1. Field
Embodiments of the present invention relate to the field of filled polymer materials. More particularly, embodiments of the present invention related to a filled polymer composition for use in etch chamber components.
2. Background Information
Polymer materials used in etch chamber components are exposed to plasmas within the etch chamber during both substrate etching and chamber cleaning processes. For example, plasma etch residues and byproducts formed on chamber components can pose a chronic problem, and therefore the etch chamber is periodically cleaned to prevent process drift and particle generation. As a result, the polymer materials can themselves become a source of particle adders and also must be periodically replaced because they are eroded by the various etching and cleaning plasmas.
Embodiments of the present invention disclose a filled polymer composition including a particle filler dispersed in a polymer matrix. The particle filler can be Nb2O5, YF3, AlN, Al, SiC, Si3N4, rare earth oxides, and combinations thereof. The filled polymer composition can be utilized in any chamber or service environment exposed to various plasmas to prolong the service life, to improve the application temperature, to advance process uniformity, to decrease the amount of formed particles, and to decrease metal contamination. In an embodiment, the filled polymer composition is utilized as a bonding adhesive for an electrostatic chuck, bonding adhesive for a shower head, bonding adhesive for a liner, a sealing material, an O-ring, or a plastic component.
Embodiments of the present invention disclose a filled polymer composition and applications of the filled polymer composition in plasma chamber components.
Various embodiments described herein are described with reference to figures. In the following description, numerous specific details are set forth, such as specific configurations, compositions, and processes, etc., in order to provide a thorough understanding of the present invention. However, certain embodiments may be practiced without one or more of these specific details, or in combination with other known methods and configurations. In other instances, well-known processes and manufacturing techniques have not been described in particular detail in order to not unnecessarily obscure the present invention. Reference throughout this specification to “one embodiment” or “an embodiment” means that a particular feature, configuration, composition, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. Thus, the appearances of the phrase “in one embodiment” or “an embodiment” in various places throughout this specification are not necessarily referring to the same embodiment of the invention. Furthermore, the particular features, configurations, compositions, or characteristics may be combined in any suitable manner in one or more embodiments.
Embodiments of the invention disclose a filled polymer composition including a particle filler dispersed in a polymer matrix. In an embodiment, the particle filler has an average particle size of 10 nm-10 μm, and can be a rare earth oxide, Nb2O5, YF3, AlN, SiC, Si3N4, and combinations thereof. In another embodiment, the particle filler can be a metal such as Al powder of the same average particle size. The particle filler is tightly combined with the polymer matrix to provide a composition with improved properties including excellent plasma resistance, material structure stability (low outgassing), high temperature application, improved thermal properties (thermal conductivity and thermal expansion), advanced mechanical properties (elongation, elastic modulus, lap share, tensile strength) and much reduced particle generation potential. The filled polymer composition can be utilized in any chamber or service environment exposed to various plasmas to prolong the service life, to improve the application temperature, to advance process uniformity, to decrease the amount of formed particles, and to decrease metal contamination. In an embodiment, the filled polymer composition is utilized as a bonding adhesive for electrostatic chuck, a bonding adhesive for shower head, a bonding adhesive for liner, a sealing material, an O-ring, or a plastic component.
As used herein, the term “rare earth oxide” means an oxide of the rare earth elements in the Periodic Table of Elements called the Lanthanide Series that runs from atomic number 57 to 71, and additionally elements yttrium #39 and scandium #21 because they share similar properties to the elements of the Lanthanide Series. For example, the particle filler can be a rare earth oxide such as, but not limited to, Y2O3, Sc2O3, Er2O3, Nd2O3, Sm2O3 and Yb2O3.
The polymer matrix can be a variety of materials. For example, the polymer matrix may be fluorinated carbon based, polyimide based, ether ketone based, and silicon based including partially and fully fluorinated silicon. In an embodiment, the polymer matrix is a perfluoroelastomer, thermosetting silicone, a thermoplastic acrylic, or poly(etheretherketone) (PEEK).
In an embodiment where the filled polymer composition is employed as a bonding adhesive, for example, for an electrostatic chuck, shower head, and/or liner, it may be preferable to adjust the materials properties of the filled polymer composition to minimize the coefficient of thermal expansion (CTE) mismatch between a metal and a ceramic. In an embodiment, a higher tensile elongation %, higher tensile strength, and lower Young's Modulus are desirable for electrostatic chuck bonding application. For example, the filled polymer composition may exhibit a tensile elongation % above 190%, a tensile strength above 2.2 MPa, and Young's Modulus below 2.0 MPa. In an embodiment, the filled polymer composition may exhibit a tensile elongation % above 105%, and Young's Modulus below 3.8 MPa.
The filled polymer composition is not limited to adhesive applications. In an embodiment, the filled polymer composition can be a seal such as an O-ring.
In an embodiment, the filled polymer composition can be an insert plastic part such as a cathode insulator.
The filled polymer composition can be implemented into a variety of critical etch chamber components to prolong the service life, to improve the application temperature, to advance process uniformity, to decrease the amount of formed particles, and to reduce metal contamination. In addition, the filled polymer composition can be applied to other service environments, not limited to plasma chambers, where the excellent plasma resistance performance and adjustable materials properties are required.
The filled polymer composition can be prepared utilizing a number of known techniques depending upon application. In an embodiment, the filled polymer composition can be prepared by adding a particle filler to a solution including a dissolved polymer composition. The particle filler can be uniformly dispersed in the solution utilizing a dispersing agent, cast, cured, and post-cure baked as is known in the art. In another embodiment, particulate polymer and particle filler can be physically mixed together by stirring or ball milling as is known in the art.
In one aspect, embodiments of the invention disclose a filled polymer composition in which the particle size of the particle filler can be varied to obtain the required materials properties. In an embodiment, the particle filler has an average particle size of 10 nm-10 μm. In an embodiment, the particle filler has a particle size small enough that the particle itself does not become a contaminant. For example, the particle filler may have a particles size of less than 1 μm. It has been found that below approximately 10 nm particles can be difficult to evenly disperse. Larger particles are beneficial when matching of thermal conductivity of the filled polymer composition to another material is desired. However, above approximately 10 μm the particle filler can act as a physical barrier to outgassing during post-cure baking of the filled polymer composition. Consequently, the filled polymer composition may subsequently outgas into the plasma chamber during operation if the particle filler has a particle size greater than 10 μm.
In one aspect, embodiments of the invention disclose a filled polymer composition in which the volume % of the particle filler can be varied to obtain the required materials properties. In one embodiment, the filled polymer composition includes 50%-75% particle filler by volume. Maintaining the volume density of the particle filler is particularly beneficial for applications where the filled polymer composition is exposed to significant plasma etching, such as, but not limited to, a bonding adhesive for a shower head, electrostatic chuck and/or liner. The specific volume composition obtains the synergetic effect of changing the characteristic etch rate of the entire filled polymer composition. While individually, the polymer matrix and particle filler possess different characteristic etch rates to specific plasma chemistries, when the filled polymer composition includes 50%-75% particle filler by volume the etch rate of the entire filled polymer composition is improved. This is accomplished by controlling the volume density of particles such that the particles touch one another, and can further bond or coalesce when exposed to a plasma process such as a plasma etching or cleaning process.
Plasma chamber components comprising a filled polymer composition in accordance with embodiments of the invention may demonstrate increased plasma resistance which can be measured by surface erosion and surface morphology. Table I includes normalized surface erosion data of filled polymer compositions for adhesive applications in accordance with the present invention, compared to the base polymer composition of thermosetting silicone and a thermoplastic acrylic polymer filled with Al mesh and TiB2 filler.
As shown in Table I, an embodiment in which an adhesive comprises a filled polymer composition containing 50%-75% by volume Y2O3 filler particles with an average particle size of 380 nm embedded in a thermosetting silicone matrix exhibits the lowest normalized surface erosion for the three plasma conditions. For example, when exposed to a CH4/CHF3 plasma for 5 RF hours, thermosetting silicone experiences 2 times, and Al mesh with TiB2 filled thermoplastic acrylic experiences 20 times the amount of surface erosion. Fluorine chemistries such as CF4/CHF3 are etch chemistries often utilized in dielectric substrate etching. HBr/Cl2/CF4/O2 chemistries are etch chemistries often utilized in conductive substrate etching. O2 and SiCl4 chemistries are etch chamber clean chemistries. SiCl4 in particular is utilized as an etch chamber clean chemistry to remove AlF contamination from chamber components which forms during dielectric and conductive surface etching.
In another embodiment, the filled polymer composition of the present invention is implemented in a plasma chamber as an O-ring. For example, the filled polymer composition can contain approximately 15% by volume Y2O3 particle filler in a perfluoroelastomer polymer matrix, which exhibits approximately 4 times less erosion than an unfilled perfluoroelastomer polymer matrix when exposed to a CF4 plasma, approximately 7 times less erosion when exposed to an O2 plasma, and approximately 5 times less erosion when exposed to a CF4/O2 plasma. The improved plasma resistance improves the lifetime, reduces contamination, and particle generation.
In another embodiment, the filled polymer composition of the present invention is implemented in a plasma chamber as a high performance plastic, such as a cathode insulator. For example, the filled polymer composition includes Y2O3 particle filler in a PEEK polymer matrix. In such an application, the particle filler improves the tensile strength, tensile modulus, flexural modulus, and surface resistivity compared to an unfilled PEEK cathode insulator. In addition, surface erosion is improved over 100 times compared to an unfilled PEEK composition when exposed to an O2 plasma for 14 RF hours.
In the foregoing specification, various embodiments of the invention have been described. It will, however, be evident that various modifications and changes may be made thereto without departing from the broader spirit and scope of the invention as set forth in the appended claims. The specification and drawings are, accordingly, to be regarded in an illustrative sense rather than a restrictive sense.
The present patent application hereby claims the priority benefit of U.S. Provisional Patent Application No. 61/121,490, filed Dec. 10, 2008.
Number | Date | Country | |
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61121490 | Dec 2008 | US |