Fluid recirculation system for use in vapor phase particle production system

Information

  • Patent Grant
  • 8906316
  • Patent Number
    8,906,316
  • Date Filed
    Friday, May 31, 2013
    10 years ago
  • Date Issued
    Tuesday, December 9, 2014
    9 years ago
Abstract
A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.
Description
FIELD OF THE INVENTION

The present invention relates generally to the field of particle production. More specifically, the present invention relates to systems and methods for recirculating fluid used within a vapor phase particle production system.


BACKGROUND OF THE INVENTION

Many vapor phase particle production systems produce mixtures of particles and fluid. Typically, these mixtures are high in temperature and thus reactive. In some systems, these mixtures are quenched via introduction of a conditioning fluid. The conditioning fluid acts to cool the mixture and promote particle formation, and often acts as a carrier for the particles. Typically, particles are sampled or collected from the mixture following introduction of the conditioning fluid. Then, the conditioning fluid is vented to the ambient, or otherwise disposed. This disposal occurs because typical particle production systems require high purity gases as conditioning fluids. In many cases, the purity must be on the order of 99.9999% purity. The unit cost of particles produced using these methods is inflated by the need to use fresh fluid for each production run.


What is needed in the art is a way to reduce the costs associated with a vapor phase particle production system, while at the same time maintaining a high purity level for the system.


SUMMARY OF THE INVENTION

In one aspect of the present invention, a particle production system comprises a particle production core and a fluid recirculation system fluidly coupled to the particle production core. The production core is configured to produce a reactive particle-gas mixture from a precursor material and a working gas, and to quench the reactive particle-gas mixture using a conditioning fluid, thereby producing a cooled particle-gas mixture. The cooled particle-gas mixture comprises a plurality of precursor material particles and an output fluid. The output fluid includes the conditioning fluid. The fluid recirculation system is configured to receive the cooled particle-gas mixture from the particle production core, and to remove the plurality of precursor material particles from the cooled particle-gas mixture, thereby producing a filtered output that includes the output fluid. The fluid recirculation system is also configured to modulate a content ratio of the filtered output, thereby producing a content-controlled, filtered output, wherein the filtered output comprises a distinct primary fluid and a distinct secondary fluid, and the content ratio is the ratio of the primary fluid to the secondary fluid. The fluid recirculation system is further configured to channel the content-controlled, filtered output to the particle production core, wherein the content-controlled, filtered output is provided to the particle production core as the conditioning fluid to be used in quenching the reactive particle-gas mixture.


In a preferred embodiment, the particle production core comprises a particle production reactor and a quench chamber fluidly coupled to the particle production reactor. The particle production reactor is configured to receive the precursor material and the working gas, to energize the working gas to form a plasma, and to apply the plasma to the precursor material, thereby producing the reactive particle-gas mixture. The quench chamber is configured to receive the reactive particle-gas mixture from the particle production reactor, to receive the content-controlled, filtered output from the recirculation system as the conditioning fluid, and to mix the received conditioning fluid with the reactive particle-gas mixture, thereby producing the cooled particle-gas mixture.


In some embodiments, the fluid recirculation system is further configured to control the temperature of the filtered output prior to modulation of the content ratio.


Furthermore, in some embodiments, the fluid recirculation system is further configured to sense the ratio between the primary fluid and the secondary fluid, and to modulate the content ratio of the filtered output by adjusting the amount of either the primary fluid or the secondary fluid in the content-controlled, filtered output based on the sensed ratio.


In another aspect of the present invention, a particle production system comprises a particle production reactor and a quench chamber having a fluid inlet, a reactive mixture inlet fluidly coupled to the particle production reactor, and a cooled mixture outlet. The particle production system also comprises a filter element fluidly coupled to the cooled mixture outlet, a temperature control module fluidly coupled to the filter element, a content ratio control module fluidly coupled to the temperature control module, and a channeling element fluidly coupling the content ratio control module to the fluid inlet of the quench chamber.


The particle production reactor is configured to produce a reactive particle-gas mixture from a precursor material and a working gas. The quench chamber is configured to receive a conditioning fluid at the fluid inlet, to receive the reactive particle-gas mixture mix fluid from the particle production reactor at the reactive mixture inlet, and to mix the conditioning fluid with the reactive particle-gas mixture to produce a cooled particle-gas mixture. The cooled particle-gas mixture comprises a plurality of precursor material particles and an output fluid, the output fluid including the conditioning fluid. The filter element is configured to receive and filter the output fluid from the quench chamber to produce a filtered output. The temperature control module is configured to control the temperature of the filtered output to produce a temperature-controlled, filtered output. The content ratio control module is configured to modulate a content ratio of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output, wherein the temperature-controlled, filtered output comprises a distinct primary fluid and a distinct secondary fluid, and the content ratio is the ratio of the primary fluid to the secondary fluid. Finally, the channeling element is configured to supply the content-controlled, temperature-controlled, filtered output to the fluid inlet of the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in quenching the reactive particle-gas mixture.


In a preferred embodiment, the particle production reactor is configured to energize the working gas to form a plasma, and to apply the plasma to the precursor material, thereby producing the reactive particle-gas mixture.


In some embodiments, the system also comprises a suction generator configured to generate a suction force at the cooled mixture outlet of the quench chamber to draw the output fluid from the quench chamber.


In some embodiments, the filter element is configured to remove the plurality of precursor material particles from the output fluid to produce the filtered output. Furthermore, the filter element preferably comprises a high efficiency particulate air (HEPA) filter.


In some embodiments, a pressure relief module is fluidly coupled between the filter element and the temperature control module. This pressure relief module is configured to reduce the pressure of the filtered output if the pressure exceeds a predetermined threshold.


In some embodiments, the temperature control module comprises a heat exchanger. It is also contemplated that other means for adjusting fluid temperature can be employed.


In a preferred embodiment, the content ratio control module comprises a sensor and a micro-controller communicatively connected to the sensor. The sensor is configured to sense the content ratio of the temperature-controlled, filtered output, and to produce a signal representing the sensed content ratio. The micro-controller is configured to receive the signal from the sensor and modulate the content ratio of the content-controlled, temperature-controlled, filtered output that is to be supplied to the fluid inlet of the quench chamber. This modulation is based on the received signal.


In some embodiments, the content ratio control module can further comprise a buffer reservoir fluidly coupled to the temperature control module and to the sensor. The buffer reservoir is configured to receive the temperature-controlled, filtered output from the temperature control module and to temporarily store the temperature-controlled, filtered output before the content ratio of the temperature-controlled, filtered output is modulated. The content ratio control module can also comprise a fluid relief valve fluidly coupled between the buffer reservoir and the ambient atmosphere. This fluid relief valve is configured to vent the secondary fluid from the buffer reservoir to the ambient atmosphere.


Furthermore, the content ratio control module can comprise a secondary fluid supply reservoir that stores a supply of the secondary fluid and is communicatively connected to the micro-controller. This secondary fluid supply reservoir is configured to selectively add a portion of the secondary fluid from the secondary fluid supply reservoir into the temperature-controlled, filtered output in response to a signal from the micro-controller, thereby producing the content-controlled, temperature-controlled, filtered output.


The content ratio control module can additionally or alternatively comprise a primary fluid supply reservoir that stores a supply of the primary fluid and is communicatively connected to the micro-controller. The primary fluid supply reservoir is configured to selectively add a portion of the primary fluid from the primary fluid supply reservoir into the temperature-controlled, filtered output in response to a signal from the micro-controller, thereby producing the content-controlled, temperature-controlled, filtered output.


In addition to these systems, the present invention also includes methods of recirculating fluid within these systems, involving the operations discussed both above and below.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a schematic illustration of one embodiment of a fluid recirculation system integrated into a particle production system in accordance with the principles of the present invention.



FIG. 2 is a schematic illustration of one embodiment of the particle production system of FIG. 1 with a more detailed embodiment of the content ratio control module in accordance with the principles of the present invention.



FIG. 3A is a schematic illustration of one embodiment of a content ratio control module in accordance with the principles of the present invention.



FIG. 3B is a schematic illustration of another embodiment of a content ratio control module in accordance with the principles of the present invention.



FIG. 4 is a flow chart illustrating one embodiment of a method of recirculating a fluid in a particle production system in accordance with the principles of the present invention.





DETAILED DESCRIPTION OF THE INVENTION

The description below concerns several embodiments of the invention. The discussion references the illustrated preferred embodiment. However, the scope of the present invention is not limited to either the illustrated embodiment, nor is it limited to those discussed. To the contrary, the scope should be interpreted as broadly as possible based on the language of the Claims section of this document.


In the following description, numerous details and alternatives are set forth for purpose of explanation. However, one of ordinary skill in the art will realize that the invention can be practiced without the use of these specific details. In other instances, well-known structures and devices are shown in block diagram form in order not to obscure the description of the invention with unnecessary detail.


This disclosure refers to both particles and powders. These two terms are equivalent, except for the caveat that a singular “powder” refers to a collection of particles. The present invention may apply to a wide variety of powders and particles.


The present invention will be readily understood by the following detailed description in conjunction with the accompanying drawings. To facilitate this description, like reference numerals designate like elements.



FIG. 1 illustrates one embodiment of a fluid recirculation system integrated into a particle production system 100 in accordance with the principles of the present invention. The particle production system 100 includes a particle production core 120, which takes various material inputs, including both working and conditioning fluids as well as particle precursors, and produces a particle-gas mixture. The two main components of the particle production core 120 are a particle production reactor 122, configured to produce a reactive particle-gas mixture from a precursor material and a working gas, and a quench chamber 124, configured to quench the reactive particle-gas mixture using a conditioning fluid.


In general, vapor phase particle production means are preferred for producing the particle-gas mixture in the particle production core 120. Most preferably, the embodiments of the present invention use particle production systems similar to those disclosed in U.S. Pat. application Ser. No. 11/110,341, filed on Apr. 19, 2005 and entitled, “HIGH THROUGHPUT DISCOVERY OF MATERIALS THROUGH VAPOR PHASE SYNTHESIS”, which is currently published as U.S. Publication No. 2005-0233380-A. In such a particle production system, working gas is supplied from a gas source to a plasma reactor. Within the plasma reactor, energy is delivered to the working gas, thereby creating a plasma. A variety of different means can be employed to deliver this energy, including, but not limited to, DC coupling, capacitive coupling, inductive coupling, and resonant coupling. One or more material dispensing devices introduce at least one material, preferably in powder form, into the plasma reactor. The combination within the plasma reactor of the plasma and the material(s) introduced by the material dispensing device(s) forms a highly reactive and energetic mixture, wherein the powder can be vaporized. This mixture of vaporized powder moves through the plasma reactor in the flow direction of the working gas. As it moves, the mixture cools and particles are formed therein. The still-energetic output mixture, comprising hot gas and energetic particles, is emitted from the plasma reactor. Following emission from the plasma reactor, the output mixture can cool further. This output mixture may comprise hot gas and particles of relatively homogeneous size distribution. Each particle can comprise a combination of the materials introduced by the material dispensing devices. It is contemplated that portions of these or other particle production means, including non-vapor phase particle production means, are within the scope of the present invention as well and can be employed as part of the particle production core 120.


In a preferred embodiment, the reactor 122 is fluidly coupled to a working gas supply 110 via a working gas inlet 111, thereby allowing the reactor 122 to receive a working gas from the working gas supply 110. Examples of working gas include, but are not limited to, argon and hydrogen. The reactor 122 can also be fluidly coupled to a precursor material supply 115 via a precursor material inlet 116, thereby allowing the reactor 122 to receive precursor material, such as precursor material powder, from the precursor material supply 115. The reactor 122 combines the working gas and the precursor material to produce a reactive particle-gas mixture. In a preferred embodiment, as discussed above, energy is delivered to the working gas within the reactor 122, thereby creating a plasma. The plasma is then applied to the precursor material. The application of the plasma to the precursor material(s) forms a highly reactive and energetic mixture, wherein the powder can be vaporized. This mixture of vaporized powder moves through the reactor 122 in the flow direction of the working gas. This reactive particle-gas mixture flows into the quench chamber 124, preferably via reactive mixture port 123, which fluidly couples the reactor 122 to the quench chamber 124.


In addition to being configured to receive the reactive mixture from the reactor 122, the quench chamber 124 is also configured to receive recirculated conditioning fluid. One example of a conditioning fluid is argon. However, it is contemplated that other fluids may be used in addition to or as alternatives to argon. In a preferred embodiment, the quench chamber 124 is housed within a conditioning fluid input manifold 125, which itself receives recirculated conditioning fluid through a conditioning fluid inlet 119. The conditioning fluid is supplied to the conditioning fluid input manifold 125 via a recirculation system discussed in detail below. The manifold 125 is fluidly coupled to the quench chamber 124, preferably via one or more conditioning fluid ports 121, thereby providing the recirculated conditioning fluid to the quench chamber 124.


The quench chamber 124 mixes the conditioning fluid with the reactive particle-gas mixture from the reactor 122, thereby quenching the reactive particle-gas mixture. This quenching rapidly cools the reactive mixture to form a cooled particle-gas mixture. The cooled mixture is preferably drawn into a conduit system 126 that is fluidly coupled to the quench chamber. In a preferred embodiment, the cooled mixture is drawn into the conduit system 126 by suction supplied by a suction generator 128, such as a pump, drawing the cooled mixture towards the suction generator 128. A powder product can be sampled or collected from the cooled mixture between the quench chamber 124 and the suction generator 128. Such sampling or collection can be achieved in a variety of ways.


Outside of the quench chamber 124 and the particle production core 120, the rest of the particle production system 100 comprises a fluid recirculation system, which includes a plurality of elements fluidly coupled via a conduit system 180. The fluid recirculation system is configured to receive the cooled mixture from the particle production core, filter the cooled mixture to produce a filtered output, modulate the content ratio of the filtered output to produce a content-controlled, filtered output, and channel the content-controlled, filtered output to the particle production core 120 to be used as the recirculated conditioning fluid in quenching the reactive mixture. The means for performing these operations, as well as other functions, will be discussed in further detail below.


In a preferred embodiment, the fluid recirculation system comprises a filter element 130 fluidly coupled to the suction generator, a pressure relief module 140 fluidly coupled to the filter element 130, a temperature control module 150 fluidly coupled to the pressure relief module 140, and a content ratio control module 160 fluidly coupled to the temperature control module 150 and to the particle production core 120, thereby creating a recirculation path from the output of the particle production core 120 to the input of the particle production core 120. It is contemplated that the scope of the present invention can include the rearrangement or removal of some of these components. For example, pressure relief module 140 may be disposed between temperature control module 150 and content control module 160, rather than between filter element 130 and temperature control module 150. In an alternative example, pressure relief module 140 can be completely removed from the fluid recirculation path.


The suction generator 128 preferably moves the cooled particle-gas mixture out of the particle production core through the conduit system 126 and into the filter element 130. The filter element 130 is configured to remove remaining particles, such as precursor material particles, from the cooled mixture, thereby producing a filtered output. Preferably, the filter element 130 is a high efficiency particulate air (HEPA) filter. In some embodiments, the filter element 130 does not completely remove all of the particles from the cooled mixture.


Following passage through the filter element 130, the cooled mixture becomes a filtered output, which is channeled into the conduit system 180. The conduit system 180 fluidly couples the filter element 130 to the pressure relief module 140 such that the pressure relief module 140 can receive the filtered output from the filter element 130. The pressure relief module 140 is configured to reduce the pressure of the fluid of the filtered output. This pressure reduction can be conditioned upon the pressure of the fluid exceeding a predetermined threshold. Furthermore, this pressure reduction can be achieved in a variety of ways, including, but not limited to, venting to ambient atmosphere. As noted above, in some embodiments, no pressure relief module 140 is included at all.


Following passage through the pressure relief module 140, the filtered output passes into the temperature control module 150. The temperature control module 150 is configured to regulate the temperature of the output, thereby forming a temperature-controlled, filtered output. In a preferred embodiment, the temperature control module 150 comprises a heat exchanger. Additionally, in some embodiments, no temperature control module 150 is included at all.


The temperature-controlled, filtered output reenters a portion of the conduit system 180 that fluidly couples the temperature control module 150 to the content ratio control module 160. The content ratio control module 160 is configured to receive and modulate the content ratio of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. In a preferred embodiment, the filtered output that is received by the content control module 160 comprises a distinct primary fluid and a distinct secondary fluid. The content control module 160 controls the ratio of the primary fluid to the secondary fluid, making adjustments when necessary, thereby producing the content-controlled output.


This content-controlled output, still comprising conditioning fluid from the quench chamber, is then channeled through another portion of the conduit system 180 to the conditioning fluid inlet 119 of the particle production core 120 for use in quenching. Thus, the output of the quench chamber 124, which includes the conditioning fluid, has been recirculated back into the quench chamber 124. This recirculation includes the filtering and the content control (and in some cases, the pressure relief and the temperature control) of the fluid to ensure sufficient preparation for the fluid's reuse in quenching the reactive mixture in the particle production core 120.



FIG. 2 illustrates one embodiment of a particle production system 200, similar to the system 100 of FIG. 1, with a more detailed embodiment of the content ratio control module 160 in accordance with the principles of the present invention. The content ratio control module 160 can include a plurality of components. Some components are fluidly coupled with the conduit system 180. For example, a buffer reservoir 260 is preferably coupled to the conduit system 180 and in fluid communication with the temperature control module 150.


The content ratio control module 140 of some embodiments receives the temperature-controlled, filtered output from the temperature control module 150 in the buffer reservoir 260. The buffer reservoir 260 acts as a fluid buffer, holding the temperature-controlled, filtered output for a period of time before releasing it. During the time while the temperature-controlled, filtered output is within the buffer reservoir 260, the fluid within the output begins to separate based on density because of gravity. In the embodiments where the output comprises a primary fluid and a secondary fluid, the secondary fluid is preferably a less dense fluid. Thus, in these embodiments, the primary fluid concentrates in a lower portion of the buffer reservoir 260, while the secondary fluid concentrates in an upper portion of the buffer reservoir 260.


In a preferred embodiment, the content control module also comprises a content ratio sensor 262 coupled into the conduit system and in fluid communication with the buffer reservoir 260. The content ratio sensor 262 is configured to receive a portion of the fluid mixture, determine the content ratio of the mixture (e.g., the ratio of primary fluid to secondary fluid), and provide one or more signals representing the content ratio.


The buffer reservoir 260 can be configured to permit venting of the secondary fluid from the system 200. In one embodiment of such a configuration, the buffer reservoir 260 is fluidly coupled to a secondary fluid relief element 264. The secondary fluid relief element 264 is in fluid communication with the ambient environment of the particle production system 200 and is configured to selectively permit fluid communication between the buffer reservoir 260 and the ambient atmosphere.


A secondary fluid supply 266 can be fluidly coupled to the conduit system 180 to permit selective fluid communication with the conduit system 180, and thereby with the content ratio sensor 262. The secondary fluid supply 266 is configured to store and selectively introduce an amount of secondary fluid into the fluid mixture to increase the amount of secondary fluid in the mixture relative to the amount of primary fluid, thereby adjusting the content ratio.


The content ratio control module 160 preferably includes a micro-controller 268. The micro-controller 268 is communicatively connected to the content ratio sensor 262, thereby enabling the micro-controller 268 to receive signals from the content ratio sensor 262 that represent the content ratio of the fluid within the conduit system 180 that is in the vicinity of the content ratio sensor 262. The micro-controller 268 is also communicatively connected to the secondary fluid supply 266 and the secondary fluid relief element 264, thereby enabling the micro-controller 268 to select whether the secondary fluid supply 266 is in fluid communication with the conduit system 180 to add secondary fluid and select whether the relief element 264 provides fluid communication between the buffer reservoir 260 and the ambient environment to vent the secondary fluid. The micro-controller 268 can make any or all of these selections based on the content ratio as represented by the signal provided by the content ratio sensor 262.


During the time while the temperature-controlled, filtered output is within the buffer reservoir 260, the secondary fluid relief module 264 can operate to make an initial adjustment to the level of secondary fluid within the buffer reservoir 260. The relief module 264 is preferably coupled to the upper portion of the buffer reservoir 260 to take advantage of the gravity-based separation of the secondary and primary fluids. The micro-controller 268 controls relief of the secondary fluid by the relief module 264. Preferably, the secondary fluid relief module 264 operates by relieving fluid at a continuous rate. The rate can be variable and is preferably determined by the micro-controller 268.


Following the initial adjustment of the secondary fluid level, the adjusted output moves out of the buffer reservoir 260 and into a portion of the conduit system 180 that fluidly couples the buffer reservoir 260 to the content ratio sensor 262. The content ratio sensor 262 detects the ratio of the primary fluid to the secondary fluid within the adjusted output, then sends a signal representing the ratio to the micro-controller 268.


Meanwhile, the adjusted output moves through another portion of the conduit system 180 that fluidly couples the sensor 262 to the outlet of the secondary fluid supply 266. The micro-controller 268 controls the secondary fluid supply 266 to introduce secondary fluid into the adjusted output. The micro-controller 268 uses the signal from the content ratio sensor 262 in determining the rate at which secondary fluid is introduced into the output. The result of these adjustments is the production of a content-controlled, temperature-controlled, filtered output.


This output is channeled through a portion of the conduit system 180 that fluidly couples the outlet of the secondary fluid supply 266 to the conditioning fluid inlet 119 of the particle production core 120. Thus, the content-controlled, temperature-controlled, filtered output is supplied to the particle production core 120 as conditioning fluid.


Because the working gas from the working gas supply 110 becomes part of the output of the particle production core 120, the recirculated conditioning fluid comprises the working gas. In some embodiments, the conditioning fluid is initially supplied from the working gas supply 110 in a charging step, where no precursor material is introduced into the reactor 122. The fluid recirculation system works during the charging step to modulate the characteristics of the conditioning fluid until desired characteristics are reached, at which point, the precursor material is introduced into the reactor 122.



FIG. 3A is a schematic illustration of one embodiment of a content ratio control module 300, similar to content ratio control module 160 shown in FIG. 2, in accordance with the principles of the present invention. A portion of the content ratio control module 300 is disposed along the conduit system 180. The conduit system 180 provides fluid communication between a buffer reservoir 260, a content ratio sensor 262, and a secondary fluid supply valve 366.


The secondary fluid supply valve 366 is fluidly coupled to a secondary fluid reservoir 367. The secondary fluid supply reservoir 367 contains a secondary fluid G2. The supply valve 366 enables selective fluid communication between the secondary fluid reservoir 367 and the conduit system 180, thereby allowing for the introduction of additional secondary fluid G2 into the conduit system 180 when appropriate.


Similarly, a primary fluid supply valve 376 is fluidly coupled between the buffer reservoir 260 and a primary fluid reservoir 377, which contains a primary fluid G1, thereby enabling selective fluid communication between the primary fluid reservoir 377 and the buffer reservoir 260 and allowing for the introduction of additional primary fluid G1 into the conduit system 180 when appropriate.


Additionally, the buffer reservoir 260 can be fluidly coupled to a secondary fluid relief valve 364, which is fluidly coupled with the ambient atmosphere, thereby enabling selective fluid communication between the buffer reservoir 260 and the ambient atmosphere. In an exemplary embodiment, the buffer reservoir 260 contains both primary fluid G1 and secondary fluid G2.


The content ratio control module 300 further includes micro-controller 268. The micro-controller 268 is communicatively connected to the content ratio sensor 262, thereby enabling the micro-controller 268 to receive signals from the content ratio sensor 262 that represent the content ratio of the fluid within the conduit system 180 that is in the vicinity of the content ratio sensor 262. The micro-controller 268 is also communicatively connected to the secondary fluid supply valve 366, the secondary fluid relief valve 364, and the primary fluid supply valve 376, thereby enabling the micro-controller 268 to select whether the secondary fluid supply reservoir 367 is in fluid communication with the conduit system 180 to add secondary fluid, to select whether the secondary fluid relief valve 364 provides fluid communication between the buffer reservoir 260 and the ambient environment to vent the secondary fluid, and to select whether the primary fluid supply reservoir 377 is in fluid communication with the conduit system 180 to add primary fluid. The micro-controller 268 can make any or all of these selections based on the content ratio as represented by the signal provided by the content ratio sensor 262.


In operation, the content ratio control module 300 receives the temperature-controlled, filtered output in the buffer reservoir 260. The buffer reservoir 260 acts as a fluid buffer, holding the temperature-controlled, filtered output for a period of time before releasing it.


During the time while the temperature-controlled, filtered output is within the buffer reservoir 260, the fluid within the output begins to separate based on density because of gravity.


In the embodiments where the output comprises a primary fluid G1 and a secondary fluid G2, the secondary fluid G2 is preferably a less dense fluid. Thus, in these embodiments, the primary fluid G1 concentrates in a lower portion of the buffer reservoir 260, while the secondary fluid G2 concentrates in an upper portion of the buffer reservoir 260.


Also, during the time while the temperature-controlled, filtered output is within the buffer reservoir 260, the secondary fluid relief valve 364 can operate to make an initial adjustment to the level of secondary fluid G2 within the buffer reservoir 260. The relief valve 364 is preferably coupled to the upper portion of the buffer reservoir 260 to take advantage of the gravity-based separation of the secondary fluid G2 and primary fluid G1. The micro-controller 268 controls relief of the secondary fluid G2 by the relief valve 364. Preferably, the secondary fluid relief valve 364 operates by relieving secondary fluid G2 at a continuous rate. The rate can be variable and is preferably determined by the controller 268.


Additionally, during the time while the temperature-controlled, filtered output is within the buffer reservoir 260, the primary fluid supply valve 376 and reservoir 377 can operate to make an initial adjustment to the level of primary fluid G1 within the buffer reservoir 260. Although not shown, the primary fluid supply valve 376 can be coupled to the lower portion of the buffer reservoir to take advantage of the gravity-based separation of the secondary fluid G2 and primary fluid G1. The micro-controller 268 controls supply of the primary fluid G1 by the valve 376. Preferably, the primary fluid supply valve 376 operates by supplying primary fluid G1 at a continuous rate. The rate can be variable and is preferably determined by the micro-controller 268.


Following the initial adjustment of the secondary fluid level, the adjusted output moves out of the buffer reservoir 260 and into a portion of the conduit system 180 that fluidly couples the buffer reservoir 260 to the content ratio sensor 262. The content ratio sensor 262 detects the ratio of the primary fluid G1 to the secondary fluid G2 within the adjusted output and sends a signal representing the ratio to the micro-controller 268.


Meanwhile, the adjusted output moves through another portion of the conduit system 180 that fluidly couples the sensor 262 to the secondary fluid supply valve 367. The micro-controller 268 controls the secondary fluid supply valve 3672 to selectively introduce secondary fluid G2 into the adjusted output from the secondary fluid reservoir 367. The micro-controller uses the signal from the content ratio sensor 262 in determining the rate at which secondary fluid G2 is introduced into the output. The result of these adjustments is the production of a content-controlled, temperature-controlled, filtered output.


This output is channeled through a portion of the conduit system 180 that fluidly couples the content ratio control module 300 to the conditioning fluid inlet of the particle production core 120. Thus, the content-controlled, temperature-controlled, filtered output is supplied to the particle production core 120 as conditioning fluid.



FIG. 3B is a schematic illustration of another embodiment of a content ratio control module 300′ in accordance with the principles of the present invention. Content ratio control module 300′ is the same as content ratio control module 300, except that module 300′ does not include primary fluid supply valve 376 or primary fluid supply reservoir 377. In an alternative embodiment, primary fluid supply valve 376 and primary fluid supply reservoir 377 can be present while secondary fluid supply valve 366 or secondary fluid supply reservoir 367 are excluded. It is contemplated that several other different configurations are also well within the scope of the present invention.



FIG. 4 is a flow chart illustrating one embodiment of a method of recirculating a fluid in a particle production system in accordance with the principles of the present invention.


At step 402, the particle production core performs two main functions. First, it produces a reactive particle-gas mixture using a working gas and a precursor material. Preferably, this operation is performed via a particle production reactor as discussed above. Second, the particle production core quenches the reactive particle-gas mixture using recirculated conditioning fluid, resulting in the production of a cooled particle-gas mixture, which comprises a plurality of precursor material particles. Preferably, this operation is performed via a quenching chamber as discussed above.


The cooled particle-gas mixture then flows out of the particle production core and into the fluid recirculation system for preparation before being re-introduced back into the particle production core for use in quenching.


At step 404, the cooled particle-gas mixture flows into a filter, where the filter removes the precursor material particles from the cooled particle-gas mixture, thereby producing a filtered output. It is contemplated that, in some embodiments, the filter can be configured to remove all of the precursor material particles in the cooled particle-gas mixture, leaving no precursor material particles in the filtered output, while in other embodiments, the filter can be configured to remove less than all of the precursor material particles in the cooled particle-gas mixture, leaving a certain amount of the precursor material particles remaining in the filtered output.


At this point, the filtered output flows to the content ratio control module. However, it is contemplated that the filtered output can optionally be subjected to additional preparation before reaching the content ratio control module. If this additional preparation is desired, then at step 405, the filtered output can undergo temperature control and/or pressure relief, as discussed above with respect to the temperature module and the pressure relief module. For example, a portion of the filtered output can be vented to ambient, thereby reducing the pressure of the filtered output. The filtered output can then flow through a heat exchanger, thereby reducing its temperature.


At step 406, the filtered (and possibly temperature-controlled and pressure-relieved) output reaches the content ratio control module, where its content ratio is modulated. In a preferred embodiment, the filtered output comprises a distinct primary fluid and a distinct secondary fluid, and the content ratio is the ratio of the primary fluid to the secondary fluid. As discussed above, this modulation of the content ratio can involve one or more operations, including, but not limited to, a decrease in the amount of a certain fluid or the increase in the amount of a certain fluid. These operations are preferably performed with the use of one or more components, such as the micro-controller, sensor, reservoirs, and valves discussed above. The result of this content ratio modulation is the production of a content-controlled, filtered output that is now acceptable for reuse as conditioning fluid in quenching the reactive particle-gas mixture back in the particle production core.


At step 408, a channeling element recirculates the content-controlled, filtered output into the particle production core for use as conditioning fluid in the quenching of the reactive mixture back at step 402. This process 400 can be repeated several times, wherein the same conditioning fluid is recirculated and reused over and over again.


Embodiments of the present invention permit the recirculation and reuse of conditioning fluids within a particle production system. Furthermore, these embodiments permit the adjustment of a content ratio of the conditioning fluids, which may otherwise change undesirably with system use. Particle production systems incorporating embodiments of the present invention do not need a constant supply of fresh conditioning fluid. When fresh fluid is supplied, the system uses it for multiple production runs. Since the cost of fresh conditioning fluid is spread over more than one production run, the unit cost of the particles produced using the present invention is less than with conventional means.


Additionally, some embodiments described herein permit recirculation using filters with a specified tolerance so as not to filter out every particle from the output. These embodiments allow for use of less expensive filters on dedicated production lines where cross-contamination is not an issue.


The present invention has been described in terms of specific embodiments incorporating details to facilitate the understanding of the principles of construction and operation of the invention. As such, references herein to specific embodiments and details thereof are not intended to limit the scope of the claims appended hereto. It will be apparent to those skilled in the art that modifications can be made to the embodiments chosen for illustration without departing from the spirit and scope of the invention.

Claims
  • 1. A particle production system, comprising: a particle production reactor configured to produce a reactive particle-gas mixture from a precursor material and a working gas;a quench chamber with a fluid inlet, a reactive mixture inlet fluidly coupled to the particle production reactor, and a cooled mixture outlet, wherein the quench chamber is configured to receive a conditioning fluid at the fluid inlet, to receive the reactive particle-gas mixture from the particle production reactor at the reactive mixture inlet, and to mix the conditioning fluid with the reactive particle-gas mixture to produce a cooled particle-gas mixture, the cooled particle-gas mixture comprising a plurality of precursor material particles and an output fluid, the output fluid including the conditioning fluid;a filter element fluidly coupled to the cooled mixture outlet and configured to receive and filter the output fluid from the quench chamber to produce a filtered output;a temperature control module fluidly coupled to the filter element and configured to control the temperature of the filtered output to produce a temperature-controlled, filtered output, wherein the temperature-controlled, filtered output comprises a primary fluid and a secondary fluid;a content ratio control module fluidly coupled to the temperature control module and configured to modulate a content ratio of the temperature-controlled, filtered output to produce a content-controlled, temperature-controlled, filtered output, wherein the content ratio is the ratio of the primary fluid to the secondary fluid; anda channeling element fluidly coupling the content ratio control module to the fluid inlet of the quench chamber, and configured to supply the content-controlled, temperature-controlled, filtered output to the fluid inlet of the quench chamber, wherein the content-controlled, temperature-controlled, filtered output is provided to the quench chamber as the conditioning fluid.
  • 2. The system of claim 1, wherein the particle production reactor is configured to energize the working gas to form a plasma, and to apply the plasma to the precursor material to produce the reactive particle-gas mixture.
  • 3. The system of claim 1, further comprising a suction generator configured to generate a suction force at the cooled mixture outlet of the quench chamber to draw the output fluid from the quench chamber.
  • 4. The system of claim 1, wherein the filter element is configured to remove precursor material particles from the cooled particle-gas mixture to produce the filtered output including the output fluid.
  • 5. The system of claim 4, wherein the filter element comprises a high efficiency particulate air (HEPA) filter.
  • 6. The system of claim 1, further comprising a pressure relief module fluidly coupled between the filter element and the temperature control module, wherein the pressure relief module is configured to reduce the pressure of the filtered output if the pressure exceeds a predetermined threshold.
  • 7. The system of claim 1, wherein the temperature control module comprises a heat exchanger.
  • 8. The system of claim 1, wherein the content ratio control module comprises: a sensor configured to measure the content ratio of the temperature-controlled, filtered output, and to produce a signal representing the measured content ratio; anda controller communicatively connected to the sensor and configured to receive the signal from the sensor and control the modulation of the content ratio of the temperature-controlled, filtered output based on the received signal.
  • 9. The system of claim 8, wherein the content ratio control module further comprises a buffer reservoir fluidly coupled between the temperature control module and the sensor, wherein the buffer reservoir is configured to receive the temperature-controlled, filtered output from the temperature control module and to store the temperature-controlled, filtered output before the content ratio of the temperature-controlled, filtered output is modulated.
  • 10. The system of claim 9, wherein the content ratio control module further comprises a fluid relief valve communicatively connected to the controller and fluidly coupled between the buffer reservoir and the ambient atmosphere, wherein the fluid relief valve is configured to vent the secondary fluid from the buffer reservoir to the ambient atmosphere in response to a signal from the controller.
  • 11. The system of claim 9, wherein the content ratio control module further comprises: a secondary fluid supply valve communicatively connected to the controller and configured to add secondary fluid from a secondary fluid supply reservoir to the measured temperature-controlled, filtered output in response to a signal from the controller to produce the content-controlled, temperature-controlled, filtered output.
  • 12. The system of claim 11, wherein the content ratio control module further comprises: a primary fluid supply valve communicatively connected to the controller and configured to add primary fluid from a primary fluid supply reservoir into the stored temperature-controlled, filtered output in the buffer reservoir in response to a signal from the controller.
  • 13. A particle production system comprising: a particle production reactor configured to produce a reactive particle-gas mixture from a precursor material and a working gas;a quench chamber with a fluid inlet, a reactive mixture inlet fluidly coupled to the particle production reactor, and a cooled mixture outlet, wherein the quench chamber is configured to receive a conditioning fluid at the fluid inlet, to receive the reactive particle-gas mixture from the particle production reactor at the reactive mixture inlet, and to mix the conditioning fluid with the reactive particle-gas mixture to produce a cooled particle-gas mixture, the cooled particle-gas mixture comprising a plurality of precursor material particles and an output fluid, the output fluid including the conditioning fluid;a filter element fluidly coupled to the cooled mixture outlet and configured to receive and filter the output fluid from the quench chamber to produce a filtered output;a temperature control module fluidly coupled to the filter element and configured to control the temperature of the filtered output to produce a temperature-controlled, filtered output, wherein the temperature-controlled, filtered output comprises a primary fluid and a secondary fluid;a buffer reservoir fluidly coupled to the temperature control module, wherein the buffer reservoir is configured to receive the temperature-controlled, filtered output from the temperature control module and to store the temperature-controlled, filtered output;a sensor fluidly coupled to the buffer reservoir and configured to measure a content ratio of the stored temperature-controlled, filtered output, and to produce a signal representing the measured content ratio, wherein the content ratio is the ratio of the primary fluid to the secondary fluid;a controller communicatively connected to the sensor and configured to receive the signal from the sensor and control the modulation of the content ratio of the measured temperature- controlled, filtered output based on the received signal;a fluid relief valve communicatively connected to the controller and fluidly coupled between the buffer reservoir and the ambient atmosphere, wherein the fluid relief valve is configured to vent the secondary fluid from the buffer reservoir to the ambient atmosphere in response to a signal from the controller;a secondary fluid supply valve communicatively connected to the controller and configured to add secondary fluid from a secondary fluid supply reservoir to the measured temperature- controlled, filtered output in response to a signal from the controller to produce a content-controlled, temperature-controlled, filtered output; anda channeling element fluidly coupling the sensor to the fluid inlet of the quench chamber, and configured to supply the content-controlled, temperature-controlled, filtered output to the fluid inlet of the quench chamber, wherein the content-controlled, temperature-controlled, filtered output is provided to the quench chamber as the conditioning fluid.
  • 14. The system of claim 13, wherein the particle production reactor is configured to energize the working gas to form a plasma, and to apply the plasma to the precursor material to produce the reactive particle-gas mixture.
  • 15. The system of claim 13, further comprising a suction generator configured to generate a suction force at the cooled mixture outlet of the quench chamber to draw the output fluid from the quench chamber.
  • 16. The system of claim 13, wherein the filter element is configured to remove precursor material particles from the cooled particle-gas mixture to produce the filtered output including the output fluid.
  • 17. The system of claim 16, wherein the filter element comprises a high efficiency particulate air (HEPA) filter.
  • 18. The system of claim 13, further comprising a pressure relief module fluidly coupled between the filter element and the temperature control module, wherein the pressure relief module is configured to reduce the pressure of the filtered output if the pressure exceeds a predetermined threshold.
  • 19. The system of claim 13, wherein the temperature control module comprises a heat exchanger.
  • 20. The system of claim 13, further comprising a primary supply valve communicatively connected to the controller and configured to add primary fluid from a primary fluid supply reservoir into the stored temperature-controlled, filtered output in the buffer reservoir in response to a signal from the controller.
Parent Case Info

The present application is a divisional of U.S. patent application Ser. No. 12/151,765, filed May 8, 2008 which claims priority benefit of U.S. Provisional Patent Application Ser. No. 60/928,946, filed May 11, 2007, entitled “MATERIAL PRODUCTION SYSTEM AND METHOD,” both of which are hereby incorporated by reference in their entireties as if set forth herein. The entire contents of U.S. patent application Ser. No. 11/110,341, filed on Apr. 19, 2005, entitled, “HIGH THROUGHPUT DISCOVERY OF MATERIALS THROUGH VAPOR PHASE SYNTHESIS” are incorporated by reference herein.

US Referenced Citations (466)
Number Name Date Kind
2021936 Johnstone Nov 1935 A
2284554 Beyerstedt May 1942 A
2419042 Todd Apr 1947 A
2519531 Worn Aug 1950 A
2562753 Trost Jul 1951 A
2689780 Rice Sep 1954 A
3001402 Koblin Sep 1961 A
3042511 Reding, Jr. Jul 1962 A
3067025 Chisholm Dec 1962 A
3145287 Siebein et al. Aug 1964 A
3178121 Wallace, Jr. Apr 1965 A
3179782 Matvay Apr 1965 A
3181947 Vordahl May 1965 A
3313908 Unger et al. Apr 1967 A
3401465 Larwill Sep 1968 A
3450926 Kiernan Jun 1969 A
3457788 Nobuo Miyajima Jul 1969 A
3537513 Austin Nov 1970 A
3552653 Inoue Jan 1971 A
3617358 Dittrich Nov 1971 A
3667111 Chartet Jun 1972 A
3741001 Fletcher et al. Jun 1973 A
3752172 Cohen et al. Aug 1973 A
3761360 Auvil et al. Sep 1973 A
3774442 Gustaysson Nov 1973 A
3804034 Stiglich, Jr. Apr 1974 A
3830756 Sanchez et al. Aug 1974 A
3871448 Vann et al. Mar 1975 A
3892882 Guest et al. Jul 1975 A
3914573 Muehlberger Oct 1975 A
3959094 Steinberg May 1976 A
3959420 Geddes et al. May 1976 A
3969482 Teller Jul 1976 A
4008620 Narato et al. Feb 1977 A
4018388 Andrews Apr 1977 A
4021021 Hall et al. May 1977 A
4127760 Meyer et al. Nov 1978 A
4139497 Castor et al. Feb 1979 A
4157316 Thompson et al. Jun 1979 A
4171288 Keith et al. Oct 1979 A
4174298 Antos Nov 1979 A
4189925 Long Feb 1980 A
4227928 Wang Oct 1980 A
4248387 Andrews Feb 1981 A
4253917 Wang Mar 1981 A
4260649 Dension et al. Apr 1981 A
4284609 deVries Aug 1981 A
4315874 Ushida et al. Feb 1982 A
4326492 Leibrand, Sr. et al. Apr 1982 A
4344779 Isserlis Aug 1982 A
4369167 Weir Jan 1983 A
4388274 Rourke et al. Jun 1983 A
4419331 Montalvo Dec 1983 A
4431750 McGinnis et al. Feb 1984 A
4436075 Campbell et al. Mar 1984 A
4440733 Lawson et al. Apr 1984 A
4458138 Adrian et al. Jul 1984 A
4459327 Wang Jul 1984 A
4505945 Dubust et al. Mar 1985 A
4513149 Gray et al. Apr 1985 A
4523981 Ang et al. Jun 1985 A
4545872 Sammells et al. Oct 1985 A
RE32244 Andersen Sep 1986 E
4609441 Frese, Jr. et al. Sep 1986 A
4723589 Iyer et al. Feb 1988 A
4731517 Cheney Mar 1988 A
4751021 Mollon et al. Jun 1988 A
4764283 Ashbrook et al. Aug 1988 A
4765805 Wahl et al. Aug 1988 A
4824624 Palicka et al. Apr 1989 A
4836084 Vogelesang et al. Jun 1989 A
4855505 Koll Aug 1989 A
4866240 Webber Sep 1989 A
4885038 Anderson et al. Dec 1989 A
4921586 Molter May 1990 A
4983555 Roy et al. Jan 1991 A
4987033 Abkowitz et al. Jan 1991 A
5006163 Benn et al. Apr 1991 A
5015863 Takeshima et al. May 1991 A
5041713 Weidman Aug 1991 A
5043548 Whitney et al. Aug 1991 A
5070064 Hsu et al. Dec 1991 A
5073193 Chaklader et al. Dec 1991 A
5133190 Abdelmalek Jul 1992 A
5151296 Tokunaga Sep 1992 A
5157007 Domesle et al. Oct 1992 A
5192130 Endo et al. Mar 1993 A
5230844 Macaire et al. Jul 1993 A
5233153 Coats Aug 1993 A
5269848 Nakagawa Dec 1993 A
5330945 Beckmeyer et al. Jul 1994 A
5338716 Triplett et al. Aug 1994 A
5369241 Taylor et al. Nov 1994 A
5371049 Moffett et al. Dec 1994 A
5372629 Anderson et al. Dec 1994 A
5392797 Welch Feb 1995 A
5436080 Inoue et al. Jul 1995 A
5439865 Abe et al. Aug 1995 A
5442153 Marantz et al. Aug 1995 A
5460701 Parker et al. Oct 1995 A
5464458 Yamamoto Nov 1995 A
5485941 Guyomard et al. Jan 1996 A
5534149 Birkenbeil et al. Jul 1996 A
5534270 De Castro Jul 1996 A
5543173 Horn, Jr. et al. Aug 1996 A
5553507 Basch et al. Sep 1996 A
5562966 Clarke et al. Oct 1996 A
5582807 Liao et al. Dec 1996 A
5596973 Grice Jan 1997 A
5611896 Swanepoel et al. Mar 1997 A
5630322 Heilmann et al. May 1997 A
5652304 Calderon et al. Jul 1997 A
5714644 Irgang et al. Feb 1998 A
5723187 Popoola et al. Mar 1998 A
5726414 Kitahashi et al. Mar 1998 A
5749938 Coombs May 1998 A
5776359 Schultz et al. Jul 1998 A
5788738 Pirzada et al. Aug 1998 A
5804155 Farrauto et al. Sep 1998 A
5811187 Anderson et al. Sep 1998 A
5837959 Muehlberger et al. Nov 1998 A
5851507 Pirzada et al. Dec 1998 A
5853815 Muehlberger Dec 1998 A
5858470 Bernecki et al. Jan 1999 A
5884473 Noda et al. Mar 1999 A
5905000 Yadav et al. May 1999 A
5928806 Olah et al. Jul 1999 A
5935293 Detering et al. Aug 1999 A
5973289 Read et al. Oct 1999 A
5989648 Phillips Nov 1999 A
5993967 Brotzman, Jr. et al. Nov 1999 A
5993988 Ohara et al. Nov 1999 A
6004620 Camm Dec 1999 A
6012647 Ruta et al. Jan 2000 A
6033781 Brotzman, Jr. et al. Mar 2000 A
6045765 Nakatsuji et al. Apr 2000 A
6059853 Coombs May 2000 A
6066587 Kurokawa et al. May 2000 A
6084197 Fusaro, Jr. Jul 2000 A
6093306 Hanrahan et al. Jul 2000 A
6093378 Deeba et al. Jul 2000 A
6102106 Manning et al. Aug 2000 A
6117376 Merkel Sep 2000 A
6168694 Huang et al. Jan 2001 B1
6190627 Hoke et al. Feb 2001 B1
6213049 Yang Apr 2001 B1
6214195 Yadav et al. Apr 2001 B1
6228904 Yadav et al. May 2001 B1
6254940 Pratsinis et al. Jul 2001 B1
6261484 Phillips et al. Jul 2001 B1
6267864 Yadav et al. Jul 2001 B1
6322756 Arno et al. Nov 2001 B1
6342465 Klein et al. Jan 2002 B1
6344271 Yadav et al. Feb 2002 B1
6362449 Hadidi et al. Mar 2002 B1
6379419 Celik et al. Apr 2002 B1
6387560 Yadav et al. May 2002 B1
6395214 Kear et al. May 2002 B1
6398843 Tarrant Jun 2002 B1
6399030 Nolan Jun 2002 B1
6409851 Sethuram et al. Jun 2002 B1
6413781 Geis et al. Jul 2002 B1
6416818 Aikens et al. Jul 2002 B1
RE37853 Detering et al. Sep 2002 E
6444009 Liu et al. Sep 2002 B1
6475951 Domesle et al. Nov 2002 B1
6488904 Cox et al. Dec 2002 B1
6506995 Fusaro, Jr. et al. Jan 2003 B1
6517800 Cheng et al. Feb 2003 B1
6524662 Jang et al. Feb 2003 B2
6531704 Yadav et al. Mar 2003 B2
6548445 Buysch et al. Apr 2003 B1
6554609 Yadav et al. Apr 2003 B2
6562304 Mizrahi May 2003 B1
6562495 Yadav et al. May 2003 B2
6569393 Hoke et al. May 2003 B1
6569397 Yadav et al. May 2003 B1
6569518 Yadav et al. May 2003 B2
6572672 Yadav et al. Jun 2003 B2
6579446 Teran et al. Jun 2003 B1
6596187 Coll et al. Jul 2003 B2
6603038 Hagemeyer et al. Aug 2003 B1
6607821 Yadav et al. Aug 2003 B2
6610355 Yadav et al. Aug 2003 B2
6623559 Huang Sep 2003 B2
6635357 Moxson et al. Oct 2003 B2
6641775 Vigliotti et al. Nov 2003 B2
6652822 Phillips et al. Nov 2003 B2
6652967 Yadav et al. Nov 2003 B2
6669823 Sarkas et al. Dec 2003 B1
6682002 Kyotani Jan 2004 B2
6689192 Phillips et al. Feb 2004 B1
6699398 Kim Mar 2004 B1
6706097 Zomes Mar 2004 B2
6706660 Park Mar 2004 B2
6710207 Bogan, Jr. et al. Mar 2004 B2
6713176 Yadav et al. Mar 2004 B2
6716525 Yadav et al. Apr 2004 B1
6744006 Johnson et al. Jun 2004 B2
6746791 Yadav et al. Jun 2004 B2
6772584 Chun et al. Aug 2004 B2
6786950 Yadav et al. Sep 2004 B2
6813931 Yadav et al. Nov 2004 B2
6817388 Tsangaris et al. Nov 2004 B2
6832735 Yadav et al. Dec 2004 B2
6838072 Kong et al. Jan 2005 B1
6841509 Hwang et al. Jan 2005 B1
6855410 Buckley Feb 2005 B2
6855426 Yadav Feb 2005 B2
6855749 Yadav et al. Feb 2005 B1
6858170 Van Thillo et al. Feb 2005 B2
6886545 Holm May 2005 B1
6891319 Dean et al. May 2005 B2
6896958 Cayton et al. May 2005 B1
6902699 Fritzemeier et al. Jun 2005 B2
6916872 Yadav et al. Jul 2005 B2
6919065 Zhou et al. Jul 2005 B2
6919527 Boulos et al. Jul 2005 B2
6933331 Yadav et al. Aug 2005 B2
6972115 Ballard Dec 2005 B1
6986877 Takikawa et al. Jan 2006 B2
6994837 Boulos et al. Feb 2006 B2
7007872 Yadav et al. Mar 2006 B2
7022305 Drumm et al. Apr 2006 B2
7052777 Brotzman, Jr. et al. May 2006 B2
7073559 O'Larey et al. Jul 2006 B2
7074364 Jähn et al. Jul 2006 B2
7081267 Yadav Jul 2006 B2
7101819 Rosenflanz et al. Sep 2006 B2
7147544 Rosenflanz Dec 2006 B2
7147894 Zhou et al. Dec 2006 B2
7166198 Van Der Walt et al. Jan 2007 B2
7166663 Cayton et al. Jan 2007 B2
7172649 Conrad et al. Feb 2007 B2
7172790 Koulik et al. Feb 2007 B2
7178747 Yadav et al. Feb 2007 B2
7208126 Musick et al. Apr 2007 B2
7211236 Stark et al. May 2007 B2
7217407 Zhang May 2007 B2
7220398 Sutorik et al. May 2007 B2
7255498 Bush et al. Aug 2007 B2
7265076 Taguchi et al. Sep 2007 B2
7282167 Carpenter Oct 2007 B2
7307195 Polverejan et al. Dec 2007 B2
7323655 Kim Jan 2008 B2
7384447 Kodas et al. Jun 2008 B2
7402899 Whiting et al. Jul 2008 B1
7417008 Richards et al. Aug 2008 B2
7494527 Jurewicz et al. Feb 2009 B2
7517826 Fujdala et al. Apr 2009 B2
7534738 Fujdala et al. May 2009 B2
7541012 Yeung et al. Jun 2009 B2
7541310 Espinoza et al. Jun 2009 B2
7557324 Nylen et al. Jul 2009 B2
7572315 Boulos et al. Aug 2009 B2
7576029 Saito et al. Aug 2009 B2
7576031 Beutel et al. Aug 2009 B2
7604843 Robinson et al. Oct 2009 B1
7611686 Alekseeva et al. Nov 2009 B2
7615097 McKeclutie et al. Nov 2009 B2
7618919 Shimazu et al. Nov 2009 B2
7622693 Foret Nov 2009 B2
7632775 Zhou et al. Dec 2009 B2
7635218 Lott Dec 2009 B1
7674744 Shiratori et al. Mar 2010 B2
7678419 Kevwitch et al. Mar 2010 B2
7704369 Olah et al. Apr 2010 B2
7709411 Zhou et al. May 2010 B2
7709414 Fujdala et al. May 2010 B2
7745367 Fujdala et al. Jun 2010 B2
7750265 Belashchenko et al. Jul 2010 B2
7803210 Sekine et al. Sep 2010 B2
7842515 Zou et al. Nov 2010 B2
7851405 Wakamatsu et al. Dec 2010 B2
7874239 Howland Jan 2011 B2
7875573 Beutel et al. Jan 2011 B2
7897127 Layman et al. Mar 2011 B2
7902104 Kalck Mar 2011 B2
7905942 Layman Mar 2011 B1
7935655 Tolmachev May 2011 B2
8051724 Layman et al. Nov 2011 B1
8076258 Biberger Dec 2011 B1
8080494 Yasuda et al. Dec 2011 B2
8089495 Keller Jan 2012 B2
8142619 Layman et al. Mar 2012 B2
8168561 Virkar May 2012 B2
8173572 Feaviour May 2012 B2
8211392 Grubert et al. Jul 2012 B2
8258070 Fujdala et al. Sep 2012 B2
8278240 Tange et al. Oct 2012 B2
8294060 Mohanty et al. Oct 2012 B2
8309489 Cuenya et al. Nov 2012 B2
8349761 Xia et al. Jan 2013 B2
8557727 Yin et al. Oct 2013 B2
20010004009 MacKelvie Jun 2001 A1
20010042802 Youds Nov 2001 A1
20010055554 Hoke et al. Dec 2001 A1
20020018815 Sievers et al. Feb 2002 A1
20020068026 Murrell et al. Jun 2002 A1
20020071800 Hoke et al. Jun 2002 A1
20020079620 DuBuis et al. Jun 2002 A1
20020100751 Carr Aug 2002 A1
20020102674 Anderson Aug 2002 A1
20020131914 Sung Sep 2002 A1
20020143417 Ito et al. Oct 2002 A1
20020182735 Kibby et al. Dec 2002 A1
20020183191 Faber et al. Dec 2002 A1
20020192129 Shamouilian et al. Dec 2002 A1
20030036786 Duren et al. Feb 2003 A1
20030042232 Shimazu Mar 2003 A1
20030047617 Shanmugham et al. Mar 2003 A1
20030066800 Saim et al. Apr 2003 A1
20030108459 Wu et al. Jun 2003 A1
20030110931 Aghajanian et al. Jun 2003 A1
20030129098 Endo et al. Jul 2003 A1
20030139288 Cai et al. Jul 2003 A1
20030143153 Boulos et al. Jul 2003 A1
20030172772 Sethuram et al. Sep 2003 A1
20030223546 McGregor et al. Dec 2003 A1
20040009118 Phillips et al. Jan 2004 A1
20040023302 Archibald et al. Feb 2004 A1
20040023453 Xu et al. Feb 2004 A1
20040077494 LaBarge et al. Apr 2004 A1
20040103751 Joseph et al. Jun 2004 A1
20040109523 Singh et al. Jun 2004 A1
20040119064 Narayan et al. Jun 2004 A1
20040127586 Jin et al. Jul 2004 A1
20040166036 Chen et al. Aug 2004 A1
20040167009 Kuntz et al. Aug 2004 A1
20040176246 Shirk et al. Sep 2004 A1
20040208805 Fincke et al. Oct 2004 A1
20040213998 Hearley et al. Oct 2004 A1
20040238345 Koulik et al. Dec 2004 A1
20040251017 Pillion et al. Dec 2004 A1
20040251241 Blutke et al. Dec 2004 A1
20050000321 O'Larey et al. Jan 2005 A1
20050000950 Schroder et al. Jan 2005 A1
20050066805 Park et al. Mar 2005 A1
20050070431 Alvin et al. Mar 2005 A1
20050077034 King Apr 2005 A1
20050097988 Kodas et al. May 2005 A1
20050106865 Chung et al. May 2005 A1
20050133121 Subramanian et al. Jun 2005 A1
20050163673 Johnson et al. Jul 2005 A1
20050199739 Kuroda et al. Sep 2005 A1
20050220695 Abatzoglou et al. Oct 2005 A1
20050227864 Sutorik et al. Oct 2005 A1
20050233380 Pesiri et al. Oct 2005 A1
20050240069 Polverejan et al. Oct 2005 A1
20050258766 Kim Nov 2005 A1
20050275143 Toth Dec 2005 A1
20060051505 Kortshagen et al. Mar 2006 A1
20060068989 Ninomiya et al. Mar 2006 A1
20060094595 Labarge May 2006 A1
20060096393 Pesiri May 2006 A1
20060105910 Zhou et al. May 2006 A1
20060108332 Belashchenko May 2006 A1
20060153728 Schoenung et al. Jul 2006 A1
20060153765 Pham-Huu et al. Jul 2006 A1
20060159596 De La Veaux et al. Jul 2006 A1
20060166809 Malek et al. Jul 2006 A1
20060211569 Dang et al. Sep 2006 A1
20060213326 Gollob et al. Sep 2006 A1
20060222780 Gurevich et al. Oct 2006 A1
20060231525 Asakawa et al. Oct 2006 A1
20070048206 Hung et al. Mar 2007 A1
20070049484 Kear et al. Mar 2007 A1
20070063364 Hsiao et al. Mar 2007 A1
20070084308 Nakamura et al. Apr 2007 A1
20070084834 Hanus et al. Apr 2007 A1
20070087934 Martens et al. Apr 2007 A1
20070163385 Takahashi et al. Jul 2007 A1
20070173403 Koike et al. Jul 2007 A1
20070178673 Gole et al. Aug 2007 A1
20070221404 Das et al. Sep 2007 A1
20070253874 Foret Nov 2007 A1
20070292321 Plischke et al. Dec 2007 A1
20080006954 Yubuta et al. Jan 2008 A1
20080026041 Tepper et al. Jan 2008 A1
20080031806 Gavenonis et al. Feb 2008 A1
20080038578 Li Feb 2008 A1
20080045405 Beutel et al. Feb 2008 A1
20080047261 Han et al. Feb 2008 A1
20080057212 Dorier et al. Mar 2008 A1
20080064769 Sato et al. Mar 2008 A1
20080104735 Howland May 2008 A1
20080105083 Nakamura et al. May 2008 A1
20080116178 Weidman May 2008 A1
20080125308 Fujdala et al. May 2008 A1
20080125313 Fujdala et al. May 2008 A1
20080138651 Doi et al. Jun 2008 A1
20080175936 Tokita et al. Jul 2008 A1
20080187714 Wakamatsu et al. Aug 2008 A1
20080206562 Stucky et al. Aug 2008 A1
20080207858 Kowaleski et al. Aug 2008 A1
20080248704 Mathis et al. Oct 2008 A1
20080274344 Vieth et al. Nov 2008 A1
20080277092 Layman et al. Nov 2008 A1
20080277264 Sprague Nov 2008 A1
20080277266 Layman Nov 2008 A1
20080277267 Biberger et al. Nov 2008 A1
20080277269 Layman et al. Nov 2008 A1
20080277270 Biberger et al. Nov 2008 A1
20080277271 Layman Nov 2008 A1
20080280049 Kevwitch et al. Nov 2008 A1
20080280751 Harutyunyan et al. Nov 2008 A1
20080280756 Biberger Nov 2008 A1
20080283411 Eastman et al. Nov 2008 A1
20080283498 Yamazaki Nov 2008 A1
20090010801 Murphy et al. Jan 2009 A1
20090054230 Veeraraghavan et al. Feb 2009 A1
20090088585 Schammel et al. Apr 2009 A1
20090092887 McGrath et al. Apr 2009 A1
20090098402 Kang et al. Apr 2009 A1
20090114568 Trevino et al. May 2009 A1
20090162991 Beneyton et al. Jun 2009 A1
20090168506 Han et al. Jul 2009 A1
20090170242 Lin et al. Jul 2009 A1
20090181474 Nagai Jul 2009 A1
20090200180 Capote et al. Aug 2009 A1
20090208367 Calio et al. Aug 2009 A1
20090209408 Kitamura et al. Aug 2009 A1
20090223410 Jun et al. Sep 2009 A1
20090253037 Park et al. Oct 2009 A1
20090274897 Kaner et al. Nov 2009 A1
20090274903 Addiego Nov 2009 A1
20090286899 Hofmann et al. Nov 2009 A1
20090324468 Golden et al. Dec 2009 A1
20100089002 Merkel Apr 2010 A1
20100092358 Koegel et al. Apr 2010 A1
20100124514 Chelluri et al. May 2010 A1
20100166629 Deeba Jul 2010 A1
20100180581 Grubert et al. Jul 2010 A1
20100180582 Mueller-Stach et al. Jul 2010 A1
20100186375 Kazi et al. Jul 2010 A1
20100240525 Golden et al. Sep 2010 A1
20100275781 Tsangaris Nov 2010 A1
20110006463 Layman Jan 2011 A1
20110052467 Chase et al. Mar 2011 A1
20110143041 Layman et al. Jun 2011 A1
20110143915 Yin et al. Jun 2011 A1
20110143916 Leamon Jun 2011 A1
20110143926 Yin et al. Jun 2011 A1
20110143930 Yin et al. Jun 2011 A1
20110143933 Yin et al. Jun 2011 A1
20110144382 Yin et al. Jun 2011 A1
20110152550 Grey et al. Jun 2011 A1
20110158871 Arnold et al. Jun 2011 A1
20110174604 Duesel et al. Jul 2011 A1
20110243808 Fossey et al. Oct 2011 A1
20110245073 Oljaca et al. Oct 2011 A1
20110247336 Farsad et al. Oct 2011 A9
20110305612 Müller-Stach et al. Dec 2011 A1
20120023909 Lambert et al. Feb 2012 A1
20120045373 Biberger Feb 2012 A1
20120097033 Arnold et al. Apr 2012 A1
20120122660 Andersen et al. May 2012 A1
20120124974 Li et al. May 2012 A1
20120171098 Hung et al. Jul 2012 A1
20120308467 Carpenter et al. Dec 2012 A1
20130213018 Yin et al. Aug 2013 A1
20130280528 Biberger Oct 2013 A1
20130281288 Biberger et al. Oct 2013 A1
20130316896 Biberger Nov 2013 A1
20130345047 Biberger et al. Dec 2013 A1
20140018230 Yin et al. Jan 2014 A1
Foreign Referenced Citations (49)
Number Date Country
34 45 273 Jun 1986 DE
1 134 302 Sep 2001 EP
1 256 378 Nov 2002 EP
1 619 168 Jan 2006 EP
1 307 941 Feb 1973 GB
56-146804 Nov 1981 JP
61-086815 May 1986 JP
62-102827 May 1987 JP
63-214342 Sep 1988 JP
1-164795 Jun 1989 JP
05-228361 Sep 1993 JP
05-324094 Dec 1993 JP
6-93309 Apr 1994 JP
6-135797 May 1994 JP
6-065772 Sep 1994 JP
6-272012 Sep 1994 JP
07-031873 Feb 1995 JP
07-256116 Oct 1995 JP
8-158033 Jun 1996 JP
10-130810 May 1998 JP
11-502760 Mar 1999 JP
2000-220978 Aug 2000 JP
2002-88486 Mar 2002 JP
2002-336688 Nov 2002 JP
2003-126694 May 2003 JP
2004-233007 Aug 2004 JP
2004-249206 Sep 2004 JP
2004-290730 Oct 2004 JP
2005-503250 Feb 2005 JP
2005-122621 May 2005 JP
2005-218937 Aug 2005 JP
2005-342615 Dec 2005 JP
2006-001779 Jan 2006 JP
2006-508885 Mar 2006 JP
2006-247446 Sep 2006 JP
2006-260385 Sep 2006 JP
2007-46162 Feb 2007 JP
2007-203129 Aug 2007 JP
493241 Mar 1976 SU
200611449 Apr 2006 TW
201023207 Jun 2010 TW
WO-9628577 Sep 1996 WO
WO-02092503 Nov 2002 WO
WO-2004052778 Jun 2004 WO
WO-2005063390 Jul 2005 WO
WO 2006079213 Aug 2006 WO
WO-2008130451 Oct 2008 WO
WO-2008130451 Oct 2008 WO
WO-2011081833 Jul 2011 WO
Non-Patent Literature Citations (87)
Entry
Bateman, J. E. et al. (Dec. 17, 1998). “Alkylation of Porous Silicon by Direct Reaction with Alkenes and Alkynes,” Angew. Chem Int. Ed. 37(19):2683-2685.
Carrot, G. et al. (Sep. 17, 2002). “Surface-Initiated Ring-Opening Polymerization: A Versatile Method for Nanoparticle Ordering,” Macromolecules 35(22):8400-8404.
Chen, H.-S. et al. (Jul. 3, 2001). “On the Photoluminescence of Si Nanoparticles,” Mater. Phys. Mech. 4:62-66.
Faber, K. T. et al. (Sep. 1988). “Toughening by Stress-Induced Microcracking in Two-Phase Ceramics,” Communications of the American Ceramic Society 71(9): C-399-C401.
Fauchais, P. et al. (Jun. 1989). “La Projection Par Plasma: Une Revue,” Ann. Phys. Fr. 14(3):261-310.
Fauchais, P. et al. (Jan. 1993). “Les Dépôts Par Plasma Thermique,”Revue Générale De L'Electricité, RGE, Paris, France, No. 2, pp. 7-12 (in French).
Fauchais, P. et al. (Jan. 1996). “Plasma Spray: Study of the Coating Generation,” Ceramics International 22(4):295-303.
Fojtik, A. et al. (Apr. 29, 1994). “Luminescent Colloidal Silicon Particles,” Chemical Physics Letters 221 :363-367.
Fojtik, A. (Jan. 13, 2006). “Surface Chemistry of Luminescent Colloidal Silicon Nanoparticles,” J. Phys. Chem. B. 110(5):1994-1998.
Gutsch, A. et al. (2002). “Gas-Phase Production of Nanoparticles,” Kona No. 20, pp. 24-37.
Han, B. Q. et al. (Jan. 2004). “Deformation Mechanisms and Ductility of Nanostructured Al Alloys”, Mat. Res. Soc. Symp. Proc. 821:P9.1.1-P9.1.6.
Heberlein, J. (2002). “New Approaches in Thermal Plasma Technology”, Pure Appl. Chem. 74(3):327-335.
Hua, F. et al. (Mar. 2006). “Organically Capped Silicon Nanoparticles With Blue Photoluminescence Prepared by Hydrosilylation Followed by Oxidation,” Langmuir 22(9):4363-4370.
Ji, Y. et al. (Nov. 2002) “Processing and Mechanical Properties of Al2O3-5 vol.% Cr Nanocomposites,” Journal of the European Ceramic Society 22(12):1927-1936.
Jouet, R. J. et al. (Jan. 25, 2005). “Surface Passivation of Bare Aluminum Nanoparticles Using Perfluoroalkyl Carboxylic Acids,” Chem. Mater.17(11):2987-2996.
Kenvin, J. C. et al. (1992). “Supported Catalysts Prepared from Mononuclear Copper Complexes: Catalytic Properties”, J. Catalysis 135:81-91.
Konrad, H. et al. (1996). “Nanostructured Cu-Bi Alloys Prepared by Co-Evaporation in a Continuous Gas Flow,” NanoStructured Materials 7(6):605-610.
Kim, N. Y. et al. (Mar. 5, 1997). “Thermal Derivatization of Porous Silicon with Alcohols,” J. Am. Chem. Soc. 119(9):2297-2298.
Kwon, Y.-S. et al. (Apr. 30, 2003). “Passivation Process for Superfine Aluminum Powders Obtained by Electrical Explosion of Wires,” Applied Surface Science 211:57-67.
Langner, A. et al. (Aug. 25, 2005). “Controlled Silicon Surface Functionalization by Alkene Hydrosilylation,” J. Am. Chem. Soc. 127(37):12798-12799.
Li, D. et al. (Apr. 9, 2005). “Environmentally Responsive ”Hairy“ Nanoparticles: Mixed Homopolymer Brushes on Silica Nanoparticles Synthesized by Living Radical Polymerization Techniques,” J. Am. Chem. Soc. 127(7):6248-6256.
Li, X. et al. (May 25, 2004). “Surface Functionalization of Silicon Nanoparticles Produced by Laser-Driven Pyrolysis of Silane Followed by HF-HNO3 Etching,” Langmuir 20(11):4720-4727.
Liao, Y.-C. et al. (Jun. 27, 2006). “Self-Assembly of Organic Monolayers on Aerosolized Silicon Nanoparticles,” J.Am. Chem. Soc. 128(28):9061-9065.
Liu, S.-M. et al. (Jan. 13, 2006). “Enhanced Photoluminescence from Si Nano-Organosols by Functionalization With Alkenes and Their Size Evolution,” Chem. Mater. 18(3):637-642.
Mühlenweg, H. et al. (2004). “Gas-Phase Reactions—Open Up New Roads to Nanoproducts,” Degussa ScienceNewsletter No. 08, pp. 12-16.
Nagai, Y. et al. (Jul. 3, 2006). “Sintering Inhibition Mechanism of Platinum Supported on Ceria-Based Oxide and Pt-Oxide-Support Interaction,” J. Catalysis 242:103-109.
NASA (2009). “Enthalpy,” Article located at http://www.grc.nasa.gov/WWW/K-12/airplane/enthalpy.htrnl, published by National Aeronautics and Space Administration on Nov. 23, 2009, 1 page.
Neiner, D. (Aug. 5, 2006). “Low-Temperature Solution Route to Macroscopic Amounts of Hydrogen Terminated Silicon Nanoparticles,” J. Am. Chem. Soc. 128:11016-11017.
Netzer, L. et al. (1983). “A New Approach to Construction of Artificial Monolayer Assemblies,” J. Am. Chem. Soc. 105(3):674-676.
“Platinum Group Metals: Annual Review 1996” (Oct. 1997). Engineering and Mining Journal, p. 63.
Rahaman, R. A. et al. (1995). “Synthesis of Powders,” in Ceramic Processing and Sintering. Marcel Decker, Inc., New York, pp. 71-77.
Sailor, M. J. (1997). “Surface Chemistry of Luminescent Silicon Nanocrystallites,” Adv. Mater. 9(10):783-793.
Stiles, A. B. (Jan. 1, 1987). “Manufacture of Carbon-Supported Metal Catalysts,” in Catalyst Supports and Supported Catalysts, Butterworth Publishers, MA, pp. 125-132.
Subramanian, S. et al. (1991). “Structure and Activity of Composite Oxide Supported Platinum-Iridium Catalysts,” Applied Catalysts 74: 65-81.
Tao, Y.-T. (May 1993). “Structural Comparison of Self-Assembled Monolayers of n-Alkanoic Acids on the surfaces of Silver, Copper, and Aluminum,” J. Am. Chem. Soc. 115(10):4350-4358.
Ünal, N. et al. (Nov. 2011). “Influence of WC Particles on the Microstructural and Mechanical Properties of 3 mol% Y2O3 Stabilized ZrO2 Matrix Composites Produced by Hot Pressing,” Journal of the European Ceramic Society (31)13: 2267-2275.
Vardelle, A. et al. (1996). “Coating Generation: Vaporization of Particles in Plasma Spraying and Splat Formation,” Universite de Limoges, 123 Avenue A. Thomas 87000, Limoges, France, Pure & Appl. Chem. 68(5):1093-1099.
Vardelle, M. et al. (Jun. 1991). “Experimental Investigation of Powder Vaporization in Thermal Plasma Jets,” Plasma Chemistry and Plasma Processing 11(2):185-201.
Yoshida, T. (1994). “The Future of Thermal Plasma Processing for Coating”, Pure & Appl. Chem. 66(6):1223-1230.
Zou, J. et al. (Jun. 4, 2004). “Solution Synthesis of Ultrastable Luminescent Siloxane-Coated Silicon Nanoparticles,” Nano Letters 4(7):1181-1186.
Non Final Office Action mailed on Feb. 19, 2010, for U.S. Appl. No. 12/152,109, filed May 9, 2008, Biberger et al., 17 pages.
Non Final Office Action mailed on Feb. 18, 2010, for U.S. Appl. No. 12/001,644, filed Dec. 11, 2007, for Biberger et al., 8 pages.
International Search Report mailed on Aug. 8, 2008, for PCT Patent Application No. PCT/US2008/06093, filed May 12, 2008, published on Nov. 20, 2008, as WO 2008/140823, 1 page.
Written Opinion mailed on Aug. 8, 2008, for PCT Patent Application No. PCT/US2008/06093, filed May 12, 2008, published on Nov. 20, 2008, as WO 2008/140823, 8 pages.
U.S. Appl. No. 13/291,983, filed Nov. 8, 2011, for Layman et al.
U.S. Appl. No. 12/152,084, filed May 9, 2008, for Biberger.
U.S. Appl. No. 13/028,693, filed Feb. 16, 2011, for Biberger.
U.S. Appl. No. 12/943,909, filed Nov. 10, 2010, for Layman.
U.S. Appl. No. 12/152,111, filed May 9, 2008, for Biberger et al.
U.S. Appl. No. 12/151,830, filed May 8, 2008, for Biberger et al.
U.S. Appl. No. 12/968,248, filed Dec. 14, 2010, for Biberger.
U.S. Appl. No. 12/968,245, filed Dec. 14, 2010, for Biberger.
U.S. Appl. No. 12/968,241, filed Dec. 14, 2010, for Biberger.
U.S. Appl. No. 12/968,239, filed Dec. 14, 2010, for Biberger.
U.S. Appl. No. 12/969,128, filed Dec. 15, 2010, for Biberger.
U.S. Appl. No. 12/962,463, filed Dec. 7, 2010, for Leamon.
U.S. Appl. No. 12/961,030, filed Dec. 6, 2010, for Lehman.
U.S. Appl. No. 12/961,108, filed Dec. 6, 2010, for Lehman.
U.S. Appl. No. 12/961,200, filed Dec. 6, 2010, for Lehman.
U.S. Appl. No. 12/968,253, filed Dec. 14, 2010, for Biberger.
U.S. Appl. No. 12/968,235, filed Dec. 14, 2010, for Biberger.
U.S. Appl. No. 12/969,306, filed Dec. 15, 2010, for Lehman et al.
U.S. Appl. No. 12/969,447, filed Dec. 15, 2010, for Biberger et al.
U.S. Appl. No. 12/969,087, filed Dec. 15, 2010, for Biberger.
U.S. Appl. No. 12/962,533, filed Dec. 7, 2010, for Yin et al.
U.S. Appl. No. 12/962,523, filed Dec. 7, 2010, for Yin et al.
U.S. Appl. No. 12/001,643, filed Dec. 11, 2007, for Biberger et al.
U.S. Appl. No. 12/474,081, filed May 28, 2009, for Biberger et al.
U.S. Appl. No. 12/001,602, filed Dec. 11, 2007, for Biberger et al.
U.S. Appl. No. 12/001,644, filed Dec. 11, 2007, for Biberger et al.
U.S. Appl. No. 12/969,457, filed Nov. 15, 2010, for Leamon et al.
U.S. Appl. No. 12/969,503, filed Nov. 15, 2010, for Leamon et al.
U.S. Appl. No. 12/954,813, filed Nov. 26, 2010, for Biberger.
U.S. Appl. No. 12/954,822, filed Nov. 26, 2010, for Biberger.
U.S. Appl. No. 13/033,514, filed Feb. 23, 2011, for Biberger et al.
U.S. Appl. No. 13/589,024, filed Aug. 17, 2012, for Yin et al.
U.S. Appl. No. 13/801,726, filed Mar. 13, 2013, for Qi et al.
Babin, A. et al. (1985). “Solvents Used in the Arts,” Center for Safety in the Arts: 16 pages.
Chen, W.-J. et al. (Mar. 18, 2008). “Functional Fe3O4/TiO2 Core/Shell Magnetic Nanoparticles as Photokilling Agents for Pathogenic Bacteria,” Small 4(4): 485-491.
Gangeri, M. et al. (2009). “Fe and Pt Carbon Nanotubes for the Electrocatalytic Conversion of Carbon Dioxide to Oxygenates,” Catalysis Today 143: 57-63.
Luo, J. et al. (2008). “Core/Shell Nanoparticles as Electrocatalysts for Fuel Cell Reactions,” Advanced Materials 20: 4342-4347.
Mignard, D. et al. (2003). “Methanol Synthesis from Flue-Gas CO2 and Renewable Electricity: A Feasibility Study,” International Journal of Hydrogen Energy 28: 455-464.
Park, H.-Y. et al. (May 30, 2007). “Fabrication of Magnetic Core@Shell Fe Oxide@Au Nanoparticles for Interfacial Bioactivity and Bio-Separation,” Langmuir 23: 9050-9056.
Park, N.-G. et al. (Feb. 17, 2004). “Morphological and Photoelectrochemical Characterization of Core-Shell Nanoparticle Films for Dye-Sensitized Solar Cells: Zn-O Type Shell on SnO2 and TiO2 Cores,” Langmuir 20: 4246-4253.
“Plasma Spray and Wire Flame Spray Product Group,” located at http://www.processmaterials.com/spray.html, published by Process Materials, Inc., last accessed Aug. 5, 2013, 2 pages.
Chaim, R. et al. (2009). “Densification of Nanocrystalline Y2O3 Ceramic Powder by Spark Plasma Sintering,” Journal of European Ceramic Society 29: 91-98.
Viswanathan, V. et al. (2006). “Challenges and Advances in Nanocomposite Processing Techniques,” Materials Science and Engineering R 54: 121-285.
Related Publications (1)
Number Date Country
20140151939 A1 Jun 2014 US
Provisional Applications (1)
Number Date Country
60928946 May 2007 US
Continuations (1)
Number Date Country
Parent 12151765 May 2008 US
Child 13907667 US