Membership
Tour
Register
Log in
Control means for lapping machines or devices
Follow
Industry
CPC
B24B37/005
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
Lapping machines or devices Accessories
Current Industry
B24B37/005
Control means for lapping machines or devices
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Resistivity-based adjustment of thresholds for in-situ monitoring
Patent number
12,320,883
Issue date
Jun 3, 2025
Applied Materials, Inc.
Kun Xu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Displacement measurements in semiconductor wafer processing
Patent number
12,322,662
Issue date
Jun 3, 2025
Applied Materials, Inc.
Justin Wong
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing liquid supply system, polishing apparatus, exhausting met...
Patent number
12,311,500
Issue date
May 27, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Peng Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Method of double-side polishing work, method of producing work, and...
Patent number
12,311,496
Issue date
May 27, 2025
Sumco Corporation
Kazushige Takaishi
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for thinning substrates for semiconductor devices
Patent number
12,290,900
Issue date
May 6, 2025
Qorvo US, Inc.
Krishna Chetry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic abrasion compensation system of lower plate and wafer lap...
Patent number
12,285,841
Issue date
Apr 29, 2025
SK SILTRON CO., LTD.
Jae Pyo Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer edge asymmetry correction using groove in polishing pad
Patent number
12,285,838
Issue date
Apr 29, 2025
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Grinding method for workpiece and grinding apparatus
Patent number
12,263,553
Issue date
Apr 1, 2025
Disco Corporation
Keisuke Yamamoto
B24 - GRINDING POLISHING
Information
Patent Grant
Controlling chemical mechanical polishing pad stiffness by adjustin...
Patent number
12,257,664
Issue date
Mar 25, 2025
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Grant
Surface height measurement method using dummy disk
Patent number
12,257,666
Issue date
Mar 25, 2025
Ebara Corporation
Hiroyuki Shinozaki
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and method
Patent number
12,251,789
Issue date
Mar 18, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head with local wafer pressure
Patent number
12,251,788
Issue date
Mar 18, 2025
Applied Materials, Inc.
Andrew Nagengast
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad and method of fabricating semiconductor device using...
Patent number
12,246,408
Issue date
Mar 11, 2025
SK ENPULSE CO., LTD.
Eun Sun Joeng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detection signal processing apparatus and detection signal processi...
Patent number
12,241,738
Issue date
Mar 4, 2025
Ebara Corporation
Hiroto Yamada
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, substrate suction determination method...
Patent number
12,230,529
Issue date
Feb 18, 2025
Ebara Corporation
Osamu Nabeya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing head retaining ring tilting moment control
Patent number
12,214,469
Issue date
Feb 4, 2025
Applied Materials, Inc.
Andrew Nagengast
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing apparatus and method
Patent number
12,208,487
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,211,733
Issue date
Jan 28, 2025
Ebara Corporation
Nobuyuki Takada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Irregular mechanical motion detection systems and method
Patent number
12,172,262
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chunhung Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization tool
Patent number
12,172,263
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Michael Yen
B24 - GRINDING POLISHING
Information
Patent Grant
Monitoring method for chemical mechanical polishing and chemical me...
Patent number
12,151,335
Issue date
Nov 26, 2024
HWATSING TECHNOLOGY CO., LTD.
Xinchun Lu
B24 - GRINDING POLISHING
Information
Patent Grant
Training a machine learning system to detect an excursion of a CMP...
Patent number
12,148,149
Issue date
Nov 19, 2024
Applied Materials, Inc.
Sidney P. Huey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Polishing apparatus
Patent number
12,128,523
Issue date
Oct 29, 2024
Ebara Corporation
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Grant
Machine for finishing a work piece, and having a highly controllabl...
Patent number
12,122,012
Issue date
Oct 22, 2024
II-VI DELAWARE, INC.
Edward J. Gratrix
B24 - GRINDING POLISHING
Information
Patent Grant
Magnetic grinding device and magnetic grinding control method
Patent number
12,115,619
Issue date
Oct 15, 2024
Zhejiang Normal University
Shiju E
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for determining thickness of metal film of wafer, polishing...
Patent number
12,109,664
Issue date
Oct 8, 2024
Hwatsing (Beijing) Technology Co., Ltd.
Xinchun Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platen rotation device
Patent number
12,090,602
Issue date
Sep 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Bruce Cho
B24 - GRINDING POLISHING
Information
Patent Grant
Systems and methods for suction pad assemblies
Patent number
12,087,646
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Hsiang Chao
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and method
Patent number
12,076,831
Issue date
Sep 3, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Chen Wei
B24 - GRINDING POLISHING
Information
Patent Grant
Eddy current sensor
Patent number
12,076,834
Issue date
Sep 3, 2024
Ebara Corporation
Atsushi Abe
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND SYSTEM FOR ONLINE INSPECTION OF SURFACE CONDITION OF POL...
Publication number
20250178157
Publication date
Jun 5, 2025
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Zhe YANG
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND METHOD FOR POLISHING SUBSTRATE
Publication number
20250178159
Publication date
Jun 5, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Shi-Ting Wu
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
Publication number
20250170688
Publication date
May 29, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsi HUANG
B24 - GRINDING POLISHING
Information
Patent Application
INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...
Publication number
20250153302
Publication date
May 15, 2025
EBARA CORPORATION
Seungho YUN
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE SUCTION DETERMINATION METHOD...
Publication number
20250140594
Publication date
May 1, 2025
EBARA CORPORATION
Osamu Nabeya
B24 - GRINDING POLISHING
Information
Patent Application
EDGE AND HOT SPOT COMPENSATION TECHNIQUES IN CHEMICAL MECHANICAL PO...
Publication number
20250114897
Publication date
Apr 10, 2025
Applied Materials, Inc.
Zhize Zhu
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
Publication number
20250118604
Publication date
Apr 10, 2025
EBARA CORPORATION
Akira FUKUNAGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INDIVIDUALLY ROTATABLE PLATENS AND CONTROL OF CARRIER HEAD SWEEP
Publication number
20250114896
Publication date
Apr 10, 2025
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD WITH DECOUPLED MEMBRANE POSITION CONTROL
Publication number
20250108473
Publication date
Apr 3, 2025
Applied Materials, Inc.
Andrew J. Nagengast
B24 - GRINDING POLISHING
Information
Patent Application
FINDING SUBSTRATE NOTCH ON SUBSTRATE BETWEEN PLATENS IN CHEMICAL ME...
Publication number
20250108474
Publication date
Apr 3, 2025
Applied Materials, Inc.
Nojan Motamedi
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, AND ABNORMALITY DETERMINATION METHOD
Publication number
20250073841
Publication date
Mar 6, 2025
EBARA CORPORATION
Yoshimasa OZONE
B24 - GRINDING POLISHING
Information
Patent Application
ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING
Publication number
20250062163
Publication date
Feb 20, 2025
Applied Materials, Inc.
Nicholas A. Wiswell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAVINESS PREDICTION DEVICE, WAVINESS PREDICTION METHOD, PROCESSING...
Publication number
20250058425
Publication date
Feb 20, 2025
Resonac Corporation
Shuki HASHIMOTO
B24 - GRINDING POLISHING
Information
Patent Application
INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...
Publication number
20250050461
Publication date
Feb 13, 2025
EBARA CORPORATION
Kenichi TAKEBUCHI
B24 - GRINDING POLISHING
Information
Patent Application
PAD CONDITIONING DISK GIMBALING CONTROL
Publication number
20250041985
Publication date
Feb 6, 2025
Applied Materials, Inc.
Justin H. WONG
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING DEVICE, POLISHING METHOD, AND COMPUTER-READABLE STORAGE M...
Publication number
20250041986
Publication date
Feb 6, 2025
SANOH INDUSTRIAL CO., LTD.
Hideo AIDA
B24 - GRINDING POLISHING
Information
Patent Application
DEVICE FOR MEASURING WAFER POLISHING AMOUNT, AND MEASUREMENT METHOD...
Publication number
20250041988
Publication date
Feb 6, 2025
SK SILTRON CO., LTD.
Sangho LEE
B24 - GRINDING POLISHING
Information
Patent Application
DEVICE, METHOD, AND SYSTEM FOR TRANSFORMING MEASUREMENT DATA
Publication number
20250025981
Publication date
Jan 23, 2025
Samsung Electronics Co., Ltd.
Hojoon Lee
B24 - GRINDING POLISHING
Information
Patent Application
MACHINE FOR FINISHING A WORK PIECE, AND HAVING A HIGHLY CONTROLLABL...
Publication number
20250018521
Publication date
Jan 16, 2025
II-VI Delaware, Inc.
Edward J. GRATRIX
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRA...
Publication number
20250010431
Publication date
Jan 9, 2025
Applied Materials, Inc.
Jianjun HU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND NON-TRANSITORY COMPUTER-...
Publication number
20240424635
Publication date
Dec 26, 2024
EBARA CORPORATION
HIROKI NAKAMURA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20240416479
Publication date
Dec 19, 2024
EBARA CORPORATION
Kenji KODERA
B24 - GRINDING POLISHING
Information
Patent Application
INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...
Publication number
20240399527
Publication date
Dec 5, 2024
EBARA CORPORATION
Ryo NAKAGOMI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD AND POLISHING SYSTEM
Publication number
20240399526
Publication date
Dec 5, 2024
EBARA CORPORATION
Yuichi KATO
B24 - GRINDING POLISHING
Information
Patent Application
SYSTEM AND METHOD FOR CONTROLLING CHEMICAL MECHANICAL PLANARIZATION
Publication number
20240404894
Publication date
Dec 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wei HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240391049
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Cheng LIN
B24 - GRINDING POLISHING
Information
Patent Application
IN-TOOL AUDIO AND VISUAL BEHAVIOR MONITORING FOR PROCESS CONTROL
Publication number
20240391048
Publication date
Nov 28, 2024
Applied Materials, Inc.
Justin H. WONG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR SLURRY QUALITY MONITORING
Publication number
20240375238
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing company Ltd.
CHIH-CHIANG TSENG
B24 - GRINDING POLISHING
Information
Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
Publication number
20240378718
Publication date
Nov 14, 2024
Applied Materials, Inc.
Sidney P. Huey
B24 - GRINDING POLISHING
Information
Patent Application
PLATEN ROTATION DEVICE
Publication number
20240367286
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Bruce CHO
B24 - GRINDING POLISHING