This application is a divisional application of U.S. application Ser. No. 582,517, filed Sep. 13, 1990, now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
4333986 | Tsuji et al. | Jun 1982 | |
4434188 | Kamo et al. | Feb 1984 | |
4643741 | Yu et al. | Feb 1987 | |
4698256 | Giglia et al. | Oct 1987 | |
4707384 | Schachner et al. | Nov 1987 | |
4725345 | Sakamoto et al. | Feb 1988 | |
4731296 | Kikuchi et al. | Mar 1988 | |
4734339 | Schachner et al. | Mar 1988 | |
4816286 | Huose | Mar 1989 | |
4849290 | Fujimori et al. | Jul 1989 | |
4859490 | Ikega et al. | Aug 1989 | |
4873115 | Matsumura et al. | Oct 1989 | |
4900628 | Ikega et al. | Feb 1990 | |
4925701 | Jansen et al. | May 1990 | |
4988421 | Drawl et al. | Jan 1991 |
Number | Date | Country |
---|---|---|
61-106494 | May 1986 | JPX |
62-196371 | Aug 1987 | JPX |
62-142076 | Dec 1988 | JPX |
63-307196 | Dec 1988 | JPX |
62-180060 | Jan 1989 | JPX |
Entry |
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Kobashi et al "Synthesis of diamond by use of microwave plasma CVD: Morphology growth of diamond films, " Aug. 15, 1988 vol. 38, No. 6 Physical Review pp. 4067-4084. |
Matsumoto et al "Chemical Vapor Deposition of Diamond from Methane-Hydrogen gas" Pro 7th CVM, 1982, pp. 386-391. |
Hirose et al "Synthesis of Diamond Thin Films by Thermal CVD Using Organic Compounds" vol. 25, No. 6, Jun. 1986, pp. 519-521. |
Matsumoto et al "Growth of diamond particles from CH.sub.3 Hgas" Jou of Nat'l Scie 17 (1982) 3106-3112. |
Singh et al "Hollow cathode plasma assisted CVD of diamond" App Phy. Lett 52(20) May 16, 1988. |
Sawabe et al "Growth of Diamond Thin Films in a DC discharge Plasma" Applied Surface Sci. 33/34 (1988) 539-545. |
Number | Date | Country | |
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Parent | 582517 | Sep 1990 |