Coating cavities or hollow spaces

Industry

CPC
C23C16/045

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/045Coating cavities or hollow spaces

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Molybdenum fill
- Patent number 12,327,762
- Issue date Jun 10, 2025
- Lam Research Corporation
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of conformal and gap-fill amorphous silicon thin-films
- Patent number 12,325,910
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Yihong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsing plasma treatment for film densification
- Patent number 12,322,573
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Rui Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Step coverage using an inhibitor molecule for high aspect ratio str...
- Patent number 12,312,677
- Issue date May 27, 2025
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Wontae Noh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,312,683
- Issue date May 27, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous fiber-reinforced silicon carbide member, manufacturing m...
- Patent number 12,304,176
- Issue date May 20, 2025
- Kabushiki Kaisha Toshiba
- Shoko Suyama
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
CVI matrix densification process
- Patent number 12,304,870
- Issue date May 20, 2025
- RTX Corporation
- Ying She
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools
- Patent number 12,291,775
- Issue date May 6, 2025
- Halliburton Energy Services, Inc.
- James M. Price
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid chromatography system and component
- Patent number 12,291,778
- Issue date May 6, 2025
- Silcotek Corp.
- Gary A. Barone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low refractive index surface layers and related methods
- Patent number 12,281,384
- Issue date Apr 22, 2025
- UChicago Argonne, LLC
- Elena Shevchenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 12,283,479
- Issue date Apr 22, 2025
- ASM IP Holding B.V.
- JaeOk Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating onto fabric substrates by means of plasma
- Patent number 12,281,435
- Issue date Apr 22, 2025
- AGC Glass Europe
- Hansjoerg Weis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating short fibres
- Patent number 12,269,780
- Issue date Apr 8, 2025
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a ceramic matrix composite component
- Patent number 12,269,779
- Issue date Apr 8, 2025
- RTX Corporation
- Paul Sheedy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 12,272,547
- Issue date Apr 8, 2025
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor infiltration densification method using single-pile...
- Patent number 12,264,394
- Issue date Apr 1, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu Champagne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 12,261,038
- Issue date Mar 25, 2025
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ PECVD cap layer
- Patent number 12,252,782
- Issue date Mar 18, 2025
- Lam Research Corporation
- Jeremy David Fields
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for selective film formation in semiconductor...
- Patent number 12,243,753
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for increasing the density of high-index nanoimprint lithog...
- Patent number 12,242,186
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Andrew Ceballos
- B82 - NANO-TECHNOLOGY
Information Patent Grant
PECVD coated pharmaceutical packaging
- Patent number 12,239,606
- Issue date Mar 4, 2025
- SiO2 Medical Products, LLC
- Christopher Weikart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching features using a targeted deposition for selecti...
- Patent number 12,217,955
- Issue date Feb 4, 2025
- Lam Research Corporation
- Wenchi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing electroactive materials for metal-ion batteries
- Patent number 12,203,165
- Issue date Jan 21, 2025
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 12,191,201
- Issue date Jan 7, 2025
- Mitsubishi Electric Corporation
- Masahiro Totsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic matrix composite surface roughness
- Patent number 12,180,591
- Issue date Dec 31, 2024
- RTX Corporation
- Ashley A. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming low resistivity titanium nitride thin film in ho...
- Patent number 12,180,583
- Issue date Dec 31, 2024
- The Regents of the University of California
- Andrew Kummel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,216
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composites and methods of forming composites having friction and we...
- Patent number 12,146,539
- Issue date Nov 19, 2024
- Goodrich Corporation
- Christopher T. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for making a fabric based substrate bearing a carbon based...
- Patent number 12,134,820
- Issue date Nov 5, 2024
- AGC Glass Europe
- Grégory Arnoult
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 12,131,947
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yutaka Motoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LOW RESISTANCE MOLYBDENUM DEPOSITION FOR LOGIC SOURCE/DRAIN CONTACTS
- Publication number 20250183041
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Yao-Tsung HSIEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ONO FILMS AND METHODS OF MAKING THEREOF
- Publication number 20250185263
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTIVITY CONTACTS AND INTERCONNECTS
- Publication number 20250183097
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Chiukin Steven LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE BOTTOM-UP FILL
- Publication number 20250183054
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Guannan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE INHIBITION ATOMIC LAYER DEPOSITION
- Publication number 20250179632
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Tao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EMBEDDING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250171890
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Isao GUNJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR FILLING A GAP
- Publication number 20250171892
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FILLING GAPS ON SUBSTRATE SURFACE USING PLASMA
- Publication number 20250171891
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Sho Ichinose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BA...
- Publication number 20250163573
- Publication date May 22, 2025
- Applied Materials, Inc.
- Zhijun CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF EMBEDDING RUTHENIUM INTO RECESS
- Publication number 20250163570
- Publication date May 22, 2025
- Tokyo Electron Limited
- Masato ARAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING TECHNOLOGY FOR PLASTIC CONTAINERS
- Publication number 20250163231
- Publication date May 22, 2025
- Ionkraft GmbH
- Montgomery JARITZ
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
HIGH PRESSURE INERT OXIDATION AND IN-SITU ANNEALING PROCESS TO IMPR...
- Publication number 20250154644
- Publication date May 15, 2025
- LAM RESEARCH CORPORATION
- Eli Jeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME
- Publication number 20250155069
- Publication date May 15, 2025
- Metal Industries Research & Development Centre
- Jia-Hao Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...
- Publication number 20250149330
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Wenchi LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
- Publication number 20250149383
- Publication date May 8, 2025
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILIC...
- Publication number 20250149328
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Bhadri N. VARADARAJAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURE OF GRAPHENE COATED SURFACES BY ATOMIC OR MOLE...
- Publication number 20250137120
- Publication date May 1, 2025
- 2D GENERATION LTD.
- Doron Yaacov NAVEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF CARBON GAPFILL MATERIALS
- Publication number 20250137119
- Publication date May 1, 2025
- Applied Materials, Inc.
- Bhargav S. CITLA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE
- Publication number 20250122611
- Publication date Apr 17, 2025
- TES CO., LTD.
- Sungwoo LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for filling a gap
- Publication number 20250122610
- Publication date Apr 17, 2025
- ASM IP HOLDING B.V.
- René Henricus Jozef Vervuurt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...
- Publication number 20250109497
- Publication date Apr 3, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu CHAMPAGNE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPONGE-LIKE POROUS BODY, POLISHING PAD, LIQUID ABSORBING PAD, CLEAN...
- Publication number 20250108478
- Publication date Apr 3, 2025
- Canon Kabushiki Kaisha
- SHINJI FUKUI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Methods for Depositing Film Layers
- Publication number 20250101575
- Publication date Mar 27, 2025
- Yaoying ZHONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAPFILL METHOD, SYSTEM AND APPARATUS
- Publication number 20250079160
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROWTH OF THIN OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION
- Publication number 20250075321
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Fredrick FISHBURN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING FILMS WITH IMPROVED STEP COVERAGE
- Publication number 20250075314
- Publication date Mar 6, 2025
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC MATRIX COMPOSITE SURFACE ROUGHNESS
- Publication number 20250075326
- Publication date Mar 6, 2025
- RTX Corporation
- Ashley A. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20250066905
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- René Henricus Jozef Vervuurt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250067664
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...
- Publication number 20250054752
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dustin Zachary Austin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Coating cavities or hollow spaces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Molybdenum fill

Deposition of conformal and gap-fill amorphous silicon thin-films

Pulsing plasma treatment for film densification

Step coverage using an inhibitor molecule for high aspect ratio str...

Substrate processing method and substrate processing device

Continuous fiber-reinforced silicon carbide member, manufacturing m...

CVI matrix densification process

Depositing coatings on and within housings, apparatus, or tools

Liquid chromatography system and component

Low refractive index surface layers and related methods

Substrate processing method

Method of coating onto fabric substrates by means of plasma

Method for coating short fibres

Method for producing a ceramic matrix composite component

Conformal deposition of silicon carbide films

Chemical vapor infiltration densification method using single-pile...

Gapfill of variable aspect ratio features with a composite PEALD an...

In-situ PECVD cap layer

Method and apparatus for selective film formation in semiconductor...

Methods for increasing the density of high-index nanoimprint lithog...

PECVD coated pharmaceutical packaging

Method for etching features using a targeted deposition for selecti...

Process for preparing electroactive materials for metal-ion batteries

Semiconductor device and method for manufacturing semiconductor device

Ceramic matrix composite surface roughness

Methods of forming low resistivity titanium nitride thin film in ho...

Depositing coatings on and within housings, apparatus, or tools uti...

Composites and methods of forming composites having friction and we...

Process for making a fabric based substrate bearing a carbon based...

Method for manufacturing semiconductor device and substrate process...

Patents Applicationslast 30 patents

LOW RESISTANCE MOLYBDENUM DEPOSITION FOR LOGIC SOURCE/DRAIN CONTACTS

ROBUST ONO FILMS AND METHODS OF MAKING THEREOF

LOW RESISTIVITY CONTACTS AND INTERCONNECTS

SELECTIVE BOTTOM-UP FILL

SURFACE INHIBITION ATOMIC LAYER DEPOSITION

EMBEDDING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUSES AND METHODS FOR FILLING A GAP

METHOD OF FILLING GAPS ON SUBSTRATE SURFACE USING PLASMA

METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BA...

METHOD AND APPARATUS OF EMBEDDING RUTHENIUM INTO RECESS

COATING TECHNOLOGY FOR PLASTIC CONTAINERS

HIGH PRESSURE INERT OXIDATION AND IN-SITU ANNEALING PROCESS TO IMPR...

ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME

METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...

TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION

REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILIC...

METHOD OF MANUFACTURE OF GRAPHENE COATED SURFACES BY ATOMIC OR MOLE...

DEPOSITION OF CARBON GAPFILL MATERIALS

METHOD FOR PROCESSING SUBSTRATE

Method and system for filling a gap

CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...

SPONGE-LIKE POROUS BODY, POLISHING PAD, LIQUID ABSORBING PAD, CLEAN...

Methods for Depositing Film Layers

GAPFILL METHOD, SYSTEM AND APPARATUS

GROWTH OF THIN OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION

FORMING FILMS WITH IMPROVED STEP COVERAGE

CERAMIC MATRIX COMPOSITE SURFACE ROUGHNESS

METHODS AND SYSTEMS FOR FILLING A GAP

DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...