Number | Date | Country | Kind |
---|---|---|---|
6-006153 | Jan 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4371587 | Peters | Feb 1983 | |
4794048 | Oboodi | Dec 1988 | |
4900591 | Bennett et al. | Feb 1990 |
Number | Date | Country |
---|---|---|
0299754 | Jan 1989 | EPX |
0428839 | May 1991 | EPX |
Entry |
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Hatanaka et al., "H.sub.2 O-Teos Plasma-CVD Realizing Dielectrics Having a Smooth Surface", VMIC Conference, Jun. 11-12, 1991, pp. 435-441. |