Number | Name | Date | Kind |
---|---|---|---|
3629023 | Strehlow | Dec 1971 | |
3979239 | Walsh | Sep 1976 | |
4256535 | Banks | Mar 1981 | |
4261791 | Shwartzman | Apr 1981 | |
4373991 | Banks | Feb 1983 | |
4505720 | Gabor et al. | Mar 1985 | |
4600469 | Fusco et al. | Jul 1986 | |
4677043 | Cordes, III et al. | Jun 1987 | |
4768883 | Waldo et al. | Sep 1988 | |
4778532 | McConnell et al. | Oct 1988 | |
4789648 | Chow et al. | Dec 1988 | |
4879258 | Fisher | Nov 1989 | |
4933715 | Yamada et al. | Jun 1990 | |
4944836 | Beyer et al. | Jul 1990 | |
4954141 | Takiyama et al. | Sep 1990 | |
4962423 | Yamada et al. | Oct 1990 | |
4968381 | Prigge et al. | Nov 1990 | |
4986878 | Malazgirt et al. | Jan 1991 | |
5032203 | Doy et al. | Jul 1991 | |
5057462 | Eisenberg et al. | Oct 1991 | |
5064683 | Poon et al. | Nov 1991 | |
5084419 | Sakao | Jan 1992 | |
5209816 | Yu et al. | May 1993 | |
5273558 | Nelson et al. | Dec 1993 | |
5288333 | Tanaka et al. | Feb 1994 | |
5320706 | Blackwell | Jun 1994 | |
5320978 | Hsu | Jun 1994 | |
5340370 | Cadien et al. | Aug 1994 | |
5346584 | Nasr et al. | Sep 1994 | |
5362668 | Tasaka | Nov 1994 | |
5362669 | Boyd et al. | Nov 1994 | |
5363550 | Aitken et al. | Nov 1994 | |
5376482 | Hwang et al. | Dec 1994 | |
5389194 | Rostoker et al. | Feb 1995 | |
5389579 | Wells | Feb 1995 | |
5392361 | Imaizumi et al. | Feb 1995 | |
5395801 | Doan et al. | Mar 1995 | |
5401691 | Caldwell | Mar 1995 | |
5406111 | Sun | Apr 1995 | |
5435772 | Yu | Jul 1995 | |
5436488 | Poon et al. | Jul 1995 | |
5441094 | Pasch | Aug 1995 | |
5459096 | Venkatesan et al. | Oct 1995 | |
5468983 | Hirase et al. | Nov 1995 | |
5486265 | Salugsugan | Jan 1996 | |
5492858 | Bose et al. | Feb 1996 | |
5494857 | Cooperman et al. | Feb 1996 | |
5503962 | Caldwell | Apr 1996 | |
5525840 | Tominaga | Jun 1996 | |
5531861 | Yu et al. | Jul 1996 | |
5541427 | Chappell et al. | Jul 1996 | |
5551986 | Jain | Sep 1996 | |
5573633 | Gambino et al. | Nov 1996 | |
5578523 | Fiordalice et al. | Nov 1996 | |
5591239 | Larson et al. | Jan 1997 | |
5595937 | Mikagi | Jan 1997 | |
5607345 | Barry et al. | Mar 1997 | |
5616513 | Shepard | Apr 1997 | |
5629242 | Nagashima et al. | May 1997 | |
5643406 | Shimomura et al. | Jul 1997 | |
5643823 | Ho et al. | Jul 1997 | |
5643836 | Meister et al. | Jul 1997 | |
5652176 | Maniar et al. | Jul 1997 | |
5656097 | Olesen et al. | Aug 1997 | |
5664990 | Adams et al. | Sep 1997 | |
5665202 | Subramanian et al. | Sep 1997 | |
5666985 | Smith, Jr. et al. | Sep 1997 | |
5702977 | Jang et al. | Dec 1997 | |
5728308 | Muroyama | Mar 1998 | |
5776808 | Muller et al. | Jul 1998 | |
5837612 | Ajuria et al. | Nov 1998 | |
5906532 | Nakajima et al. | May 1999 | |
5919082 | Walker et al. | Jul 1999 | |
5952687 | Kawakubo et al. | Sep 1999 | |
6010964 | Glass | Jan 2000 |
Number | Date | Country |
---|---|---|
0 303 061 | Feb 1989 | EP |
Entry |
---|
Wolf, Silicon Processing for the VLSI Era Volume 2: Process Integration, Lattice Press 1990, pp. 189-191. |
Singer, “CMP Developers Take Aim at STI Applications” and “Slurry-Free CMP Reduces Dishing, Speeds Process,” Semiconductor International, Feb. 1998, vol. 21, No. 2, p. 40. |
Ali et al., “Chemical-Mechanical Polishing of Interlayer Dielectric: A Review,” Solid State Technology, Oct. 1994, pp. 63-68. |
Sivaram et al., “Developments in Consumables Used in the Chemical Mechanical Polishing of Dielectrics,” International Conference on Solid State Devices & Materials, Aug. 1995, p. 166. |
Singer, “CMP Developers Take Aim at STI Applications” Semiconductor International, vol. 21, No. 2, p. 40. No Date. |
Singer, “Slurry-Free CMP Reduces Dishing, Speeds Process” Semiconductor International, vol. 21, No. 2, p. 40. No Date. |
Stanley Wolf, “Silicon Processing for the VLSI era” Lattice Press, vol. 2, pp. 189-193, 1990. |