1. Technical Field The invention relates to coating devices, particularly to glass coating systems.
2. Related Art
In recent years, with the execution of national policy of energy conservation and carbon reduction, energy-saving glass has been applied in doors, windows and glass curtain extensively. As shown in
In a conventional production line for energy-saving glass as shown in
An object of the invention is to provide a glass coating system, which can guarantee the gases separately in different chambers not to communicate with and permeate through each other without prolonging the distance between two cathodes.
Another object of the invention is to provide a glass coating system, which can continuously coat glass with different thickness without a pause.
To accomplish the above objects, the glass coating system of the invention includes a first coating chamber, a second coating chamber, an intermediary chamber and three conveying units. The intermediary chamber is sandwiched between the first and second chambers and has a gap plate and an elevator connected to the gap plate. The three conveying units are separately disposed in lower portions of the first costing chamber, the second coating chamber and the intermediary chamber for conveying a sheet of glass to be coated. The gap plate is located above one of the conveying units, and the elevator is capable of adjusting a distance between the gap plate and the conveying unit.
In the present invention, by the adjustable intermediary chamber between the first and second chambers, the distance between the two cathodes does not need to be prolonged and the gases separately in different chambers cannot communicate with and permeate through each other. This can shorten the distance between two cathodes. Also, the invention has an advantage of continuous adjustment in vacuum. When different kinds of glass with different thickness are being processed, a pause in production is not needed. Only adjusting the gap plate in vacuum to fit different glass thickness is enough. The invention can be applied in continuous glass coating production lines.
Please refer to
The elevator 50 includes a servomotor 51 and an eccentric wheel mechanism. The servomotor 51 is disposed outside the intermediary chamber 16. The eccentric wheel mechanism connects the gap plate 163. A spindle 58 of the servo motor 51 is provided with a coupling 54. The eccentric wheel mechanism includes a bearing seat 55 on a side wall of the intermediary chamber 16. A shaft 54 is disposed in the bearing seat 55. The shaft 54 is disposed with an eccentric wheel 56. The shaft 54 is connected to the spindle 58 through the coupling 53. The eccentric wheel 56 connects the gap plate 163. The gap plate 163 can be moved up or down by rotation of the spindle 58 of the servomotor 51 so as to adjust the distance between the gap plate 163 and the conveying unit 20. When a vacuum degree in the first coating chamber 12, the intermediary chamber 16 and the second coating chamber 14 reaches the sputtering vacuum degree, the servomotor 51 is started to rotate with a certain angle, and the spindle 58, the shaft 54 and the eccentric wheel 56 are driven to rotate. The position of the eccentric wheel 56 makes the distance between the gap plate 163 and a left bottom 1642, a middle bottom 1644 and a right bottom 1646 become smaller to form the gap 166.
A sealing ring 57 is disposed between the spindle 58 of the servomotor 51 and the intermediary chamber 16. A sealing element 52 is disposed between the spindle 58 and the sealing ring 57. The sealing ring 57 and the sealing element 52 divide the spindle 58 into an interior portion and an exterior portion to guarantee the vacuum degree of the first coating chamber 12, the intermediary chamber 16 and the second coating chamber 14.
The elevator 50 may be two in number and they are separately mounted on two sides of the gap plate 163 for higher stability and accuracy.
The conveying unit 20 in the intermediary chamber 16 includes two parallel rollers 22. The two rollers 22 divide the bottom of the intermediary chamber 16 into a left bottom 1642, a middle bottom 1644 and a right bottom 1646. The bottom is not protrudent from the highest points of the rollers 22.
The first and second coating chambers 12, 14 are separately provided with two cathodes 122, 142 above the conveying units 20 and two gas supply tubes 124, 144. The gas supply tubes 124, 144 are filled with reaction gases 42, 44. The intermediary chamber 16 is provided with a vacuum pump 162 above the conveying unit 20. The vacuum pump 162 may be a molecular pump or a pumping tube of another vacuum pump.
The gap plate 163 is formed with a pumping aperture 1632 under the vacuum pump 162 for pumping a small amount of the reaction gasses 42, 44 to prevent the gasses 42, 44 from entering the second coating chamber 14.
As shown in
A second step is to place the glass 30 to be coated on the conveying unit 20.
1) When a vacuum degree in the first coating chamber 12, the intermediary chamber 16 and the second coating chamber 14 reaches the sputtering vacuum degree, the servomotor 51 is started to rotate with a certain angle, and the spindle 58, the shaft 54 and the eccentric wheel 56 are driven to rotate. The position of the eccentric wheel 56 makes the distance between the gap plate 163 and a bottom form the gap 166.
2) Fill the gas supply tube 124 in the first coating chamber 12 with the reaction gas 42, and the cathode 122 of the first coating chamber 12 starts sputtering. Then fill the gas supply tube 142 in the second coating chamber 14 with the reaction gas 44, and the cathode 142 of the second coating chamber 14 starts sputtering.
3) Convey the glasses 30 to be coated into the first coating chamber 12, the intermediary chamber 16 and the second coating chamber 14 one by one. When the first sheet of glass 30 nears the left bottom 1642, start the servomotor 51 to adjust the distance between the gap plate 163 and the glass 30 to be less than 1 mm
4) Repeat the above steps to coat another glass when a glass 30 has been coated. The position of the eccentric wheel 56 makes the distance between the gap plate 163 and a bottom form the gap 166. When the distance is adjusted to be less than 1 mm, the first and second coating chambers 12, 14 are under the sputtering vacuum degree and the mean free path will be much greater than the distance. According to the theory of molecular movement in vacuum, the gas molecular is hard to pass the gap. Thus the reaction gasses 42, 44 in the first and second coating chambers 12, 14 can be isolated. The gap plate 163 is formed with a pumping aperture 1632 under the vacuum pump 162 for pumping a small amount of the reaction gasses 42, 44 to prevent the gasses 42, 44 from entering the second coating chamber 14. Thus, using a shorter distance to isolate reaction gases 42, 44 is achieved. Similarly, the gap plate 163 can be adjusted downward to reduce the distance when no glass 30 exists. Under the sputtering vacuum degree, the mean free path will be much greater than the distance. According to the theory of molecular movement in vacuum, the gas molecular is hard to pass the gap. Thus the reaction gasses 42, 44 in the first and second coating chambers 12, 14 can be isolated.
In a coating process, the relative distance which can be adjusted is a gap. When the glass to be coated varies in thickness, the coating process can be performed without a pause.
In the present invention, by the adjustable intermediary chamber between the first and second chambers, the distance between the two cathodes does not need to be prolonged and the gases separately in different chambers cannot communicate with and permeate through each other. This can shorten the distance between two cathodes. Also, the invention has an advantage of continuous adjustment in vacuum. When different kinds of glass with different thickness are being processed, a pause in production is not needed. Only adjusting the gap plate in vacuum to fit different glass thickness is enough. The invention can be applied in continuous glass coating production lines.
Those skilled in the art will appreciate that numerous changes and modifications can be made to the preferred embodiment of the invention, and that such changes and modifications can be made without departing from the spirit of the invention.
Number | Date | Country | Kind |
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201310588999.1 | Nov 2013 | CN | national |