The present invention relates to control of electric induction heating, melting and stirring of a material wherein zone heating or melting is selectively controlled and the material is non-electrically conductive in the solid state and electrically conductive in the non-solid state.
Batch electric induction heating and melting of an electrical conductive material can be accomplished in a crucible by surrounding the crucible with an induction coil. A batch of an electrically conductively material, such as metal ingots or scrap, is placed in the crucible. One or more induction coils surround the crucible. A suitable power supply provides ac current to the coils, thereby generating a magnetic field around the coils. The field is directed inward so that it magnetically couples with the material in the crucible, which induces eddy current in the material. Basically the magnetically coupled circuit is commonly described as a transformer circuit wherein the one or more induction coils represent the primary winding, and the magnetically coupled material in the crucible represents a shorted secondary winding.
Similarly when the primary and secondary coil sections surround a susceptor or an electrically conductive material, such as a billet or metal slab, the arrangement in
There is a class of materials, such as silicon, that are substantially non-electrically conductive in the “cold” or solid (crystalline) state and electrically conductive in the non-solid (semi-solid, liquid or molten) state. For example the resistivity of crystalline silicon is over 100,000 μohm·cm below its nominal melting temperature of 1,410° C., and typically 75-80 μohm·cm in the molten state. This class of materials is referred to herein as transition materials. Typically a transition material is heated to the molten state to reshape the material or separate impurities from the material. Electric induction power directly heats an electrically conductive material by inducing eddy currents in the material as described above and in
There are two general approaches to heating and melting a transition material with electric induction power. In the first general approach, “cold” or solid and substantially non-electrically conductive transition material, for example, in the form of pellets, are placed in a non-electrically conductive refractory crucible surrounded by an induction coil. Since flux from the magnetic field generated by the flow of ac current in the coil can not inductively heat the solid transition material, one or more discrete susceptors can either be permanently installed in areas around the non-electrically conductive crucible, or temporally brought close to, or in contact with, the solid transition material in the non-electrically conductive crucible. The magnetic flux will electromagnetically heat (suscept) the discrete susceptors due to their high susceptance, and, in turn, the susceptors will transfer heat by conduction to the solid transition material in the non-electrically conductive crucible. Permanently installed discrete susceptors are disadvantageous in that after the solid transition material begins to melt and becomes electrically conductive, magnetic flux continues to be at least partially coupled with the permanently installed discrete susceptors, which decreases the efficiency of the heating and melting process. Further depending upon where the one or more discrete susceptors are permanently located, relative to other components of the crucible system, dissipation of electromagnetically generated heat in the discrete susceptor can degrade adjacent components of the crucible system. For example an electromagnetically heated discrete susceptor located adjacent to a crucible's interior liner material that prevents contamination of transition material in the crucible with refractory material may overheat and degrade the liner while heat is transferred by conduction from the susceptor to the transition material in the crucible. Temporarily installed discrete susceptors are disadvantageous in that apparatus is required for moving the susceptors. The requirement for susceptors can be eliminated by depositing transition material in the solid state into a refractory crucible that is at least partially filled with molten transition material. The solid material must be quickly dissolved in the molten bath while electromagnetic induction current suscepts to the molten material and provides necessary heat for melting.
In the second general approach, the solid transition material can be placed in a susceptor vessel that is surrounded by an induction coil. The flow of ac current in the induction coil will generate a magnetic field that electromagnetically couples with the susceptor vessel to heat the vessel. The heated susceptor vessel will heat transition material placed in the vessel by conduction regardless of the state of electrical conductivity of the material. The degree to which the magnetic flux from the field will couple with the susceptor vessel and electrically conductive transition material in the susceptor vessel is fundamentally dependent upon the electrical frequency of ac current supplied to the induction coil and the wall thickness of the susceptor vessel. The standard depth of penetration (Δ, in meters) of ac current into a material as a function of frequency is defined by the equation:
where ρ is the resistivity of the material comprising the susceptor vessel in ohm·meters;
f is the frequency of the ac current supplied to the induction coil in Hertz; and
μ is the magnetic permeability (dimensionless relative value) of the material comprising the susceptor vessel.
If the standard depth of penetration is less than the thickness of the susceptor vessel, then most input electrical energy is used to electromagnetically heat the susceptor vessel, which then transfers heat to the transition material in the vessel by conduction. Conversely if the standard depth of penetration is substantially greater than the thickness of the susceptor vessel, then most input electrical energy is used to inductively heat transition material in the vessel after it transitions to the non-solid state.
Therefore there is the need for selectively inducing heat to a susceptor vessel and a transition material contained in the vessel when the inductive heating and melting process utilizes multiple coil sections.
It is one object of the present invention to provide apparatus for, and method of, batch heating and melting of a transition material with electric induction power in a susceptor vessel surrounded by multiple coil sections without the disadvantages of a refractory crucible in combination with discrete susceptors located either permanently or temporarily around, or in, the refractory crucible while optimizing the transfer of induced power to transition material in the susceptor vessel when the transition material is in the electrically conductive state.
It is another object of the present invention to electromagnetically induce a stirring pattern in the transition material in the susceptor vessel when substantially all transition material is in the electrically conductive molten state to achieve rapid dissolution of any solid transition material that may be added to the molten transition material in the susceptor vessel.
In one aspect the present invention is apparatus for, and method of, heating and melting a transition material that is substantially non-electrically conductive in the solid (cold) state and electrically conductive in the non-solid (warm or hot) state. For example, silicon is a transition material that is substantially non-electrically conductive until it reaches a nominal melting temperature of 1,410° C. The term “solid” as used herein means any physical form of the transition material, including, for example, a solid cylinder, pellets or powder of the transition material.
The transition material can be placed in a susceptor vessel in the solid state. A primary or active induction coil surrounds a lower section of the susceptor vessel and is connected to an ac power supply. A secondary or passive induction coil surrounds a section of the susceptor vessel above the lower section and is connected to a tuning capacitor to form a passive circuit that is at, or near, resonance when the transition material in the region of the susceptor vessel surrounded by the passive induction coil is in the molten (hot) state and the output of the ac power supply is set at a hot state operating frequency so that current flowing in the active induction coil generates a magnetic field that induces significant current flow in the passive circuit when the load circuit is at, or near, resonance as further described below.
Power supply frequency control is provided so that initially, in the cold state, when substantially all of the transition material in the susceptor vessel is non-electrically conductive, the output frequency is set to a cold state operating frequency that limits inductive heating to the lower section of the susceptor vessel and, optionally, for a small distance into the vessel to inductively heat transition material adjacent to the inner wall of the vessel as that transition material is heated by conduction from the inductively heated wall of the susceptor vessel.
As more of the transition material in the susceptor vessel melts and becomes electrically conductive, the frequency controller reduces the output frequency of the power supply to a warm state operating frequency to provide increased electromagnetic coupling with the melting transition material in the vessel until the power supply's load resistance begins to increase due to effective magnetic coupling between the active and passive induction coils when the output frequency of the power supply increases to the hot state operating frequency, which is the resonant, or near resonant, frequency of the passive circuit.
Other aspects of the invention are set forth in this specification and the appended claims.
The foregoing brief summary, as well as the following detailed description of the invention, is better understood when read in conjunction with the appended drawings. For the purpose of illustrating the invention, there is shown in the drawings exemplary forms of the invention that are presently preferred; however, the invention is not limited to the specific arrangements and instrumentalities disclosed in the following appended drawings:
Referring now to the drawings, wherein like numerals indicate like elements, there is shown in
U.S. Pat. No. 6,542,535, the entirety of which is incorporated herein by reference, discloses an induction coil comprising an active coil that is connected to the output of an ac power supply, and a passive coil connected with a capacitor to form a closed circuit that is not connected to the power supply. The active and passive coils surround a crucible in which an electrically conductive material is placed. The active and passive coils are arranged so that the active magnetic field generated by current flow in the active coil, which current is supplied from the power supply, magnetically couples with the passive coil, as well as with the material in the crucible.
The non-limiting example load circuit comprises active induction coil 22, which is connected to the inverter output of the power supply via load matching (or tank) capacitor CTANK, and passive induction coil 24, which is connected in parallel with tuning capacitor CTUNE to form a passive load circuit. Current supplied from the power supply generates a magnetic field around the active induction coil. This field magnetically couples with electrically conductive material 90 in crucible 10 and with the passive induction coil, which induces a current in the passive load circuit. The induced current flowing in the passive induction coil generates a second magnetic field that couples with the electrically conductive material in the crucible. Voltage sensing means 30 and 32 are provided to sense the instantaneous voltage across the active coil and passive coils respectively; and control lines 30a and 32a transmit the two sensed voltages to control system 26. Current sensing means 34 and 36 are provided to sense the instantaneous current through the active coil and passive coil, respectively; and control lines 34a and 36a transmit the two sensed currents to control system 26. Control system 26 includes a processor to calculate the instantaneous power in the active load circuit and the passive load circuit from the inputted voltages and currents. The calculated values of power can be compared by the processor with stored data for a desired batch melting process power profile to determine whether the calculated values of power division between the active and passive load circuits are different from the desired batch melting process power profile. If there is a difference, control system 26 will output gate turn on and turn off signals to the switching devices in the inverter via control line 38 so that the output frequency of the inverter is adjusted to achieve the desired power division between the active and passive load circuits.
By selecting tank capacitor CTANK, tuning capacitor CTUNE, and active and passive induction coils of appropriate values, the active load circuit will have a resonant frequency that is different from that of the passive load circuit.
The stored data for a desired batch melting process for a particular circuit and crucible arrangement may be determined from the physical and electrical characteristics of the particular arrangement. Power and current characteristics versus frequency for the active and passive load circuits in a particular arrangement may also be determined from the physical and electrical characteristics of a particular arrangement.
In alternative examples of the invention different parameters and methods may be used to measure power in the active and passive load circuits as known in the art. The processor in control system 26 may be a microprocessor or any other suitable processing device. In other examples of the invention different numbers of active and passive induction coils may be used; the coils may also be configured differently around the crucible. For example active and passive coils may be overlapped, interspaced or counter-wound to each other to achieve a controlled application of induced power to selected regions of the electrically conductive material.
By way of example and not limitation, the electric induction melt control system of the present invention may be practiced by implementing the simplified control algorithm illustrated in the flow diagram presented in
Routine 206 calculates total load power, Ptotal, from the following equation:
where T is the inverse of the output frequency of the inverter.
Routine 208 calculates passive load power, Pp, from the following equation:
Routine 210 calculates active load circuit power, Pa, by subtracting passive load power, Pp, from total load power, Ptotal.
Routine 212 calculates RMS active load circuit current, IaRMS, from the following equation:
Similarly routine 214 calculates RMS passive load circuit current, IpRMS, from the following equation:
Active load circuit resistance, Ra, is calculated by dividing active load circuit power, Pa, by the square of the RMS active load circuit current, (IaRMS)2, in routine 216.
Similarly in routine 218 passive load circuit resistance, Rp, is calculated by dividing passive load circuit power, Pp, by the square of the RMS passive load circuit current, (IpRMS)2.
Routine 220 determines if active load circuit resistance, Ra, is approximately equal to passive load circuit resistance, Rp. A preset tolerance band of resistance values can be included in routine 220 to establish the approximation band. If Ra is approximately equal to Rp, routine 222 checks to see if these two values are approximately equal to the total load circuit resistance in the cold state, Rcold, when substantially all of the material in the crucible is in the solid state. For a given load circuit and crucible configuration, Rcold, may be determined by one skilled in the art by conducting preliminary tests and using the test value in routine 222. Further multiple values of Rcold may be determined based upon the volume and type of the material in the crucible, with means for an operator to select the appropriate value for a particular batch melting process. If the approximately equal values of Ra and Rp are not approximately equal to the value of Rcold, routine 224 checks to see if these two values are approximately equal to the total load circuit resistance in the hot state, Rhot, when substantially all of the material in the crucible is in the molten state. For a given load circuit and crucible configuration, Rhot, may be determined by one skilled in the art by conducting preliminary tests and using the test value in routine 224. Further multiple values of Rhot may be determined based upon the volume and type of the material in the crucible, with means for an operator to select the appropriate value for a particular batch melting process. If the approximately equal values of Ra and Rp are not approximately equal to the value of Rhot, error routine 226 is executed to evaluate why Ra and Rp are approximately equal to each other, but not approximately equal to Rcold or Rhot.
If routine 222 or routine 224 determines that the approximately equal values of Ra and Rp are approximately equal to Rcold or Rhot, as illustrated in
If routine 220 in
If routine 234 in
Generally, but not by way of limitation, Ptotal will remain constant throughout the batch melting process. Values in power vs. frequency lookup tables 230 and 240 can be predetermined by one skilled in the art by conducting preliminary tests and using the test values in lookup tables 230 and 240. Adaptive controls means can be used in some examples of the invention so that values in power vs. frequency lookup tables 230 and 240 are refined during sequential batch melting processes, based upon melt performance maximization routines, for use in a subsequent batch melting process.
Optionally stirring of the melt in the hot state may be achieved by selecting an inverter output frequency at which the phase shift between the active and passive coil currents is approximately 90 electrical degrees. This mode of operation forces melt circulation from the bottom of the crucible to the top, as illustrated in
The term “electrically conductive workpiece” includes a susceptor, which can be a conductive susceptor formed, for example, from a graphite composition, which is inductively heated. The induced heated is then transferred by conduction or radiation to a workpiece moving in the vicinity of the susceptor, or a process being performed in the vicinity of the susceptor. For example a workpiece may be moved through the interior of a susceptor so that it absorbs heat radiated or conducted from the inductively heated susceptor. In this case the workpiece may be a non-electrically conductive material, such as a plastic. Alternatively a process may be performed within the susceptor, for example a gas flow through the susceptor may absorb the heat radiated or conducted from the inductively heated susceptor. Heat absorption by the workpiece or process along the length of the susceptor may be non-uniform and the induction control system of the present invention may be used to direct induced power to selected regions of the susceptor as required to account for the non-uniformity. Generally whether the process is the heating of a workpiece moving near a susceptor, or other heat absorbing process is performed neared the susceptor, all these processes are referred to as “heat absorbing processes.”
Zone temperature data for the workpiece may be inputted to control system 26 as the heating process is performed. For example, for a susceptor, temperature sensors, such as thermocouples, may be located in each zone of the susceptor to provide zone temperature signals to the control system. The control system can process the received temperature data and regulate output frequency of the power supply as required for a particular process. In some examples of the invention output power level of the power supply may be kept constant; in other examples of the invention, power supply output power level (or voltage) can be changed by suitable means, such as pulse width modulation, along with the frequency. For example if the overall temperature of the electrically conductive material is too low, the output power level from the power supply may be increased by increasing the voltage pulse width.
In other examples of the invention, the susceptor may be a susceptor vessel that is surrounded by at least one active (primary) coil and at least one passive (secondary) coil, and is used to heat and melt a transition material that is substantially non-electrically conductive in the solid (cold) state and electrically conductive in the non-solid (warm or hot) state. For example heating and melting system 40 in
AC power is supplied to lower active induction coil 44a from a variable frequency output power supply. One suitable supply is power supply 12 as illustrated in
Upper induction coil 44b forms a passive coil circuit in combination with resonant tuning capacitor C′TUNE whereby current flow through active induction coil 44a in the active coil circuit generates an ac magnetic field that effectively couples with passive induction coil 44b in the hot operating state as further described below. Magnetic coupling with induction coil 44b generates a substantial current flow in the passive coil circuit when the operating frequency of the output of the power supply is at or near resonance, which occurs when the inverter's output is the hot state operating frequency as further described below.
In
as the cold state operating frequency fcold that satisfies the above limiting condition.
Primary magnetic flux (represented by flux lines FL44a in
During the initial cold state heating stage, the equivalent load circuit impedance reflected at the output of the power supply comprises inductance L44a of coil 44a in the active coil circuit and the resistance, Rsv, of the susceptor vessel as illustrated in
where Rsv is the resistance of the susceptor vessel in ohms;
Pcold is the magnitude of output power (in watts) of the inverter at the cold state operating frequency; and
Icold is the magnitude of current (in amperes) flowing through induction coil 44a at the cold state operating frequency when the transition material is substantially in the solid non-electrically conductive (cold) state.
If a liner is used, then the induced power density in the liner material should be limited to the thermal withstand density of the liner material. For example if a graphite susceptor vessel and silica liner is used, the induced power density in the susceptor vessel should be limited to approximately no greater than 5 watts per square centimeter since silica will begin to deform if subjected to a higher power density.
As the heating and melting process proceeds from the cold to warm state, the output frequency of the inverter is lowered from fcold to an intermediate frequency fwarm, which results in increasing flux coupling with the increasing volume of electrically conductive molten transition material, and decreasing flux coupling with the susceptor vessel. For example if the transition material in the susceptor vessel is silicon, when the silicon reaches a nominal melting temperature of 1,410° C., the molten silicon will become susceptible to a portion of the electromagnetic field penetrating into the susceptor vessel. As the inverter's output frequency is decreased, induced power to the susceptor vessel decreases while induced power to the melting transition material increases through the warm state until there is effective coupling between the active and passive coil circuits as further described below.
In this warm intermediate state, when a batch of transition material in the susceptor vessel is partially molten, for a given magnitude of inverter output power, the inverter's output current will increase since the high resistance of the susceptor vessel is being shunted with the lower resistance Rtm(warm) of the partially molten bath as shown in
where Pwarm is magnitude of output power (in watts) of the inverter at the warm state operating frequency; and
Iwarm is the magnitude of current (in amperes) flowing through induction coil 44a at the warm state operating frequency when the transition material is in the partially molten (warm) state.
The resistance of the molten material, Rtm, at any point during the melting process can be calculated from the equation:
where the equivalent resistance, Req, of the susceptor vessel and the electrically conductive transition material in the susceptor vessel are calculated from equation (8) above.
The melting process is complete when substantially all transition material in the susceptor vessel is in the molten electrically conductive (hot) state and the output frequency of the inverter is equal to the resonant, or near resonant, frequency fhot of the passive coil circuit comprising induction coil 44b and capacitor C′TUNE. The frequency fhot can be calculated from the following equation:
where L44b is the inductance (in Henries) of induction coil 44b; and
C′TUNE is the capacitance (in Farads) of resonant capacitor C′TUNE in the passive coil circuit.
Inductively coupling passive induction coil 44b with the magnetic field generated by the flow of current through induction coil 44a creates a magnetic field in the volume of electrically conductive transition material surrounded by induction coil 44b since the phase of the current flowing in passive induction coil 44b lags behind the phase of the current flowing in active induction coil 44a.
In the hot state, the current in the active induction coil generates a magnetic field that effectively couples with the passive induction coil since the passive coil circuit is operating at a near resonant (hot state) frequency. At the hot state operating frequency, the current in the passive induction coil resonates with the resonant capacitor. This increases the magnitude of current flow in the passive coil circuit, and with an approximately ninety degrees phase shift between current flow in the active and passive coils, a running electromagnetic wave is established in the molten batch of transition material in the susceptor vessel. As previously described above and shown in
The following table summarizes parameters in the cold, warm and hot states.
Further processing of molten transition material after the hot stage has been reached may include addition of solid transition material to the molten transition material in the susceptor vessel; solidification of the transition material in the susceptor vessel; or pouring of molten transition material from the susceptor, for example, by bottom pour, vessel tilt pour, pressure pour, or other types of material extraction processes and apparatus.
Monitored electrical parameters of the induction heating and melting system of the present invention can provide input to a control system for determining when changes in output frequency and power levels from the inverter are made. For example initial system resistance Req of the heating and melting system with substantially non-electrically conductive transition material in the susceptor vessel (cold state) is substantially equal to the relatively high resistance Rsv of the susceptor vessel. As the heating process proceeds as described above, system resistance Req begins to drop as the transition material becomes electrically conductive (warm state). When the control system senses that the drop in system resistance, the control system can output appropriate control signals to the inverter to reduce output frequency as the warm state progresses. During this stage of the process the equivalent resistance Req continues to decrease as more electromagnetic energy suscepts to the electrically conductive transition material until passive induction coil 44b effectively couples with the magnetic field generated by the flow of current in active induction coil 44a as graphically illustrated in
By way of example and not limitation, a control system for the heating and melting of a transition material in a susceptor vessel may be practice by implementing the simplified control algorithm illustrated in the flow diagram presented in
Subroutine 303 can be continuously executed to determine instantaneous inverter output power level, P, instantaneous rms load current, Irms, and resulting load resistance, R, from input measured inverter output voltage, vout, and current, Iout, as referenced in
Once frequency fcold and power level Pcold are set, subroutine 303 outputs calculated susceptor vessel resistance, Rsv. As the heating process proceeds, subroutine 303 repeatedly outputs updated calculated equivalent resistance, Req. Routine 305 is repeatedly executed to determine if the next outputted Req(next) is less than the previous outputted Req(previous), which indicates that the transition material is melting. When Req(next)<Req(previous) is true, routine 309 sets the inverter's output frequency, f, to fwarm and the inverter's output power level, P, to Pwarm for the warm stage of the heating and melting process. As described above, equivalent resistance, Req will continue to decrease during the warm stage until there is effective magnetic coupling between the active and passive induction coil circuit. Frequency fwarm and output power level Pwarm are selected as described above. Since equivalent resistance Req continuously decreases during the warm stage, fwarm and Pwarm may be continuously changed during the warm stage to enhance heating of the increasing volume of partially molten transition material in the susceptor vessel.
Subroutine 311 can be repeatedly executed to determine if equivalent resistance Req has begun to increase in value by comparing a previously calculated value of equivalent resistance Req(previous) with the next calculated value of equivalent resistance Req(next). When this state is true, subroutine 313 can be continuously executed to determine if the resonant maximum equivalent resistance Req (resonance) has been reached by testing for the equality of Req(previous) and Req(next). When that state is true, routine 315 sets the inverter's output frequency to fhot, at, or near, resonance, and the inverter's output power level Phot to stir and hold the entire molten volume of transition material at a selected temperature in the susceptor vessel until further processing (for example, addition of solid transition material to the vessel; solidification of transition material in the vessel; or extracting the transition material from the vessel with suitable apparatus, such as pouring apparatus) of the molten transition material is performed.
A graphite composition is one suitable, but non-limiting choice for susceptor vessel 42. In other examples of the inventions any suitable susceptor material, such as but not limited to, molybdenum, silicon carbide, stainless steel, and high temperature steel alloys, that is, a steel that has satisfactory mechanical properties under load at temperatures of up to about 540° C., may be used.
In other examples of the invention, the susceptor vessel may be a self-contained vacuum chamber, or a susceptor vessel contained within a vacuum chamber.
Active and passive coil configurations around the susceptor vessel can be varied in arrangement and quantities without deviating from the scope of the invention. For example the active coil may surround approximately the bottom quarter of the susceptor vessel and the passive coil may surround approximately a quarter of the susceptor vessel above the active coil.
It is noted that the foregoing examples have been provided merely for the purpose of explanation and are in no way to be construed as limiting of the present invention. While the invention has been described with reference to various embodiments, it is understood that the words which have been used herein are words of description and illustration, rather than words of limitations. Further, although the invention has been described herein with reference to particular means, materials and embodiments, the invention is not intended to be limited to the particulars disclosed herein; rather, the invention extends to all functionally equivalent structures, methods and uses, such as are within the scope of the appended claims. The examples of the invention include reference to specific electrical components. One skilled in the art may practice the invention by substituting components that are not necessarily of the same type but will create the desired conditions or accomplish the desired results of the invention. For example, single components may be substituted for multiple components or vice versa. Circuit elements without values indicated in the drawings can be selected in accordance with known circuit design procedures. Those skilled in the art, having the benefit of the teachings of this specification, may effect numerous modifications thereto and changes may be made without departing from the scope of the invention in its aspects.
This application is a continuation-in-part of U.S. application Ser. No. 11/297,010 filed Dec. 8, 2005, which claims the benefit of U.S. Provisional Application No. 60/634,353, filed Dec. 8, 2004, both of which are incorporated herein by reference in their entireties.
Number | Name | Date | Kind |
---|---|---|---|
1852215 | Northrup | Apr 1932 | A |
1943802 | Northrup | Jan 1934 | A |
2793242 | Beckius et al. | May 1957 | A |
3442622 | Monnier et al. | May 1969 | A |
3478156 | Segsworth | Nov 1969 | A |
4207293 | Scholl et al. | Jun 1980 | A |
4242553 | Berkman et al. | Dec 1980 | A |
4471488 | Reboux | Sep 1984 | A |
5260538 | Clary et al. | Nov 1993 | A |
6121592 | Fishman et al. | Sep 2000 | A |
6361597 | Takase et al. | Mar 2002 | B1 |
6542535 | Fishman et al. | Apr 2003 | B2 |
6696770 | Nadot et al. | Feb 2004 | B2 |
6798822 | Fishman et al. | Sep 2004 | B2 |
6992406 | Fishman et al. | Jan 2006 | B2 |
7110430 | Lazor | Sep 2006 | B2 |
7197061 | Fishman et al. | Mar 2007 | B1 |
20020053973 | Ward, Jr. | May 2002 | A1 |
20030035309 | Nadot et al. | Feb 2003 | A1 |
20040256383 | Fischer et al. | Dec 2004 | A1 |
20050259712 | Lazor | Nov 2005 | A1 |
20060050763 | Lazor et al. | Mar 2006 | A1 |
20060118549 | Fishman et al. | Jun 2006 | A1 |
20070009005 | Lazor | Jan 2007 | A1 |
Number | Date | Country |
---|---|---|
1800431 | Jan 1971 | DE |
713498 | Oct 1931 | FR |
371553 | Apr 1932 | GB |
02054831 | Jul 2002 | WO |
2004004420 | Jan 2004 | WO |
Entry |
---|
W.R. Runyan; Silicon Semiconductor Technology; 1965; pp. 38-39; McGraw-Hill Book Company, New York. |
T.F. Ciszek, G.H. Schwuttke, and K.H. Yang; Solar-Grade Silicon by Directional Solidification in Carbon Crucibles; IBM Journal of Research and Development; May 1979; pp. 270-277; vol. 23, No. 3; IBM Corporation; Amonk, NY. |
Sindanyo Furnace (with Crucible); 1981; (3 pages total); Inductotherm Europe LTD. |
Induction Susceptor Furnaces; Tech Application; 1988; (1 page total); vol. 2, No. 2; Electric Power Research Institute Center for Material Fabrications; Palo Alto, CA. |
Number | Date | Country | |
---|---|---|---|
20080063025 A1 | Mar 2008 | US |
Number | Date | Country | |
---|---|---|---|
60634353 | Dec 2004 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 11297010 | Dec 2005 | US |
Child | 11942341 | US |