ELECTROSTATIC CHUCK

Abstract

An electrostatic chuck includes a ceramic base having an electrode embedded in vicinity to a holding face for holding a substrate. On a back side of this ceramic base, provided are a terminal connected to the electrode, a wafer temperature control member, and an insulating member for insulating the temperature control member from the terminal. This insulating member has a flange portion on its end portion in contact with the ceramic base, and is made of highly thermal conductive ceramics.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and further objects, features and advantages of the invention will more fully appear in the detailed description of embodiments of the invention, when the same is read in conjunction with the drawings, in which:

FIG. 1 is a section view showing an embodiment of an electrostatic chuck according to the present invention;

FIG. 2 is an enlarged section view in the vicinity of a central portion of a ceramic base of the electrostatic chuck shown in FIG. 1; and

FIG. 3 is an enlarged section view in the vicinity of a central portion of a ceramic base of a conventional electrostatic chuck.

Claims

1. An electrostatic chuck comprising: a ceramic base having an electrode embedded approximately in parallel with and in vicinity to a holding face for holding a substrate;a temperature control member in contact with a back face of the ceramic base;a terminal that is inserted through an introduction hole formed in the back face, which is a reverse side of the holing face of the ceramic base, and connected to the electrode; andan insulating member that is provided around the terminal and insulates the temperature control member from the terminal,wherein the insulating member has a flange portion on an end portion in contact with the ceramic base.

2. The electrostatic chuck according to claim 1, wherein a dielectric strength characteristic of the insulating member is not smaller than 5 kV/mm.

3. The electrostatic chuck according to claim 1, wherein the insulating member is made of highly thermal conductive ceramics.

4. The electrostatic chuck according to claim 3, wherein thermal conductivity of the insulating member is not smaller than 100 W/m·K.

5. The electrostatic chuck according to claim 1, wherein a thickness of the flange portion of the insulating member is not smaller than 0.5 mm and not larger than 2 mm.

6. The electrostatic chuck according to claim 1, wherein the insulating member is fixed to the ceramic base with an adhesive having a high insulating property.

7. The electrostatic chuck according to claim 6, wherein dielectric voltage of the adhesive is not smaller than 10 kV/mm.