Coating cavities or hollow spaces

Industry

CPC
C23C16/045

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/045Coating cavities or hollow spaces

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods of forming dielectric layers through deposition and anneal...
- Patent number 12,368,044
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wan-Yi Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films using heterogeneous p...
- Patent number 12,359,311
- Issue date Jul 15, 2025
- Lam Research Corporation
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Downhole sand control screen system
- Patent number 12,352,136
- Issue date Jul 8, 2025
- Chevron U.S.A. Inc.
- Jeremy Alexander Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiN film embedding method
- Patent number 12,344,933
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming porous inorganic films via polymer swelling infil...
- Patent number 12,331,394
- Issue date Jun 17, 2025
- University of North Texas
- Diana Berman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum deposition
- Patent number 12,334,351
- Issue date Jun 17, 2025
- Lam Research Corporation
- Jeong-Seok Na
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma based deposition of silicon carbide films using silic...
- Patent number 12,334,332
- Issue date Jun 17, 2025
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum fill
- Patent number 12,327,762
- Issue date Jun 10, 2025
- Lam Research Corporation
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of conformal and gap-fill amorphous silicon thin-films
- Patent number 12,325,910
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Yihong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsing plasma treatment for film densification
- Patent number 12,322,573
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Rui Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Step coverage using an inhibitor molecule for high aspect ratio str...
- Patent number 12,312,677
- Issue date May 27, 2025
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Wontae Noh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,312,683
- Issue date May 27, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous fiber-reinforced silicon carbide member, manufacturing m...
- Patent number 12,304,176
- Issue date May 20, 2025
- Kabushiki Kaisha Toshiba
- Shoko Suyama
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
CVI matrix densification process
- Patent number 12,304,870
- Issue date May 20, 2025
- RTX Corporation
- Ying She
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools
- Patent number 12,291,775
- Issue date May 6, 2025
- Halliburton Energy Services, Inc.
- James M. Price
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid chromatography system and component
- Patent number 12,291,778
- Issue date May 6, 2025
- Silcotek Corp.
- Gary A. Barone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low refractive index surface layers and related methods
- Patent number 12,281,384
- Issue date Apr 22, 2025
- UChicago Argonne, LLC
- Elena Shevchenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 12,283,479
- Issue date Apr 22, 2025
- ASM IP Holding B.V.
- JaeOk Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating onto fabric substrates by means of plasma
- Patent number 12,281,435
- Issue date Apr 22, 2025
- AGC Glass Europe
- Hansjoerg Weis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating short fibres
- Patent number 12,269,780
- Issue date Apr 8, 2025
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a ceramic matrix composite component
- Patent number 12,269,779
- Issue date Apr 8, 2025
- RTX Corporation
- Paul Sheedy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 12,272,547
- Issue date Apr 8, 2025
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor infiltration densification method using single-pile...
- Patent number 12,264,394
- Issue date Apr 1, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu Champagne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 12,261,038
- Issue date Mar 25, 2025
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ PECVD cap layer
- Patent number 12,252,782
- Issue date Mar 18, 2025
- Lam Research Corporation
- Jeremy David Fields
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for selective film formation in semiconductor...
- Patent number 12,243,753
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for increasing the density of high-index nanoimprint lithog...
- Patent number 12,242,186
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Andrew Ceballos
- B82 - NANO-TECHNOLOGY
Information Patent Grant
PECVD coated pharmaceutical packaging
- Patent number 12,239,606
- Issue date Mar 4, 2025
- SiO2 Medical Products, LLC
- Christopher Weikart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching features using a targeted deposition for selecti...
- Patent number 12,217,955
- Issue date Feb 4, 2025
- Lam Research Corporation
- Wenchi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing electroactive materials for metal-ion batteries
- Patent number 12,203,165
- Issue date Jan 21, 2025
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION DEVICE FOR UNIFORM COATING ON INNER SURFACE...
- Publication number 20250236953
- Publication date Jul 24, 2025
- HARBIN INSTITUTE OF TECHNOLOGY
- GANG GAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FILLING A GAP
- Publication number 20250232974
- Publication date Jul 17, 2025
- ASM IP HOLDING B.V.
- Sungdae Woo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF)...
- Publication number 20250230541
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL
- Publication number 20250230540
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Supriya Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FILLING A GAP
- Publication number 20250226214
- Publication date Jul 10, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215564
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20250218790
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCING CAPACITANCE IN SEMICONDUCTOR DEVICES
- Publication number 20250207246
- Publication date Jun 26, 2025
- LAM RESEARCH CORPORATION
- Ian John CURTIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS THAT UTILIZE PHOTOSENSITIVE ORGANOMETALLIC OXIDES FORMED BY...
- Publication number 20250207247
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Kandabara Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20250210344
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Rio SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20250197303
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Peter J. GUERCIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME
- Publication number 20250198544
- Publication date Jun 19, 2025
- Metal Industries Research & Development Centre
- Jia-Hao LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250188597
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Atsushi MORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM GAPFILL DEPOSITION ON SEMICONDUCTOR SUBSTRATES WITH VARYING...
- Publication number 20250191909
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Bharati Neelamraju
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIG...
- Publication number 20250188600
- Publication date Jun 12, 2025
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTANCE MOLYBDENUM DEPOSITION FOR LOGIC SOURCE/DRAIN CONTACTS
- Publication number 20250183041
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Yao-Tsung HSIEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ONO FILMS AND METHODS OF MAKING THEREOF
- Publication number 20250185263
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE BOTTOM-UP FILL
- Publication number 20250183054
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Guannan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTIVITY CONTACTS AND INTERCONNECTS
- Publication number 20250183097
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Chiukin Steven LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE INHIBITION ATOMIC LAYER DEPOSITION
- Publication number 20250179632
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Tao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EMBEDDING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250171890
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Isao GUNJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR FILLING A GAP
- Publication number 20250171892
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FILLING GAPS ON SUBSTRATE SURFACE USING PLASMA
- Publication number 20250171891
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Sho Ichinose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BA...
- Publication number 20250163573
- Publication date May 22, 2025
- Applied Materials, Inc.
- Zhijun CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING TECHNOLOGY FOR PLASTIC CONTAINERS
- Publication number 20250163231
- Publication date May 22, 2025
- Ionkraft GmbH
- Montgomery JARITZ
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD AND APPARATUS OF EMBEDDING RUTHENIUM INTO RECESS
- Publication number 20250163570
- Publication date May 22, 2025
- Tokyo Electron Limited
- Masato ARAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE INERT OXIDATION AND IN-SITU ANNEALING PROCESS TO IMPR...
- Publication number 20250154644
- Publication date May 15, 2025
- LAM RESEARCH CORPORATION
- Eli Jeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME
- Publication number 20250155069
- Publication date May 15, 2025
- Metal Industries Research & Development Centre
- Jia-Hao Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...
- Publication number 20250149330
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Wenchi LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
- Publication number 20250149383
- Publication date May 8, 2025
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Coating cavities or hollow spaces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of forming dielectric layers through deposition and anneal...

Conformal deposition of silicon carbide films using heterogeneous p...

Downhole sand control screen system

SiN film embedding method

Method of forming porous inorganic films via polymer swelling infil...

Molybdenum deposition

Remote plasma based deposition of silicon carbide films using silic...

Molybdenum fill

Deposition of conformal and gap-fill amorphous silicon thin-films

Pulsing plasma treatment for film densification

Step coverage using an inhibitor molecule for high aspect ratio str...

Substrate processing method and substrate processing device

Continuous fiber-reinforced silicon carbide member, manufacturing m...

CVI matrix densification process

Depositing coatings on and within housings, apparatus, or tools

Liquid chromatography system and component

Low refractive index surface layers and related methods

Substrate processing method

Method of coating onto fabric substrates by means of plasma

Method for coating short fibres

Method for producing a ceramic matrix composite component

Conformal deposition of silicon carbide films

Chemical vapor infiltration densification method using single-pile...

Gapfill of variable aspect ratio features with a composite PEALD an...

In-situ PECVD cap layer

Method and apparatus for selective film formation in semiconductor...

Methods for increasing the density of high-index nanoimprint lithog...

PECVD coated pharmaceutical packaging

Method for etching features using a targeted deposition for selecti...

Process for preparing electroactive materials for metal-ion batteries

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION DEVICE FOR UNIFORM COATING ON INNER SURFACE...

METHOD OF FILLING A GAP

Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF)...

SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL

METHODS AND APPARATUSES FOR FILLING A GAP

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

REDUCING CAPACITANCE IN SEMICONDUCTOR DEVICES

METHODS THAT UTILIZE PHOTOSENSITIVE ORGANOMETALLIC OXIDES FORMED BY...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

UNIFORM GAPFILL DEPOSITION ON SEMICONDUCTOR SUBSTRATES WITH VARYING...

SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIG...

LOW RESISTANCE MOLYBDENUM DEPOSITION FOR LOGIC SOURCE/DRAIN CONTACTS

ROBUST ONO FILMS AND METHODS OF MAKING THEREOF

SELECTIVE BOTTOM-UP FILL

LOW RESISTIVITY CONTACTS AND INTERCONNECTS

SURFACE INHIBITION ATOMIC LAYER DEPOSITION

EMBEDDING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUSES AND METHODS FOR FILLING A GAP

METHOD OF FILLING GAPS ON SUBSTRATE SURFACE USING PLASMA

METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BA...

COATING TECHNOLOGY FOR PLASTIC CONTAINERS

METHOD AND APPARATUS OF EMBEDDING RUTHENIUM INTO RECESS

HIGH PRESSURE INERT OXIDATION AND IN-SITU ANNEALING PROCESS TO IMPR...

ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME

METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...

TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION