Claims
- 1. A process for electrodepositing copper from an aqueous acidic copper plating bath containing at least one member independently selected from each of the following two groups:
- A. 0.005 gram per liter to 40 grame per liter of an aryl, aralkyl or cycloaliphatic amine exhibiting the formula: ##EQU23## wherein X, Y, and Z are each independently selected from the group consisting of hydrogen, substituted and unsubstituted benzyl, phenyl, and cyclohexyl rings; --CH.sub.2 R, --CH.sub.2 RSO.sub.3, --CH.sub.2 ROH where R is a substituted or unsubstituted alkyl chain of one or two carbon atoms provided that at least one member of X, Y, and Z is benzyl, phenyl, or cyclohexyl; and
- B. sulfoalkyl sulfide compounds containing the grouping --Alk--SO.sub.3 M where M is one gramequivalent of a cation and --Alk-- is a divalent aliphatic hydrocarbon group of 1 to 8 carbon atoms in an amount of 0.01 milligrams per liter to 1000 milligrams per liter.
- 2. The process as claimed in claim 1 where the cooperating amine is of the formula:
- C.sub.6 H.sub.5 CH.sub.2 NH CH.sub.2 C.sub.6 H.sub.5
- 3. The process as claimed in claim 1 where the cooperating amine is of the formula: ##EQU24##
- 4. The process as claimed in claim 1 where the cooperating amine is of the formula: ##EQU25##
- 5. The process as claimed in claim 1 where the cooperating amine is of the formula: ##EQU26##
- 6. The process as claimed in claim 1 where the cooperating amine is of the formula: ##EQU27##
- 7. The process as claimed in claim 1 wherein the cooperating amine is of the formula:
- C.sub.6 H.sub.5 CH.sub.2 NH C.sub.6 H.sub.5
- 8. The process as claimed in claim 1 where the cooperating amine is of the formula: ##EQU28##
- 9. The process as claimed in claim 1 where the cooperating amine is of the formula: ##EQU29##
- 10. The process as claimed in claim 1 where the cooperating amine is of the formula:
- C.sub.6 H.sub.5 NH CH.sub.2 CHOH C.sub.6 H.sub.5
- 11. the process as claimed in claim 1 where the cooperating amine is of the formula: ##EQU30##
- 12. The process as claimed in claim 1 where the cooperating amine is of the formula: ##SPC2##
- 13. The process as claimed in claim 1 where the cooperating amine is of the formula: ##SPC3##
- 14. A process for electrodepositing copper from an aqueous acidic copper plating bath containing at least one member independently selected from each of the following three groups:
- A. 0.005 gram per liter to 40 grams per liter of an aryl, aralkyl or cycloaliphatic amine exhibiting the formula: ##EQU31## wherein X, Y, and Z are each independently selected from the group consisting of hydrogen, substituted and unsubstituted benzyl, phenyl, and cyclohexyl rings; --CH.sub.2 R, --CH.sub.2 RSO.sub.3, --CH.sub.2 ROH where R is a substituted or unsubstituted alkyl chain of one or two carbon atoms provided that at least one member of X, Y, and Z is benzyl, phenyl or cyclohexyl;
- B. sulfoalkyl sulfide compounds containing the grouping --Alk--SO.sub.3 M where M is one gram-equivalent of a cation and --Alk-- is a divalent aliphatic hydrocarbon group of 1 to 8 carbon atoms in an amount of 0.01 milligrams per liter to 1000 milligrams per liter; and
- C. diffusion controlled inhibitors which act as leveling agents which contain at least one group ##EQU32## or its tautomer ##EQU33## or a cationic organic compound of a molecular weight greater than about 500 selected from the group consisting of phenazine azo dyes, polyethyleneimines, alkylated polyethyeleneimines, polyvinylpyridine, polyvinylalkylpyridines, and their quaternization products in an amount of at least 0.1 milligram per liter and not more than 1 gram per liter.
- 15. A process for electrodepositing copper from an aqueous acidic copper plating bath containing at least one member independently selected from each of the following three groups:
- A. 0.005 gram per liter to 40 grams per liter of an aryl, aralkyl or cycloaliphatic amine exhibiting the formula: ##EQU34## wherein X, Y, and Z are each independently selected from the group consisting of hydrogen, substituted and unsubstituted benzyl, phenyl, and cyclohexyl rings; --CH.sub.2 R, --CH.sub.2 RSO.sub.3, --CH.sub.2 ROH where R is a substituted or unsubstituted alkyl chain of one or two carbon atoms provided that at least one member of X, Y, and Z is benzyl, phenyl or cyclohexyl;
- B. sulfoalkyl sulfide compounds containing the grouping --Alk--SO.sub.3 M where M is one gram-equivalent of a cation and --Alk-- is a divalent aliphatic hydrocarbon group of 1 to 8 carbon atoms in an amount of 0.01 milligrams per liter to 1000 milligrams per liter; and
- C. 0.01 gram per liter to 5.0 grams per liter of condensation products of formaldehyde and naphthalene sulfonic acids.
- 16. An aqueous acidic copper electroplating bath containing at least one member independently selected from each of the following two groups:
- A. 0.005 gram per liter to 40 grams per liter of an aryl, aralkyl or cycloaliphatic amine exhibiting the formula: ##EQU35## wherein X, Y, and Z are each independently selected from the group consisting of hydrogen, substituted and unsubstituted benzyl, phenyl, and cyclohexyl rings; --CH.sub.2 R, --CH.sub.2 RSO.sub.3, --CH.sub.2 ROH where R is a substituted or unsubstituted alkyl chain of one or two carbon atoms provided that at least one member of X, Y, and Z is benzyl, phenyl or cyclohexyl; and
- B. sulfoalkyl sulfide compounds containing the grouping --Alk--SO.sub.3 M where M is one gram-equivalent of a cation and --Alk-- is a divalent aliphatic hydrocarbon group of 1 to 8 carbon atoms in an amount of 0.01 milligrams per liter to 1000 milligrams per liter.
- 17. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula:
- C.sub.6 H.sub.5 CH.sub.2 NH CH.sub.2 C.sub.6 H.sub.5
- 18. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##EQU36##
- 19. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##EQU37##
- 20. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##EQU38##
- 21. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##EQU39##
- 22. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula:
- C.sub.6 H.sub.5 CH.sub.2 NH CH.sub.6 H.sub.5
- 23. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##EQU40##
- 24. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##EQU41##
- 25. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula:
- C.sub.6 H.sub.5 NH CH.sub.2 CHOH C.sub.6 H.sub.5
- 26. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##EQU42##
- 27. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##SPC4##
- 28. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##SPC5##
- 29. An aqueous acidic copper electroplating bath as claimed in claim 16 wherein the cooperating amine exhibits the formula: ##SPC6##
- 30. An aqueous acidic copper electroplating bath containing at least one member independently selected from each of the following three groups:
- A. 0.005 gram per liter to 40 grams per liter of an aryl, aralkyl or cycloaliphatic amine exhibiting the formula: ##EQU43## wherein X, Y, and Z are each independently selected from the group consisting of hydrogen, substituted and unsubstituted benzyl, phenyl, and cyclohexyl rings; --CH.sub.2 R, --CH.sub.2 RSO.sub.3, --CH.sub.2 ROH where R is a substituted or unsubstituted alkyl chain of one or two carbon atoms provided that at least one member of X, Y, and Z is benzyl, phenyl or cyclohexyl;
- B. sulfoalkyl sulfide compounds containing the grouping --Alk--SO.sub.3 M where M is one gram-equivalent of a cation and --Alk-- is a divalent aliphatic hydrocarbon group of 1 to 8 carbon atoms in an amount of 0.01 milligrams per liter to 1000 milligrams per liter; and
- C. diffusion controlled inhibitors which act as leveling agents which contain at least one group ##EQU44## or its tautomer ##EQU45## or a cationic organic compound of a molecular weight greater than about 500 selected from the group consisting of phenazine azo dyes, polyethyleneimines, alkylated polyethyleneimines, polyvinylpyridine, polyvinylalkylpyridines, and their quaternization products in an amount of at least 0.1 milligram per liter but not more than 1 gram per liter.
- 31. A composition for electrodepositing copper from an aqueous acidic copper electroplating bath containing at least one member independently selected from each of the following three groups:
- A. 0.005 gram per liter to 40 grams per liter of an aryl, aralkyl or cycloaliphatic amine exhibiting the formula: ##EQU46## wherein X, Y, and Z are each independently selected from the group consisting of hydrogen, substituted and unsubstituted benzyl, phenyl, and cyclohexyl rings; --CH.sub.2 R, --CH.sub.2 RSO.sub.3, --CH.sub.2 ROH where R is a substituted or unsubstituted alkyl chain of one or two carbon atoms provided that at least one member of X, Y, and Z is benzyl, phenyl or cyclohexyl;
- B. sulfoalkyl sulfide compounds containing the grouping --Alk--SO.sub.3 M where M is one gram-equivalent of a cation and --Alk-- is a divalent aliphatic hydrocarbon group of 1 to 8 carbon atoms in an amount of 0.01 milligrams per liter to 1000 milligrams per liter; and
- C. condensation products of formaldehyde and naphthalene sulfonic acids in an amount of 0.01 gram per liter to 5.0 grams per liter.
- 32. A composition for electrodepositing copper from an aqueous acidic copper plating bath containing at least one member independently selected from each of the following four groups:
- A. 0.005 gram per liter to 40 grams per liter of an aryl, aralkyl or cycloaliphatic amine exhibiting the formula: ##EQU47## wherein X, Y, and Z are each independently selected from the group consisting of hydrogen, substituted and unsubstituted benzyl, phenyl, and cyclohexyl rings; --CH.sub.2 R, --CH.sub.2 RSO.sub.3, --CH.sub.2 ROH where R is a substituted or unsubstituted alkyl chain of one or two carbon atoms provided that at least one member of X, Y, and Z is benzyl, phenyl or cyclohexyl;
- B. sulfoalkyl sulfide compounds containing the grouping --Alk--SO.sub.3 M where M is one gram-equivalent of a cation and --Alk-- is a divalent aliphatic hydrocarbon group of 1 to 8 carbon atoms in an amount of 0.01 milligrams per liter to 1000 milligrams per liter;
- C. diffusion controlled inhibitors which act as leveling agents which contain at least one group ##EQU48## or its tautomer ##EQU49## in an amount of at least 0.1 milligram per liter and not more than 1 gram per liter; and
- D. 0.005 gram per liter to 1 gram per liter of a polyether containing at least five ether atoms per molecule exhibiting molecular weights between 300 and 5,000,000.
Parent Case Info
This application is a continuation-in-part of U.S. Pat. application Ser. No. 315,112 filed Dec. 14, 1972, now abandoned.
US Referenced Citations (11)
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
315112 |
Dec 1972 |
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