Number | Name | Date | Kind |
---|---|---|---|
3813828 | Bennett | Jun 1974 | |
5191738 | Nakazato et al. | Mar 1993 | |
5245790 | Jerbic | Sep 1993 | |
5314843 | Yu et al. | May 1994 | |
5320706 | Blackwell | Jun 1994 | |
5352625 | Hoshi | Oct 1994 | |
5362669 | Boyd et al. | Nov 1994 | |
5377451 | Leoni et al. | Jan 1995 | |
5421769 | Schultz et al. | Jun 1995 | |
5424224 | Allen et al. | Jun 1995 | |
5429711 | Watanabe et al. | Jul 1995 | |
5486129 | Sandhu et al. | Jan 1996 | |
5494857 | Cooperman et al. | Feb 1996 | |
5697832 | Greenlaw | Dec 1997 | |
5782678 | Cesna et al. | Jul 1998 | |
5897425 | Fisher, Jr. et al. | Apr 1999 |
Number | Date | Country |
---|---|---|
000481410 | Dec 1975 | SUX |
001592498 | Jun 1981 | GBX |
Entry |
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Cawley, Measuring Crystal Plate Thickness in a Lapping Operation, Western Electric, pp. 7-8, Jul. 1981. |
Nordyke, Disk Substrate Polisher, IBM Technical Disclosure Bulletin, vol. 26, pp. 1652-1654, Aug. 1983. |
Web Page for Zygo, http://www.zygo.com/semicon/semicon.htm, entitled Semiconductor Manufacturing, 3pgs., Sep 11, 1996. |