Heater for semiconductor manufacturing

Information

  • Patent Grant
  • D604257
  • Patent Number
    D604,257
  • Date Filed
    Thursday, April 27, 2006
    18 years ago
  • Date Issued
    Tuesday, November 17, 2009
    15 years ago
Abstract
Description


FIG. 1 is an enlarged front elevation view of a heater for semiconductor manufacturing showing our new design;



FIG. 2 is an enlarged left side elevation view, the right side being a mirror image thereof;



FIG. 3 is a top plan view thereof;



FIG. 4 is a bottom plan view thereof;



FIG. 5 is an enlarged top plan view of the area 55 shown in FIG. 3; and,



FIG. 6 is an enlarged bottom plan view of the area 66 shown in FIG. 4.


The broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design.


Claims
  • The ornamental design for a heater for semiconductor manufacturing, as shown and described.
Priority Claims (1)
Number Date Country Kind
2005-031458 Oct 2005 JP national
US Referenced Citations (6)
Number Name Date Kind
5408071 Ragland et al. Apr 1995 A
5575941 Johnson Nov 1996 A
D424025 Mori May 2000 S
6061500 Su May 2000 A
6407371 Toya et al. Jun 2002 B1
7311520 Saito et al. Dec 2007 B2
Foreign Referenced Citations (1)
Number Date Country
D1191934 Dec 2003 JP