Claims
- 1. A photoresist element, consisting of a substrate coated with a photosensitive layer comprising an effective amount of an amphoteric polymer consisting of the following monomeric units:
- (a) 20 to 90 mol percent of acrylic acid,
- (b) 10 to 30 mol percent of N,N-dimethylaminoethyl methacrylate or N,N-diethylaminoethyl acrylate, and
- (c) 0 to 70 mol percent of units from one or more members of the group consisting of C.sub.1-8 alkyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate and 2-hydroxypropyl methacrylate;
- said polymer prepared by copolymerizing (a), (b) and (c), in solution, in the presence of a strong acid selected from the group consisting of nitric acid, sulfuric acid and hydrochloric acid, in a quantity sufficient to protonate the amine group of (b),
- the polymer characterized further by having (i) a molar ratio of (a) to (b) of at least 2 to 1, and (ii) substantially no betaine contaminant.
- 2. The photoresist element as recited in claim 1 wherein said amphoteric polymer is made by polymerization of said monomers (b) and (c) and the methyl ester of (a) followed by selective hydrolysis of said prepolymer.
- 3. The photoresist element as recited in claim 2 wherein said polymerization is an emulsion polymerization.
- 4. The photoresist element as recited in claim 1 wherein said amphoteric polymer has a degree of polymerization of 50 to 300.
- 5. The photoresist element as recited in claim 1 wherein the ratio of (a) to (b) in said amphoteric polymer is at least 2.5 to 1.
- 6. A photoresist element consisting of a substrate coated with a photosensitive layer comprising an effective amount of amphoteric polymer containing the following monomeric units:
- (a) 20 to 90 mol percent of the methyl ester of acrylic acid,
- (b) 10 to 30 mol percent of N,N-dimethylaminoethyl methacrylate or N,N-diethylaminoethyl acrylate, and
- (c) 0 to 70 mol percent of units from one or more members of the group consisting of C.sub.1-8 alkyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate and 2-hydroxypropyl methacrylate;
- said polymer prepared by copolymerizing (a), (b), and (c), and then hydrolyzing the polymer in aqueous base to selectively convert acrylate ester groups to carboxylate salt groups, thereby forming the amphoteric polymer characterized by:
- (i) molar ratio of hydrolyzed polymer units derived from monomer (a) which contains carboxylate salt groups, to monomer (b), of at least 2 to 1,
- (ii) a degree of polymerization of about 50 to 300, and
- (iii) substantially no betaine contaminant.
- 7. The photoresist element as recited in claim 5 wherein the ratio of hydrolyzed (a) units to (b) units in said amphoteric polymer is at least 2.5 to 1.
- 8. The element as recited in claim 2 wherein said amphoteric polymer is made by polymerization of said (a), (b) and (c) polymers in the presence of a strong acid, sufficient to protonate the amine group.
- 9. The element as recited in claim 8 wherein the strong acid is selected from nitric acid, sulfuric acid and hydrochloric acid.
Parent Case Info
This is a continuation of application Ser. No. 07/650,784, filed on Feb. 5, 1991, U.S. Pat. No. 5,187,059 which was a division of application Ser. No. 07/343,773, filed on Apr. 27, 1989 U.S. Pat. No. 5,011,848 which was a division of Ser. No. 07/076,806, filed Apr. 1, 1988, U.S. Pat. No. 4,756,669 which was a division of application Ser. No. 377,373 filed on May 12, 1982, U.S. Pat. No. 4,749,762.
US Referenced Citations (18)
Foreign Referenced Citations (1)
Number |
Date |
Country |
889760 |
Feb 1962 |
GBX |
Non-Patent Literature Citations (2)
Entry |
Merle et al. Synthetic Polyampholytes Z. Sequence Distribution in Methacrylic Acid (Dimethylamino) ethel. |
Methacrylate Copolymers by .sup.13 C AMR Spectroscopy, Macromolecules 1982, 15, 360-365. |
Divisions (3)
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Number |
Date |
Country |
Parent |
343773 |
Apr 1989 |
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Parent |
76806 |
Apr 1988 |
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Parent |
377373 |
May 1982 |
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Continuations (1)
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Number |
Date |
Country |
Parent |
650784 |
Feb 1991 |
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