Number | Date | Country | Kind |
---|---|---|---|
3-100074 | May 1991 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3994793 | Harvilchuck et al. | Nov 1976 | |
4557796 | Druschke et al. | Dec 1985 | |
5100499 | Douglas | Mar 1992 |
Entry |
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Cuomo et al., "Reactive Ion Etching of Copper"; IBM Tech. Disclosure Bulletin, vol. 25, No. 12, May 1983; pp. 6394. |