Coating cavities or hollow spaces

Industry

CPC
C23C16/045

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/045Coating cavities or hollow spaces

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for selective film formation in semiconductor...
- Patent number 12,243,753
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for increasing the density of high-index nanoimprint lithog...
- Patent number 12,242,186
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Andrew Ceballos
- B82 - NANO-TECHNOLOGY
Information Patent Grant
PECVD coated pharmaceutical packaging
- Patent number 12,239,606
- Issue date Mar 4, 2025
- SiO2 Medical Products, LLC
- Christopher Weikart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching features using a targeted deposition for selecti...
- Patent number 12,217,955
- Issue date Feb 4, 2025
- Lam Research Corporation
- Wenchi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing electroactive materials for metal-ion batteries
- Patent number 12,203,165
- Issue date Jan 21, 2025
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 12,191,201
- Issue date Jan 7, 2025
- Mitsubishi Electric Corporation
- Masahiro Totsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic matrix composite surface roughness
- Patent number 12,180,591
- Issue date Dec 31, 2024
- RTX Corporation
- Ashley A. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming low resistivity titanium nitride thin film in ho...
- Patent number 12,180,583
- Issue date Dec 31, 2024
- The Regents of the University of California
- Andrew Kummel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,216
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composites and methods of forming composites having friction and we...
- Patent number 12,146,539
- Issue date Nov 19, 2024
- Goodrich Corporation
- Christopher T. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for making a fabric based substrate bearing a carbon based...
- Patent number 12,134,820
- Issue date Nov 5, 2024
- AGC Glass Europe
- Grégory Arnoult
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 12,131,947
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yutaka Motoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for filling a gap
- Patent number 12,104,244
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metallic film on a substrate by cyclical depo...
- Patent number 12,106,965
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterning of complex metal oxide structures
- Patent number 12,099,294
- Issue date Sep 24, 2024
- University of Massachusetts
- James J. Watkins
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods for low resistivity and stress tungsten gap fill
- Patent number 12,094,773
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xi Cen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 12,094,708
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,074,009
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air data probe corrosion protection
- Patent number 12,071,684
- Issue date Aug 27, 2024
- Rosemount Aerospace Inc.
- Steven Poteet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of manufacturing semiconductor devices
- Patent number 12,074,023
- Issue date Aug 27, 2024
- Samsung Electronics Co., Ltd.
- Ji-woon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom-up metal nitride formation
- Patent number 12,068,164
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a pure porous 3D diamond
- Patent number 12,065,357
- Issue date Aug 20, 2024
- Saeed Alhassan Alkhazraji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of fluid-permeable materials
- Patent number 12,065,730
- Issue date Aug 20, 2024
- Picosun Oy
- Marko Pudas
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 12,062,522
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Keiji Kitagaito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic matrix composite structures with controlled microstructures...
- Patent number 12,054,432
- Issue date Aug 6, 2024
- General Electric Company
- Jared Hogg Weaver
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,051,571
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Kazuya Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric gapfill using atomic layer deposition (ALD), inhibitor p...
- Patent number 12,049,699
- Issue date Jul 30, 2024
- Lam Research Corporation
- Joseph Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid chromatography system and component
- Patent number 12,037,685
- Issue date Jul 16, 2024
- Silcotek Corp.
- Gary A. Barone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulse-managed plasma method for coating on internal surfaces of wor...
- Patent number 12,037,923
- Issue date Jul 16, 2024
- Pratt & Whitney Canada Corp.
- Ludvik Martinu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming a conformal silicon carbon nitride la...
- Patent number 12,031,205
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Ling Chi Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAPFILL METHOD, SYSTEM AND APPARATUS
- Publication number 20250079160
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROWTH OF THIN OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION
- Publication number 20250075321
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Fredrick FISHBURN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING FILMS WITH IMPROVED STEP COVERAGE
- Publication number 20250075314
- Publication date Mar 6, 2025
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC MATRIX COMPOSITE SURFACE ROUGHNESS
- Publication number 20250075326
- Publication date Mar 6, 2025
- RTX Corporation
- Ashley A. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20250066905
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- René Henricus Jozef Vervuurt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250067664
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...
- Publication number 20250054752
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dustin Zachary Austin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE GRAIN TUNGSTEN GROWTH IN FEATURES
- Publication number 20250051908
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Kevin Qiwen CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Quantum Printing Nanostructures Within Carbon Nanopores
- Publication number 20250034702
- Publication date Jan 30, 2025
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
FEATURE FILL WITH NUCLEATION INHIBITION
- Publication number 20250038050
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Son Vo Nam TRAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250003059
- Publication date Jan 2, 2025
- Tokyo Electron Limited
- Hu LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20240417138
- Publication date Dec 19, 2024
- SiO2 Medical Products, Inc.
- John T. Felts
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PATTERNING OF COMPLEX METAL OXIDE STRUCTURES
- Publication number 20240411224
- Publication date Dec 12, 2024
- University of Massachusetts
- James J. Watkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BONDING FOR HIGH-TEMPERATURE COMPOSITE APPLICATIONS
- Publication number 20240399671
- Publication date Dec 5, 2024
- Rohr, Inc.
- WEIMING LU
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
FORMATION OF MEMORY DEVICE CHANNEL HOLES USING DOPED FILM LAYER
- Publication number 20240401189
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Hsiang Yu LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20240392434
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PREPARING ELECTROACTIVE MATERIALS FOR METAL-ION BATTERIES
- Publication number 20240384398
- Publication date Nov 21, 2024
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM-UP METAL NITRIDE FORMATION
- Publication number 20240379368
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS RAMP DURING SEMICONDUCTOR PROCESSING
- Publication number 20240376598
- Publication date Nov 14, 2024
- LAM RESEARCH CORPORATION
- Jasmine LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR EMBEDDING RUTHENIUM IN RECESS FORMED ON SU...
- Publication number 20240360547
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20240352576
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID CHROMATOGRAPHY SYSTEM AND COMPONENT
- Publication number 20240327981
- Publication date Oct 3, 2024
- SILCOTEK CORP.
- Gary A. BARONE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MATERIALS
- Publication number 20240332002
- Publication date Oct 3, 2024
- Micron Technology, Inc.
- Santanu Sarkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20240327973
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Ravi KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSE-MANAGED PLASMA METHOD FOR COATING ON INTERNAL SURFACES OF WOR...
- Publication number 20240318564
- Publication date Sep 26, 2024
- Pratt & Whitney Canada Corp.
- Ludvik MARTINU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICE BASED ON MULTILAYER THIN FILM AND METHOD FOR MANU...
- Publication number 20240309503
- Publication date Sep 19, 2024
- Woonkyung LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR INFILTRATION TOOLING HOLE MODIFICATION FOR OPTIMIZIN...
- Publication number 20240301547
- Publication date Sep 12, 2024
- Raytheon Technologies Corporation
- Lane M. Thornton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...
- Publication number 20240295020
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287672
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240290609
- Publication date Aug 29, 2024
- Tokyo Electron Limited
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS

Coating cavities or hollow spaces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for selective film formation in semiconductor...

Methods for increasing the density of high-index nanoimprint lithog...

PECVD coated pharmaceutical packaging

Method for etching features using a targeted deposition for selecti...

Process for preparing electroactive materials for metal-ion batteries

Semiconductor device and method for manufacturing semiconductor device

Ceramic matrix composite surface roughness

Methods of forming low resistivity titanium nitride thin film in ho...

Depositing coatings on and within housings, apparatus, or tools uti...

Composites and methods of forming composites having friction and we...

Process for making a fabric based substrate bearing a carbon based...

Method for manufacturing semiconductor device and substrate process...

Methods and systems for filling a gap

Methods for forming a metallic film on a substrate by cyclical depo...

Patterning of complex metal oxide structures

Methods for low resistivity and stress tungsten gap fill

Method of processing substrate, substrate processing apparatus, rec...

Apparatus for processing a substrate

Air data probe corrosion protection

Methods of manufacturing semiconductor devices

Bottom-up metal nitride formation

Process for manufacturing a pure porous 3D diamond

Coating of fluid-permeable materials

Plasma etching method and plasma etching apparatus

Ceramic matrix composite structures with controlled microstructures...

Substrate processing method and substrate processing system

Dielectric gapfill using atomic layer deposition (ALD), inhibitor p...

Liquid chromatography system and component

Pulse-managed plasma method for coating on internal surfaces of wor...

Method and system for forming a conformal silicon carbon nitride la...

Patents Applicationslast 30 patents

GAPFILL METHOD, SYSTEM AND APPARATUS

GROWTH OF THIN OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION

FORMING FILMS WITH IMPROVED STEP COVERAGE

CERAMIC MATRIX COMPOSITE SURFACE ROUGHNESS

METHODS AND SYSTEMS FOR FILLING A GAP

DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...

LARGE GRAIN TUNGSTEN GROWTH IN FEATURES

Quantum Printing Nanostructures Within Carbon Nanopores

FEATURE FILL WITH NUCLEATION INHIBITION

SUBSTRATE PROCESSING METHOD

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

PATTERNING OF COMPLEX METAL OXIDE STRUCTURES

BONDING FOR HIGH-TEMPERATURE COMPOSITE APPLICATIONS

FORMATION OF MEMORY DEVICE CHANNEL HOLES USING DOPED FILM LAYER

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

PROCESS FOR PREPARING ELECTROACTIVE MATERIALS FOR METAL-ION BATTERIES

BOTTOM-UP METAL NITRIDE FORMATION

PROCESS GAS RAMP DURING SEMICONDUCTOR PROCESSING

METHOD AND APPARATUS FOR EMBEDDING RUTHENIUM IN RECESS FORMED ON SU...

METHODS AND SYSTEMS FOR FILLING A GAP

LIQUID CHROMATOGRAPHY SYSTEM AND COMPONENT

ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MATERIALS

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

PULSE-MANAGED PLASMA METHOD FOR COATING ON INTERNAL SURFACES OF WOR...

ELECTRONIC DEVICE BASED ON MULTILAYER THIN FILM AND METHOD FOR MANU...

CHEMICAL VAPOR INFILTRATION TOOLING HOLE MODIFICATION FOR OPTIMIZIN...

METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS