Control means for lapping machines or devices

Industry

CPC
B24B37/005

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B37/00Lapping machines or devices Accessories

Current Industry

B24B37/005Control means for lapping machines or devices

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus, substrate suction determination method...
- Patent number 12,230,529
- Issue date Feb 18, 2025
- Ebara Corporation
- Osamu Nabeya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing head retaining ring tilting moment control
- Patent number 12,214,469
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Andrew Nagengast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing apparatus and method
- Patent number 12,208,487
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hsi Huang
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,733
- Issue date Jan 28, 2025
- Ebara Corporation
- Nobuyuki Takada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irregular mechanical motion detection systems and method
- Patent number 12,172,262
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chunhung Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization tool
- Patent number 12,172,263
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Michael Yen
- B24 - GRINDING POLISHING
Information Patent Grant
Monitoring method for chemical mechanical polishing and chemical me...
- Patent number 12,151,335
- Issue date Nov 26, 2024
- HWATSING TECHNOLOGY CO., LTD.
- Xinchun Lu
- B24 - GRINDING POLISHING
Information Patent Grant
Training a machine learning system to detect an excursion of a CMP...
- Patent number 12,148,149
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polishing apparatus
- Patent number 12,128,523
- Issue date Oct 29, 2024
- Ebara Corporation
- Makoto Fukushima
- B24 - GRINDING POLISHING
Information Patent Grant
Machine for finishing a work piece, and having a highly controllabl...
- Patent number 12,122,012
- Issue date Oct 22, 2024
- II-VI DELAWARE, INC.
- Edward J. Gratrix
- B24 - GRINDING POLISHING
Information Patent Grant
Magnetic grinding device and magnetic grinding control method
- Patent number 12,115,619
- Issue date Oct 15, 2024
- Zhejiang Normal University
- Shiju E
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for determining thickness of metal film of wafer, polishing...
- Patent number 12,109,664
- Issue date Oct 8, 2024
- Hwatsing (Beijing) Technology Co., Ltd.
- Xinchun Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen rotation device
- Patent number 12,090,602
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Bruce Cho
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for suction pad assemblies
- Patent number 12,087,646
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Hsiang Chao
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus and method
- Patent number 12,076,831
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Wei
- B24 - GRINDING POLISHING
Information Patent Grant
Eddy current sensor
- Patent number 12,076,834
- Issue date Sep 3, 2024
- Ebara Corporation
- Atsushi Abe
- B24 - GRINDING POLISHING
Information Patent Grant
Detecting an excursion of a CMP component using time-based sequence...
- Patent number 12,079,984
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of using polishing pad
- Patent number 12,070,833
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- ChunHung Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Slurry dispersion system with real time control
- Patent number 12,042,904
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- I-Chen Chiang
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head with membrane position control
- Patent number 12,042,899
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing control system, substrate processing control m...
- Patent number 12,036,634
- Issue date Jul 16, 2024
- Ebara Corporation
- Koichi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of detecting non-conforming substrate processing events dur...
- Patent number 12,036,635
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing carrier head with piezoelectric pressure control
- Patent number 12,030,156
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head system and polishing apparatus
- Patent number 12,017,323
- Issue date Jun 25, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head having abrasive structure on retainer ring
- Patent number 12,011,803
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chang-Sheng Lin
- B24 - GRINDING POLISHING
Information Patent Grant
Fixing device and detection system
- Patent number 12,005,545
- Issue date Jun 11, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chao Li
- B24 - GRINDING POLISHING
Information Patent Grant
Planar grinder
- Patent number 12,000,764
- Issue date Jun 4, 2024
- Illinois Tool Works Inc.
- Kurt G. Adair
- G01 - MEASURING TESTING
Information Patent Grant
Polishing head with local wafer pressure
- Patent number 11,986,923
- Issue date May 21, 2024
- Applied Materials, Inc.
- Andrew Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device, polishing method, and recording medium for record...
- Patent number 11,980,998
- Issue date May 14, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Control of processing parameters during substrate polishing using e...
- Patent number 11,969,854
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING
- Publication number 20250062163
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Nicholas A. Wiswell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAVINESS PREDICTION DEVICE, WAVINESS PREDICTION METHOD, PROCESSING...
- Publication number 20250058425
- Publication date Feb 20, 2025
- Resonac Corporation
- Shuki HASHIMOTO
- B24 - GRINDING POLISHING
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...
- Publication number 20250050461
- Publication date Feb 13, 2025
- EBARA CORPORATION
- Kenichi TAKEBUCHI
- B24 - GRINDING POLISHING
Information Patent Application
PAD CONDITIONING DISK GIMBALING CONTROL
- Publication number 20250041985
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Justin H. WONG
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING DEVICE, POLISHING METHOD, AND COMPUTER-READABLE STORAGE M...
- Publication number 20250041986
- Publication date Feb 6, 2025
- SANOH INDUSTRIAL CO., LTD.
- Hideo AIDA
- B24 - GRINDING POLISHING
Information Patent Application
DEVICE FOR MEASURING WAFER POLISHING AMOUNT, AND MEASUREMENT METHOD...
- Publication number 20250041988
- Publication date Feb 6, 2025
- SK SILTRON CO., LTD.
- Sangho LEE
- B24 - GRINDING POLISHING
Information Patent Application
DEVICE, METHOD, AND SYSTEM FOR TRANSFORMING MEASUREMENT DATA
- Publication number 20250025981
- Publication date Jan 23, 2025
- Samsung Electronics Co., Ltd.
- Hojoon Lee
- B24 - GRINDING POLISHING
Information Patent Application
MACHINE FOR FINISHING A WORK PIECE, AND HAVING A HIGHLY CONTROLLABL...
- Publication number 20250018521
- Publication date Jan 16, 2025
- II-VI Delaware, Inc.
- Edward J. GRATRIX
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRA...
- Publication number 20250010431
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Jianjun HU
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND NON-TRANSITORY COMPUTER-...
- Publication number 20240424635
- Publication date Dec 26, 2024
- EBARA CORPORATION
- HIROKI NAKAMURA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20240416479
- Publication date Dec 19, 2024
- EBARA CORPORATION
- Kenji KODERA
- B24 - GRINDING POLISHING
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...
- Publication number 20240399527
- Publication date Dec 5, 2024
- EBARA CORPORATION
- Ryo NAKAGOMI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING SYSTEM
- Publication number 20240399526
- Publication date Dec 5, 2024
- EBARA CORPORATION
- Yuichi KATO
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING CHEMICAL MECHANICAL PLANARIZATION
- Publication number 20240404894
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Wei HSU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240391049
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Cheng LIN
- B24 - GRINDING POLISHING
Information Patent Application
IN-TOOL AUDIO AND VISUAL BEHAVIOR MONITORING FOR PROCESS CONTROL
- Publication number 20240391048
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Justin H. WONG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR SLURRY QUALITY MONITORING
- Publication number 20240375238
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-CHIANG TSENG
- B24 - GRINDING POLISHING
Information Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
- Publication number 20240378718
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- B24 - GRINDING POLISHING
Information Patent Application
PLATEN ROTATION DEVICE
- Publication number 20240367286
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Bruce CHO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20240367282
- Publication date Nov 7, 2024
- EBARA CORPORATION
- Hisashi SARUWATARI
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES
- Publication number 20240371708
- Publication date Nov 7, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yu-Hsiang CHAO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF USING POLISHING PAD
- Publication number 20240359288
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- ChunHung CHEN
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20240351161
- Publication date Oct 24, 2024
- EBARA CORPORATION
- Tomoko OWADA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING TOOL, POLISHING SYSTEM AND METHOD OF POLISHING
- Publication number 20240342850
- Publication date Oct 17, 2024
- MEI S.r.l.
- Stefano Sonzogni
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD WITH MEMBRANE POSITION CONTROL
- Publication number 20240342853
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...
- Publication number 20240316720
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Koichi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND INFORMATION PROCESSING SYSTEM
- Publication number 20240308018
- Publication date Sep 19, 2024
- EBARA CORPORATION
- Yuta SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VEHICLE WAXING SYSTEM AND VEHICLE WAXING METHOD
- Publication number 20240308024
- Publication date Sep 19, 2024
- National Taiwan University of Science and Technology
- Chyi-Yeu Lin
- B60 - VEHICLES IN GENERAL
Information Patent Application
METHOD FOR DETECTION OF WAFER SLIPPAGE
- Publication number 20240308019
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Wei Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF INFLATING ELASTIC MEMBRANE OF POLISHING HEAD, AND POLISHI...
- Publication number 20240286246
- Publication date Aug 29, 2024
- EBARA CORPORATION
- Masayuki TAMURA
- B24 - GRINDING POLISHING

Control means for lapping machines or devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate holding apparatus, substrate suction determination method...

Polishing head retaining ring tilting moment control

Chemical mechanical polishing apparatus and method

Substrate processing apparatus and substrate processing method

Irregular mechanical motion detection systems and method

Chemical mechanical planarization tool

Monitoring method for chemical mechanical polishing and chemical me...

Training a machine learning system to detect an excursion of a CMP...

Polishing apparatus

Machine for finishing a work piece, and having a highly controllabl...

Magnetic grinding device and magnetic grinding control method

Method for determining thickness of metal film of wafer, polishing...

Platen rotation device

Systems and methods for suction pad assemblies

Chemical mechanical polishing apparatus and method

Eddy current sensor

Detecting an excursion of a CMP component using time-based sequence...

Method of using polishing pad

Slurry dispersion system with real time control

Polishing head with membrane position control

Substrate processing control system, substrate processing control m...

Methods of detecting non-conforming substrate processing events dur...

Polishing carrier head with piezoelectric pressure control

Polishing head system and polishing apparatus

Carrier head having abrasive structure on retainer ring

Fixing device and detection system

Planar grinder

Polishing head with local wafer pressure

Polishing device, polishing method, and recording medium for record...

Control of processing parameters during substrate polishing using e...

Patents Applicationslast 30 patents

ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING

WAVINESS PREDICTION DEVICE, WAVINESS PREDICTION METHOD, PROCESSING...

INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...

PAD CONDITIONING DISK GIMBALING CONTROL

POLISHING DEVICE, POLISHING METHOD, AND COMPUTER-READABLE STORAGE M...

DEVICE FOR MEASURING WAFER POLISHING AMOUNT, AND MEASUREMENT METHOD...

DEVICE, METHOD, AND SYSTEM FOR TRANSFORMING MEASUREMENT DATA

MACHINE FOR FINISHING A WORK PIECE, AND HAVING A HIGHLY CONTROLLABL...

POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRA...

POLISHING METHOD, POLISHING APPARATUS, AND NON-TRANSITORY COMPUTER-...

POLISHING APPARATUS AND POLISHING METHOD

INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...

POLISHING HEAD AND POLISHING SYSTEM

SYSTEM AND METHOD FOR CONTROLLING CHEMICAL MECHANICAL PLANARIZATION

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

IN-TOOL AUDIO AND VISUAL BEHAVIOR MONITORING FOR PROCESS CONTROL

METHOD AND SYSTEM FOR SLURRY QUALITY MONITORING

DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...

PLATEN ROTATION DEVICE

POLISHING METHOD AND POLISHING APPARATUS

SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES

METHOD OF USING POLISHING PAD

POLISHING METHOD AND POLISHING APPARATUS

POLISHING TOOL, POLISHING SYSTEM AND METHOD OF POLISHING

POLISHING HEAD WITH MEMBRANE POSITION CONTROL

SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...

SUBSTRATE PROCESSING APPARATUS AND INFORMATION PROCESSING SYSTEM

VEHICLE WAXING SYSTEM AND VEHICLE WAXING METHOD

METHOD FOR DETECTION OF WAFER SLIPPAGE

METHOD OF INFLATING ELASTIC MEMBRANE OF POLISHING HEAD, AND POLISHI...