Apparatus for thermal treatment

Industry

CPC
H01L21/67098

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67098Apparatus for thermal treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
High pressure wafer processing systems and related methods
- Patent number 12,198,951
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and oxygen removal method thereof
- Patent number 12,165,883
- Issue date Dec 10, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Min Zuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for cooling a heating element
- Patent number 12,158,305
- Issue date Dec 3, 2024
- Kanthal GmbH
- Ralph Miethe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating substrate
- Patent number 12,154,796
- Issue date Nov 26, 2024
- Semes Co., Ltd.
- Joo Jib Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus for component for semiconductor production appar...
- Patent number 12,139,788
- Issue date Nov 12, 2024
- Taiyo Nippon Sanso Corporation
- Akira Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,131,902
- Issue date Oct 29, 2024
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, plurality of electrodes and method...
- Patent number 12,094,735
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Tsuyoshi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing line edge roughness and mitigating defects by wafer freezing
- Patent number 12,087,601
- Issue date Sep 10, 2024
- International Business Machines Corporation
- Karen E. Petrillo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of manufacturing solder bump
- Patent number 12,068,176
- Issue date Aug 20, 2024
- Samsung Electronics Co., Ltd.
- Sungyong Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Progressive heating of components of substrate processing systems u...
- Patent number 12,062,554
- Issue date Aug 13, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,051,596
- Issue date Jul 30, 2024
- SCREEN Holdings Co., Ltd.
- Mao Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system for processing substrates with an elect...
- Patent number 12,051,602
- Issue date Jul 30, 2024
- ASM IP Holding B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 12,050,138
- Issue date Jul 30, 2024
- Kokusai Electric Corporation
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,042,813
- Issue date Jul 23, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi Abe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and method of cleaning substrate pro...
- Patent number 12,046,485
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Shusei Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding head for mounting components and die bonder with such a bon...
- Patent number 12,046,490
- Issue date Jul 23, 2024
- Besi Switzerland AG
- Rene Kroehnert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
- Patent number 12,042,828
- Issue date Jul 23, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and methods for calibrating a se...
- Patent number 12,040,200
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Shiva Rajavelu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,040,199
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sintering devices and pressure sintering mechanisms with controllab...
- Patent number 12,038,232
- Issue date Jul 16, 2024
- QUICK INTELLIGENT EQUIPMENT CO., LTD.
- Guoqiang Qi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication system embedded with effective baking module
- Patent number 12,033,863
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and dummy substrate processing method
- Patent number 12,027,384
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Yutaka Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing wafer
- Patent number 12,020,975
- Issue date Jun 25, 2024
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced wafer soak for thin film deposition
- Patent number 12,014,921
- Issue date Jun 18, 2024
- Lam Research Corporation
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical batch furnace assembly with detector to detect cassette
- Patent number 12,009,241
- Issue date Jun 11, 2024
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transferring unit, substrate treating apparatus including the same,...
- Patent number 12,004,268
- Issue date Jun 4, 2024
- Semes Co., Ltd.
- Ji-Hwan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mitigating thermal impacts on adjacent stacked semiconductor devices
- Patent number 11,984,427
- Issue date May 14, 2024
- Sui Chi Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal chamber with improved thermal uniformity
- Patent number 11,978,646
- Issue date May 7, 2024
- Applied Materials, Inc.
- Dongming Iu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022703
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR HEAT TREATMENT MEMBER
- Publication number 20250002390
- Publication date Jan 2, 2025
- CoorsTek GK
- Kanta DOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...
- Publication number 20250004489
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS
- Publication number 20250006541
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Riichiro ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PLURALITY OF ELECTRODES AND METHOD...
- Publication number 20240412987
- Publication date Dec 12, 2024
- Kokusai Electric Corporation
- Tsuyoshi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID-STATE BONDING METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR CHU...
- Publication number 20240404869
- Publication date Dec 5, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Jason STEPHENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD
- Publication number 20240404849
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20240404854
- Publication date Dec 5, 2024
- Samsung Electronics Co., Ltd.
- Jaeho Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
- Publication number 20240395569
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20240377145
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- SungBae Kim
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME
- Publication number 20240379394
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Huang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER STRUCTURE, MULTILAYER STRUCTURE, PROCESSING APPARATUS AND ME...
- Publication number 20240379483
- Publication date Nov 14, 2024
- Kokusai Electric Corporation
- Shuhei SAIDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR HEAT TREATMENT DEVICE AND METHOD FOR CONTROLLING PRES...
- Publication number 20240355646
- Publication date Oct 24, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yan JIA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240347351
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MITIGATING THERMAL IMPACTS ON ADJACENT STACKED SEMICONDUCTOR DEVICES
- Publication number 20240347505
- Publication date Oct 17, 2024
- Lodestar Licensing Group LLC
- Sui Chi Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE
- Publication number 20240347345
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE SUBSTRATE FOR FABRICATION OF BETA GALLIUM OXIDE DEVICES
- Publication number 20240347339
- Publication date Oct 17, 2024
- Syrnatec, Inc.
- Yash Suresh Mirchandani
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF PERFORMING MAINTENANCE ON SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20240339307
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Yuya MINOURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20240339340
- Publication date Oct 10, 2024
- ASM IP HOLDING B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPACER DEVICE FOR A HEATING SYSTEM FOR HEATING LARGE-AREA SUBSTRATE...
- Publication number 20240339354
- Publication date Oct 10, 2024
- SINGULUS TECHNOLOGIES AG
- Sergiy BORODIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR COMPENSATING MANUFACTURING ERROR IN SEMICONDU...
- Publication number 20240332094
- Publication date Oct 3, 2024
- Prosemi Co., Ltd.
- Wen-Shian CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE
- Publication number 20240321574
- Publication date Sep 26, 2024
- ROBERT BOSCH GmbH
- Mirjam Henn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240321596
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Masanao Osanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR CALIBRATING A SE...
- Publication number 20240321605
- Publication date Sep 26, 2024
- ASM IP HOLDING B.V.
- Shiva Rajavelu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR COLLECTING BY-PRODUCT FOR SEMICONDUCTOR MANUFACTURING...
- Publication number 20240321595
- Publication date Sep 26, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD, SEMICONDUCTOR SUBSTRA...
- Publication number 20240312779
- Publication date Sep 19, 2024
- FILNEX INC.
- Mitsuhiko OGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING WAFER
- Publication number 20240312828
- Publication date Sep 19, 2024
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240261814
- Publication date Aug 8, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20240258138
- Publication date Aug 1, 2024
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS

Apparatus for thermal treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

High pressure wafer processing systems and related methods

Semiconductor device and oxygen removal method thereof

Methods and systems for cooling a heating element

Method for treating substrate

Cleaning apparatus for component for semiconductor production appar...

Heating platform, thermal treatment and manufacturing method

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, plurality of electrodes and method...

Reducing line edge roughness and mitigating defects by wafer freezing

Apparatus and method of manufacturing solder bump

Progressive heating of components of substrate processing systems u...

Heat treatment method and heat treatment apparatus

Substrate processing system for processing substrates with an elect...

Substrate processing apparatus, and thermocouple

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and method of cleaning substrate pro...

Bonding head for mounting components and die bonder with such a bon...

Wafer cleaning apparatus and wafer cleaning method using the same

Semiconductor processing apparatus and methods for calibrating a se...

Substrate processing apparatus for processing substrates

Sintering devices and pressure sintering mechanisms with controllab...

Semiconductor fabrication system embedded with effective baking module

Heat treatment apparatus and dummy substrate processing method

Apparatus and method for processing wafer

Plasma enhanced wafer soak for thin film deposition

Vertical batch furnace assembly with detector to detect cassette

Transferring unit, substrate treating apparatus including the same,...

Mitigating thermal impacts on adjacent stacked semiconductor devices

Thermal chamber with improved thermal uniformity

Vaporizer, substrate processing apparatus and method for manufactur...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR HEAT TREATMENT MEMBER

TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...

SUBSTRATE-PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, PLURALITY OF ELECTRODES AND METHOD...

SOLID-STATE BONDING METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR CHU...

SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

SUBSTRATE PROCESSING DEVICE

SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME

HEATER STRUCTURE, MULTILAYER STRUCTURE, PROCESSING APPARATUS AND ME...

SEMICONDUCTOR HEAT TREATMENT DEVICE AND METHOD FOR CONTROLLING PRES...

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

MITIGATING THERMAL IMPACTS ON ADJACENT STACKED SEMICONDUCTOR DEVICES

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

COMPOSITE SUBSTRATE FOR FABRICATION OF BETA GALLIUM OXIDE DEVICES

METHOD OF PERFORMING MAINTENANCE ON SUBSTRATE PROCESSING APPARATUS,...

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SPACER DEVICE FOR A HEATING SYSTEM FOR HEATING LARGE-AREA SUBSTRATE...

METHOD AND SYSTEM FOR COMPENSATING MANUFACTURING ERROR IN SEMICONDU...

METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR CALIBRATING A SE...

APPARATUS FOR COLLECTING BY-PRODUCT FOR SEMICONDUCTOR MANUFACTURING...

SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD, SEMICONDUCTOR SUBSTRA...

APPARATUS AND METHOD FOR PROCESSING WAFER

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PARTICLE BEAM INSPECTION APPARATUS