Number | Name | Date | Kind |
---|---|---|---|
34425 | Schultz | Feb 1862 | |
4999954 | Miyamoto et al. | Mar 1991 | |
5212910 | Breivogel et al. | May 1993 | |
5216843 | Breivogel et al. | Jun 1993 | |
5308438 | Cote et al. | May 1994 | |
5421769 | Schultz et al. | Jun 1995 | |
5664987 | Renteln | Sep 1997 | |
5791969 | Lund | Aug 1998 |
Entry |
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Article entitled "Selective Conditioning And Pad Degradation Studies On Interlayer Dielectric Films"; K. Achhuthan et al.; CMP-MIC Conference; Feb. 22-23, 1996. |