Number | Name | Date | Kind |
---|---|---|---|
4590589 | Gerzberg | May 1986 | |
4662063 | Collins et al. | May 1987 | |
4845045 | Shacham et al. | Jul 1989 | |
5095362 | Roesner | Mar 1992 |
Number | Date | Country |
---|---|---|
57-143857 | Sep 1982 | JPX |
4-323818 | Nov 1992 | JPX |
5-259174 | Oct 1993 | JPX |
Entry |
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Wolf et al; "Silicon Processing For the VLSI Era"; vol 1, pp. 303-308, 1986. |