Claims
- 1. A machine for processing semiconductor wafers, comprising:a combustible solvent supply; a cooling water supply; a processing chamber; a solvent heater including a solvent coil within the metal block, the solvent coil connecting with the solvent supply and the processing chamber; a cooling water coil within the metal block, the cooling water coil connecting with the cooling water supply; and at least one heating element in the metal block.
- 2. The machine of claim 1 further comprising a layer of insulation around the metal block.
- 3. The machine of claim 2 further comprising a container surrounding the metal block, wherein a purge gas space is provided between the layer of insulation and inner walls of the container.
- 4. The machine of claim 1 further comprising a container surrounding the metal block, wherein inner walls of the container are separated from the metal block by an air gap.
- 5. The machine of claim 1 wherein the solvent coil surrounds the cooling water coil.
- 6. The machine of claim 5 wherein the solvent coil is concentric with a longitudinal axis of the cooling water coil, and where a plurality of solvent heating elements are equally spaced apart around the longitudinal axis of the cooling water coil.
- 7. The machine of claim 1 wherein the solvent heating element includes a first leg within the cooling coil and a second leg outside of the cooling coil.
- 8. The machine of claim 1 wherein the metal block comprises a casting and the solvent heating element is cast in place within the metal casting.
- 9. A machine for processing semiconductor wafers using a combustible solvent, comprising:a combustible solvent supply; a cooling water supply; a processing chamber; a combustible solvent heater having a block of metal; a solvent coil extending through the block of metal and connecting with the solvent supply and an outlet connecting with the processing chamber; a cooling coil extending through the block of metal and having an inlet connecting with the cooling water supply; at least one heating element in the block of metal; a container around the block metal with a purge gas space between the container and the block of metal; and a purge gas supply connecting with the purge gas space.
Parent Case Info
This application is a continuation-in-part of Ser. No. 60/142,684, filed Jul. 6, 1999, incorporated herein by reference.
US Referenced Citations (38)
Non-Patent Literature Citations (1)
Entry |
European Patent Application 428,983 May 1991. |
Provisional Applications (1)
|
Number |
Date |
Country |
|
60/142684 |
Jul 1999 |
US |