Gas-separating plate for reactor for manufacturing semiconductor

Information

  • Patent Grant
  • D655260
  • Patent Number
    D655,260
  • Date Filed
    Wednesday, April 13, 2011
    13 years ago
  • Date Issued
    Tuesday, March 6, 2012
    12 years ago
Abstract
Description


FIG. 1 is front perspective view of a gas-separating plate for reactor for manufacturing semiconductor illustrating our new design;



FIG. 2 is a front view thereof;



FIG. 3 is a rear view thereof;



FIG. 4 is a right side view thereof;



FIG. 5 is a left side view thereof;



FIG. 6 is a top view thereof;



FIG. 7 is a bottom view thereof; and,



FIG. 8 is a sectional view taken along line 8-8 of FIG. 2.


The broken lines are shown for illustrative purposes only and form no part of the claimed design.


Claims
  • The ornamental design for gas-separating plate for reactor for manufacturing semiconductor, as shown and described.
Priority Claims (1)
Number Date Country Kind
2010-025241 Oct 2010 JP national
US Referenced Citations (12)
Number Name Date Kind
3618921 Corbett, Jr. Nov 1971 A
5709543 Shimazu Jan 1998 A
6379466 Sahin et al. Apr 2002 B1
D600220 Sato Sep 2009 S
7625205 Sasajima et al. Dec 2009 B2
D615937 Sato May 2010 S
D616392 Sato May 2010 S
7798811 Nitadori et al. Sep 2010 B2
20050056218 Sun et al. Mar 2005 A1
20050252447 Zhao et al. Nov 2005 A1
20070131168 Gomi et al. Jun 2007 A1
20090159002 Bera et al. Jun 2009 A1