BRIEF DESCRIPTION OF THE DRAWINGS
The above and other aspects, features and advantages of the present invention will be more apparent from the following detailed description taken with reference to the accompanying drawings, in which:
FIG. 1 is a view illustrating a downward type MEMS switch according to an exemplary embodiment of the present invention;
FIG. 2 is a perspective view of a part of the downward type MEMS switch illustrated in FIG. 1, from which a supporting layer is removed;
FIG. 3 is a cross-sectional view of a downward type MEMS switch taken on line A-A′ of FIG. 1, from which a supporting layer is removed;
FIG. 4 is a cross-sectional view of a downward type MEMS switch taken on line B-B′ of FIG. 1; and
FIGS. 5A through 5F are views for explaining a fabrication method of a downward type MEMS switch illustrated in FIG. 1;
FIG. 6A is a view illustrating a configurable antenna employing a downward type MEMS switch illustrated in FIG. 1 according to a first exemplary embodiment of the present invention; and
FIG. 6B is a view illustrating a configurable antenna employing a downward type MEMS switch illustrated in FIG. 2 according to a second embodiment of the present invention.