Number | Name | Date | Kind |
---|---|---|---|
4835402 | Guillaume | May 1989 | |
5260558 | Goltsos | Nov 1993 | |
5633714 | Nyyssonen | May 1997 | |
5955654 | Stover et al. | Sep 1999 |
Entry |
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Integrated Circuit Metrology II, SPIE Proceedings vol. 480 (1984), pp. 29-77. |
Microelectronic Engineering, vol. 5 (1986), pp. 563-580. |
Guillaume M.E. et al., Microelectronic Engineering, vol. 6 (1987), pp. 631-636. |
Guillaume M.E. et al., Microelectronic Engineering, vol. 3 (1985), pp. 211-218. |
Optical Microlithography IV, SPIE Proceedings vol. 538 (1985), pp. 172-186. |