Exhaust system for a microwave excited ultraviolet lamp

Information

  • Patent Grant
  • 6831419
  • Patent Number
    6,831,419
  • Date Filed
    Monday, June 2, 2003
    21 years ago
  • Date Issued
    Tuesday, December 14, 2004
    19 years ago
Abstract
An exhaust system for use with a microwave excited ultraviolet lamp system is provided to receive cooling air emitted from the lamp system and to contain and direct the cooling air so as not to contact a substrate being irradiated with ultraviolet light. A lens, such as a quartz lens, is supported by the exhaust duct to transmit the ultraviolet light emitted from the lamp system toward the substrate.
Description




FIELD OF THE INVENTION




The present invention relates generally to microwave excited ultraviolet lamp systems and, more particularly, to an exhaust system for directing cooling air used in such lamp systems.




BACKGROUND OF THE INVENTION




Ultraviolet lamp systems, such as those used in the heating or curing of adhesives, sealants, inks or other coatings for example, are designed for coupling microwave energy to an electrodeless lamp, such as an ultraviolet (UV) plasma lamp bulb mounted within a microwave chamber of the lamp system. In ultraviolet lamp heating and curing applications, one or more magnetrons are typically provided in the lamp system to couple microwave radiation to the plasma lamp bulb within the microwave chamber. The magnetrons are coupled to the microwave chamber through waveguides that include output ports connected to an upper end of the chamber. When the plasma lamp bulb is sufficiently excited by the microwave energy, it emits ultraviolet radiation through an open lamp face of the lamp system to irradiate a substrate which is located generally near the open lamp face.




A source of pressurized air is fluidly connected to a housing of the lamp system which contains the magnetrons, the microwave chamber and the plasma lamp bulb. The source of pressurized air is operable to direct cooling air, such as 350 CFM of cooling air for example, through the housing and into the microwave chamber to properly cool the magnetrons and the plasma lamp bulb during irradiation of the substrate by the lamp system.




In some UV heating and curing applications, the lamp system includes a mesh screen mounted at the open lamp face which is transmissive to ultraviolet radiation but is opaque to microwaves. The configuration of the mesh screen also permits the significant air flow of cooling air to pass therethrough and toward the substrate.




In some applications, however, the substrate may require a clean environment, such as in a curing chamber, so that the substrate will not be contaminated during the heating and curing process by contaminants carried by the cooling air in contact with the substrate. The substrate may also be somewhat delicate and therefore susceptible to damage in harsh environments, such as under the influence of the significant air flow of the cooling air which impinges upon and possibly disturbs the substrate. Oftentimes, the substrate may also be adversely affected by excessive heat which may be generated by the plasma lamp bulb during the irradiation process.




Accordingly, there is a need for a microwave excited ultraviolet lamp system which may be used in a clean environment to prevent contamination of a substrate by the cooling air necessary to properly cool the lamp system. There is also a need for a lamp system which reduces or eliminates the potential damage to a substrate by the significant air flow of cooling air used to cool the lamp system. There is yet also a need for a lamp system which minimizes heat transfer from the plasma lamp bulb to the substrate being irradiated.




SUMMARY OF THE INVENTION




The present invention overcomes the foregoing and other shortcomings and drawbacks of heretofore known exhaust systems for microwave excited ultraviolet lamp systems. While the invention will be described in connection with certain embodiments, it will be understood that the invention is not limited to these embodiments. On the contrary, the invention includes all alternatives, modifications and equivalents as may be included within the spirit and scope of the present invention.




According to one aspect of the present invention, a microwave excited ultraviolet lamp system or light source is provided having an exhaust system mounted thereto in accordance with the principles of the present invention. The light source includes a housing which is connected to a source of pressurized air which is operable to direct cooling air through the housing and into the microwave chamber to cool the magnetrons and plasma lamp bulb of the light source.




The exhaust system of the present invention is mounted in fluid communication with the light source and is configured to contain and direct the cooling air emitted by the lamp source so as not to contact the substrate being irradiated with ultraviolet light. The exhaust system comprises an enclosed exhaust duct having an air inlet port configured to receive the cooling air emitted from the light source and an air exhaust port configured to direct the cooling air within the exhaust duct to a location remote from the light source so that the cooling air does not contact and thereby possibly contaminate or disturb the substrate.




A lens, such as a quartz lens, is supported by the exhaust duct and is operable to transmit the ultraviolet light emitted from the light source toward the substrate. The quartz lens is beneficial to reduce heat transfer to the substrate from the plasma lamp bulb and also serves as an air shield to prevent the cooling air from contacting the substrate.




In accordance with another aspect of the present invention, a sensor, such as a differential pressure transducer, is provided within the housing of the light source to insure that a sufficient cooling air flow rate is being provided for proper operation of the magnetrons and the plasma lamp bulb. The pressure transducer senses the pressure drop between the interior of the housing and the exhaust system and provides a signal to a control of the light source to shutdown operation when the desired pressure drop is not sensed by the pressure transducer.




The above and other objects and advantages of the present invention shall be made apparent from the accompanying drawings and the description thereof.











BRIEF DESCRIPTION OF THE DRAWINGS




The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with a general description of the invention given above, and the detailed description of the embodiments given below, serve to explain the principles of the invention.





FIG. 1

is a perspective view of a microwave excited ultraviolet lamp system including an exhaust system mounted thereto in accordance with the principles of the present invention;





FIG. 2

is a perspective view of the exhaust system shown in

FIG. 1

;





FIG. 3

is a cross-sectional view of the lamp system and exhaust system taken along line


3





3


of

FIG. 1

;





FIG. 4

is a cross-sectional view of the lamp system and exhaust system taken along line


4





4


of

FIG. 1

; and





FIGS. 5-8

are diagrammatic views of alternative embodiments of the present invention.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT




With reference to the

FIGS. 1-4

, a microwave excited ultraviolet (“UV”) lamp system or light source


10


is shown including an exhaust system


12


mounted thereto in accordance with the principles of the present invention. Light source


10


includes a pair of microwave generators, illustrated as a pair of magnetrons


14


(FIG.


4


), that are each coupled to a longitudinally extending microwave chamber


16


through a respective waveguide


18


(FIG.


4


).




Each waveguide


18


has an outlet port


20


(

FIG. 4

) coupled to an upper end of the microwave chamber


16


so that microwaves generated by the pair of microwave generators


14


are coupled to the microwave chamber


16


in spaced longitudinal relationship adjacent opposite upper ends of the chamber


16


. An electrodeless plasma lamp


22


, in the form of a sealed, longitudinally extending plasma bulb, is mounted within the microwave chamber


16


and supported adjacent the upper end of the chamber


16


as is well known in the art.




Light source


10


includes a housing


24


which is connected in fluid communication with a source of pressurized air


25


(

FIG. 5

) in one embodiment through an air inlet duct


26


as is well known in the art. The air inlet duct


26


is located at an upper end of the housing


24


and the lower end of the housing


24


forms a lamp head


28


(FIG.


3


). The source of pressurized air


25


is operable to direct cooling air, represented diagrammatically by arrows


30


in

FIG. 3

, through the housing


24


and into the microwave chamber


16


to cool the magnetrons


14


and plasma lamp bulb


22


as will be described in greater detail below. The cooling air


30


passes through the microwave chamber


16


and is emitted through an open lamp face


32


(

FIG. 3

) of the lamp head


28


.




Light source


10


is designed and constructed to emit ultraviolet light, illustrated diagrammatically by arrows


34


in

FIG. 3

, through the open lamp face


32


(

FIG. 3

) of the light source


10


upon sufficient excitation of the plasma lamp bulb


22


by microwave energy coupled to the microwave chamber


16


from the pair of microwave generators


14


. While a pair of magnetrons


14


are illustrated and described herein, it is to be understood that the light source


10


may include only a single magnetron


14


to excite the plasma lamp bulb


22


without departing from the spirit and scope of the present invention.




As shown in

FIG. 4

, light source


10


includes a starter bulb


36


and a pair of transformers


38


(one shown) that are each electrically coupled to a respective one of the magnetrons


14


to energize filaments of the magnetrons


14


as understood by those skilled in the art. The magnetrons


14


are mounted to inlet ports


40


(

FIG. 4

) of the waveguides


18


so that microwaves generated by the magnetrons


14


are discharged into the chamber


16


through the longitudinally spaced apart outlet ports


20


of the waveguides


18


. Preferably, the frequencies of the two magnetrons


14


are split or offset by a small amount to prevent intercoupling between them during operation of the light source


10


.




A longitudinally extending reflector


42


is mounted within the microwave chamber


16


for reflecting the ultraviolet light


34


emitted from the plasma lamp bulb


22


toward a substrate (not shown) which is located generally near the open lamp face


32


of the lamp head


28


. In one embodiment, reflector


42


has an elliptical configuration in transverse cross-section, although parabolic or other cross-sectional configurations are possible without departing from the spirit and scope of the present invention.




As shown in

FIG. 3

, reflector


42


includes a pair of longitudinally extending reflector panels


44


that are mounted in opposing, i.e., mirror facing relationship within the microwave chamber


16


and in spaced relationship to the plasma lamp bulb


22


. Each reflector panel


44


is preferably made of coated glass, although other materials having suitable reflective and thermal properties are possible as well. When made of coated glass, for example, each reflector panel


44


is transparent to the microwave energy generated by the pair of magnetrons


14


but opaque to and reflective of the ultraviolet light


34


emitted by the plasma lamp bulb


22


.




Further referring to

FIG. 3

, a longitudinally extending intermediate member


46


is mounted within the microwave chamber


16


in spaced relationship to the reflector panels


44


, and also in spaced relationship to the plasma lamp bulb


22


. The intermediate member


46


may be made of glass, such as PYREX®, and may uncoated to be non-reflective of the ultraviolet light


34


emitted by the plasma lamp bulb


22


.




When the pair of reflector panels


44


and the intermediate member


46


are mounted within the microwave chamber


16


to form the reflector


42


, a pair of spaced, longitudinally extending slots


48


(

FIG. 3

) are formed between the reflector panels


44


and the intermediate member


46


. The pair of spaced, longitudinally extending slots


48


are operable to pass cooling air


30


from the pressurized air source


25


(

FIG. 5

) toward the plasma lamp bulb


22


so that the cooling air


30


envelops the plasma lamp bulb


22


effectively entirely about its outer surface to cool the bulb


22


. Details of the construction of the reflector


42


is fully described in commonly owned and co-pending U.S. Ser. No. 10/182,164, entitled “Microwave Excited Ultraviolet Lamp System With Improved Cooling”, the disclosure of which is hereby incorporated herein by reference in its entirety. Of course, other reflector configurations are possible as well as will be readily understood by those of ordinary skill in the art. The cooling air


30


thereafter passes through the microwave chamber


16


and is emitted through the open lamp face


32


of the lamp head


28


.




In accordance with the principles of the present invention as shown in

FIGS. 1-4

, the exhaust system


12


is mounted in fluid communication with the lamp head


28


so that the cooling air


30


emitted from the open lamp face


32


is contained and directed within the exhaust system


12


so as not to contact the substrate (not shown) being irradiated. The exhaust system


12


comprises an enclosed exhaust duct


50


having an air inlet port


52


(

FIG. 3

) configured to receive the cooling air


30


emitted through the open lamp face


32


and an air exhaust port


54


(

FIG. 3

) configured to direct the cooling air


30


within the exhaust duct


12


to a location remote from the lamp head


28


so that the cooling air


30


does not contact the substrate (not shown).




In one embodiment, the exhaust duct


50


includes a top wall


56


, an opposite bottom wall


58


, a pair of opposite side walls


60


and a pair of opposite end walls


62


which are configured to form an elongated and enclosed plenum


64


(FIG.


3


). The elongated plenum


64


has a first plenum portion


66




a


which is positioned generally in registry with the lamp face


32


and a second plenum portion


66




b


which is positioned outwardly of the lamp face


32


and in fluid communication with the first plenum portion


66




a.






The exhaust system


12


is mounted to the lamp head


28


through a plurality of mounting screws


68


(

FIG. 3

) which extend upwardly through respective standoffs


70


(FIG.


3


). The mounting screws


68


extend through apertures


72


(

FIG. 2

) formed in mounting flanges


74


(

FIG. 2

) of the exhaust duct


12


and are threadably engaged with aligned apertures


76


(

FIG. 3

) formed in mounting flanges


78


of the lamp head


28


. As shown in

FIG. 3

, a gasket


80


is positioned between the mounting flanges


74


of the exhaust duct


12


and the mounting flanges


78


of the lamp head


28


to provide a generally air tight seal therebetween.




As shown in

FIGS. 2 and 3

, the bottom wall


58


of the exhaust duct


12


has an opening


82


formed therethrough which is positioned generally in registry with the microwave chamber


16


. A lens


84


, such as a quartz lens, is mounted to the bottom wall


58


of the exhaust duct


12


and is positioned generally in registry with the opening


82


. A pair of elongated and generally “Z-shaped” mounting flanges


86


are mounted to the bottom wall


58


through screws


88


(

FIG. 3

) and have flange portions


90


which extend over opposite sides of the lens


84


to secure the lens


84


to the bottom wall


58


. The lens


84


transmits the ultraviolet light


34


emitted through the lamp face


32


toward the substrate (not shown). A gasket


92


(

FIG. 3

) is positioned between a lower surface of the lens


84


and the bottom wall


58


about the opening


82


to provide a generally air tight seal therebetween. The quartz lens


84


is beneficial to reduce heat transfer to the substrate (not shown) from the plasma lamp bulb


22


and also serves as an air shield to prevent the cooling air


30


emitted from the lamp face


32


from contacting the substrate (not shown).




As shown in

FIGS. 1-3

, an air exhaust duct


94


is mounted to the top wall


56


of the exhaust duct


50


in generally registry with the air exhaust port


54


. Wing nuts


96


extend through a mounting flange


98


of the air exhaust duct


94


and are engaged in aligned retainers


100


(FIG.


3


). A gasket


102


is positioned between the mounting flange


98


of the air exhaust duct


94


and the top wall


56


of the exhaust duct


12


to provide a generally air tight seal therebetween. Of course, it will be appreciated that the configuration and orientation of the air exhaust port


54


and the air exhaust duct


94


can be changed without departing from the spirit and scope of the present invention. The air exhaust duct


94


is fluidly connected to an air exhaust system (not shown) so that the cooling air


30


is contained and directed within the exhaust


12


to an area where it will not contact and thereby possibly contaminate or disturb the substrate (not shown).




It is important that a sufficient cooling air flow rate, such as 350 CFM of cooling air for example, be provided within the housing


28


to insure proper operation of the magnetrons


14


and the plasma lamp bulb


22


. To insure that a sufficient cooling air flow rate is being provided during operation of the light source


10


, a differential pressure transducer


104


(

FIG. 3

) is mounted in fluid communication with the lamp head


28


and the exhaust duct


50


. The pressure transducer


104


senses the pressure drop between the lamp head


28


and the air duct


50


and provides a signal to a control (not shown) of the light source


10


to shutdown operation when the desired pressure drop is not sensed by the pressure transducer


104


.




While light source


10


has been described in combination with a source of pressurized air


25


as shown in FIG.


1


and as shown diagrammatically in

FIG. 6

, it is contemplated in an alternative embodiment that a negative pressure source


106


(

FIG. 6

) may be used instead of the positive air pressure source


25


to draw cooling air


30


through the lamp head


28


and the exhaust system


12


as shown in FIG.


6


.




Alternatively, it is contemplated that a combination of a pressurized air source


25


connected to the air inlet duct


26


and a negative air pressure source


106


connected to the air exhaust duct


94


, as shown diagrammatically in

FIG. 7

, may provide the necessary air flow rate through the light source


10


. As shown diagrammatically in

FIG. 8

, it is also contemplated that an air recirculation path


108


may be provided to fluidly connect the negative air pressure source


106


to the positive air pressure source


25


. In this embodiment, a filter and chiller


110


is provided in the recirculation path


108


to filter and cool the exhausted air from the exhaust duct


12


before it is recirculated to the positive air pressure source


25


.




While the present invention has been illustrated by a description of various embodiments and while these embodiments have been described in considerable detail, it is not the intention of the applicants to restrict or in any way limit the scope of the appended claims to such detail. Additional advantages and modifications will readily appear to those skilled in the art. The invention in its broader aspects is therefore not limited to the specific details, representative apparatus and method, and illustrative example shown and described. Accordingly, departures may be made from such details without departing from the spirit or scope of applicants' general inventive concept.



Claims
  • 1. An exhaust system for use in a microwave excited ultraviolet lamp system having a lamp head terminating in a lamp face through which ultraviolet light and cooling air are emitted during ultraviolet irradiation of a substrate, the exhaust system comprising:an enclosed exhaust duct capable of being supported in fluid communication with the lamp face and having an air inlet port configured to receive the cooling air emitted through the lamp face and an air exhaust port configured to direct the cooling air within said exhaust duct so as not to contact the substrate; and a lens supported by said exhaust duct and configured to transmit the ultraviolet light emitted through the lamp face toward the substrate.
  • 2. The exhaust system of claim 1 wherein said exhaust duct comprises an elongated plenum having a first plenum portion configured to be positioned in general registry with the lamp face and a second plenum portion configured to be positioned outwardly of the lamp face.
  • 3. The exhaust system of claim 2 wherein said air exhaust port is supported in fluid communication with said second plenum portion.
  • 4. The exhaust system of claim 2 wherein said exhaust duct has a top wall, a bottom wall, a pair of side walls and a pair of end walls which are configured to define said elongated plenum.
  • 5. The exhaust system of claim 4 wherein said bottom wall includes an opening therethrough and further wherein said lens is positioned in general registry with said opening.
  • 6. The exhaust system of claim 1 wherein said lens comprises a quartz lens.
  • 7. A microwave excited ultraviolet lamp system, comprising:a lamp head terminating in a lamp face through which ultraviolet light and cooling air are emitted during ultraviolet irradiation of a substrate by said lamp head; an enclosed exhaust duct supported by said lamp head in fluid communication with said lamp face and having an air inlet port which receives the cooling air emitted through said lamp face and an air exhaust port which directs the cooling air within said exhaust duct so as not to contact the substrate; and a lens supported by said exhaust duct which transmits the ultraviolet light emitted through said lamp face toward the substrate.
  • 8. The microwave excited ultraviolet lamp system of claim 7 wherein said exhaust duct comprises an elongated plenum having a first plenum portion positioned in general registry with said lamp face and a second plenum portion positioned outwardly of said lamp face.
  • 9. The microwave excited ultraviolet lamp system of claim 8 wherein said air exhaust port is supported in fluid communication with said second plenum portion.
  • 10. The microwave excited ultraviolet lamp system of claim 8 wherein said exhaust duct has a top wall, a bottom wall, a pair of side walls and a pair of end walls which are configured to define said elongated plenum.
  • 11. The microwave excited ultraviolet lamp system of claim 10 wherein said bottom wall includes an opening therethrough and further wherein said lens is positioned in general registry with said opening.
  • 12. The microwave excited ultraviolet lamp system of claim 7 wherein said lens comprises a quartz lens.
  • 13. The microwave excited ultraviolet lamp system of claim 7 further comprising a pressure sensor mounted in fluid communication with said lamp head and said exhaust duct.
  • 14. The microwave excited ultraviolet lamp system of claim 13 wherein said pressure sensor comprises a differential pressure transducer.
  • 15. A method of cooling a microwave excited ultraviolet lamp system having a lamp head configured to emit ultraviolet light through a lamp face thereof, comprising:emitting ultraviolet light through the lamp face to irradiate a substrate; directing cooling air through the lamp head; emitting the cooling air through the lamp face; containing the cooling air proximate the lamp face; and exhausting the cooling air at a location remote from the lamp head so that the cooling air does not contact the substrate.
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Number Name Date Kind
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4965876 Foldi et al. Oct 1990 A
4990789 Uesaki Feb 1991 A
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5504391 Turner et al. Apr 1996 A
6507031 Jinbo et al. Jan 2003 B1
Non-Patent Literature Citations (1)
Entry
Fusion UV Systems, Inc., Modular Light Shield Systems, Tech Notes, 2001 (4 pages).