Inner tube for use in a semiconductor wafer heat processing apparatus

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Information

Patent Grant
D407696

References
Source

Patent Number
D407,696
Date Filed
Monday, February 2, 1998
27 years ago
Date Issued
Tuesday, April 6, 1999
25 years ago

Inventors
- Tomohisa Shimazu
Original Assignees
- TOKYO ELECTRON LIMITED
Examiners
- Vinson; Brian N.
Agents
- Ladas & Parry

US Classifications
- D13 - Equipment for production, distribution, or transformation of energy
Field of Search
- US
- D13 182
- D15 144
- D15 1441
- D15 199
- 414 935-941
- 414 217
- 414 147
- 437 247
- 437 946
- D23 259
- D23 262
- D23 266
International Classifications
- 1303
- Term of Grant
  14Years

Information

Abstract

Description

Claims

I claim the ornamental design for inner tube for use in a semiconductor wafer heat processing apparatus, as shown and described.

Priority Claims (1)

Number	Date	Country	Kind
9-65096	Aug 1997	JPX

US Referenced Citations (4)

Number	Name	Date	Kind
4857689	Lee	Aug 1989
5314574	Takahashi	May 1994
5320218	Yamashita et al.	Jun 1994
5752796	Muka	May 1998