FLOW SPEED MEASURING APPARATUS AND FLOW SPEED MEASURING METHOD

Abstract

Two different kinds of fluids are sent to a flow path for measurement in which a plurality of detection sections are provided, transit time of consecutive fluid, following preceding fluid, at each detection unit is detected, and a flow speed of the fluid is found from time required for the consecutive fluid to move between the plurality of detection sections. The present invention provides a measuring apparatus which measures the flow speed and a rate of flow in the flow path with suppressing an influence from the external to the fluid thereby, and a measuring method using the measuring apparatus.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating a measuring section in an embodiment of the present invention.

FIG. 2 is a schematic diagram illustrating a planar array of a detecting section in an embodiment of the present invention.

FIG. 3 is a schematic diagram illustrating a planar array of a detecting section in an embodiment of the present invention.

FIGS. 4A, 4B, 4C, 4D, 4E and 4F are diagrams of describing a production method of a detecting section in an embodiment of the present invention.

FIGS. 5A, 5B and 5C are diagrams of describing a production method of a detecting section in an embodiment of the present invention.

FIGS. 6A, 6B and 6C are diagrams of describing a production method of a detecting section in an embodiment of the present invention.

FIG. 7 is a diagram of describing a production method of a detecting section in an embodiment of the present invention.

FIG. 8 is a diagram of illustrating an example of construction of a measuring section in an embodiment of the present invention.

FIG. 9 is a diagram of illustrating an example of construction of a measuring section in an embodiment of the present invention.

FIG. 10 is a block diagram of a detecting device in an embodiment of the present invention.

FIGS. 11A, 11B and 11C illustrate an example of detection in a first example.

FIG. 12 illustrates an example of a SEM image of a metal structure of a detecting section of the first example.

FIG. 13 illustrates an example of a SEM image of a metal structure of a detecting section of a second example.

FIG. 14 illustrates an example of construction of a detecting section of a third example.

Claims

1. A flow speed measuring apparatus for measuring a flow speed of fluid which flows through an inside of a flow path continuously, including: a flow path for measurement in which two different kinds of fluids can be continuously sent; anda detecting section for detecting transit of a consecutive fluid following a preceding fluid between two different kinds of fluids, wherein a plurality of the detecting sections are provided in the flow path for measurement along a flow direction of the fluid.

2. The apparatus according to claim 1, further including a calculating unit of calculating a duration when the consecutive fluid passes through between the detecting sections from transit time of the consecutive fluid detected in the detecting section in an upstream section, and transit time of the consecutive fluid detected in a downstream section, and further calculating at least one of a flow speed and a rate of flow of the fluid on the basis of the duration.

3. The apparatus according to claim 1, further including an optical unit for detecting a refractive index change of the fluid.

4. The apparatus according to claim 3, wherein the optical unit includes a unit of detecting the change of the refractive index by a plasmon resonance method.

5. The apparatus according to claim 4, wherein the detecting section has a plurality of metal structures, arranged with having a gap mutually, on a surface which contacts the fluid, and detects the refractive index change of the fluid, which contacts the surface, using the surface plasmon resonance method by the optical unit.

6. The apparatus according to claim 4, wherein the detecting section has a metal film on a surface which contacts the fluid, and detects the refractive index change of the fluid, which contacts the surface, using the surface plasmon resonance method by the optical unit.

7. A flow speed measuring method which measures a flow speed of liquid which flows in a flow path, which comprises the steps of: sending preceding fluid and consecutive fluid, which is different from the preceding fluid, continuously to a flow path for measurement which has a plurality of detecting sections arranged with a predetermined gap;detecting transit time of the consecutive fluid in each detecting section; andcalculating elapsed time when the consecutive fluid arrives at the detecting section, located in downstream, from the detecting section, located in upstream, from transit time in the respective detecting sections, and further calculating a flow speed of the fluid on the basis of the elapsed time.

8. The measuring method according to claim 7, wherein the detecting section detects transit time of the consecutive fluid by detecting a refractive index change at the time of the consecutive fluid passing with following the preceding fluid.

9. The measuring method according to claim 8, wherein an optical unit detects the refractive index change.

10. The measuring method according to claim 9, wherein the optical unit detects the refractive index change using a plasmon resonance method.