Silicon dioxide

Industry

CPC
C23C16/402

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/402Silicon dioxide

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate supporting apparatus, substrate processing apparatus incl...
- Patent number 12,230,531
- Issue date Feb 18, 2025
- ASM IP Holding B.V.
- Seung Woo Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cutting tool
- Patent number 12,220,747
- Issue date Feb 11, 2025
- Sumitomo Electric Hardmetal Corp.
- Fumiyoshi Kobayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Smoothing surface roughness using atomic layer deposition
- Patent number 12,215,419
- Issue date Feb 4, 2025
- Eagle Technology, LLC
- James Throckmorton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer coating for corrosion resistance
- Patent number 12,191,120
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing silicon oxide films
- Patent number 12,188,121
- Issue date Jan 7, 2025
- ASM Genitech Korea Ltd.
- Tae Ho Yoon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Soft-magnetic powder comprising coated particles
- Patent number 12,180,568
- Issue date Dec 31, 2024
- BASF SE
- Robert Prunchak
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Nano robotic system for high throughput single cell DNA sequencing
- Patent number 12,163,979
- Issue date Dec 10, 2024
- Versitech Limited
- Ning Xi
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Thermal atomic layer deposition of silicon-containing films
- Patent number 12,157,945
- Issue date Dec 3, 2024
- Lam Research Corporation
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective liquid sliding surface and method of fabricating the same
- Patent number 12,112,941
- Issue date Oct 8, 2024
- THE INDUSTRY & ACADEMIC COOPERAPATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC)
- Seong Min Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of post-deposition treatment for silicon oxide film
- Patent number 12,100,588
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,080,546
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal-doped boron films
- Patent number 12,077,852
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,074,009
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air data probe corrosion protection
- Patent number 12,071,684
- Issue date Aug 27, 2024
- Rosemount Aerospace Inc.
- Steven Poteet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and methods for preparing silicon-containing films
- Patent number 12,071,688
- Issue date Aug 27, 2024
- Entegris, Inc.
- SangJin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus and semiconductor device manu...
- Patent number 12,068,138
- Issue date Aug 20, 2024
- Kioxia Corporation
- Higenyi Ismail Wamusango
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 12,062,522
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Keiji Kitagaito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Functionalized cyclosilazanes as precursors for high growth rate si...
- Patent number 12,057,310
- Issue date Aug 6, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Package structure for semiconductor device and preparation method t...
- Patent number 12,040,241
- Issue date Jul 16, 2024
- Xidian University
- Chen Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and ion beam irradiati...
- Patent number 12,040,155
- Issue date Jul 16, 2024
- Kioxia Corporation
- Junichi Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD preparation method for minimizing camera module dot defects and...
- Patent number 12,034,020
- Issue date Jul 9, 2024
- HANGZHOU MDK OPTO ELECTRONICS CO., LTD
- Wenzhi Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,020,904
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
- Patent number 12,018,040
- Issue date Jun 25, 2024
- VERSUM MATERIALS US, LLC
- Matthew R. Macdonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming method and film-forming apparatus
- Patent number 12,018,370
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Tatsuhiko Tanimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single process volume to perform high-pressure and low-pressure pro...
- Patent number 12,012,652
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Kelvin Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 11,981,997
- Issue date May 14, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Feng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,975,357
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition methods
- Patent number 11,970,769
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Trigagema Gama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 11,965,246
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Naonori Fujiwara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20250087480
- Publication date Mar 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Haifeng QIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Increasing Skin Depth and Reducing Eddy Cu...
- Publication number 20250087417
- Publication date Mar 13, 2025
- Atlas Magnetics
- John Othniel McDonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DECORATIVE ANTIQUE COPPER COATING WITH HTL COMPATIBILITY AND NOVEL...
- Publication number 20250084537
- Publication date Mar 13, 2025
- MOTHERSON INNOVATIONS COMPANY LIMITED
- Simon David FIELD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS
- Publication number 20250076550
- Publication date Mar 6, 2025
- Modulight Corporation
- Timo Aho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR SELECTIVE DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20250074927
- Publication date Mar 6, 2025
- Entegris, Inc.
- Drew Michael Hood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-ALIGNED THREE-DIMENSIONAL OPTICAL PHASED ARRAY AND FABRICATION...
- Publication number 20250067928
- Publication date Feb 27, 2025
- The Regents of the University of Michigan
- Dachuan WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER COATING FOR CORROSION RESISTANCE
- Publication number 20250069857
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...
- Publication number 20250054752
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dustin Zachary Austin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20250051911
- Publication date Feb 13, 2025
- AIR WATER INC.
- Fumio KAWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...
- Publication number 20250051914
- Publication date Feb 13, 2025
- Merck Patent GmbH
- Byeong-IL Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE
- Publication number 20250043422
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATE AND MANUFACTURING METHOD OF LAMINATE
- Publication number 20250018697
- Publication date Jan 16, 2025
- FUJIFILM CORPORATION
- Yoshihiko MOCHIZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...
- Publication number 20250011928
- Publication date Jan 9, 2025
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Songtao Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS
- Publication number 20250006474
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Naomi YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...
- Publication number 20240417882
- Publication date Dec 19, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALUMINA MEMBRANE, PREPARATION METHOD AND USE THEREOF
- Publication number 20240408551
- Publication date Dec 12, 2024
- SHENZHEN ASIA KIDNEY REBUILDING MEDICAL TECHNOLOGY LTD.
- Zhonghui CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...
- Publication number 20240410052
- Publication date Dec 12, 2024
- Picosun Oy
- Jesse KALLIOMÄKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...
- Publication number 20240395541
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED GLASS BUBBLES, COMPOSITES THEREFROM, AND METHODS OF MAKING T...
- Publication number 20240384069
- Publication date Nov 21, 2024
- Adam D. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUND, SILICON-CONTAINING FILM FORMATION COMPO...
- Publication number 20240383927
- Publication date Nov 21, 2024
- UP CHEMICAL CO., LTD.
- Byung Kwan KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUND, COMPOSITION FOR FORMING SILICON-CONTAIN...
- Publication number 20240376599
- Publication date Nov 14, 2024
- UP CHEMICAL CO., LTD.
- Byung Kwan KIM
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD OF PRODUCING A COATED GLASS ARTICLE
- Publication number 20240351941
- Publication date Oct 24, 2024
- PILKINGTON GROUP LIMITED
- Srikanth VARANASI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE FILM FORMING DEVICE
- Publication number 20240344200
- Publication date Oct 17, 2024
- MEIDENSHA CORPORATION
- Toshinori MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240327984
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Tuhin Shuvra Basu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
- Publication number 20240332535
- Publication date Oct 3, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SILICON-CONTAINING FILM, AND SILICON-CONTAINING...
- Publication number 20240318305
- Publication date Sep 26, 2024
- UP CHEMICAL CO., LTD.
- Byung Kwan KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
- Publication number 20240304438
- Publication date Sep 12, 2024
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Patterning Process
- Publication number 20240297041
- Publication date Sep 5, 2024
- Shin-Etsu Chemical Co., Ltd.
- Naoki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING THIN FILM AND APPARATUS FOR PROCESSING SUBSTRATE...
- Publication number 20240290586
- Publication date Aug 29, 2024
- WONIK IPS CO., LTD.
- Jae Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240290610
- Publication date Aug 29, 2024
- Tokyo Electron Limited
- Takashi FUSE
- H01 - BASIC ELECTRIC ELEMENTS

Silicon dioxide

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate supporting apparatus, substrate processing apparatus incl...

Cutting tool

Smoothing surface roughness using atomic layer deposition

Multilayer coating for corrosion resistance

Method of depositing silicon oxide films

Soft-magnetic powder comprising coated particles

Nano robotic system for high throughput single cell DNA sequencing

Thermal atomic layer deposition of silicon-containing films

Method of forming structures using a neutral beam

Selective liquid sliding surface and method of fabricating the same

Method of post-deposition treatment for silicon oxide film

Method of processing substrate, method of manufacturing semiconduct...

Metal-doped boron films

Apparatus for processing a substrate

Air data probe corrosion protection

Precursors and methods for preparing silicon-containing films

Semiconductor manufacturing apparatus and semiconductor device manu...

Plasma etching method and plasma etching apparatus

Functionalized cyclosilazanes as precursors for high growth rate si...

Package structure for semiconductor device and preparation method t...

Method of manufacturing semiconductor device and ion beam irradiati...

CVD preparation method for minimizing camera module dot defects and...

Apparatus for processing a substrate

Organoamino-functionalized cyclic oligosiloxanes for deposition of...

Film-forming method and film-forming apparatus

Single process volume to perform high-pressure and low-pressure pro...

Film deposition method and film deposition apparatus

Selective deposition of metals, metal oxides, and dielectrics

Cyclical deposition methods

Deposition method and deposition apparatus

Patents Applicationslast 30 patents

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF

Method and Apparatus for Increasing Skin Depth and Reducing Eddy Cu...

DECORATIVE ANTIQUE COPPER COATING WITH HTL COMPATIBILITY AND NOVEL...

SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS

PRECURSORS FOR SELECTIVE DEPOSITION OF SILICON-CONTAINING FILMS

SELF-ALIGNED THREE-DIMENSIONAL OPTICAL PHASED ARRAY AND FABRICATION...

MULTILAYER COATING FOR CORROSION RESISTANCE

METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...

FILM FORMING METHOD

SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...

METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE

LAMINATE AND MANUFACTURING METHOD OF LAMINATE

ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...

INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS

SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...

ALUMINA MEMBRANE, PREPARATION METHOD AND USE THEREOF

MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...

FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...

COATED GLASS BUBBLES, COMPOSITES THEREFROM, AND METHODS OF MAKING T...

SILICON PRECURSOR COMPOUND, SILICON-CONTAINING FILM FORMATION COMPO...

SILICON PRECURSOR COMPOUND, COMPOSITION FOR FORMING SILICON-CONTAIN...

METHOD OF PRODUCING A COATED GLASS ARTICLE

OXIDE FILM FORMING DEVICE

FILM FORMING METHOD AND FILM FORMING APPARATUS

PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF

METHOD FOR FORMING SILICON-CONTAINING FILM, AND SILICON-CONTAINING...

COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...

Patterning Process

METHOD FOR FORMING THIN FILM AND APPARATUS FOR PROCESSING SUBSTRATE...

FILM FORMING METHOD AND FILM FORMING APPARATUS