Claims
- 1. A heat treating apparatus for baking a coating film on a large substrate, comprising:
- a support plate for supporting a substrate to be treated, said support plate having a plurality of holes;
- heating means for heating said substrate through said support plate; and
- support pins extending through said plurality of holes of said support plate so as to support said substrate, each of said support pins having a leg portion slidably mounted on said support plate, wherein each of said support pins is slidable in a horizontal direction within each hole of said plurality of holes in said support plate.
- 2. The apparatus according to claim 1, wherein said support pin comprises a pin body and an auxiliary portion mounted to the tip portion of said pin body and having a corrosion resistance.
- 3. The apparatus according to claim 2, wherein said support pin is made of stainless steel.
- 4. The apparatus according to claim 2, wherein said auxiliary upper end portion of the support pin is made of a material selected from the group consisting of PEEK, fluoroelastomer, and fluoroplastic.
- 5. The apparatus according to claim 1, wherein a coating film is formed on the surface of the wall defining said hole made through said support plate.
- 6. The apparatus according to claim 5, wherein said coating film is made of a material selected from the group consisting of a fluoroplastic and a sintered body thereof.
- 7. The apparatus according to claim 1, wherein a ratio D/L is 0.2 or more, where D denotes the width of the leg portion, and L denotes the length of the support pin.
- 8. The apparatus according to claim 1, further comprising spacer members, wherein said spacer members are mounted to a surface of said support plate which is brought into contact with said substrate to be treated.
- 9. The apparatus according to claim 1, further comprising pin lift means for moving said support pins in a vertical direction.
Priority Claims (1)
Number |
Date |
Country |
Kind |
7-138740 |
May 1995 |
JPX |
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Parent Case Info
This application is a continuation of Ser. No. 08/642,898, filed May 6, 1996, now U.S. Pat. No. 5,834,737.
US Referenced Citations (4)
Number |
Name |
Date |
Kind |
4790258 |
Drage et al. |
Dec 1988 |
|
5016332 |
Reichelderfer et al. |
May 1991 |
|
5665167 |
Deguchi et al. |
Sep 1997 |
|
5669977 |
Shufflebotham et al. |
Sep 1997 |
|
Continuations (1)
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Number |
Date |
Country |
Parent |
642898 |
May 1996 |
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