The present invention relates generally to OLED displays and, more particularly, to inspection systems for detecting defects and non-uniformities in displays such as active matrix organic light emitting diode displays.
Display panels can be created from an array of light emitting devices each controlled by individual circuits (i.e., pixel circuits) having transistors for selectively controlling the circuits to be programmed with display information and to cause the light emitting devices to emit light according to the display information. Thin film transistors (“TFTs”) fabricated on a substrate can be incorporated into such display panels. Both OLEDs and TFTs can demonstrate non-uniform behavior across display panels due to production problems. Such problems can be corrected if the defects and non-uniformities can be identified at the time the panels are produced, e.g., during or immediately following fabrication.
A system is provided for inspecting at least a portion of a display panel having thin film transistors (TFTs) and light emitting devices (OLEDs), during or immediately following fabrication, so that adjustments can be made to the fabrication procedures to avoid defects and non-uniformities. The system provides bonding pads connected to signal lines on at least portions of the display panel, and probe pads along selected edges of the display panel. The probe pads are coupled to the bonding pads through a plurality of multiplexers so that the number of probe pads is smaller than the number of bonding pads.
The foregoing and additional aspects and embodiments of the present invention will be apparent to those of ordinary skill in the art in view of the detailed description of various embodiments and/or aspects, which is made with reference to the drawings, a brief description of which is provided next.
The foregoing and other advantages of the invention will become apparent upon reading the following detailed description and upon reference to the drawings.
While the invention is susceptible to various modifications and alternative forms, specific embodiments have been shown by way of example in the drawings and will be described in detail herein. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed. Rather, the invention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
As can be seen in
The proper pad pitch for full panel probing is typically about 150 μm. As illustrated by the data in Table 1, the pad pitch for most conventional configurations meets the minimum pad pitch requirements. However, using multiplexing ratios of 2:1 or greater permits the pad pitch to be increased, resulting in much simpler probe cards, as also illustrated by the data in Table 1:
As depicted in
The circuitry depicted in
A wide variety of different circuitry and algorithms may be used for extracting measurements of different parameters from the display panel at different stages of its fabrication, such as the extraction systems described in U.S. patent application Ser. No. 13/835,124 filed Mar. 15, 2013 and entitled “Systems and Methods for Extrraction of Threshold and Mobility Parameters in AMOLED Displays,” which is incorporated by reference herein in its entirety.
The inspection system can identify many potential defects and problems (e.g., with sputtering and PECVD steps, that can be used to identify the likely cause of the defect or problem so that the fabricating process can be immediately fine-tuned to correct the problem). Examples of such issues and their likely causes are the following:
For defects that cannot be directly identified by a single measurement of the inspection system, the first measurement can reveal that a problem exists, and specify additional tests that will conclusively identify the exact defect. One example is the identification of line defects, which can be detected by any of the following procedures:
Defects in the thin film transistors (TFTs) can also be detected. For example, in the situation where the pixel circuit in
To detect problems with process annealing, the exact Vt and mobility of each TFT can be used to adjust process annealing parameters, as follows:
The number and types of defects can be used to identify problems in patterning (particles, under/over exposure, etc.), as follows:
The defect location and defect type can be used to pinpoint areas suitable for laser repair (removing material) or ion beam deposition (adding material), as follows:
The uniformity data can also be used to continuously calibrate each print head used for inkjet printing, in real-time. The system knows which print head was used to print each pixel, and thus problems with individual print heads can be detected. The print head used to print those pixels can then be immediately adjusted, as follows.
The exact failure mode of every OLED device can be used to tune the evaporation process, as follows:
The electrical characteristics (collected during TFT and OLED inspection) can be loaded into a lookup table, and used to correct for all TFT and OLED non-uniformities.
Additional defects can be identified once both the OLEDs and TFTs have been deposited. The first measurement can identify that a problem exists, and specify additional tests that will conclusively identify the exact defect.
If test samples are created around the periphery of the panel, then more details about the global process parameters can be extracted. Typically this is done by cutting off the test samples from a small percentage of displays and putting them in a separate characterization system. However, with the present inspection system, this can be done as part of panel characterization, for every panel, as follows:
While particular embodiments and applications of the present invention have been illustrated and described, it is to be understood that the invention is not limited to the precise construction and compositions disclosed herein and that various modifications, changes, and variations can be apparent from the foregoing descriptions without departing from the spirit and scope of the invention as defined in the appended claims.
This application claims the benefit of U.S. Provisional Application No. 61/861,614, filed Aug. 2, 2013, and U.S. Provisional Application No. 61/814,580, filed Apr. 22, 2013, both of which are hereby incorporated by reference herein in their entireties.
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