Claims
- 1. A manufactured product comprising a gas having an extended shelf-life, the product comprising:
a) a container having an internal space and a clean and passivated internal metal surface; b) a composition comprising a reactive gas contained within the internal space and in contact with the clean passivated internal metal surface, the reactive gas having a concentration that is substantially maintained; and c) the clean and passivated internal metal surface comprising:
1) the reaction product of a silicon-containing material and an oxygen-containing material, and 2) an effective amount of the reactive gas to form the passivated internal metal surface, the effective amount being many times the intended concentration of reactive gas that is substantially maintained.
- 2. The product of claim 1 wherein said reactive gas is selected from the group consisting of nitrous oxide, nitric oxide, hydrogen chloride, chlorine, boron trichloride, and acid gases that will not react with a silicon-containing material.
- 3. The product of claim 2 wherein said acid gas is selected from the group consisting of carbondisulfide, carbonylsulfide, and compounds within formula (I):
- 4. The product of claim 1 wherein said passivated internal surface is a passivated metal.
- 5. The product of claim 4 wherein said metal is selected from the group consisting of aluminum, aluminum alloys, steel, iron and combinations thereof.
- 6. The product of claim 1 wherein said silicon-containing material is selected from the group consisting of compounds within the general formula:
- 7. The product of claim 6 wherein said compound is a methyl-containing silane.
- 8. The product of claim 7 wherein said methyl-containing silane is selected from the group consisting of methylsilane, dimethylsilane, trimethylsilane and tetramethylsilane.
- 9. The product of claim 1 wherein the composition has a reactive gas concentration of about 1000 ppb and which does not vary by more than +/−10 percent.
- 10. The product of claim 1 wherein the composition has a reactive gas concentration of about 500 ppb and does not vary by more than +/−15 percent.
- 11. The product of claim 1 wherein the composition has a reactive gas concentration of about 100 ppb and does not vary by more than +/−20 percent.
- 12. The product of claim 1 wherein the composition comprises a single reactive gas mixed with a gas selected from the group consisting of an inert gas, a hydrocarbon gas, and mixtures thereof.
- 13. A method of making the manufactured product of claim 1 from a clean container, the method comprising the steps of:
i) exposing an internal metal surface of a container to a first fluid composition comprising a silicon-containing compound for a time sufficient to allow at least some of the silicon-containing compound to react with an oxygen-containing compound present to form a silicon-treated surface on at least some of the internal metal surface, the silicon-containing compound selected from the group consisting of compounds within the general formula: SiR1R2R3R4 wherein R1, R2, R3, and R4 are the same or different and are independently selected from the group consisting of hydrogen, halogen, alkyl, aryl, amine, halogenated alkyl, and halogenated aryl; ii) evacuating the container for a time sufficient to remove substantially all silicon-containing compound that has not reacted with the oxygen-containing compound to form the silicon-treated surface; iii) exposing the silicon-treated surface to a second fluid composition, the second fluid composition comprising a reactive gas having a concentration that is greater than an intended reactive gas concentration of the manufactured product; iv) evacuating the container for a time sufficient to remove substantially all of the second fluid composition, thus forming said passivated internal metal surface in the container; and v) filling the container with a third fluid composition having the intended reactive gas concentration for the manufactured product.
- 14. The method of claim 13 wherein the silicon-containing compound is selected from the group consisting of silane and a methyl-containing silane.
- 15. The method of claim 14 wherein said methyl-containing silane is selected from the group consisting of methylsilane, dimethylsilane, trimethylsilane and tetramethylsilane.
- 16. The method of claim 13 wherein the second fluid composition has a concentration of reactive gas at least 10 times the intended reactive gas concentration.
- 17. The method of claim 13 wherein steps i) and ii) are repeated prior to step iii).
- 18. The method of claim 13 wherein the composition of the silicon-containing gas used in step iii) ranges from about 100 ppm to 100 percent.
- 19. The method of claim 13 wherein during step i) the first fluid composition is heated to a temperature of not more than 74° C.
- 20. The method of claim 13 wherein during step iii) the second fluid composition is heated to a temperature of not more than 74° C.
- 21. A method of making a device having a passivated metal surface, the method comprising the steps of:
i) exposing a metal surface to a silicon-containing compound selected from the group consisting of compounds within the general formula: SiR1R2R3R4 wherein R1, R2, R3, and R4 are independently selected from the group consisting of hydrogen, halogen, amine, alkyl, aryl, halogenated alkyl, and halogenated aryl, for a time sufficient to form a silicon treated surface on at least some of the metal surface; ii) evacuating the metal surface for a time sufficient to remove silicon-containing material that has not reacted with oxygen-containing compounds to form a silicon-treated surface; iii) exposing the silicon-treated surface to a gas composition, the gas composition having a concentration of reactive gas that is greater than an intended reactive gas concentration of gas to be transported by the metal surface; and iv) evacuating the silicon-treated surface for a time sufficient to remove substantially all of said gas composition and thus form a passivated metal surface.
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application claims priority from copending provisional patent application serial Nos. 60/306,014, and 60/306,012, both filed Jul. 17, 2001, both incorporated by reference herein.
Provisional Applications (2)
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Number |
Date |
Country |
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60306014 |
Jul 2001 |
US |
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60306012 |
Jul 2001 |
US |