Claims
- 1. An aqueously developable, negative acting, electrophoretically depositable photoresist consisting essentially of an aqueous solution or emulsion of at least one polymer, free of ethylenic unsaturation, having less than about 200 milliequivalents of carrier groups per 100 grams of said polymer or polymers, said carrier groups being selected from the group consisting of amines or carboxylic acids, an effective amount of an acid or base for the neutralization of said amine or carboxylic acid carrier groups, respectively, to charged carrier groups such that said polymer or polymers contain from at least 10 milliequivalents to about 50 milliequivalents of charged carrier groups per 100 grams of said polymer or polymers, a photoinitiator, and an unsaturated crosslinking monomer, and where said photoresist can be anaphoretically or cataphoretically deposited, depending on the charge of said carrier groups on said polymer, as an adherent uniform film on a conductive surface, and where after exposure of selected portions of said film to actinic radiation, said unexposed portions of said photoresist film are capable of being removed by development with an aqueous solution of a weak organic acid, in the case of a cataphoretically deposited photoresist, or an aqueous base solution, in the case of an anaphoretically deposited photoresist, and where the exposed portions of said photoresist film remain resistant to oxidizing agents used to etch said conductive surface, and where said exposed photoresist film portions can be stripped from said surface using an aqueous solution.
- 2. The photoresist composition of claim 1 where said polymer having said carrier groups is formed:
- from the polymerization or copolymerization of monomers selected from the group consisting of acrylate esters, methacrylate esters, acrylic acid, methacrylic acid, acrylamides, methacrylamides, other vinyl monomers and mixtures thereof;
- from condensation and addition polymers selected from the group consisting of polyepoxides, polyesters and polyurethanes; and
- from mixtures thereof.
- 3. The cataphoretically depositable photoresist of claim 1 wherein said polymer is formed from the polymerization or copolymerization of monomers selected from the group consisting of acrylate esters, methacrylate esters, acrylamides, methacrylamides, other vinylmonomers and mixtures thereof.
- 4. The composition of claim 2 where the polymer comprises from about 2 weight percent to about 15 weight percent 2-(dimethylamino)ethyl methacrylate.
- 5. The composition of claim 2 where the polymer is a copolymer formed from about 2 weight percent to about 15 weight percent 2-(dimethylamino)ethyl methacrylate, from about 55 weight percent to about 83 weight percent methyl methacrylate and from about 2 weight percent to about 43 weight percent ethyl acrylate.
- 6. The photoresist composition of claim 3 where said polymer, free of ethylenic unsaturation and containing said carrier groups has a glass transition temperature of from about 0.degree. C. to about 100.degree. C. and a molecular weight ranging from about 10,000 to about 100,000.
- 7. The composition of claim 2 where said photoinitiator comprises a compound selected from the group consisting of 2,2-dimethoxy-2-phenylacetophenone, 1-hydroxycyclohexyl phenyl ketone, diethoxy acetophenone, 2-t-butyl anthraquinone and a mixture of 3-phenyl-5-isoxanzolone and benzanthrone.
- 8. The composition of claim 1 where said unsaturated crosslinking monomer is a multifunctional monomer.
- 9. The multifunctional monomer of claim 8 being selected from the group consisting of trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, pentaerythritol triacrylate, melamine acrylate, trimethylolpropane tri(2-acryloxy propionate), and diethylene glycol diacrylate.
Parent Case Info
This application is a continuation of application Ser. No. 842,323, filed Mar. 21, 1986, now abandoned, which is a division of application Ser. No. 654,821 filed Sept. 26, 1984, now U.S. Pat. No. 4,592,816.
US Referenced Citations (16)
Foreign Referenced Citations (3)
Number |
Date |
Country |
2816774 |
Oct 1978 |
DEX |
0071789 |
Feb 1983 |
DEX |
866244 |
Oct 1978 |
FRX |
Divisions (1)
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Number |
Date |
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Parent |
654821 |
Sep 1984 |
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Continuations (1)
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Number |
Date |
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Parent |
842323 |
Mar 1986 |
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