Patent Application
20100276611
1. Field of Invention
The present invention relates to irradiance, and more particularly to methods and apparatus for producing electromagnetic radiation.
2. Description of Related Art
Arc lamps have been used to produce electromagnetic radiation for a wide variety of purposes. Generally, arc lamps include continuous or DC arc lamps for producing continuous irradiance, as well as flashlamps for producing irradiance flashes.
Continuous or DC arc lamps have been used for applications ranging from sunlight simulation to rapid thermal processing of semiconductor wafers. A typical conventional DC arc lamp includes two electrodes, namely, a cathode and an anode, mounted within a quartz envelope filled with an inert gas such as xenon or argon. An electrical power supply is used to sustain a continuous plasma arc between the electrodes. Within the plasma arc, the plasma is heated by the high electrical current to a high temperature via particle collision, and emits electromagnetic radiation, at an intensity corresponding to the electrical current flowing between the electrodes.
Flashlamps are similar in some ways to continuous arc lamps, but differ in other respects. Rather than using a constant electrical current to produce a continuous radiant output, a capacitor bank or other pulsed power supply is abruptly discharged through the electrodes, to generate a high-energy electrical discharge pulse in the form of a plasma arc between the electrodes. As with continuous arc lamps, the plasma is heated by the large electrical current of the discharge pulse, and emits light energy in the form of an abrupt flash whose duration corresponds to that of the electrical discharge pulse. For example, some flashes may be on the order of one millisecond in duration, although other durations may also be achieved. Unlike continuous arc lamps, which typically operate under quasi-static pressure and temperature conditions, flashlamps are typically characterized by large, abrupt changes in pressure and temperature during the flash.
Historically, one of the major applications of high power flashlamps has been laser pumping. As a more recent example, a high power flashlamp has been used to anneal a semiconductor wafer, by irradiating a surface of the wafer at a power on the order of five megawatts, for a pulse duration on the order of one millisecond.
Cooling of conventional flashlamps typically consists of cooling only the outside surface of the envelope, rather than the inside surface. Although simple convection cooling using ambient air is sufficient for low-power applications, high-power applications often require the outside of the envelope to be cooled by forced air or other gas, or by water or another liquid for even higher-power applications.
Such conventional high-power flashlamps tend to suffer from a number of difficulties and disadvantages. One factor that tends to limit the lifetime of such lamps is the mechanical strength of the quartz envelopes, which are typically on the order of 1 mm thick, and rarely exceed 2.5 mm in thickness. In this regard, although increasing the thickness of the quartz envelope increases its mechanical strength, the additional quartz material provides added insulation between the cooled outer surface of the envelope and the inner surface of the envelope, which is heated by the plasma arc. Therefore, with thicker tubes, it is more difficult for the outer coolant to remove heat from the inner surface of the envelope. As a result, the inner surface of a thicker envelope is heated to higher temperatures, resulting in greater thermal gradients in the envelope which tend to cause thermal stress cracks, ultimately leading to envelope failure. Thus, the thickness of an envelope, and hence its mechanical strength, are limited in conventional flashlamps. This in turn limits the ability of the envelope to withstand the mechanical stresses resulting from the significant rapid changes in gas pressure within the envelope resulting from the rapid increases of arc temperature and diameter during the flash.
A further difficulty with conventional lamps involves ablation of the quartz envelope, primarily from evaporation of quartz material from the heated inner surface of the envelope. Such ablation tends to contaminate the arc gas with oxygen. As most commercially-available arc lamps are sealed systems rather than recirculating, the accumulation of such contaminants in the arc gas tends to cause the radiant output of the lamp to drop over time. Such changes in the radiant output of the flashlamp may be undesirable for many applications, such as semiconductor annealing, in which reproducibility is strongly desired. The accumulation of these contaminants also tends to make the lamp more difficult to start.
Yet another disadvantage of conventional flashlamps results from sputtering of material from the electrodes, which are typically made of tungsten or tungsten alloys. In this regard, the abrupt emission of electrons and the resulting arc can sputter or blast off significant amounts of material from the cathode. To a lesser extent, the abrupt electron bombardment and the heat of the arc can cause partial melting of the anode tip, also resulting in the release of anode material. As a result, sputtering deposits tend to accumulate on the inside surface of the envelope, thereby reducing the radiant output of the lamp, as well as causing its radiation pattern to become increasingly non-uniform over time. In addition, such deposits on the inside surface of the envelope tend to be heated by the flash, thereby increasing local thermal stress in the envelope, which may eventually lead to cracking and failure of the envelope. Such loss of material also reduces electrode lifetimes.
A further disadvantage of conventional flashlamps is the relatively poor reproducibility of the radiant emissions of the arc itself. Some conventional lamps maintain a low-current continuous DC discharge between the electrodes, referred to as an idle current or simmer current, in between flashes. The purpose of the simmer current in conventional lamps is primarily to heat the cathode sufficiently to begin emitting electrons, which reduces sputtering and thereby increases lamp lifetime, although the simmer current may also provide at least some pre-ionization of the gas. The simmer current is typically less than one amp, and generally cannot be significantly increased in conventional flashlamps without causing overheating of the electrodes and sputtering. As a result, the present inventors have observed that the large change in the arc current that occurs in the transition from the simmer current to the peak flash current tends to occur in a relatively inconsistent manner in conventional flashlamps, resulting in poor reproducibility characteristics of the flash.
Accordingly, there is a need for an improved flashlamp and method.
In addressing the above need, the present inventors have investigated modifications of continuous or DC arc lamps in which the inside surface of the envelope is cooled by a vortexing flow of liquid, such as those disclosed in commonly-owned U.S. Pat. Nos. 6,621,199, 4,937,490 and 4,700,102, and earlier U.S. Pat. No. 4,027,185, for example, the complete disclosures of which are incorporated herein by reference. Although one of the present inventors has previously described a modified use of such a water-wall continuous arc lamp in conjunction with a pulsed power supply to act as a flashlamp, in general, such water-wall arc lamps have typically been considered to be undesirable for flashlamp applications. In this regard, the very large increases in arc temperature and diameter during a flash can potentially have dramatic effects on the liquid and gas flows within the envelope. The large and abrupt increase in pressure within the envelope can be further compounded if the internal cooling liquid boils and produces steam, thereby further increasing the pressure, potentially leading to envelope failure.
This same abrupt increase in pressure can cause the vortexing liquid wall to be pushed against the inside surface of the envelope, thereby forcing the liquid axially outward in opposite directions away from the center of the lamp, toward and past the electrodes. This can result in an abrupt back-splash of liquid onto the electrodes, potentially extinguishing the arc, and also potentially detracting from electrode life-span.
In addition, to the extent that this pressure increase forces liquid back toward the cathode, the back-pressure in this direction opposes the pump pressure, and may potentially weaken the mechanical connections of the vortexing liquid flow generator components.
In addition, the present inventors have discovered that the operation of such a water-wall arc lamp as a flashlamp tends to produce different particulate contamination than that which results from operation of the same type of lamp in continuous or DC mode. In particular, the present inventors have discovered that tungsten particles as small as 0.5 to 2 microns tend to be released by the electrodes in flash-mode, whereas the particulate contamination resulting from operation of the same lamp in continuous or DC mode typically consists of particles no smaller than 5 microns. Existing water-wall arc lamp filtration systems are typically inadequate to remove the smaller particulate contamination resulting particularly from flash-mode operation. The present inventors have appreciated that the accumulation of such small particulate contamination in the liquid coolant tends to alter the output power and spectrum of the lamp over time, thereby undesirably detracting from the reproducibility of the flashes produced by the lamp.
The present inventors have further appreciated that for some ultra-high-power applications, it would be desirable to employ a plurality of flashlamps in close proximity to each other, to allow such lamps to simultaneously or contemporaneously flash together. However, typical existing water-wall arc lamps have uninsulated metal flow generator components mounted outside the radial distance of the envelope. In addition to their conductivity, the metal flow generator components are typically used as an electrical connection to the cathode, to effectively connect the cathode to the negative terminal of the capacitor bank or other pulsed power supply. Thus, during the flash, the flow generator components are at the same negative potential as the cathode. Thus, conductive components of each lamp, such as its grounded reflector for example, must be maintained sufficiently far away from the flow generator of each adjacent lamp to prevent arcing through the ambient air from the flow generator of one lamp to the grounded reflector or other conductive components of an adjacent lamp. This tends to impose an undesirably large minimum spacing between adjacent lamps.
In accordance with one aspect of the invention, there is provided an apparatus for producing electromagnetic radiation. The apparatus includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, and first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation. The apparatus further includes an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid.
Such an exhaust chamber has been found to be advantageous for both flashlamp and continuous arc lamp applications. In this regard, the presence of the exhaust chamber tends to increase the distance between the arc and the location at which the flow of liquid begins to collapse. Thus, the exhaust chamber tends to reduce the effect on the arc of turbulence resulting from the collapse of the flow of liquid, thereby improving the stability of the arc. Accordingly, the exhaust chamber tends to improve the stability and reproducibility of the radiant output of the arc lamp, for both continuous and flashlamp applications.
The flow of liquid along the inside surface of the envelope is also advantageous. For example, this flow of liquid significantly reduces the thermal gradient between the inside and outside surfaces of the envelope, thereby reducing thermal stress on the envelope, which is advantageous for both continuous and flashlamp applications. This in turn allows thicker envelopes to be used than in conventional flashlamps, thereby allowing envelopes having greater mechanical strength to be used, to more easily withstand the abrupt pressure increase during the flash. In turn, increasing the thickness of the envelopes allows larger diameter tubes to be employed, thereby allowing for larger and more powerful arcs, without exceeding stress tolerances of the envelopes. The flow of liquid along the inside surface of the envelope also inhibits or prevents ablation of the inside surface of the envelope during the flash, or during continuous operation. In addition, this flow of liquid also reduces problems caused by electrode sputtering, as any sputtered material tends to be swept out of the envelope by the flow of liquid, rather than accumulating on the inside surface as in conventional flashlamps. Thus, the irradiance flashes or continuous irradiance outputs produced by such an apparatus tend to be more reproducible and consistent over time than those produced by conventional flashlamps or continuous arc lamps, respectively.
The exhaust chamber may extend axially outwardly sufficiently far beyond the one of the electrodes to isolate the one of the electrodes from turbulence resulting from collapse of the flow of liquid within the exhaust chamber.
The flow generator may be configured to generate a flow of gas radially inward from the flow of liquid, in which case the exhaust chamber may extend sufficiently far beyond the one of the electrodes to isolate the one of the electrodes from turbulence resulting from mixture of the flows of liquid and gas.
The electrodes may be configured to generate an electrical discharge pulse to produce an irradiance flash, in which case the exhaust chamber preferably has a sufficient volume to accommodate a volume of the liquid forced outward by a pressure pulse resulting from the electrical discharge pulse. Such an exhaust chamber is particularly advantageous for flashlamp applications, as it increases the effective internal volume of the apparatus, and thereby assists in reducing the peak internal pressure that results from the flash and any associated boiling and steam generation that may occur. Thus, mechanical stress on the envelope and other components is reduced. In addition, such an exhaust chamber allows water forced axially outwardly by the increased pressure of the flash to continue flowing past the electrode, thereby reducing the tendency of such water to back-splash onto the electrode. By reducing the likelihood of liquid splashing onto the electrodes, the exhaust chamber tends to increase electrode life-span and reduce the likelihood of the arc being quenched or extinguished.
The second electrode may include an anode, and the exhaust chamber may extend axially outwardly beyond the anode.
The flow generator may be electrically insulated. For example, the apparatus may include electrical insulation surrounding the flow generator, and the flow generator may include a conductor. Electrical insulation of the flow generator allows for safer operation of the apparatus without fear of arcing between the flow generator and external conductors, and allows for closer spacing of adjacent lamps in a multi-lamp system. The availability of a conductor as the flow generator is advantageous as it allows the flow generator to benefit from the mechanical strength of metal to withstand the liquid flow pressure and back-pressure during a flash, and also allows the flow generator to act as an electrical connector to connect the cathode to a power supply.
The first electrode may include a cathode, and the electrical insulation may surround the cathode and an electrical connection thereto. Such embodiments tend to further enhance the safety of single-lamp systems and reduce the minimum spacing between adjacent lamps in multi-lamp systems.
The apparatus may further include the electrical connection, which in turn may include the flow generator. Thus, the flow generator itself may advantageously act as part of the electrical connection between the cathode and a negative terminal of a capacitor bank or other pulsed power supply.
The electrical insulation surrounding the flow generator may include the envelope. The electrical insulation surrounding the flow generator may further include an insulative housing. In such an embodiment, the insulative housing may surround at least a portion of the envelope.
Advantageously, including the flow generator within the envelope and the insulative housing allows the flow generator to be disposed in close proximity to the axis of the apparatus, which in turn allows for stronger threaded and bolted mechanical connections than previous water-wall arc lamps having flow generator components outside the envelope. This in turn assists the flow generator in withstanding the mechanical stress of the flash, which tends to force some of the liquid axially outwards opposing the direction of the flow generator.
The electrical insulation may further include compressed gas in a space between the insulative housing and the portion of the envelope.
The envelope may include a transparent cylindrical tube. The tube may have a thickness of at least four millimeters. In this regard, the flow of liquid on the inner surface of the envelope reduces thermal gradients in the envelope, and therefore allows for thicker tubes than those used in conventional flashlamps, thereby providing the envelope with greater mechanical strength to withstand the large abrupt increase in pressure during a flash.
The tube may include a precision bore cylindrical tube, which tends to improve the effectiveness of seals engaged with the envelope, and also tends to improve the performance of the flow of liquid along the inner surface of the envelope.
The insulative housing may include at least one of a plastic and a ceramic.
The first and second electrodes may include a cathode and an anode, and the cathode may have a shorter length than the anode. In this regard, a shortened cathode tends to have greater mechanical strength, which is advantageous to prevent cathode vibration for continuous arc lamp applications, and which is advantageous to withstand the abrupt pressure changes and stresses during a flash.
The first electrode may include a cathode having a protrusion length along which it protrudes axially inwardly within the envelope toward a center of the apparatus beyond a next-most-inner component of the apparatus within the envelope. The protrusion length may be less than double a diameter of the cathode. Thus, the cathode may be shorter relative to its thickness than typical conventional cathodes, thereby improving its mechanical strength, and providing it with greater ability to resist vibration in continuous operation, or abrupt pressure changes and stresses during a flash.
Conversely, however, the protrusion length is preferably sufficiently long to prevent the electrical arc from occurring between the flow generator and the second electrode. Such a length is preferable for embodiments in which the flow generator is a conductor and forms part of the electrical connection between the cathode and the pulsed power supply, as the flow generator is at the same electrical potential as the cathode in such embodiments. It is therefore desirable in such embodiments to ensure that the cathode is sufficiently long to prevent the arc from being established between the anode and the flow generator rather than the anode and the cathode.
In accordance with another aspect of the invention, there is provided a system including a plurality of apparatuses as described above, configured to irradiate a common target. For example, the plurality of apparatuses may be configured to irradiate a semiconductor wafer.
The plurality of apparatuses may be configured parallel to each other. If so, each one of the plurality of apparatuses is preferably aligned in a direction opposite to an adjacent one of the plurality of apparatuses, such that a cathode of the each one of the plurality of apparatuses is adjacent an anode of the adjacent one of the plurality of apparatuses. Thus, whether in continuous or flash operation, the strong magnetic fields produced by the plasma arcs tend to cancel each other, particularly where there are an even number of apparatuses so aligned.
The system may further include a single circulation device configured to supply liquid to the flow generator of each of the plurality of apparatuses. In such embodiments, a more efficient system is provided, by eliminating the need for independent circulation devices for each apparatus.
The apparatus may further include a conductive reflector outside the envelope and extending from a vicinity of the first electrode to a vicinity of the second electrode.
The apparatus may further include a plurality of power supply circuits in electrical communication with the electrodes. If so, the apparatus preferably includes an isolator configured to isolate at least one of the plurality of power supply circuits from at least one other of the plurality of power supply circuits.
Each of the electrodes may include a coolant channel for receiving a flow of coolant therethrough. In addition, at least one of the electrodes may include a tungsten tip having a thickness of at least one centimeter.
Advantageously, such electrodes tend to have longer life-spans than conventional electrodes, especially for flash applications, although also for continuous operation. In this regard, liquid-cooling tends to reduce the tendency of the electrode to melt, sputter or otherwise release material, although during the flash itself, particularly fast flashes on the order of one millisecond or shorter in duration, the heating of the electrode surface tends to occur more quickly than the coolant can remove heat from the electrode via the coolant channel. During the flash, the greater thickness of the electrode tip as compared with conventional electrodes provides the electrode tip with greater heat capacity, which tends to mitigate the heating effects of the flash and thereby reduce the rate at which the tip tends to melt, sputter or otherwise lose material. To the extent that the electrode may still lose material at a diminished rate, the thicker tip provides more material for the electrode to be able to lose, thereby further extending the life-span of the electrode. The flow of liquid along the inner surface of the envelope removes such molten or otherwise lost material from the system, rather than allowing it to accumulate on the inner surface of the envelope, thereby extending envelope life and preserving the consistency and reproducibility of the spectrum and power of the radiant output of the apparatus.
The electrodes may be configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus may further include an idle current circuit configured to generate an idle current between the first and second electrodes. The idle current circuit may be configured to generate the idle current for a time period preceding the electrical discharge pulse, the time period being longer than a fluid transit time required by the flow of liquid to travel through the envelope. For example, in an embodiment in which the flow of liquid traverses the envelope in about thirty milliseconds, the idle current circuit may be configured to generate the idle current for at least about thirty milliseconds.
The idle current circuit may be configured to generate, as the idle current, a current of at least about 1×102 amps. In this regard, the coolant channels in the electrodes allow a much higher idle or simmer current than conventional flashlamps, without the severe melting or sputtering that would tend to result if conventional electrodes were subjected to such a high idle current. The present inventors have found that the higher idle current provides more consistent, well-defined starting conditions for the flash. More particularly, the higher idle current serves to define a hot, wide ionized channel between the electrodes, ready to receive the electrical discharge pulse. Effectively, the higher idle current serves to reduce the initial resistance between the electrodes immediately prior to the flash (although the peak impedance during the flash itself may remain largely unchanged). The present inventors have found that this advantageously results in greater consistency and reproducibility of flashes produced by the apparatus, and also tends to reduce loss of electrode material, thereby resulting in longer electrode life.
The idle current circuit may be configured to generate, as the idle current, a current of at least about 4×102 amps, for at least about 1×102 milliseconds.
In accordance with another aspect of the invention, there is provided an apparatus for producing electromagnetic radiation. The apparatus includes means for generating a flow of liquid along an inside surface of an envelope, and further includes means for generating an electrical arc within the envelope to produce the electromagnetic radiation. The apparatus also includes means for accommodating a portion of the flow of liquid, the means for accommodating extending outwardly beyond the means for generating.
In accordance with another aspect of the invention, there is provided a method of producing electromagnetic radiation. The method includes generating a flow of liquid along an inside surface of an envelope, and generating an electrical arc within the envelope between first and second electrodes to produce the electromagnetic radiation. The method further includes accommodating a portion of the flow of liquid in an exhaust chamber extending outwardly beyond one of the electrodes.
Accommodating may include isolating the one of the electrodes from turbulence resulting from collapse of the flow of liquid within the exhaust chamber.
The method may further include generating a flow of gas radially inward from the flow of liquid, and accommodating may include isolating the one of the electrodes from turbulence resulting from collapse of the flows of liquid and gas.
Generating an electrical arc may include generating an electrical discharge pulse to produce an irradiance flash, and accommodating may include accommodating a volume of the liquid forced outward by a pressure pulse resulting from the electrical discharge pulse.
Generating the flow of liquid may include generating the flow of liquid using an electrically insulated flow generator.
In accordance with another aspect of the invention, there is provided a method including controlling a plurality of apparatuses as described herein to irradiate a common target, such as a semiconductor wafer, for example.
Controlling may include causing each one of the plurality of apparatuses to generate the electrical arc in a direction opposite to that of an electrical arc direction in each adjacent one of the plurality of apparatuses.
The method may further include isolating at least one of a plurality of power supply circuits from at least one other of the plurality of power supply circuits.
The method may further include cooling the first and second electrodes. Cooling may include circulating liquid coolant through respective coolant channels of the first and second electrodes.
Generating the electrical arc may include generating an electrical discharge pulse to produce an irradiance flash, and the method may further include generating an idle current between the first and second electrodes. Generating the idle current may include generating the idle current for a time period preceding the electrical discharge pulse, the time period being longer than a fluid transit time required by the flow of liquid to travel through the envelope. This may include generating, as the idle current, a current of at least about 1×102 amps. More particularly, this may include generating, as the idle current, a current of at least about 4×102 amps, for at least about 1×102 milliseconds.
In accordance with another aspect of the invention, there is provided an apparatus for producing electromagnetic radiation. The apparatus includes an electrically insulated flow generator configured to generate a flow of liquid along an inside surface of an envelope. The apparatus further includes first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation.
Advantageously, as discussed above, the flow of liquid reduces thermal stress in the envelope, allows thicker envelopes to be used, inhibits or prevents ablation of the envelope, and reduces problems caused by electrode sputtering. Thus, the irradiance output of such an apparatus, whether for a flashlamp or continuous irradiance application, tends to be more consistent and reproducible over time than in conventional lamps. At the same time, the fact that the flow generator is electrically insulated allows for safer operation of the apparatus without fear of arcing between the flow generator and external conductors, and allows for closer spacing of adjacent lamps in a multi-lamp system.
The apparatus preferably includes electrical insulation surrounding the flow generator. Thus, the flow generator may include a conductor, if desired, in which case the flow generator is still electrically insulated by the electrical insulation. Advantageously, as discussed above, the availability of a conductor as the flow generator allows the flow generator to benefit from the mechanical strength of metal to withstand the liquid flow pressure and back-pressure during the flash, and also allows the flow generator to act as an electrical connector to connect the cathode to a power supply.
In a preferred embodiment, the first electrode includes a cathode, and the electrical insulation surrounds the cathode and an electrical connection thereto. Such embodiments tend to further enhance the safety of single-lamp systems and reduce the minimum spacing between adjacent lamps in multi-lamp systems.
The apparatus may further include the electrical connection, which in turn may include the flow generator. Thus, the flow generator itself may advantageously act as part of the electrical connection between the cathode and a negative terminal of a capacitor bank or other pulsed power supply.
The electrical insulation surrounding the flow generator may include the envelope.
The electrical insulation surrounding the flow generator may further include an insulative housing. In such an embodiment, the insulative housing may surround at least a portion of the envelope.
Advantageously, as discussed above, including the flow generator within the envelope and the insulative housing allows the flow generator to be disposed in close proximity to the axis of the apparatus, which in turn allows for stronger mechanical connections, thereby assisting the flow generator in withstanding the mechanical stress of the flash.
The electrical insulation may further include gas in a space between the insulative housing and the portion of the envelope. The gas may include an insulating gas such as nitrogen, for example. In such an embodiment, the apparatus may further include a pair of spaced apart seals cooperating with an inner surface of the insulative housing and an outer surface of the portion of the envelope to seal the gas in the space. The gas is preferably compressed, above atmospheric pressure.
The envelope may include a transparent cylindrical tube.
The tube may have a thickness of at least four millimeters. More particularly, the tube may have a thickness of at least five millimeters. As noted above, the flow of liquid reduces thermal gradients in the envelope, and therefore allows for thicker tubes with commensurately greater mechanical strength than those used in conventional flashlamps, thereby providing the envelope with greater ability to withstand the large abrupt increase in pressure during the flash.
The tube may include a precision bore cylindrical tube. If so, the precision bore cylindrical tube may have a dimensional tolerance at least as low as 5×10−2 millimeters. As noted, the use of such a precision bore improves the effectiveness of seals engaged with the envelope, and also improves the performance of the flow of liquid along the inner surface of the envelope.
The tube may include quartz. For example, the tube may include pure quartz, such as synthetic quartz. Alternatively, the tube may include cerium-doped quartz, for example. The use of either pure quartz or cerium-doped quartz is desirable, as these materials tend to be free from the effects of solarization (a discoloration of the quartz resulting from UV absorption by ion impurities in the quartz; pure quartz lacks such impurities, while cerium-oxide dopants absorb the harmful UV and re-emit the energy as visible fluorescence before it can be absorbed by other impurities in the quartz). Such embodiments are particularly advantageous for applications in which a constant, reproducible flash spectrum over time is desirable, such as semiconductor annealing applications, for example.
Alternatively, the tube may include sapphire. Alternatively, other suitable transparent materials may be substituted.
The apparatus insulative housing may include at least one of a plastic and a ceramic. For example, the insulative housing may include ULTEM™ plastic.
The first and second electrodes may include a cathode and an anode, and the cathode may have a shorter length than the anode. In this regard, a shortened cathode tends to have greater mechanical strength to withstand the abrupt pressure changes and stresses during the flash.
The first electrode may include a cathode having a protrusion length along which it protrudes axially inwardly within the envelope toward a center of the apparatus beyond a next-most-inner component of the apparatus within the envelope.
The protrusion length may be less than double a diameter of the cathode. Thus, the cathode may be shorter relative to its thickness than typical conventional cathodes, thereby improving its mechanical strength.
Conversely, however, the protrusion length is preferably sufficiently long to prevent the electrical arc from occurring between the flow generator and the second electrode. Such a length is preferable for embodiments in which the flow generator is a conductor and forms part of the electrical connection between the cathode and the pulsed power supply, as the flow generator is at the same electrical potential as the cathode in such embodiments. It is therefore desirable in such embodiments to ensure that the cathode is sufficiently long to prevent the arc from being established between the anode and the flow generator rather than the anode and the cathode.
The protrusion length may be at least three and a half centimeters.
The flow generator may include the next-most-inner component. The protrusion length of the cathode beyond the flow generator may be less than five centimeters.
In accordance with another aspect of the invention, there is provided a system including a plurality of apparatuses as described herein, configured to irradiate a common target. The common target may include a semiconductor wafer.
The plurality of apparatuses may be configured parallel to each other. If so, each one of the plurality of apparatuses is preferably aligned in a direction opposite to an adjacent one of the plurality of apparatuses. Thus, a cathode of each one of the plurality of apparatuses may be adjacent an anode of an adjacent one of the plurality of apparatuses. Advantageously, as noted above, the strong magnetic fields produced by the plasma arcs tend to cancel each other, particularly where there is an even number of apparatuses so aligned.
An axial line between the first and second electrodes of each one of the plurality of apparatuses may be spaced apart less than 1×10−1 meters from an axial line between the first and second electrodes of an adjacent one of the plurality of apparatuses. Such close-proximity spacing, which is facilitated by the fact that the flow generator is electrically insulated, allows a larger number of lamps to be positioned side-by-side in a single multi-lamp system.
The system may further include a single circulation device configured to supply liquid to the flow generator of each of the plurality of apparatuses. If so, the single circulation device may be configured to receive liquid and gas from an exhaust port of each of the plurality of apparatuses. The single circulation device may include a separator configured to separate the liquid from the gas, and may include a filter for removing particulate contamination from the liquid.
The single circulation device may be configured to supply to the flow generator, as the liquid, water having a conductivity of less than about 1×10−5 Siemens per centimeter. In this regard, water having such a low conductivity tends to act as a good insulator, and is therefore advantageous for use in the strong electric fields generated within the envelope.
The apparatus may further include a conductive reflector outside the envelope and extending from a vicinity of the first electrode to a vicinity of the second electrode. If so, the conductive reflector may be grounded.
The apparatus may further include an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. Advantageously, as discussed above, the exhaust chamber tends to improve the stability and reproducibility of the radiant output of the apparatus for both continuous and flash applications, by reducing the effect of turbulence on the arc.
For example, the exhaust chamber may extend axially outwardly sufficiently far beyond the one of the electrodes to isolate it from turbulence resulting from collapse of the flow of liquid within the exhaust chamber.
The flow generator may be configured to generate a flow of gas radially inward from the flow of liquid. In such an embodiment, the exhaust chamber may extend sufficiently far beyond the one of the electrodes to isolate it from turbulence resulting from mixture of the flows of liquid and gas.
The electrodes may be configured to generate an electrical discharge pulse therebetween to produce an irradiance flash. In such an embodiment, the exhaust chamber preferably has a sufficient volume to accommodate a volume of the liquid forced outward by a pressure pulse resulting from the electrical discharge pulse. Advantageously, as discussed above, such an exhaust chamber assists in reducing the peak internal pressure that results from the flash, thereby reducing mechanical stress on the envelope and other components, and also allows water forced axially outwardly by the increased pressure of the flash to continue flowing past the electrode, thereby reducing the tendency of such water to back-splash onto the electrode, which in turn tends to increase electrode life-span and reduce the likelihood of the arc being quenched or extinguished.
The apparatus may further include a plurality of power supply circuits in electrical communication with the electrodes. For example, the plurality of power supply circuits may include a pulse supply circuit configured to generate an electrical discharge pulse between the first and second electrodes, to produce an irradiance flash. The plurality of power supply circuits may further include an idle current circuit configured to generate an idle current between the first and second electrodes. The plurality of power supply circuits may also include a starting circuit configured to generate a starting current between the first and second electrodes. The plurality of power supply circuits may additionally include a sustaining circuit configured to generate a sustaining current between the first and second electrodes.
In such embodiments, the apparatus preferably includes an isolator configured to isolate at least one of the plurality of power supply circuits from at least one other of the plurality of power supply circuits. The isolator may include a mechanical switch. Alternatively, or in addition, the isolator may include a diode.
Each of the electrodes may include a coolant channel for receiving a flow of coolant therethrough.
In addition, at least one of the electrodes may include a tungsten tip having a thickness of at least one centimeter.
Advantageously, for the reasons discussed earlier herein, such electrodes tend to have longer life-spans than conventional electrodes.
The electrodes may be configured to generate an electrical discharge pulse to produce an irradiance flash. In such an embodiment, the apparatus may further include an idle current circuit configured to generate an idle current between the first and second electrodes. The idle current circuit may be configured to generate the idle current for a time period preceding the electrical discharge pulse, the time period being longer than a fluid transit time required by the flow of liquid to travel through the envelope. For example, in an embodiment in which the flow of liquid traverses the envelope in 3×101 milliseconds, the idle current circuit is configured to generate the idle current for at least 3×101 milliseconds.
The idle current circuit may be configured to generate, as the idle current, a current of at least about 1×102 amps. In this regard, as noted above, the coolant channels in the electrodes allow a much higher idle or simmer current than conventional flashlamps, without the severe melting or sputtering that would tend to result if conventional electrodes were subjected to such a high idle current. For the reasons discussed earlier herein, such a high idle current advantageously results in greater consistency and reproducibility of flashes produced by the apparatus, and also tends to reduce loss of electrode material, thereby resulting in longer electrode life.
The idle current circuit may be configured to generate, as the idle current, a current of at least about 4×102 amps, for at least about 1×102 milliseconds. Alternatively, other suitable idle currents and durations may be substituted for particular applications.
In accordance with another aspect of the invention, there is provided an apparatus for producing electromagnetic radiation. The apparatus includes electrically insulated means for generating a flow of liquid along an inside surface of an envelope. The apparatus further includes means for generating an electrical arc within the envelope to produce the electromagnetic radiation.
In accordance with another aspect of the invention, there is provided a method of producing electromagnetic radiation. The method includes generating a flow of liquid along an inside surface of an envelope, using an electrically insulated flow generator. The method further includes generating an electrical arc between first and second electrodes to produce the electromagnetic radiation.
In accordance with another aspect of the invention, there is provided a method including controlling a plurality of apparatuses as described herein to irradiate a common target. The common target may include a semiconductor wafer, for example.
Controlling may include causing each one of the plurality of apparatuses to generate the electrical arc in a direction opposite to that of an electrical arc direction in each adjacent one of the plurality of apparatuses. Advantageously, as discussed above, such a configuration allows the strong magnetic fields generated by adjacent arcs to substantially cancel each other out.
The method may include accommodating a portion of the flow of liquid in an exhaust chamber extending outwardly beyond one of the electrodes. This may include isolating the one of the electrodes from turbulence resulting from collapse of the flow of liquid within the exhaust chamber.
The method may include generating a flow of gas radially inward from the flow of liquid, and accommodating may include isolating the one of the electrodes from turbulence resulting from collapse of the flows of liquid and gas.
Generating an electrical arc may include generating an electrical discharge pulse to produce an irradiance flash, and accommodating may include accommodating a volume of the liquid forced outward by a pressure pulse resulting from the electrical discharge pulse. Advantageously, as discussed above, this tends to increase envelope and electrode life-span, by reducing mechanical stress on the envelope and reducing the likelihood of liquid back-splash onto the electrodes.
The method may further include isolating at least one of a plurality of power supply circuits from others of the plurality of power supply circuits.
The method may further include cooling the first and second electrodes. Cooling may include circulating liquid coolant through respective coolant channels of the first and second electrodes.
Generating the electrical arc may include generating an electrical discharge pulse to produce an irradiance flash, and the method may further include generating an idle current between the first and second electrodes. This may include generating the idle current for a time period preceding the electrical discharge pulse, the time period being longer than a fluid transit time required by the flow of liquid to travel through the envelope. For example, this may include generating the idle current for at least 3×101 milliseconds. Generating may include generating, as the idle current, a current of at least about 1×102 amps. For example, this may include generating, as the idle current, a current of at least about 4×102 amps, for at least about 1×102 milliseconds. As discussed above, such large idle currents tend to enhance consistency and reproducibility of the flash, in comparison with conventional flashlamps.
In accordance with another aspect of the invention, there is provided an apparatus for producing an irradiance flash. The apparatus includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope. The apparatus further includes first and second electrodes configured to generate an electrical discharge pulse within the envelope to produce the irradiance flash, the pulse causing the electrodes to release particulate contamination different than that released by the electrodes during continuous operation thereof. The apparatus also includes a removal device configured to remove the particulate contamination from the liquid.
Advantageously, therefore, in contrast with previous continuous DC water-wall arc lamps, which are not configured to remove such particulate contamination, such an apparatus is able to prevent such particulate contamination from accumulating within the flow of liquid, thereby preserving the consistency of the output power and spectrum of the apparatus.
The removal device may include a filter configured to filter the particulate contamination from the liquid. For example, the filter may be configured to filter particles as small as two microns. More particularly, the filter may be configured to filter particles as small as one micron. More particularly still, the filter may be configured to filter particles as small as one-half micron.
Alternatively, or in addition, the removal device may include a disposal valve of a fluid circulation system, the disposal valve being operable to dispose of the flow of liquid for at least a fluid transit time required by the flow of liquid to travel through the envelope. For example, if the flow of liquid typically requires thirty milliseconds to traverse the apparatus, the disposal valve can be opened simultaneously or contemporaneously with the flash, and may be left open for at least the fluid transit time (in this example thirty milliseconds), in order to dispose of the potentially contaminated liquid that was present in the envelope at the time of the flash.
In accordance with another aspect of the invention, there is provided an apparatus for producing an irradiance flash. The apparatus includes means for generating a flow of liquid along an inside surface of an envelope. The apparatus further includes means for generating an electrical discharge pulse within the envelope to produce the irradiance flash, the pulse causing the means for generating to release particulate contamination different than that released by the means for generating during continuous operation thereof. The apparatus also includes means for removing the particulate contamination from the liquid.
In accordance with another aspect of the invention, there is provided a method of producing an irradiance flash. The method includes generating a flow of liquid along an inside surface of an envelope. The method further includes generating an electrical discharge pulse within the envelope between first and second electrodes to produce the irradiance flash, the pulse causing the electrodes to release particulate contamination different than that released by the electrodes during continuous operation thereof. The method also includes removing the particulate contamination from the liquid.
Removing may include filtering the particulate contamination from the liquid. Filtering may include filtering particles as small as two microns. For example, filtering may include filtering particles as small as one micron. More particularly, filtering may include filtering particles as small as one-half micron.
Alternatively, or in addition, removing may include disposing of the flow of liquid for at least a fluid transit time required by the flow of liquid to travel through the envelope.
Although numerous features are shown and described in combination herein, in the context of a preferred embodiment of the invention, it will be appreciated that many such features may be employed independently of each other, if desired.
Other aspects and features of the present invention will become apparent to those ordinarily skilled in the art upon review of the following description of specific embodiments of the invention in conjunction with the accompanying figures.
In drawings which illustrate embodiments of the invention:
Referring to
More particularly, in this embodiment the exhaust chamber 110 extends axially outwardly beyond the anode 108. In the present embodiment, the exhaust chamber 110 extends axially outwardly sufficiently far beyond the anode 108 to isolate the anode 108 from turbulence resulting from collapse of the flow of liquid within the exhaust chamber 110.
In this embodiment, the electrodes, or more particularly the cathode 106 and the anode 108, are configured to generate an electrical discharge pulse, to produce an irradiance flash. Also in this embodiment, the exhaust chamber 110 has a sufficient volume to accommodate a volume of the liquid forced outward by a pressure pulse resulting from the electrical discharge pulse. Advantageously, therefore, as discussed above, the exhaust chamber 110 tends to increase the life-span of the envelope 104 and the electrodes, by reducing mechanical stress on the envelope and reducing the likelihood of liquid back-splash onto the electrodes.
In this embodiment, the apparatus 100 includes a cathode side shown generally at 112, and an anode side shown generally at 114. A reflector, which in this embodiment includes a conductive reflector 116, connects the cathode and anode sides together. In this embodiment the conductive reflector 116 is electrically grounded.
In the present embodiment, the cathode side 112 includes an insulative housing 118, which in the present embodiment is bolted to the conductive reflector 116. The anode side 114 includes first and second anode housing members 120 and 122, connected between the reflector 116 and the exhaust chamber 110.
Referring to
In this embodiment, the apparatus 100 includes the flow generator, which is shown at 150 in
In the present embodiment, the flow generator 150 is contained within the cathode side 112 of the apparatus 100. The flow generator 150 of the present embodiment includes an electrical connector 152 for connecting the flow generator 150 to the electrical power supply system 130. The flow generator 150 further includes a liquid inlet port 154 and a gas inlet port 156, for receiving liquid and gas respectively, from the fluid circulation system 140. The flow generator 150 further includes a liquid outlet port 158 for returning cathode coolant liquid to the fluid circulation system.
In this embodiment, the fluid circulation system 140 includes a separation and purification system 142, similar to those described in the aforementioned U.S. patents. Generally, the separation and purification system 142 receives liquid and gas from the exhaust chamber 110 of the apparatus 100, separates the liquid from the gas, cools both the liquid and the gas, filters and purifies the liquid and gas, and re-circulates the liquid and gas back to the flow generator 150 to be re-circulated back through the apparatus 100 in the form of vortexing flows of liquid and gas, as described herein and in the aforementioned U.S. patents. In addition, in the present embodiment the separation and purification system receives liquid coolant from the cathode 106 via the liquid outlet port 158, and from the anode 108 via the exhaust chamber 110. The received liquid coolant is similarly cooled and purified, and then returned to the flow generator 150 and to the second anode housing member 122 to be recirculated through internal cooling channels (not shown in
In this embodiment, the electrical discharge pulse generated between the first and second electrodes within the envelope 104 to produce the irradiance flash causes the electrodes to release particulate contamination different than that released by the electrodes during continuous operation thereof. More particularly, the present inventors have found that such an electrical discharge pulse causes the cathode 106 and the anode 108 to release particulate contamination including particles as small as 0.5-2.0 μM, in contrast with continuous DC operation, in which the particulate contamination released by the cathode and anode typically does not include particles smaller than 5 μm.
Thus, in the present embodiment, the apparatus 100 includes at least one removal device configured to remove such different particulate contamination from the liquid received from the exhaust chamber 110. More particularly, in this embodiment the fluid circulation system 140 of the apparatus 100 includes two such removal devices, namely, a filter 144 within the separation and purification system 142, and a disposal valve 160.
The disposal valve 160 includes an inlet port 162, via which it receives liquid and gas from the exhaust chamber 110 of the apparatus 100. The disposal valve further includes a recirculation outlet port 164, via which it forwards the received liquid and gas to the separation and purification system 142. The disposal valve 160 also includes a disposal outlet port 166, via which it disposes of the received liquid and gas when desired. By default, the recirculation outlet port 164 is open, and the disposal outlet port 166 is closed. However, in this embodiment, the disposal valve is operable to dispose of the flow of liquid received from the exhaust chamber 110 for at least a fluid transit time required by the flow of liquid to travel through the envelope 104. More particularly, in this embodiment the transit time of the vortexing flow of liquid across the envelope 104 is on the order of 30 milliseconds. Thus, following each electrical discharge pulse, the disposal valve 160 is controllable to close the recirculation outlet port 164 and open the disposal outlet port 166, for at least 30 milliseconds. More particularly, in this embodiment the disposal valve is controllable to maintain the recirculation outlet port 164 closed and the disposal outlet port 166 open for at least 100 ms following each electrical discharge pulse, in order to allow sufficient time for all of the liquid that was present in the envelope 104 at the time of the electrical discharge pulse to be disposed of.
In this embodiment, the actuation of the disposal valve 160 is controlled by a main controller 170, which is also in communication with the electrical power supply system 130, the separation and purification system 142, and with various sensors (not shown) of the apparatus 100. In this embodiment the main controller 170 includes a control computer including a processor circuit 172, which in this embodiment includes a microprocessor. The processor circuit 172 is configured by executable codes stored on a computer-readable medium 174, which in this embodiment includes a hard disk drive, to control the various elements of the present embodiment to carry out the functionality described herein. Alternatively, other suitable system controllers, other computer-readable media, or other ways of generating signals embodied in communications media or carrier waves to direct the controller to carry out the functionality described herein, may be substituted.
In this embodiment, the filter 144 is configured to filter the particulate contamination from the liquid. Thus, in the present embodiment, the filter is configured to filter particles as small as two microns from the liquid. More particularly, in this embodiment the filter is configured to filter particles at least as small as one micron from the liquid. More particularly still, in this embodiment the filter is configured to remove particles at least as small as one-half micron from the liquid.
In the present embodiment the separation and purification system 142 of the fluid circulation system 140 includes a main liquid outlet port 180 for conveying liquid to the liquid inlet port 154 of the flow generator 150, to provide the liquid required for the vortexing flow of liquid along the inside surface 102 of the envelope 104, as well as coolant for the cathode 106. The separation and purification system 142 further includes a gas outlet port 182 for conveying gas to the gas inlet port 156 of the flow generator 150, and a second liquid outlet port 184 for conveying anode coolant liquid to the anode 108 via the second anode housing member 122. The system 142 further includes a coolant inlet port 186 for receiving liquid coolant from the cathode 106 via the liquid outlet port 158 of the flow generator 150, and a main inlet port 188 for receiving liquid and gas from the exhaust chamber 110 via the disposal valve 160. The system 142 also includes a liquid replenishment input port 190 and a gas replenishment input port 192, for receiving replenishing supplies of liquid and gas to replace the amounts disposed of by the disposal valve 160 following each flash.
In this embodiment, the liquid replenishment input port 190 is in communication with a supply of purified water, which acts as both the liquid for the vortexing flow of liquid and the electrode coolant. More particularly, in this embodiment the purified water has a conductivity of less than about ten micro-Siemens per centimeter. More particularly still, in this embodiment the conductivity of the purified water is in the range between about five and about ten micro-Siemens per centimeter. Water of such low conductivity acts as a good electrical insulator, and is therefore advantageous for use in the present embodiment, in which the water will be exposed to strong electric fields within the envelope 104. Alternatively, if desired, other suitable liquids may be substituted for a particular application.
In this embodiment, the gas replenishment input port 192 is in communication with a supply of inert gas, which in this embodiment is argon. In the present embodiment, argon is preferred due to its relatively low cost compared to other inert gases such as xenon or krypton. Alternatively, however, other suitable gases or gas mixtures may be substituted if desired.
In this embodiment, the electrical supply system 130 includes a negative terminal in communication with the cathode 106, and a positive terminal 134 in communication with the anode 108. More particularly, in this embodiment the negative terminal 132 is connected to the electrical connector 152 of the flow generator 150, which in this embodiment includes a conductor and is in electrical communication with the cathode 106. Similarly, in this embodiment the positive terminal 134 is connected to the second anode housing member 122, which also includes a conductor, and which is in electrical communication with the anode 108. In this embodiment, the positive terminal 134 is electrically grounded, and any required voltages are generated by lowering the electrical potential of the negative terminal 132 relative to that of the grounded positive terminal 134. Therefore, in the present embodiment, externally-exposed conductive components of the apparatus 100, such as the second anode housing member 122 and the reflector 116, are maintained at the same (grounded) electrical potential.
Referring to
In this embodiment, the electrically insulated flow generator 150 includes a conductor. More particularly, in this embodiment the flow generator 150 is composed of brass. In this regard, brass has a suitable mechanical strength to withstand the mechanical stresses resulting from the flash, and acts as a conductive electrical pathway between the cathode 106 and the electrical power supply system 130, the negative terminal 132 of which is connected to the flow generator 150 at the electrical connector 152 thereof (the electrical connector 152 and the liquid outlet port 158 shown in
Or, as a further alternative, rather than being surrounded by insulative material as in the present embodiment, the flow generator 150 may be electrically insulated by virtue of being composed of or including an electrically insulative material, in which case the electrical connection to the cathode may be provided through additional wiring, if desired.
In this embodiment, in which the flow generator 150 is a conductor, the cathode side 112 includes electrical insulation surrounding the flow generator 150. More particularly, in this embodiment the electrical insulation surrounding the flow generator 150 includes the envelope 104, and further includes the insulative housing 118. As shown in
In the present embodiment, the insulative housing 118 includes at least one of a plastic and a ceramic. More particularly, in this embodiment the insulative housing 118 is composed of ULTEM™ plastic. Alternatively, other suitable insulative materials, such as other plastics or a ceramic for example, may be substituted.
In this embodiment, the envelope 104 includes a transparent cylindrical tube. In the present embodiment, the tube has a thickness of at least four millimeters. More particularly, in this embodiment the tube has a thickness of at least five millimeters. More particularly still, in this embodiment the tube has a thickness of five millimeters, and has an inside diameter of 45 millimeters and an outside diameter of 55 millimeters. As discussed earlier herein, it will be appreciated that tubes thicker than 3 mm have generally been considered unsuitable for flashlamp applications due to the thermal gradients that result between the plasma-heated inner surface and the cooled outer surface of the tube in conventional flashlamps. The vortexing flow of liquid along the inside surface 102 of the envelope 104 reduces such thermal gradients, thereby allowing a thicker tube to be used as the envelope 104. Accordingly, the envelope 104 in the present embodiment has greater mechanical strength than conventional flashlamp tubes due to its greater thickness, and is thus better able to withstand the mechanical stresses associated with the rapid changes in pressure caused by the flash.
In this embodiment, the envelope 104 includes a precision bore cylindrical tube. More particularly, in this embodiment the precision bore cylindrical tube has a dimensional tolerance at least as low as 0.05 millimeters. In this regard, such precision bores tend to provide more reliable seals to withstand the high pressure inside the envelope during the flash. In addition, the enhanced smoothness of the inside surface of the envelope tends to improve the performance of the vortexing flow of liquid flowing along the inside surface of the envelope, and also tends to reduce electrode erosion.
In the present embodiment, the envelope 104, or more particularly, the precision bore cylindrical tube, includes a quartz tube. More particularly still, in this embodiment the quartz tube is a cerium-doped quartz tube, doped with cerium oxide to avoid the solarization/discoloration difficulties described earlier herein. Thus, in the present embodiment, by avoiding such solarization/discoloration, the consistency and reproducibility of the output spectrum of flashes produced by the apparatus 100 are improved. Alternatively, the envelope 104 may include pure quartz, such as synthetic quartz for example, which also tends to avoid solarization/discoloration disadvantages. Alternatively, however, the envelope 104 may include materials that do suffer from solarization, such as ordinary clear fused quartz for example, if spectral consistency and reproducibility are not important for a particular application. More generally, other transparent materials, such as sapphire for example, may be substituted if desired, depending on the mechanical and thermal robustness required for a particular application.
In the present embodiment, the electrical insulation, or more particularly, the envelope 104 and the insulative housing 118, surround the cathode 106 and an electrical connection thereto. As noted above, in this embodiment the electrical connection to the cathode 106 includes the flow generator 150 and the electrical connector 152 (not shown in the plane of the cross-section of
In this embodiment, the electrical insulation surrounding the flow generator 150 further includes gas in a space between the insulative housing 118 and the end portion 300 of the envelope 104. More particularly, in this embodiment the apparatus 100 includes a pair of spaced apart seals 302 and 304, cooperating with an inner surface 306 of the insulative housing 118 and an outer surface 308 of the end portion 300 of the envelope 104 to seal the gas in the space. In this embodiment, the gas is compressed. More particularly, in this embodiment the gas is compressed nitrogen. In order to pressurize the space between the surfaces 306 and 308 and the seals 302 and 304 with compressed N2, the insulative housing 118 includes an inlet valve 310 and an outlet valve 312. In this embodiment, the nitrogen pressure between the seals 302 and 304 is maintained at a higher pressure than a typical pressure within the envelope 104. More particularly, in the present embodiment the pressure within the envelope is typically on the order of about 2 atmospheres, and the nitrogen gas pressure between the seals is maintained at about triple this pressure, or in other words, on the order of about 6 atmospheres. It has been found that such pressurized insulation in the space between the seals 302 and 304, which keeps the space clean and dry, assists in providing an ideal set of starting conditions for the arc.
In this embodiment, the seals 302 and 304 include O-rings, although alternatively, other suitable seals may be substituted.
Referring to
Referring to
In the present embodiment, a locking ring 321 prevents loosening of the flow generator core 320 within the insulative housing 118. A seal 326, which in this embodiment includes an O-ring, provides a tight seal between the flow generator core 320 and the inside surface 102 of the envelope 104.
In addition, in this embodiment a washer 329 is interposed between an outer edge of the envelope 104 and the insulative housing 118. In the present embodiment, the washer 329 includes Teflon, although alternatively, other suitable materials may be substituted.
A further seal 330 provides a tight seal between the flow generator core 320 and the liquid vortex generator 324.
Referring to
In this embodiment, each of the electrodes includes a coolant channel for receiving a flow of coolant therethrough. More particularly, in the present embodiment, in addition to the portion of the incoming liquid which exits the liquid intake channel 340 through the holes 342 and 344 to form the vortexing flow of liquid as described above, a remaining portion of the liquid flowing through the liquid intake channel 340 is forced into a cathode coolant channel 360, and acts as a coolant to cool the cathode 106.
In this embodiment, the cathode 106 includes a hollow cathode pipe 362, which in this embodiment is brass. An open outer end of the cathode pipe 362 is threaded into an aperture defined through the flow generator core 320, with a seal 363 providing a tight seal between the cathode pipe and the flow generator core. A cathode insert 364, which is also brass in the present embodiment, is threadedly connected to an inner end of the cathode pipe 362. The cathode 106 further includes a cathode body 376 surrounding the cathode pipe 362. The cathode body 376, which in this embodiment is brass, is threaded into a wider portion of the aperture defined through the flow generator core 320, with a seal 377 providing a tight seal between the cathode body and the flow generator core. In this embodiment, the cathode 106 further includes a cathode head 370 threadedly connected to the cathode body 376 and surrounding the cathode insert 364. A cathode tip 372 is mounted to the cathode head 370. In this embodiment, the cathode head 370 and the cathode tip 372 are both conductors. More particularly, in this embodiment the cathode head 370 includes copper, and the cathode tip 372 includes tungsten. Thus, referring to
If desired, other suitable types of connections may be substituted for the various threaded connections. For example, the cathode head 370 may be soldered or welded to the cathode body 376, if desired.
In this embodiment, the cathode coolant channel 360 is defined within the hollow cathode pipe 362. The coolant liquid continues through the coolant channel 360, into the hollow cathode insert 364. The coolant liquid travels through a hole 366 defined through the cathode insert 364, and into a space 368 defined between the cathode insert 364 and the cathode head 370, to which the cathode tip 372 is mounted. Thus, as the coolant liquid travels through the space 368, it removes heat from the cathode head 370 and hence indirectly from the cathode tip 372. As discussed in greater detail below in connection with a similar head of the anode 108, in this embodiment an inside surface (not shown) of the cathode head 370 has a plurality of parallel grooves (not shown), for directing the flow of liquid coolant in a desired direction. The coolant liquid is directed by the grooves through the space 368, and then enters a space 374 defined between the cathode pipe 362 and the cathode body 376. From the space 374, the coolant liquid enters a coolant exit channel (not shown in the plane of the cross-section of
In this embodiment, the tungsten cathode tip 372 has a thickness of at least one centimeter. Advantageously, therefore, as discussed earlier herein, the combination of liquid cooling of the cathode 106 as described above, and the relatively thick tungsten cathode tip 372, tends to provide the cathode 106 with a greater lifespan than conventional electrodes.
In this embodiment, the gas vortex generator 322 generates a vortexing flow of gas, in a manner similar to that in which the liquid vortex generator 324 generates the vortexing flow of liquid described above. In this embodiment, pressurized gas is received from the gas outlet port 182 of the separation and purification system 142, at the gas inlet port 156 of the flow generator 150. The pressurized gas travels through a gas intake channel 380 defined within the flow generator core 320, eventually exiting the gas intake channel via a plurality of holes, such as that shown at 382, which extend through the body of the gas vortex generator 322 (the hole 382 is not in the plane of the cross-section of
Referring back to
In the present embodiment, the cathode's protrusion length is less than double a diameter of the cathode 106. Thus, the cathode 106 is shorter relative to its diameter than conventional cathodes, which gives it greater rigidity and mechanical strength to withstand the large abrupt pressure changes associated with the flash. In absolute terms, in the present embodiment the protrusion length of the cathode beyond the flow generator is less than five centimeters.
At the same time, however, in the present embodiment the protrusion length of the cathode 106 is sufficiently long to prevent the electrical discharge pulse from occurring between the flow generator 150 and the anode 108, rather than between the cathode and the anode. More particularly, in this embodiment the protrusion length is at least three and a half centimeters.
In the present embodiment, the cathode tip 372 of the cathode 106 has a thickness of at least one centimeter. Advantageously, therefore, as discussed earlier herein, the combination of liquid cooling of the cathode 106 as described below, and the relatively thick tungsten cathode tip 372, tends to provide the cathode 106 with a greater lifespan than conventional electrodes.
Referring to FIGS. 2 and 7-10, the anode side 114 of the apparatus 100 is shown in greater detail in
In this embodiment, the exhaust chamber 110 has an inside surface 700, which in this embodiment has a frustoconical shape, tapering radially inwards while extending axially outwards past the anode 108. Alternatively, however, the inside surface may be cylindrical, or may taper outwards rather than inwards. It is preferable that the inside surface 700 of the exhaust chamber 110 be configured to allow the flow of liquid to continue vortexing along the inside surface 700 after it has left the envelope 104, so that the vortexing liquid continues to be separated from the vortexing flow of gas within the exhaust chamber 110, as this allows gas (rather than a mixture of gas and water) to be drawn back into the envelope 104 when the arc is established.
In this embodiment, the exhaust chamber 110 is connected to a fitting 702, which in the present embodiment is a stainless steel fitting. A seal 703, which in this embodiment includes an O-ring, provides a tight seal between the inside surface 700 of the exhaust chamber 110 and the fitting 702. The fitting 702 is connected to a hose through which the vortexing flows of liquid and gas exiting the exhaust chamber 110 are returned to the fluid circulation system 140.
Referring to
In this embodiment, the anode pipe 704, the anode body 708, and the anode insert 712 are made of brass, the anode head 714 is made of copper, and the anode tip 716 is made of tungsten. Alternatively, other suitable materials may be substituted if desired. In this embodiment, the tungsten anode tip 716 has a thickness of at least one centimeter. Advantageously, therefore, as discussed earlier herein, the combination of liquid cooling of the anode 108 as described below, and the relatively thick tungsten anode tip 716, tends to provide the anode 108 with a greater lifespan than conventional electrodes.
Referring to
Referring to FIGS. 2 and 7-10, in addition to providing a liquid coolant channel as described above, in this embodiment the second anode housing member 122 also provides an electrical connection between the anode 108 and the electrical power supply system 130. In this embodiment, the second anode housing member 122 includes a conductor. More particularly, in this embodiment the second anode housing member 122 is made of brass. The second anode housing member 122 is connected to the positive terminal 134 (which in this embodiment is grounded) of the electrical power supply system 130, via an electrical connector 900 shown in
Referring to
Referring to
Referring to
During operation, the vortexing flows of liquid and gas generated by the flow generator 150 shown in
In this embodiment, the first anode housing member 120 includes plastic, or more particularly, ULTEM™ plastic. Alternatively, other suitable materials, such as a ceramic for example, may be substituted. In the present embodiment, in which the positive terminal of the electrical power supply to which the second anode housing member 122 is connected is grounded, an insulator is preferred for the first anode housing member 120 in order to eliminate ground loops, but is not required. Thus, alternatively, the first anode housing member may include a conductor if desired.
Referring to
Referring to
More particularly still, in this embodiment the plurality of power supply circuits includes a pulse supply circuit 1500 configured to generate the electrical discharge pulse between the first and second electrodes, an idle current circuit 1502 configured to generate an idle current between the first and second electrodes, a starting circuit 1504 configured to generate a starting current between the first and second electrodes, and a sustaining circuit 1506 configured to generate a sustaining current between the first and second electrodes.
In this embodiment, the power supply system 130 includes at least one isolator configured to isolate at least one of the plurality of power supply circuits from at least one other of the plurality of power supply circuits. More particularly, in this embodiment, a first isolator includes a mechanical switch 1510, which serves to isolate the negative terminals of the idle current circuit 1502 and of the sustaining circuit 1506 from the negative terminal of the starting circuit 1504 when open. Also in this embodiment, a second isolator includes an isolation diode 1512, configured to isolate the idle current circuit 1502 and the sustaining circuit 1506 from the pulse supply circuit 1500. In this embodiment, the mechanical switch 1510 includes a ROSS model GD60-P60-800-2C-40 mechanical switch, and is electrically actuatable in response to a control signal from the controller 170 shown in
In the present embodiment, the idle current circuit 1502, the starting circuit 1504 and the sustaining circuit 1506 each receive AC power, or more particularly, 480 V, 60 Hz, three-phase power. Similarly, the pulse supply circuit 1500 also includes a DC power supply 1514, which receives similar 480 V/60 Hz power, which it converts to a DC voltage in order to charge capacitors of the pulse supply circuit, as described below. In this embodiment, the DC power supply 1514 is adjustable to produce a desired DC charging voltage up to 4 kV. As shown in
In this embodiment, the idle current circuit 1502 rectifies the incoming 480 V AC power, and produces a controllable DC current up to 600 A. In this embodiment, the positive terminal of the idle current circuit 1502 is electrically grounded, and thus, the DC voltage is generated by lowering the electrical potential of the negative terminal relative to the ground.
In the present embodiment, the idle current circuit 1502 is in communication with the controller 170 shown in
In this embodiment, the starting circuit 1504 is used only to initially establish an arc between the cathode 106 and the anode 108. To achieve this, in the present embodiment the starting circuit 1504 receives 480 V/60 Hz AC power, which it rectifies and uses to charge a plurality of internal capacitors (not shown). When its rising internal voltage reaches a predetermined threshold, such as 30 kV for example, the starting circuit 1504 delivers a pulse of current (e.g. 10 A), to establish an arc between the cathode 106 and the anode 108.
In the present embodiment, the sustaining circuit 1506 is used at the time of starting and immediately thereafter, to sustain the arc between the cathode 106 and the anode 108. In this embodiment, the sustaining circuit receives 480 V/60 Hz AC power, which it rectifies to produce a constant current DC output of 15 A. A positive terminal of the sustaining circuit 1506 is in communication with the positive terminal 134 of the power supply system 130, and hence is in communication with the anode 108. A negative terminal of the sustaining circuit 1506 can be placed in electrical communication with the cathode 106 either indirectly through the starting circuit 1504, or directly by closing the mechanical switch 1510, the latter direct connection allowing electrons to flow from the negative terminal of the sustaining circuit 1506, through a magnetic core inductor 1508, through the isolation diode 1512, through the switch 1510, and through the negative terminal 132 of the power supply to the cathode 106. In this embodiment, the magnetic core inductor 1508 has an inductance of 50 millihenrys, although alternatively, other suitable inductances may be substituted
In this embodiment, the pulse supply circuit 1500 is used to generate the electrical discharge pulse between the cathode 106 and the anode 108 that produces the desired irradiance flash. To achieve this, the pulse supply circuit 1500 receives 480 V/60 Hz AC power, which is rectified by the DC power supply 1514 to produce a DC voltage, which is used to charge a plurality of capacitors. More particularly, in this embodiment the capacitors include first and second capacitors 1520 and 1522, connected in parallel. In this embodiment, each of the first and second capacitors has a capacitance of 7900 μF, although alternatively, other suitable capacitors may be substituted. In this embodiment, the pulse supply circuit 1500 further includes diodes 1524 and 1526, resistors 1528, 1530, 1532 and 1534, and a dump relay 1536, all configured as shown in
In this embodiment, to discharge the capacitors and generate the electrical discharge pulse when desired, the pulse supply circuit 1500 includes a discharge switch. More particularly, in this embodiment the discharge switch includes a silicon-controlled rectifier (SCR) 1540, in communication with the controller 170 shown in
Referring to
The processor circuit 172 is first directed to signal the fluid circulation system 140 to begin circulating liquid and gas through the apparatus, to generate the vortexing flows of liquid and gas, as described in greater detail above in connection with
The processor circuit 172 is then directed to communicate with various components of the electrical power supply system 130, to cause such components to execute a sequence of starting an arc between the cathode 106 and the anode 108, sustaining the arc, preceding the flash with an idle current, then generating the electrical discharge pulse to produce the irradiance flash.
More particularly, at initial start-up, the mechanical switch 1510 is in an open position. The processor circuit 172 is directed to send start-up signals to the starting circuit 1504, the sustaining circuit 1506, and the pulse supply circuit 1500, to turn each of these devices on. Thus, the capacitors within the starting circuit 1504 and the pulse supply circuit 1500 begin to charge. The sustaining circuit 1506 does not produce enough voltage to establish an arc between the cathode 106 and the anode 108, and is therefore not needed until after an arc has been established. The idle current supply 1502 is not yet producing current, and is awaiting receipt of an appropriate control signal from the processor circuit 172.
As soon as the internal capacitors in the starting circuit 1504 have reached a threshold voltage for arc breakdown (establishment), in this embodiment up to 30 kV, the capacitors then deliver up to 10 amps of current to establish an arc between the cathode 106 and the anode 108. As soon as the arc is established, the sustaining circuit 1506 is able to deliver a 15 A sustaining current indirectly through the starting circuit 1504 to sustain the arc. A current sensor (not shown) of the apparatus 100 signals the processor circuit 172 to indicate that a stable arc has been established. Upon receipt of such a signal, the processor circuit 172 is directed to signal the starting circuit 1504 to turn itself off, and is further directed to send a control signal to an electrical actuator of the mechanical switch 1510, to cause the mechanical switch to close, thereby allowing the sustaining circuit 1506 to bypass the starting circuit 1504. In other words, the closure of the switch 1510 places the negative terminal of the sustaining circuit 1506 in communication with the cathode 106, via the magnetic core inductor 1508, the isolation diode 1512 and the switch 1510. Thus, when the switch 1510 has been closed, the sustaining circuit 1506 continues to cause a 15 A sustaining current to flow between the cathode 106 and the anode 108.
When a flash is desired, the processor circuit 172 of the controller 170 is directed to first signal the idle current circuit 1502 to supply a suitable idle current, following which the controller signals the pulse supply circuit 1500 to generate the electrical discharge pulse.
More particularly, in the present embodiment the idle current circuit 1502 is configured to generate the idle current for a time period preceding the electrical discharge pulse, the time period being longer than a fluid transit time required by the flow of liquid to travel through the envelope 104. Thus, in the present embodiment, in which the fluid transit time is on the order of thirty milliseconds, the idle current circuit is configured to generate the idle current for at least 30 ms.
As discussed earlier herein, in the present embodiment the idle current circuit 1502 is configured to generate a much larger idle current than conventional flashlamps, in which the idle currents are typically 1 A or less. As discussed earlier herein, such high idle currents are advantageous, as they significantly improve the consistency and reproducibility of the resulting irradiance flash.
More particularly, in this embodiment the idle current circuit is configured to generate an idle current of at least about 100 amps.
More particularly still, in this embodiment the idle current circuit is configured to effectively generate an idle current of at least about 400 A, for a duration of at least about 100 ms. To achieve this, in the present embodiment the processor circuit 172 is directed to send a digital signal to the idle current circuit 1502, specifying a desired current output of 385 A. In response to the digital signal, the idle current circuit 1502 begins applying the specified current of 385 A, which when added to the 15 A being supplied by the sustaining circuit 1506 yields the desired 400 A current between the cathode 106 and the anode 108.
Approximately 100 ms later, the processor circuit 172 is directed to apply a gate voltage to the SCR 1540, thereby allowing the capacitors of the pulse supply circuit 1500 to discharge through the inductor 1542 and the closed mechanical switch 1510, thereby generating the desired electrical discharge pulse between the cathode 106 and the anode 108 and thus producing the desired irradiance flash. In this embodiment, the radiant energy output of the apparatus 100 during the flash is on the order of 50 kJ.
As the pulse supply circuit 1500 discharges in the above manner, the isolation diode 1512 protects the sustaining circuit 1506 and the idle current circuit 1502 from the discharge from the pulse supply circuit. The starting circuit 1504, which is a high voltage device, does not require protection from this discharge, as at this point in time, the starting circuit 1504 is turned off, and is also protected by the mechanical switch 1510.
Approximately simultaneously with the application of the gate voltage to the SCR 1540 to produce the flash, the processor circuit is further directed to send a control signal to the disposal valve 160, to cause the disposal valve to close the recirculation outlet port 164 and open the disposal outlet port 166, to begin disposing of the liquid and gas within the envelope 104 at the time of the flash. The processor circuit 172 is further directed to signal the separation and purification system 142 to begin receiving replenishment liquid and gas via the liquid replenishment input port 190 and the gas replenishment input port 192, to replace the liquid and gas ejected via the disposal outlet port 166. A short time later (in this embodiment, approximately 100 ms, which is significantly longer than a typical fluid transit time across the envelope 104), the processor circuit 172 is directed to signal the disposal valve to re-open the recirculation outlet port 164 and close the disposal outlet port 166, and is similarly directed to signal the separation and purification system 142 to close the liquid and gas replenishment input ports 190 and 192. Thus, substantially all of the liquid that was in the envelope 104 at the time of the flash, which is potentially contaminated with fine particulate matter, is disposed of, while retaining the remainder of the liquid and gas from the system for recirculation.
In this embodiment, continuous or DC operation of the apparatus 100 occurs in a somewhat similar manner, although the pulse supply circuit 1500 is not required. The starting circuit 1504 and the sustaining circuit 1506 co-operate to establish and sustain an arc as discussed above. The idle current circuit 1502 may then be used as a main DC power supply circuit for continuous operation of the apparatus 100. As discussed above, the controller 170 transmits a digital signal to the idle current circuit 1502, specifying a desired current output. The combined current outputs of the idle current circuit 1502 and the sustaining circuit 1504 are supplied between the cathode 106 and the anode 108, to generate a desired continuous current, thus producing a desired continuous irradiance power output.
Although the apparatus 100 described herein is capable of dual operation as either a flashlamp or a continuous arc lamp, alternatively, embodiments of the invention may be customized or specialized for one of these applications, if desired.
Although the foregoing embodiment involves a single water-wall flowing on the inside surface 102 of the envelope 104, alternatively, the present invention may be embodied in a double-liquid-wall arc lamp, such as that disclosed in the aforementioned commonly-owned U.S. Pat. No. 6,621,199, for example, to adapt the double-liquid-wall arc lamp for use as a flashlamp as described herein.
Referring to
In this embodiment, the apparatuses 1602, 1604, 1606 and 1608 are configured parallel to each other. More particularly, in the present embodiment, each one of the apparatuses 1602, 1604, 1606 and 1608 is aligned in a direction opposite to an adjacent one of the plurality of apparatuses. Thus, in this embodiment, a cathode of the each one of the plurality of apparatuses is adjacent an anode of the adjacent one of the plurality of apparatuses. Advantageously, therefore, if the apparatuses 1602, 1604, 1606 and 1608 are used to produce simultaneous flashes, the large magnetic fields resulting from the electrical discharge pulses of the four lamps tend to largely cancel each other out.
In the present embodiment, the electrical insulation surrounding the flow generators, the cathodes, and the electrical connections thereto, allow close spacing of adjacent apparatuses. Thus, in this embodiment, an axial line between the first and second electrodes of each one of the plurality of apparatuses 1602, 1604, 1606 and 1608 is spaced apart less than 10 centimeters from an axial line between the first and second electrodes of an adjacent one of the plurality of apparatuses.
In this embodiment, the system 1600 further includes a single circulation device 1620, configured to supply liquid to the flow generator of each of the plurality of apparatuses. The circulation device 1620 is generally similar to the fluid circulation system 140 shown in
If desired, the apparatuses 1602, 1604, 1606 and 1608 may be configured to produce the plurality of respective irradiance flashes incident upon a semiconductor wafer. Thus, for example, the system 1600 may be substituted for the flashlamps disclosed in commonly-owned U.S. Pat. No. 6,594,446 or in commonly-owned U.S. patent application publication no. US 2002/0102098 A1, to rapidly heat the device side of the semiconductor wafer to a desired annealing temperature. The flashes produced by the lamps may be simultaneous, if desired.
Or, referring back to
Similarly, if desired, a plurality of apparatuses similar to the apparatus 100 may be arranged as shown in
More generally, while specific embodiments of the invention have been described and illustrated, such embodiments should be considered illustrative of the invention only and not as limiting the invention as construed in accordance with the accompanying claims.
This application is a division of U.S. patent application Ser. No. 10/777,995 filed Feb. 12, 2004, which is hereby incorporated herein by reference.
| Number | Date | Country | |
|---|---|---|---|
| Parent | 10777995 | Feb 2004 | US |
| Child | 12835589 | US |
