Number | Name | Date | Kind |
---|---|---|---|
3327182 | Kisinko | Jun 1967 | |
3411200 | Formigoni | Nov 1968 | |
3474308 | Kronlage | Oct 1969 | |
3483464 | Embree et al. | Dec 1969 | |
3502951 | Hunts | Mar 1970 | |
3511724 | Ohta | May 1970 | |
3582724 | Nakahara et al. | Jun 1971 | |
3615932 | Makimoto et al. | Oct 1971 | |
3617827 | Schmitz et al. | Nov 1971 | |
3707410 | Tauchi et al. | Dec 1972 |
Entry |
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Fuller et al., "Diffusion of Donor and Acceptor Elements in Silicon," J. Appl. Phys., Vol. 27, No. 5, May 1956, pp. 544-553. |