Claims
- 1. A fixing structure of a ceramic susceptor, said structure comprising a ceramic susceptor to be heated and having mounting and back faces, a ceramic supporting member joined with said back face of said susceptor, and a chamber fixing said supporting member,
wherein said supporting member has an outer wall surface, a continuous and integral curved part is formed between said outer wall surface and said back face, said curved part has a radius of curvature R of not smaller than 4 mm and not larger than 25 mm in the longitudinal direction of said supporting member, and said supporting member has a minimum wall thickness t of not smaller than 1 mm and not larger than 15 mm.
- 2. The fixing structure of claim 1, wherein said ceramic susceptor has a thickness T of not smaller than 3 mm and not larger than 50 mm.
- 3. The fixing structure of claim 1, wherein said supporting member has a joining face joined with said ceramic susceptor and an end face opposite to said joining face, and the width D1 said joining face at the outer profile thereof is smaller than the width D2 of said end face at the outer profile thereof.
- 4. The fixing structure of claim 1, wherein said ceramic susceptor is joined with said supporting member by means of solid phase welding.
- 5. A supporting structure of a ceramic susceptor, said structure comprising a ceramic susceptor to be heated and having mounting and back faces, and a ceramic supporting member joined with said back face of said susceptor,
wherein said supporting member has an outer wall surface, a continuous and integral curved part is formed between said outer wall surface and said back face, said curved part has a radius of curvature R of not smaller than 4 mm and not larger than 25 mm in the longitudinal direction of said supporting member, and said supporting member has a minimum wall thickness t of not smaller than 1 mm and not larger than 15 mm.
- 6. The supporting structure of claim 5, wherein said ceramic susceptor has a thickness T of not smaller than 3 mm and not larger than 50 mm.
- 7. The supporting structure of claim 5, wherein said supporting member has a joining face joined with said ceramic susceptor and an end face opposite to said joining face, the width D1 of said joining face at the outer profile thereof is smaller than the width D2 of said end face at the outer profile thereof.
- 8. The supporting structure of claim 5, wherein said ceramic susceptor is joined with said supporting member by means of solid phase welding.
- 9. A ceramic supporting member to be joined with a ceramic susceptor to be heated and having mounting and back faces,
wherein said supporting member has an outer wall surface, a joining face to be joined with said back face of said susceptor and an end face opposite to said joining face, a continuous and integral curved part is formed between said outer wall surface and said joining face, said curved part has a radius of curvature R of not smaller than 4 mm and not larger than 25 mm in the longitudinal direction of said supporting member, and said supporting member has a minimum wall thickness t of not smaller than 1 mm and not larger than 15 mm.
- 10. The supporting member of claim 9, wherein the width D1 of said joining face at the outer profile thereof is smaller than the width D2 of said end face at the outer profile thereof.
Priority Claims (1)
Number |
Date |
Country |
Kind |
P2002-90330 |
Mar 2002 |
JP |
|
Parent Case Info
[0001] This application claims the benefit of Japanese Patent Application P2002-90330 filed on Mar. 28, 2002, the entirety of which is incorporated by reference.