Claims
- 1. A graphite electrode comprising a substrate and at least one three-layer stacked structure formed on said substrate,
- said three-layer stacked structure being composed of a deposition layer of fine globular graphite particles, a metal deposition layer formed on said deposition layer of fine globular graphite particles and a pyrolyzed graphite deposition layer formed on said metal layer.
- 2. The graphite electrode of claim 1, wherein said fine globular particles of said deposition layer have a size of from 1 to 10 .mu.m.
- 3. The graphite electrode of claim 1, wherein said metal deposition layer is nickel or iron.
- 4. The graphite electrode of claim 1, wherein said metal deposition layer has a thickness of from 1 to 10 .mu.m.
- 5. The graphite electrode of claim 1, wherein said substrate comprises an iron group element or an alloy thereof.
- 6. The graphite electrode of claim 1, wherein said substrate is in the form of a plate, rod, net or foil.
- 7. The graphite electrode of claim 1, wherein said substrate is in the form of a reticular plate.
- 8. The graphite electrode of claim 1, wherein said deposition layer of fine globular graphite particles is formed from a hydrocarbon serving as a material gas having a molecular weight of up to 150, using a thermal decomposition chemical vapor deposition apparatus under the conditions of a molecular number density of 1.3.times.10.sup.22 molecules/liter and a flow rate of 0.3 to 10 cm/min.
- 9. The graphite electrode of claim 8, wherein said hydrocarbon is benzene or propane.
- 10. The graphite electrode of claim 1, wherein said pyrolyzed graphite deposition layer is formed from a hydrocarbon serving as a material gas having a molecular weight of up to 150, using a thermal decomposition chemical vapor deposition apparatus under the conditions of a molecular number density of 0.5.times.10.sup.21 to 2.6.times.10.sup.22 molecules/liter and a flow rate of 0.3 to 70 cm/mm.
- 11. The graphite electrode of claim 10, wherein said hydrocarbon is benzene or propane.
- 12. The graphite electrode of claim 1, wherein one three-layered stacked structure is formed on said substrate.
- 13. The graphite electrode of claim 1, wherein a plurality of said three-layered stacked structure is formed on said substrate.
- 14. The graphite electrode of claim 6, wherein said substrate is in the form of a net.
- 15. The graphite electrode of claim 1, wherein said metal deposition layer is an iron group element or an alloy thereof.
- 16. The graphite electrode of claim 1, wherein said electrode has a thickness of up to 1 mm.
Priority Claims (1)
Number |
Date |
Country |
Kind |
63-51821 |
Mar 1988 |
JPX |
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Parent Case Info
This application is a divisional of now allowed application Ser. No. 07/318,339 filed on Mar. 3, 1989, now U.S. Pat. No. 5,068,126.
US Referenced Citations (8)
Foreign Referenced Citations (3)
Number |
Date |
Country |
39527 |
Sep 1984 |
JPX |
61-27503 |
Feb 1986 |
JPX |
2086943 |
May 1982 |
GBX |
Non-Patent Literature Citations (1)
Entry |
M. Miyake "Chemical Vapor Deposition of Niobium on Graphite" Thin Solid Films 63, 1979 pp. 303-308. |
Divisions (1)
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Number |
Date |
Country |
Parent |
318339 |
Mar 1989 |
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