Sputtering

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CPC
C23C14/34

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/34Sputtering

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Piezoelectric bulk layers with tilted c-axis orientation and method...
- Patent number 12,365,979
- Issue date Jul 22, 2025
- Qorvo US, Inc.
- Derya Deniz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanocomposite solar absorber with encapsulated metal nanoparticles
- Patent number 12,366,385
- Issue date Jul 22, 2025
- Khalifa University of Science and Technology
- TieJun Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 12,365,976
- Issue date Jul 22, 2025
- Shibaura Mechatronics Corporation
- Shigeki Matsunaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diaphragm assembly for delimiting the coating region of a sputter s...
- Patent number 12,365,978
- Issue date Jul 22, 2025
- Solayer GmbH
- Dzmitry Hrunski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for improved high pressure plasma processing
- Patent number 12,368,028
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- William R. Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and CVD mask coating method using the same
- Patent number 12,365,975
- Issue date Jul 22, 2025
- Samsung Display Co., Ltd.
- Sungmin Hur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for physical vapor deposition (PVD) dielectri...
- Patent number 12,368,033
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochromic cathode materials
- Patent number 12,366,784
- Issue date Jul 22, 2025
- View Operating Corporation
- Robert Tad Rozbicki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support body, manufacturing apparatus for support body, and manufac...
- Patent number 12,368,034
- Issue date Jul 22, 2025
- Keio University
- Atsushi Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming transparent layers for a solar cell
- Patent number 12,369,428
- Issue date Jul 22, 2025
- VON ARDENNE Asset GmbH & Co. KG
- Martin Dimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming layer
- Patent number 12,362,160
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hsin-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing lower electrical isolation in electrochromic...
- Patent number 12,360,426
- Issue date Jul 15, 2025
- Sage Electrochromics, Inc.
- Harvey Kalweit
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Modular sputtering target with precious metal insert and skirt
- Patent number 12,359,303
- Issue date Jul 15, 2025
- Materion Corporation
- Matthew Fisher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing ferroelectric film, ferroelectric film, and us...
- Patent number 12,359,300
- Issue date Jul 15, 2025
- Tokyo Institute of Technology
- Hiroshi Funakubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ and tunable deposition of a film
- Patent number 12,359,307
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle removal during fabrication of electrochromic devices
- Patent number 12,360,425
- Issue date Jul 15, 2025
- View Operating Corporation
- Robert T. Rozbicki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten suboxide ceramic target
- Patent number 12,359,304
- Issue date Jul 15, 2025
- SOLERAS ADVANCED COATINGS BV
- Ignacio Caretti Giangaspro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma based film modification for semiconductor devices
- Patent number 12,351,900
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Timothy J. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 12,354,854
- Issue date Jul 8, 2025
- Shibaura Mechatronics Corporation
- Hisashi Nishigaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochromic cathode materials
- Patent number 12,353,109
- Issue date Jul 8, 2025
- View Operating Corporation
- Robert T. Rozbicki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Gallium nitride particles and method for producing same
- Patent number 12,351,455
- Issue date Jul 8, 2025
- Tosoh Corporation
- Masami Mesuda
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Film forming apparatus
- Patent number 12,354,856
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of non-stoichiometric metal compound layer
- Patent number 12,351,901
- Issue date Jul 8, 2025
- SOLERAS ADVANCED COATINGS BV
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Neutron capture therapy system
- Patent number 12,356,537
- Issue date Jul 8, 2025
- NEUBORON THERAPY SYSTEM LTD.
- Yuan-hao Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
III-N heteroepitaxial devices on rock salt substrates
- Patent number 12,344,958
- Issue date Jul 1, 2025
- Alliance for Sustainable Energy, LLC
- Marshall Brooks Tellekamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Piston ring with hard plating, and preparation method therefor
- Patent number 12,345,336
- Issue date Jul 1, 2025
- Asimco Shuanghuan Piston Ring (yizheng) Co., Ltd.
- Kaishun Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-functional shutter disk for thin film deposition chamber
- Patent number 12,344,929
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Durable, optically transparent, and superhydrophobic coating
- Patent number 12,338,524
- Issue date Jun 24, 2025
- Waymo LLC
- John T. Simpson
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Multilayered nonpolar, chromium, copper material coatings of power...
- Patent number 12,342,449
- Issue date Jun 24, 2025
- The Board of Trustees of the University of Illinois
- Tarek Gebrael
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for patterning a substrate, a method for forming a microstru...
- Patent number 12,338,523
- Issue date Jun 24, 2025
- Craif Inc.
- Keishu Tsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GARNET COMPOUND, OXIDE SINTERED COMPACT, OXIDE SEMICONDUCTOR THIN F...
- Publication number 20250236560
- Publication date Jul 24, 2025
- Idemitsu Kosan Co., Ltd.
- Kazuyoshi INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING HARD AND ULTRA-SMOOTH A-C BY SPUTTERING
- Publication number 20250230538
- Publication date Jul 17, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- JULIEN KERAUDY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION TOOL WITH DIELECTRIC COATED CHAMBER SIDEWALLS TO IMPROVE...
- Publication number 20250232959
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICE COMPRISING HOUSING
- Publication number 20250220098
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Kidoc SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PISTON RING WITH HARD PLATING, AND PREPARATION METHOD THEREFOR
- Publication number 20250215974
- Publication date Jul 3, 2025
- Asimco Shuanghuan Piston Ring (yizheng) Co., Ltd.
- Kaishun LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE COMPRISING A BASE AND AN INTEGRATED GETTER FILM FOR MANUF...
- Publication number 20250214830
- Publication date Jul 3, 2025
- SAES GETTERS S. P. A.
- Alessandro GALLITOGNOTTA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR FILM, AND METHOD FOR PRODUCING SEMICONDUCTOR FILM
- Publication number 20250220975
- Publication date Jul 3, 2025
- Idemitsu Kosan Co.,Ltd
- Kazuyoshi INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Growth Method of Highly Twinned SiGe Alloy on the Basal Plane of Tr...
- Publication number 20250215552
- Publication date Jul 3, 2025
- United States of America as represented by the Administrator of NASA
- Hyun Jung Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM SCANDIUM NITRIDE FILM AND FERROELECTRIC ELEMENT
- Publication number 20250212691
- Publication date Jun 26, 2025
- TOSOH CORPORATION
- Masami MESUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GALLIUM NITRIDE SINTERED BODY AND METHOD FOR PRODUCING SAME
- Publication number 20250206673
- Publication date Jun 26, 2025
- TOSOH CORPORATION
- Junya IIHAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUTTER SYSTEM FOR GAP-FREE SHIELDING OF A COATING SOURCE, AND ASSO...
- Publication number 20250210332
- Publication date Jun 26, 2025
- FHR Anlagenbau GmbH
- Sven HAEBERLEIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD APPARATUS AND METHOD
- Publication number 20250207241
- Publication date Jun 26, 2025
- SPTS TECHNOLOGIES LIMITED
- Kyle HUTCHINGS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING MODULE WITH IMPROVED CATHODE ARRANGEMENT
- Publication number 20250207238
- Publication date Jun 26, 2025
- SINGULUS TECHNOLOGIES AG
- Ralf HEILAND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless Deposition Process for Semiconductor Devices
- Publication number 20250201740
- Publication date Jun 19, 2025
- Wolfspeed, Inc.
- Meagan Lenore Coleman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM SPUTTERING TARGET ASSEMBLY AND METHOD OF MAKING
- Publication number 20250197987
- Publication date Jun 19, 2025
- Honeywell International Inc.
- Xiaodan Wu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
RARE EARTH ROTARY TARGET AND PREPARATION METHOD THEREFOR
- Publication number 20250188593
- Publication date Jun 12, 2025
- GRIREM ADVANCED MATERIALS CO., LTD
- Dehong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES
- Publication number 20250191900
- Publication date Jun 12, 2025
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINTERED BODY, SPUTTERING TARGET, OXIDE THIN FILM, THIN FILM TRANSI...
- Publication number 20250188591
- Publication date Jun 12, 2025
- Idemitsu Kosan Co.,Ltd
- Emi KAWASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET, METHOD FOR PRODUCING SPUTTERING TARGET, OXIDE SE...
- Publication number 20250188590
- Publication date Jun 12, 2025
- ULVAC, Inc.
- Kenta TANINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-EFFICIENCY TARGET FOR AN ION SOURCE
- Publication number 20250188592
- Publication date Jun 12, 2025
- Axcelis Technologies, Inc.
- Joshua Abeshaus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for improving the uniformity of rare earth nickelate thin fi...
- Publication number 20250188596
- Publication date Jun 12, 2025
- XI'AN JIAOTONG UNIVERSITY
- Zhen Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIALS FOR SWITCHING ELEMENTS, SWITCHING ELEMENTS AND METHODS FO...
- Publication number 20250194107
- Publication date Jun 12, 2025
- UIF (UNIVERSITY INDUSTRY FOUNDATION), YONSEI UNIVERSITY
- Hyun Chul SOHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CO-SPUTTERING RARE EARTH ROTATING TARGET MATERIAL, AND PREPARATION...
- Publication number 20250191818
- Publication date Jun 12, 2025
- GRIREM ADVANCED MATERIALS CO., LTD
- Zhiqiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Boron-Based and High-Entropy Magnetic Materials
- Publication number 20250182963
- Publication date Jun 5, 2025
- GEORGETOWN UNIVERSITY
- Kai Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING APPARATUS AND METHOD
- Publication number 20250183003
- Publication date Jun 5, 2025
- Institute Of Geological And Nuclear Sciences Limited
- Richard John Futter Futter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALUM SPUTTERING TARGET WITH IMPROVED PERFORMANCE AND PREDICTABI...
- Publication number 20250179624
- Publication date Jun 5, 2025
- Tosoh SMD, Inc.
- Weifang Miao
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
PEROVSKITE SOLAR MODULE WITH INDIUM ZINC-TIN OXIDE LAYER AND METHOD...
- Publication number 20250176418
- Publication date May 29, 2025
- Caelux Corporation
- Mason Lee Terry
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRESS CONTROL METHOD FOR PHYSICAL VAPOR DEPOSITION OF ALUMINUM
- Publication number 20250171887
- Publication date May 29, 2025
- Applied Materials, Inc.
- Yaoying Zhong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS
- Publication number 20250163584
- Publication date May 22, 2025
- KALARK NANOSTRUCTRE SCIENCES INC.
- Alain E. KALOYEROS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED TOOL AND CUTTING TOOL
- Publication number 20250163564
- Publication date May 22, 2025
- KYOCERA CORPORATION
- Ryoma NOMIYAMA
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Piezoelectric bulk layers with tilted c-axis orientation and method...

Nanocomposite solar absorber with encapsulated metal nanoparticles

Film forming apparatus

Diaphragm assembly for delimiting the coating region of a sputter s...

Apparatus for improved high pressure plasma processing

Sputtering apparatus and CVD mask coating method using the same

Methods and apparatus for physical vapor deposition (PVD) dielectri...

Electrochromic cathode materials

Support body, manufacturing apparatus for support body, and manufac...

Method of forming transparent layers for a solar cell

Method for forming layer

Methods for producing lower electrical isolation in electrochromic...

Modular sputtering target with precious metal insert and skirt

Method for producing ferroelectric film, ferroelectric film, and us...

In situ and tunable deposition of a film

Particle removal during fabrication of electrochromic devices

Tungsten suboxide ceramic target

Plasma based film modification for semiconductor devices

Film formation apparatus

Electrochromic cathode materials

Gallium nitride particles and method for producing same

Film forming apparatus

Deposition of non-stoichiometric metal compound layer

Neutron capture therapy system

III-N heteroepitaxial devices on rock salt substrates

Piston ring with hard plating, and preparation method therefor

Multi-functional shutter disk for thin film deposition chamber

Durable, optically transparent, and superhydrophobic coating

Multilayered nonpolar, chromium, copper material coatings of power...

Method for patterning a substrate, a method for forming a microstru...

Patents Applicationslast 30 patents

GARNET COMPOUND, OXIDE SINTERED COMPACT, OXIDE SEMICONDUCTOR THIN F...

METHOD FOR FORMING HARD AND ULTRA-SMOOTH A-C BY SPUTTERING

DEPOSITION TOOL WITH DIELECTRIC COATED CHAMBER SIDEWALLS TO IMPROVE...

ELECTRONIC DEVICE COMPRISING HOUSING

PISTON RING WITH HARD PLATING, AND PREPARATION METHOD THEREFOR

SUBSTRATE COMPRISING A BASE AND AN INTEGRATED GETTER FILM FOR MANUF...

SEMICONDUCTOR FILM, AND METHOD FOR PRODUCING SEMICONDUCTOR FILM

Growth Method of Highly Twinned SiGe Alloy on the Basal Plane of Tr...

ALUMINUM SCANDIUM NITRIDE FILM AND FERROELECTRIC ELEMENT

GALLIUM NITRIDE SINTERED BODY AND METHOD FOR PRODUCING SAME

SHUTTER SYSTEM FOR GAP-FREE SHIELDING OF A COATING SOURCE, AND ASSO...

PVD APPARATUS AND METHOD

COATING MODULE WITH IMPROVED CATHODE ARRANGEMENT

Electroless Deposition Process for Semiconductor Devices

MOLYBDENUM SPUTTERING TARGET ASSEMBLY AND METHOD OF MAKING

RARE EARTH ROTARY TARGET AND PREPARATION METHOD THEREFOR

INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES

SINTERED BODY, SPUTTERING TARGET, OXIDE THIN FILM, THIN FILM TRANSI...

SPUTTERING TARGET, METHOD FOR PRODUCING SPUTTERING TARGET, OXIDE SE...

HIGH-EFFICIENCY TARGET FOR AN ION SOURCE

Method for improving the uniformity of rare earth nickelate thin fi...

MATERIALS FOR SWITCHING ELEMENTS, SWITCHING ELEMENTS AND METHODS FO...

CO-SPUTTERING RARE EARTH ROTATING TARGET MATERIAL, AND PREPARATION...

Boron-Based and High-Entropy Magnetic Materials

ION BEAM SPUTTERING APPARATUS AND METHOD

TANTALUM SPUTTERING TARGET WITH IMPROVED PERFORMANCE AND PREDICTABI...

PEROVSKITE SOLAR MODULE WITH INDIUM ZINC-TIN OXIDE LAYER AND METHOD...

STRESS CONTROL METHOD FOR PHYSICAL VAPOR DEPOSITION OF ALUMINUM

METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS

COATED TOOL AND CUTTING TOOL