Sputtering

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CPC
C23C14/34

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/34Sputtering

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming Al-rich AlTiN coating layers by PVD from metalli...
- Patent number 12,325,906
- Issue date Jun 10, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Platinum-based sputtering target, and method for producing the same
- Patent number 12,325,908
- Issue date Jun 10, 2025
- Tohoku University
- Akihito Fujino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microminiature patterned metal on medical grade balloons
- Patent number 12,324,887
- Issue date Jun 10, 2025
- Professional Plating Inc.
- Craig A. Ingalls
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
EM source for enhanced plasma control
- Patent number 12,325,909
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Alexander Jansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Member for use in plasma processing device, and plasma processing d...
- Patent number 12,322,576
- Issue date Jun 3, 2025
- Kyocera Corporation
- Kazuhiro Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decorative object
- Patent number 12,319,997
- Issue date Jun 3, 2025
- The Swatch Group Research and Development Ltd.
- Christian Manasterski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target
- Patent number 12,312,674
- Issue date May 27, 2025
- JX Advanced Metals Corporation
- Masayoshi Shimizu
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for use in generating plasma
- Patent number 12,315,697
- Issue date May 27, 2025
- Dyson Technology Limited
- Sean Michael Carley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
- Patent number 12,315,707
- Issue date May 27, 2025
- Tokyo Electron Limited
- Motoi Yamagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing metal oxynitride film
- Patent number 12,315,717
- Issue date May 27, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Kazuki Tanemura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing solid state battery cathodes for use in bat...
- Patent number 12,312,673
- Issue date May 27, 2025
- Dyson Technology Limited
- Robert Ian Joseph Gruar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus
- Patent number 12,315,701
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD target and use thereof
- Patent number 12,305,274
- Issue date May 20, 2025
- ZHEJIANG SHINTOWN INDUSTRY CO., LTD
- Jianzhong Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorinated coupling agents and fluorinated (co)polymer layers made...
- Patent number 12,305,063
- Issue date May 20, 2025
- 3M Innovative Properties Company
- Paul J. Homnick
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
P-type gallium oxide film, and preparation method and application t...
- Patent number 12,297,527
- Issue date May 13, 2025
- HUBEI UNIVERSITY
- Yunbin He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical film, sputtering target, and method of producing optical film
- Patent number 12,297,528
- Issue date May 13, 2025
- Sumitomo Metal Mining Co., Ltd.
- Hideharu Okami
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Cathode unit for magnetron sputtering apparatus and magnetron sputt...
- Patent number 12,293,905
- Issue date May 6, 2025
- ULVAC, Inc.
- Toshiya Aoyagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mn—Ta—W—Cu—O-based sputtering target, and production method therefor
- Patent number 12,293,906
- Issue date May 6, 2025
- Dexerials Corporation
- Yuichi Kamori
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Preparation method for tungsten sulfide solid lubricating film base...
- Patent number 12,286,701
- Issue date Apr 29, 2025
- TAIZHOU UNIVERSITY
- Ping Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Pulsed DC power for deposition of film
- Patent number 12,288,670
- Issue date Apr 29, 2025
- Applied Materials, Inc.
- Abhijeet Laxman Sangle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum-scandium alloy target with high scandium content, and prep...
- Patent number 12,286,692
- Issue date Apr 29, 2025
- HUNAN RARE EARTH METAL MATERIAL RESEARCH INSTITUTE CO., LTD.
- Hua Liu
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Coating apparatus and coating method having divided pulses
- Patent number 12,286,705
- Issue date Apr 29, 2025
- CemeCon AG
- Walter May
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Packaging material for non-destructive detection of food quality, p...
- Patent number 12,280,929
- Issue date Apr 22, 2025
- Zhejiang University
- Lijuan Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,281,381
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Sireesh Adimadhyam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for decorating a mechanical part
- Patent number 12,279,679
- Issue date Apr 22, 2025
- Rubattel & Weyermann S.A.
- Frédéric Jeanrenaud
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multifocal magnetron design for physical vapor deposition processin...
- Patent number 12,283,470
- Issue date Apr 22, 2025
- Intevac, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation method of niobium diselenide film with ultra-low fricti...
- Patent number 12,281,379
- Issue date Apr 22, 2025
- LANZHOU INSTITUTE OF CHEMICAL PHYSICS CAS
- Li Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Member for use in plasma processing device, and plasma processing d...
- Patent number 12,283,466
- Issue date Apr 22, 2025
- Kyocera Corporation
- Kazuhiro Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Engineered multi-dimensional metallurgical properties in PVD materials
- Patent number 12,276,017
- Issue date Apr 15, 2025
- Vactronix Scientific, LLC.
- Scott P. Carpenter
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Transport device and method
- Patent number 12,276,019
- Issue date Apr 15, 2025
- VON ARDENNE Asset GmbH & Co. KG
- Christoph Kaiser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
RARE EARTH ROTARY TARGET AND PREPARATION METHOD THEREFOR
- Publication number 20250188593
- Publication date Jun 12, 2025
- GRIREM ADVANCED MATERIALS CO., LTD
- Dehong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINTERED BODY, SPUTTERING TARGET, OXIDE THIN FILM, THIN FILM TRANSI...
- Publication number 20250188591
- Publication date Jun 12, 2025
- Idemitsu Kosan Co.,Ltd
- Emi KAWASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES
- Publication number 20250191900
- Publication date Jun 12, 2025
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET, METHOD FOR PRODUCING SPUTTERING TARGET, OXIDE SE...
- Publication number 20250188590
- Publication date Jun 12, 2025
- ULVAC, Inc.
- Kenta TANINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-EFFICIENCY TARGET FOR AN ION SOURCE
- Publication number 20250188592
- Publication date Jun 12, 2025
- Axcelis Technologies, Inc.
- Joshua Abeshaus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for improving the uniformity of rare earth nickelate thin fi...
- Publication number 20250188596
- Publication date Jun 12, 2025
- XI'AN JIAOTONG UNIVERSITY
- Zhen Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CO-SPUTTERING RARE EARTH ROTATING TARGET MATERIAL, AND PREPARATION...
- Publication number 20250191818
- Publication date Jun 12, 2025
- GRIREM ADVANCED MATERIALS CO., LTD
- Zhiqiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIALS FOR SWITCHING ELEMENTS, SWITCHING ELEMENTS AND METHODS FO...
- Publication number 20250194107
- Publication date Jun 12, 2025
- UIF (UNIVERSITY INDUSTRY FOUNDATION), YONSEI UNIVERSITY
- Hyun Chul SOHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Boron-Based and High-Entropy Magnetic Materials
- Publication number 20250182963
- Publication date Jun 5, 2025
- GEORGETOWN UNIVERSITY
- Kai Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING APPARATUS AND METHOD
- Publication number 20250183003
- Publication date Jun 5, 2025
- Institute Of Geological And Nuclear Sciences Limited
- Richard John Futter Futter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALUM SPUTTERING TARGET WITH IMPROVED PERFORMANCE AND PREDICTABI...
- Publication number 20250179624
- Publication date Jun 5, 2025
- Tosoh SMD, Inc.
- Weifang Miao
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
PEROVSKITE SOLAR MODULE WITH INDIUM ZINC-TIN OXIDE LAYER AND METHOD...
- Publication number 20250176418
- Publication date May 29, 2025
- Caelux Corporation
- Mason Lee Terry
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRESS CONTROL METHOD FOR PHYSICAL VAPOR DEPOSITION OF ALUMINUM
- Publication number 20250171887
- Publication date May 29, 2025
- Applied Materials, Inc.
- Yaoying Zhong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS
- Publication number 20250163584
- Publication date May 22, 2025
- KALARK NANOSTRUCTRE SCIENCES INC.
- Alain E. KALOYEROS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED TOOL AND CUTTING TOOL
- Publication number 20250163564
- Publication date May 22, 2025
- KYOCERA CORPORATION
- Ryoma NOMIYAMA
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
COMPOSITION, METHODS FOR ITS PRODUCTION, AND ITS USE
- Publication number 20250154024
- Publication date May 15, 2025
- Ilika Technologies Limited
- Laura Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF DAMAGE MITIGATION AND STEP COVERAGE ENHANCE...
- Publication number 20250157790
- Publication date May 15, 2025
- Applied Materials, Inc.
- Bencherki MEBARKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS
- Publication number 20250153134
- Publication date May 15, 2025
- SHIBAURA MACHINE CO., LTD.
- Takeshi NAMBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS
- Publication number 20250155622
- Publication date May 15, 2025
- Huawei Technologies Co., Ltd
- Peiling Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, METHOD FOR MANUFACTURING...
- Publication number 20250155793
- Publication date May 15, 2025
- AGC Inc.
- Ryosuke SEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR COATING POWDER- OR GRANULAR-FORM PARTICLES
- Publication number 20250154640
- Publication date May 15, 2025
- Rainer Cremer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND DISPLAY DEVICE USING THE SAME
- Publication number 20250160191
- Publication date May 15, 2025
- SAMSUNG DISPLAY CO., LTD.
- Min Jae JEONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250146127
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20250146125
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...
- Publication number 20250149303
- Publication date May 8, 2025
- Tosoh SMD, Inc.
- Joseph BUCKFELLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED SUBSTRATE
- Publication number 20250145520
- Publication date May 8, 2025
- SCHOTT AG
- Christian Henn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO IMPART COLOR AND DURABLE PROPERTIES TO SUBSTRATES
- Publication number 20250146118
- Publication date May 8, 2025
- Georgia Tech Research Corporation
- William Judson Ready
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...
- Publication number 20250146126
- Publication date May 8, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL
- Publication number 20250137114
- Publication date May 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Lin WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTIVE DISPLAY PANEL AND SPUTTERING TARGET
- Publication number 20250138362
- Publication date May 1, 2025
- HANNSTAR DISPLAY CORPORATION
- Chiung-Chang Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for forming Al-rich AlTiN coating layers by PVD from metalli...

Platinum-based sputtering target, and method for producing the same

Microminiature patterned metal on medical grade balloons

EM source for enhanced plasma control

Member for use in plasma processing device, and plasma processing d...

Decorative object

Sputtering target

Method and apparatus for use in generating plasma

Mounting table structure, substrate processing apparatus, and metho...

Method for manufacturing metal oxynitride film

Method of manufacturing solid state battery cathodes for use in bat...

Film forming apparatus

PVD target and use thereof

Fluorinated coupling agents and fluorinated (co)polymer layers made...

P-type gallium oxide film, and preparation method and application t...

Optical film, sputtering target, and method of producing optical film

Cathode unit for magnetron sputtering apparatus and magnetron sputt...

Mn—Ta—W—Cu—O-based sputtering target, and production method therefor

Preparation method for tungsten sulfide solid lubricating film base...

Pulsed DC power for deposition of film

Aluminum-scandium alloy target with high scandium content, and prep...

Coating apparatus and coating method having divided pulses

Packaging material for non-destructive detection of food quality, p...

Methods and apparatus for processing a substrate

Method for decorating a mechanical part

Multifocal magnetron design for physical vapor deposition processin...

Preparation method of niobium diselenide film with ultra-low fricti...

Member for use in plasma processing device, and plasma processing d...

Engineered multi-dimensional metallurgical properties in PVD materials

Transport device and method

Patents Applicationslast 30 patents

RARE EARTH ROTARY TARGET AND PREPARATION METHOD THEREFOR

SINTERED BODY, SPUTTERING TARGET, OXIDE THIN FILM, THIN FILM TRANSI...

INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES

SPUTTERING TARGET, METHOD FOR PRODUCING SPUTTERING TARGET, OXIDE SE...

HIGH-EFFICIENCY TARGET FOR AN ION SOURCE

Method for improving the uniformity of rare earth nickelate thin fi...

CO-SPUTTERING RARE EARTH ROTATING TARGET MATERIAL, AND PREPARATION...

MATERIALS FOR SWITCHING ELEMENTS, SWITCHING ELEMENTS AND METHODS FO...

Boron-Based and High-Entropy Magnetic Materials

ION BEAM SPUTTERING APPARATUS AND METHOD

TANTALUM SPUTTERING TARGET WITH IMPROVED PERFORMANCE AND PREDICTABI...

PEROVSKITE SOLAR MODULE WITH INDIUM ZINC-TIN OXIDE LAYER AND METHOD...

STRESS CONTROL METHOD FOR PHYSICAL VAPOR DEPOSITION OF ALUMINUM

METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS

COATED TOOL AND CUTTING TOOL

COMPOSITION, METHODS FOR ITS PRODUCTION, AND ITS USE

APPARATUS AND METHOD OF DAMAGE MITIGATION AND STEP COVERAGE ENHANCE...

SURFACE TREATMENT APPARATUS

HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS

REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, METHOD FOR MANUFACTURING...

METHOD AND DEVICE FOR COATING POWDER- OR GRANULAR-FORM PARTICLES

SPUTTERING APPARATUS AND DISPLAY DEVICE USING THE SAME

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

FILM FORMATION APPARATUS

DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...

COATED SUBSTRATE

METHODS TO IMPART COLOR AND DURABLE PROPERTIES TO SUBSTRATES

SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...

SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL

REFLECTIVE DISPLAY PANEL AND SPUTTERING TARGET