This is a divisional of U.S. application Ser. No. 08/515,696, filed Aug. 16, 1995, now U.S. Pat. No. 5,907,221.
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Number | Date | Country |
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Entry |
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Stewart, R.A., Vitello, P., Graves, D.B., Jaeger, E.F., Berry, L.A., "Plasma uniformity in high-density inductively coupled plasma tools," Plasma Sources Science Technology, No. 4, 1995, pp. 36-46, Great Britain. |
Number | Date | Country | |
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Parent | 515695 | Aug 1995 |