TREA

the radio frequency energy being inductively coupled to the plasma

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Industry

  • CPC
  • H01J37/321
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/321the radio frequency energy being inductively coupled to the plasma
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