Heater for manufacturing semiconductor

Information

  • Patent Grant
  • D589471
  • Patent Number
    D589,471
  • Date Filed
    Wednesday, March 28, 2007
    17 years ago
  • Date Issued
    Tuesday, March 31, 2009
    15 years ago
Abstract
Description


FIG. 1 is a front elevational view of a heater for manufacturing semiconductor, showing my new design;



FIG. 2 is a rear elevational view thereof; and,



FIG. 3 is a sectional view taken along line 33 in FIG. 1.


The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.


Claims
  • The ornamental design for a heater for manufacturing semiconductor, as shown and described.
Priority Claims (1)
Number Date Country Kind
2006-026092 Sep 2006 JP national
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20070166146 Sekiya Jul 2007 A1