INK JET RECORDING HEAD AND MANUFACTURING METHOD OF THE SAME

Abstract

A manufacturing method of an ink jet recording head has: forming a liquid flow path mold material of a soluble resin on a substrate on which an energy generating elements is formed, the energy generating element being configured to generate energy for use in discharging ink; forming a coating resin layer of a negative photosensitive resin on the substrate on which the mold material is formed; exposing and developing the coating resin layer to form an ink discharge port in the coating resin layer; and dissolving and removing the mold material to form a liquid flow path, wherein during the exposing of the coating resin layer, a total amount of exposure energy per unit area, applied to an exposure region other than a region of the coating resin layer positioned above the mold material, is larger than that of exposure energy per unit area, applied to the region of the coating resin layer positioned above the mold material.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H and 1I are schematic sectional views illustrating examples of manufacturing steps of an ink jet recording head according to the present invention.

FIG. 2 is a partially cut perspective view schematically illustrating a part of the ink jet recording head.

FIGS. 3A, 3B, 3C, 3D, 3E, 3F, 3G and 3H are schematically sectional views illustrating manufacturing steps of a conventional ink jet recording head.

FIG. 4 is a schematic sectional view of an ink jet recording head including liquid flow paths having different heights.

FIG. 5 is a schematic sectional view illustrating a modified example of manufacturing steps illustrated in FIGS. 1E and 1F.

Claims

1. A manufacturing method of an ink jet recording head comprising: forming a liquid flow path mold material of a soluble resin on a substrate on which an energy generating element is formed, the energy generating element being configured to generate energy for use in discharging ink;forming a coating resin layer of a negative photosensitive resin on the substrate on which the mold material is formed;exposing and developing the coating resin layer to form an ink discharge port in the coating resin layer; anddissolving and removing the mold material to form a liquid flow path,wherein during the exposing of the coating resin layer, a total amount of exposure energy per unit area, applied to an exposure region other than a region of the coating resin layer positioned above the mold material, is larger than that of exposure energy per unit area, applied to the region of the coating resin layer positioned above the mold material.

2. A manufacturing method of the ink jet recording head according to claim 1, wherein a method of exposing the coating resin layer comprises: exposing the exposure region other than the region of the coating resin layer positioned above the mold material; and then exposing the exposure region of the coating resin layer positioned above the mold material.

3. A manufacturing method of the ink jet recording head according to claim 1, wherein a method of exposing the coating resin layer comprises: setting an exposure amount with which the region of the coating resin layer positioned above the mold material is irradiated to be smaller than that with which a portion other than the region is irradiated by use of a mask having a transmittance which differs with portions.

4. A manufacturing method of the ink jet recording head according to claim 1, wherein the ink discharge port has a polygonal shape.

5. An ink jet recording head manufactured by the manufacturing method of the ink jet recording head according to claim 1.