1 748 305 Jan 2007 EP
1780585 May 2007 EP
1947551 Jul 2008 EP
2141408 Jan 2010 EP
2163920 Mar 2010 EP
2251731 Nov 2010 EP
2259122 Dec 2010 EP
2259123 Dec 2010 EP
2264508 Dec 2010 EP
2264509 Dec 2010 EP
2264510 Dec 2010 EP
2366942 Sep 2011 EP
2366943 Sep 2011 EP
2366944 Sep 2011 EP
2366945 Sep 2011 EP
2366946 Sep 2011 EP
2388234 Nov 2011 EP
2260203 Apr 1993 GB
2278222 Nov 1994 GB
2315356 Jan 1998 GB
2321532 Jul 1998 GB
2336933 Nov 1999 GB
2340281 Feb 2000 GB
2 351 834 Jan 2001 GB
56010976 Feb 1981 JP
56010977 Feb 1981 JP
56088111 Jul 1981 JP
573266 Jan 1982 JP
58115781 Jul 1983 JP
60147718 Aug 1985 JP
60165621 Aug 1985 JP
60242408 Dec 1985 JP
62009317 Jan 1987 JP
56395489 Apr 1988 JP
2068513 Mar 1990 JP
02151079 Jun 1990 JP
3199920 Aug 1991 JP
04081816 Mar 1992 JP
4053220 May 1992 JP
04190323 Jul 1992 JP
04238321 Aug 1992 JP
05281479 Oct 1993 JP
6209114 Jul 1994 JP
6265870 Sep 1994 JP
07509327 Oct 1995 JP
8018990 Jan 1996 JP
8050283 Feb 1996 JP
08094992 Apr 1996 JP
8271874 Oct 1996 JP
9005735 Jan 1997 JP
09022012 Jan 1997 JP
09068722 Mar 1997 JP
09 171111 Jun 1997 JP
09160032 Jun 1997 JP
09189869 Jul 1997 JP
09189910 Jul 1997 JP
09507920 Aug 1997 JP
9230324 Sep 1997 JP
09260696 Oct 1997 JP
09281917 Oct 1997 JP
09307140 Nov 1997 JP
09311333 Dec 1997 JP
10096910 Apr 1998 JP
10186249 Jul 1998 JP
10202948 Aug 1998 JP
10325953 Dec 1998 JP
11002712 Jan 1999 JP
11002764 Jan 1999 JP
11052887 Feb 1999 JP
11064836 Mar 1999 JP
11064882 Mar 1999 JP
11072721 Mar 1999 JP
11160687 Jun 1999 JP
11167808 Jun 1999 JP
11174234 Jul 1999 JP
11184387 Jul 1999 JP
11 211999 Aug 1999 JP
11232919 Aug 1999 JP
11249132 Sep 1999 JP
11254752 Sep 1999 JP
11258558 Sep 1999 JP
11295725 Oct 1999 JP
11295726 Oct 1999 JP
11 326898 Nov 1999 JP
11316553 Nov 1999 JP
11326903 Nov 1999 JP
2000028933 Jan 2000 JP
2000 081848 Mar 2000 JP
2000075287 Mar 2000 JP
2000075293 Mar 2000 JP
2000089225 Mar 2000 JP
2000147262 May 2000 JP
2000 181367 Jun 2000 JP
2000193933 Jul 2000 JP
2000214804 Aug 2000 JP
2000258622 Sep 2000 JP
2000514568 Oct 2000 JP
2000 314882 Nov 2000 JP
2000305074 Nov 2000 JP
2000338310 Dec 2000 JP
2001 021883 Jan 2001 JP
2001110218 Apr 2001 JP
2001222276 Aug 2001 JP
2001 297615 Oct 2001 JP
2001283622 Oct 2001 JP
2001305312 Oct 2001 JP
2001324606 Nov 2001 JP
2001343514 Dec 2001 JP
2001345458 Dec 2001 JP
2002014344 Jan 2002 JP
2002040339 Feb 2002 JP
2002042525 Feb 2002 JP
2002062505 Feb 2002 JP
2002071965 Mar 2002 JP
2002072284 Mar 2002 JP
2002090549 Mar 2002 JP
2002 108227 Apr 2002 JP
2002098838 Apr 2002 JP
2002124113 Apr 2002 JP
2002131551 May 2002 JP
2002139630 May 2002 JP
2002 174780 Jun 2002 JP
2002208307 Jul 2002 JP
2002523798 Jul 2002 JP
2002229023 Aug 2002 JP
2002236290 Aug 2002 JP
2002245835 Aug 2002 JP
2002287047 Oct 2002 JP
2002297044 Oct 2002 JP
2002328313 Nov 2002 JP
2002365438 Dec 2002 JP
2003007114 Jan 2003 JP
2003021821 Jan 2003 JP
2003057652 Feb 2003 JP
2003057653 Feb 2003 JP
2003066236 Mar 2003 JP
2003066451 Mar 2003 JP
2003131215 May 2003 JP
2003140118 May 2003 JP
2003147351 May 2003 JP
2003149642 May 2003 JP
2003149643 May 2003 JP
2003173713 Jun 2003 JP
2003177336 Jun 2003 JP
2003177405 Jun 2003 JP
2003186008 Jul 2003 JP
2003188959 Jul 2003 JP
2003195201 Jul 2003 JP
2003202568 Jul 2003 JP
2003222861 Aug 2003 JP
2003248181 Sep 2003 JP
2003255140 Sep 2003 JP
2003255344 Sep 2003 JP
2003315560 Nov 2003 JP
2003315694 Nov 2003 JP
2003 344881 Dec 2003 JP
2004012918 Jan 2004 JP
2004062099 Feb 2004 JP
2004070189 Mar 2004 JP
2004086221 Mar 2004 JP
2004087409 Mar 2004 JP
2004111278 Apr 2004 JP
2004126196 Apr 2004 JP
2004510185 Apr 2004 JP
2004145109 May 2004 JP
2004199006 Jul 2004 JP
2004212673 Jul 2004 JP
2004219843 Aug 2004 JP
2005031219 Feb 2005 JP
2005135899 May 2005 JP
2005308871 Nov 2005 JP
2005316178 Nov 2005 JP
2006039056 Feb 2006 JP
2006065360 Mar 2006 JP
2006 099061 Apr 2006 JP
2006 099113 Apr 2006 JP
2006107993 Apr 2006 JP
2006 133743 May 2006 JP
2006120571 May 2006 JP
2007027150 Feb 2007 JP
2007218540 Aug 2007 JP
2008514992 May 2008 JP
2009300966 Dec 2009 JP
2010 156979 Jul 2010 JP
20020010322 Feb 2002 KR
100329769 Mar 2002 KR
20030029769 Apr 2003 KR
102003002964 Apr 2003 KR
20030081662 Oct 2003 KR
20040016570 Feb 2004 KR
412646 Nov 2000 TW
552720 Sep 2003 TW
556009 Oct 2003 TW
567388 Dec 2003 TW
579368 Mar 2004 TW
200500717 Jan 2005 TW
200512518 Apr 2005 TW
WO-9406871 Mar 1994 WO
WO-9501584 Jan 1995 WO
WO-9514256 May 1995 WO
WO-9515582 Jun 1995 WO
WO-9608833 Mar 1996 WO
WO-9701240 Jan 1997 WO
WO-9716756 May 1997 WO
WO-9744707 Nov 1997 WO
WO-9746908 Dec 1997 WO
WO 9819201 May 1998 WO
WO-9832047 Jul 1998 WO
WO-9835182 Aug 1998 WO
WO-9852094 Nov 1998 WO
WO-9904296 Jan 1999 WO
WO-9963394 Dec 1999 WO
WO-9967678 Dec 1999 WO
WO-9967680 Dec 1999 WO
WO-0011502 Mar 2000 WO
WO 0050807 Aug 2000 WO
WO-0157434 Aug 2001 WO
WO 0184229 Nov 2001 WO
WO-0181994 Nov 2001 WO
WO-0184228 Nov 2001 WO
WO-0190637 Nov 2001 WO
WO-0206858 Jan 2002 WO
WO-0224570 Mar 2002 WO
WO-02071132 Sep 2002 WO
WO-02097324 Dec 2002 WO
WO 03007049 Jan 2003 WO
WO 03027569 Apr 2003 WO
WO-03032058 Apr 2003 WO
WO-03038509 May 2003 WO
WO 03062912 Jul 2003 WO
WO-03075207 Sep 2003 WO
WO-03105198 Dec 2003 WO
WO-2004003643 Jan 2004 WO
WO 2004015489 Feb 2004 WO
WO-2004012004 Feb 2004 WO
WO-2004027514 Apr 2004 WO
WO-2004036270 Apr 2004 WO
WO-2004036294 Apr 2004 WO
WO-2004068460 Aug 2004 WO
WO-2004088372 Oct 2004 WO
WO-2004114418 Dec 2004 WO
WO-2005011012 Feb 2005 WO
WO-2005088367 Sep 2005 WO
WO 2005111669 Nov 2005 WO
WO-2006008702 Jan 2006 WO
WO-2006026743 Mar 2006 WO
WO 2006036451 Apr 2006 WO
WO-2006036440 Apr 2006 WO
WO-2006036496 Apr 2006 WO
WO-2006036519 Apr 2006 WO
WO-2006137337 Dec 2006 WO
WO 2007053308 May 2007 WO
WO-2007073203 Jun 2007 WO
WO-2007094558 Aug 2007 WO
WO 2008045207 Apr 2008 WO
WO-2008045311 Apr 2008 WO
WO-2008045363 Apr 2008 WO
WO-2008045364 Apr 2008 WO
WO-2008045462 Apr 2008 WO
WO-2008045463 Apr 2008 WO
WO-2008145096 Dec 2008 WO
WO-2009065069 May 2009 WO
WO-2012043396 Apr 2012 WO
Non-Patent Literature Citations (79)
Entry
International Search Report and Written Opinion for PCT/US2007/020736 dated Jul. 14, 2008.
International Preliminary Report on Patentability in International Patent Application No. PCT/US2007/020736 (International Publication No. WO 2008/045207) dated Dec. 30, 2008.
Abileah A, “Optical Tiled AMLCD for Very Large Display Applications,” SID International Symposium Digest of Papers, Boston, 1992, 945-949.
“ABS 407 Visible Narrow Band Absorber,” downloaded from http://www.exciton.com/pdfs/ABS407.pdf on Feb. 8, 2011, in 1 page.
Akasaka Y., “Three-Dimensional IC Trends,” Proceedings of IEEE, 1986, vol. 74 (12), pp. 1703-1714.
Aratani K, et al., “Process and Design Considerations for Surface Micromachined Beams for a Tuneable Interferometer Array in Silicon,” Proc. IEEE Microelectromechanical workshop fort Lauderdale FL, 1993, 230-235.
Aratani K. et al., “Surface Micromachined Tuneable Interferometer Array,” Sensors and Actuators A, Elsevier Sequoia S.A., Lausanne, CH, A, 1993, 43(1/3), 17-23.
Austrian Search Report for U.S. Appl. No. 11/036,965 dated Jul. 25, 2005 (Publication No. 2005/0179977).
Austrian Search Report for U.S. Appl. No. 11/040,824 dated Jul. 14, 2005 (Publication No. 2006/077522).
Austrian Search Report for U.S. Appl. No. 11/052,004 dated Jul. 1, 2005 (Publication No. 2006/077509).
Austrian Search Report for U.S. Appl. No. 11/057,392 dated May 12, 2005 (Publication No. 2006/077510).
Austrian Search Report for U.S. Appl. No. 11/064,143 dated Aug. 12, 2005.
Austrian Search Report for U.S. Appl. No. 11/051,258 dated May 13, 2005.
Austrian Search Report for U.S. Appl. No. 11/077,974 dated Jul. 14, 2005.
Austrian Search Report in U.S. Appl. No. 11/041,020 dated May 9, 2005.
Billard C, “Tunable Capacitor,” 5th Annual Review of LETI, 2003, p. 7.
Brosnihan, et al., “Optical iMEMS—A Fabrication Process for MEMS Optical Switches With Integrated On-Chip Electronics,” 12th International Conference on Transducers, Solid-State Sensors, Actuators and Microsystems, 2003, vol. 2, pp. 1638-1642.
Cacharelis, et al., “A Reflective-Mode PDLC Light Valve Display Technology,” Proceedings of European Solid State Device Research Conference (ESSDERC), 1997, pp. 596-599.
Chemical Properties Handbook, McGraw-Hill, 1999, Refractive Index, Dipole Moment and Radius of Gyration; Inorganic Compounds, No. 151: O2Si, in 1 page.
Conner, “Hybrid Color Display using Optical Interference Filter Array,” SID Digest, 1993, 577-580.
U.S. Appl. No. 13/494,897, filed on Jun. 12, 2012.
U.S. Appl. No. 13/494,898, filed on Jun. 12, 2012.
Demiryont, et al., “Innovative Transparent Electrode for Flexible Displays,” Defense, Security, Cockpit and Future Display II, Proc. Of SPIE, Apr. 2006, vol. 6225, pp. 622519-1 to 622519-9.
Dewitt S, “Integrating Touch Screens and Optical Films When Where and How,” 3M Touch Systems Society for Information Display, Americas Display Engineering & Applications Conference, Oct. 24-27, 2005, Portland, Oregon U.S.A, pp. 219-221.
Dokmeci, et al., “Two-Axis Single-Crytal Silicon Micromirror Arrays,” Journal of Microelectromechanical Systems, Dec. 2004, 13(6), 1006-1017.
Fan, et al., “Channel Drop Filters in Photonic Crystals,” Optics Express, 1998, vol. 3(1), pp. 4-11.
Feenstra, et al., “Electrowetting displays,” Liquavista BV, Jan. 2006, 16 pp.
Giles, et al., “A Silicon Mems Optical Switch Attenuator and its Use in Lightwave Subsystems,” IEEE Journal of Selected Topics in Quantum Electronics, 1999, 5 (1), 18-25.
“Glass Polarizing and Interference Filters,” American Institute of Physics Handbook, 1982, pp. 6-172 to 6-178.
Gokturk, et al., “A Time-Of-Flight Depth Sensor—System Description, Issues and Solutions,” 2004 Conference on Computer Vision and Pattern Recognition workshop (CVPRW'04), 2004, 3, 35-42.
Goossen, et al., “Silicon Modulator Based On Mechnically-Active Anti-Reflection Layer With 1Mbit/Sec Capability for Fiber-In-The-Loop Applications,” IEEE Photonics Technology Letters, 1994, 1119-1121.
Goossen K.W. et al., “Possible Display Applications of the Silicon Mechanical Antireflection Switch,” Society for Information Display, 1994, in 4 pages.
Goossen K.W., “MEMS-Based Variable Optical Interference Devices,” IEEE/Lens International Conference on Optical Mems, Conference Digest, Piscataway, NJ, USA, IEEE Aug. 21, 2000, pp. 17-18.
Gosch, “West Germany Grabs the Lead in X-Ray Lithography,” Electronics, 1987, 78-80.
Hohlfeld, et al., “Micro-Machined Tunable Optical Filters With Optimized Band-Pass Spectrum,” 12th International Conference on Transducers, Solid-State Sensors, Actuators and Microsystems, 2003, vol. 2, 1494-1497.
Howard, et al., “Nanometer-Scale Fabrication Techniques,” VLSI Electronics: Microstructure Science, 1982, vol. 5, 145-153, 166-173.
Huang, et al., “Multidirectional Asymmetrical Microlens-Array Light Control Films for High Performance Reflective Liquid Crystal Displays,” SID Digest, 2002, pp. 870-873.
Imenes, et al., “Spectral Beam Splitting Technology for Increased Conversion Efficiency in Solar Concentrating Systems a Review,” Solar Energy Materials, Elsevier Science, Publishers B.V.Amsterdam, NL, Oct. 1, 2004, vol. 84, pp. 19-69, XP002474546.
Jackson, “Classical Electrodynamics,” John Wiley & Sons Inc, 1962, pp. 568-573.
Jerman, et al., “A Miniature Fabry-Perot Interferometer Fabricated Using Silicon Micromachining Techniques,” IEEE Electron Devices Society, 1988, in 3 pages.
Jerman et al., “A Miniature Fabry-Perot Interferometer with a Corrugated Silicon Diaphragm Support”, IEEE Electron Devices Society, pp. 140-144, 1990.
Jerman, et al., “Miniature Fabry-Perot Interferometers Micromachined in Silicon for use in Optical Fiber WDM Systems,” Transducers, Proceedings on the International Conference on Solid State Sensors and Actuators, 1991, vol. ConF. 6, San Francisco, 372-375.
Johnson, “Optical Scanners,” Microwave Scanning Antennas, 1964, vol. 1(2), 251-261.
Kowarz, et al., “Conformal Grating Electromechanical System (Gems) for High-Speed Digital Light Modulation,” Proceedings of the IEEE 15th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2002, pp. 568-573.
Lau, “The Characterization of Silicon Dioxide and Silicon Nitride Thin Films, in Infrared Characterization for Microelectronics,” World Scientific Publishing Co. Pte. Ltd., New Jersey, 1999, 5, pp. 55-71.
Lezec, “Submicrometer Dimple Array Based Interference Color Field Displays and Sensors,” Nano Letters, 2006, 7(2), 329-333.
Light Over Matter Circle No. 36, Jun. 1993, in 1 page.
Lin, et al., “Development of UV Stable LED Encapsulants,” Microsystems, Packaging, Assembly and Circuits Technology Conference, Impact 2009, 4th, 565-567.
Little, et al., “Vertically Coupled Glass Microring Resonator Channel Dropping Filters,” IEEE Photonics Technology Letters, 1999, 11(2), 215-217.
Londergan, et al., “Advanced processes for MEMS-based displays,” Proceedings of the Asia Display, 2007, SID, 1, 107-112.
Longhurst R.S., “Geometrical and Physical Optics”, Chapter IX: Multiple Beam Interferometry, pp. 153-157, 1963.
Maeda, et al., “A Study of A High Quality Front Lighting System for Reflective Full-Color Liquid Crystal Displays,” Record of Electrical and Communication, Engineering Conversazione Tohoku University, Sep. 2009, v 78(1), 415-416, ISSN: 0385-7719.
Magel G.A., “Integrated Optic Devices using Micromachined Metal Membranes,” SPIE, 1996, vol. 2686, 54-63.
Maier et al., 1996 1 .3′ ActiveMatrix liquid crystal spatial light modulator with 508 dpi resolution, SPIE vol. 2754, pp. 171-179.
Mehregany, et al., “MEMS Applications in Optical Systems,” IEEE/LEOS 1996 Summer Topical Meetings, 1996, 75-76.
Miles M., et al., “Digital Paper (TM) for reflective displays”, Journal of the Society for Information Display, Society for Information Display, vol. 11 (1), pp. 209-215, 2003, XP002358929, ISSN: 1071-0922.
Miles M.W., “A MEMS Based Interferometric Modulator (IMOD) for Display Applications” Proceedings of Sensors Expo, Oct. 21, 1997 © 1997 Helmer's Publishing, Inc., pp. 281-284 XP009058455.
Miles M.W., “A New Reflective FPD Technology using Interferometric Modulation,” Journal of the SID, 1997, vol. 5(4), 379-382.
Miles M.W., et al., “Interferometric Modulation MOEMS as an enabling technology for high-performance reflective displays,” Proceedings of the SPIE, 2003, 4985, 131-139.
Nakagawa et al., “Wide-Field -of-View Narrow-Band Spectral Filters Based on Photonic Crystal Nanocavities”, Optical Society of America, Optics Letters, vol. 27, No. 3, pp. 191-193, Feb. 1, 2002.
Neal T.D. et al., “Surface Plasmon Enhanced Emission From Dye Doped Polymer Layers,” Optics Express Opt. Soc. America, USA, Jul. 11, 2005,vol. 13(14), 5522-5527.
Newsbreaks, “Quantum-trench devices might operated at terahertz frequencies”, Laser Focus World, May 1993, in 1 page.
Nieminen, et al., “Design of a Temperature-Stable RF MEMS Capacitor,” Institute of Electrical and Electronics Engineers (IEEE) Journal of Microelectromechanical Systems, 2004, vol. 13(5), 705-714.
Obi et al., “Fabrication of Optical Mems in Sol/Gel Materials,” IEEE/Leos International Conference on Optical Mems, 2002, Conference Digest, pp. 39-40.
Oliner, “Radiating Elements and Mutual Coupling,” Microwave Scanning Antennas, 1966, vol. 2, 131-157 and pp. 190-194.
Pape, et al., “Characteristics of the Deformable Mirror Device for Optical Information Processing,” Optical Engineering, Nov.-Dec. 1983, 22(6), 676-681.
Petschick, et.al., “Fabry-Perot-Interferometer,” available at http://pl.physik.tuberlin.de/groups/pg279/protokolless02/04—fpi.pdf, pp. 50-60, May 14, 2002.
Qualcomm MEMS Technologies, Inc., May 2008, Interferometric Modulator (IMOD), Technology Overview, White Paper, 14 pp.
Raley, et al., “A Fabry-Perot Microinterferometer for Visible Wavelengths,” IEEE Solid-State Sensor and Actuator Workshop, 1992, 170-173.
Sperger, et al., “High Performance Patterned All-Dielectric Interference Colour Filter for Display Applications,” SID Digest, 1994, 81-83.
Stone J.M., “Radiation and Optics, an Introduction to the Classic Theory,” 1963, McGraw-Hill, pp. 340-343.
Tai C. Y., et al., “A Transparent Front Lighting System for Reflective-type Displays,” SID International Symposium Digest of Technical Papers, Orlando, SID International Symposium Digest of Technical Papers, Santa Ana, SID, vol. 26, 375-378, 1995, (XP000657155).
Taii Y. et al., “A Transparent Sheet Display by Plastic MEMS,” Journal of the SID, 2006, vol. 14 (8), 735-741.
Tolansky, “Multiple-Beam Interference in Multiple-Beam Interferometry of Surfaces and Films,” Chap II Oxford at the Clarendon Press, 1948, pp. 8-11.
Walker, et al., “Electron-Beam-Tunable Interference Filter Spatial Light Modulator,” Optics Letters, 1988, vol. 13(5), 345-347.
Wang, et al., “Design and Fabrication of a Novel Two-Dimension Mems-Based Tunable Capacitor,” IEEE International Conference on Communications, Circuits and Systems and West Sino Expositions, 2002, vol. 2, 1766-1769.
Winton et al., “A novel way to capture solar energy,” Chemical Week, pp. 17-18 (May 15, 1985).
Wu, et al., “Design of a Reflective Color LCD using Optical Interference Reflectors,” Asia Display, Changchun Institute of Physics, 1995, 929-931.
Zhou et al., “Waveguide Panel Display Using Electromechanism Spatial Modulators,” SID Digest, 1998, vol. XXIX, in 4 pages.
Related Publications (1)
Number Date Country
20100141557 A1 Jun 2010 US
Provisional Applications (1)
Number Date Country
60850025 Oct 2006 US