Claims
- 1. An impedance measurement tool, comprising: a probe including a conductor, an insulating sheath coated on said conductor, and a peripheral conductor coated on said insulating sheath; and a testing tool including a plurality of lead wires electrically connected to said peripheral conductor of said probe and disposed radially from the center of said probe and detachable terminals provided on the free ends of said respective lead wires for detaching from the object to be measured, wherein the impedance of all series components from said probe to said detachable terminal through said lead wire are equalized each other.
- 2. The impedance measurement tool according to claim 1, wherein said testing tool is attached to said probe so as to be detachable from said probe with interposition of a probe attachment to which the other respective ends of said plurality of lead wires are electrically connected.
- 3. The impedance measurement tool according to claim 1, wherein said plurality of lead wires of said testing tool are connected each other electrically at the midway of respective wires.
Parent Case Info
This application is a divisional application of U.S. application Ser. No. 09/442,539 filed on Nov. 18, 1999 now U.S. Pat. No. 6,349,670, entitled Plasma Treatment Equipment and Impedance Measurement Tool.
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