Silicon dioxide

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CPC
C23C16/402

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/402Silicon dioxide

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods of forming dielectric layers through deposition and anneal...
- Patent number 12,368,044
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wan-Yi Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,362,156
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for topography-selective depositions
- Patent number 12,347,675
- Issue date Jul 1, 2025
- ASM IP Holding B.V.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon precursor compounds and method for forming silicon-containi...
- Patent number 12,347,672
- Issue date Jul 1, 2025
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-reflective optical coatings and methods of forming the same
- Patent number 12,339,421
- Issue date Jun 24, 2025
- Corning Incorporated
- Ming-Huang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,331,403
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film deposition process
- Patent number 12,322,591
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid discharge head, liquid discharge device, liquid discharge ap...
- Patent number 12,319,059
- Issue date Jun 3, 2025
- Ricoh Company, Ltd.
- Satoshi Mizukami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for thermal deposition silicon-...
- Patent number 12,320,001
- Issue date Jun 3, 2025
- VERSUM MATERIALS US, LLC
- Chandra Haripin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for filling gap using atomic layer deposition
- Patent number 12,312,686
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Eunhyoung Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming metal silicon oxide and metal silicon oxynitride...
- Patent number 12,305,281
- Issue date May 20, 2025
- ASM IP Holding B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, elevator and method of manufacturin...
- Patent number 12,293,932
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for plasma deposition of anti-fog coatings
- Patent number 12,286,559
- Issue date Apr 29, 2025
- UniversiteLaval
- Gaétan Laroche
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 12,288,671
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 12,261,038
- Issue date Mar 25, 2025
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting apparatus, substrate processing apparatus incl...
- Patent number 12,230,531
- Issue date Feb 18, 2025
- ASM IP Holding B.V.
- Seung Woo Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cutting tool
- Patent number 12,220,747
- Issue date Feb 11, 2025
- Sumitomo Electric Hardmetal Corp.
- Fumiyoshi Kobayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Smoothing surface roughness using atomic layer deposition
- Patent number 12,215,419
- Issue date Feb 4, 2025
- Eagle Technology, LLC
- James Throckmorton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer coating for corrosion resistance
- Patent number 12,191,120
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing silicon oxide films
- Patent number 12,188,121
- Issue date Jan 7, 2025
- ASM Genitech Korea Ltd.
- Tae Ho Yoon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Soft-magnetic powder comprising coated particles
- Patent number 12,180,568
- Issue date Dec 31, 2024
- BASF SE
- Robert Prunchak
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Nano robotic system for high throughput single cell DNA sequencing
- Patent number 12,163,979
- Issue date Dec 10, 2024
- Versitech Limited
- Ning Xi
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Thermal atomic layer deposition of silicon-containing films
- Patent number 12,157,945
- Issue date Dec 3, 2024
- Lam Research Corporation
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective liquid sliding surface and method of fabricating the same
- Patent number 12,112,941
- Issue date Oct 8, 2024
- THE INDUSTRY & ACADEMIC COOPERAPATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC)
- Seong Min Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of post-deposition treatment for silicon oxide film
- Patent number 12,100,588
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,080,546
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal-doped boron films
- Patent number 12,077,852
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air data probe corrosion protection
- Patent number 12,071,684
- Issue date Aug 27, 2024
- Rosemount Aerospace Inc.
- Steven Poteet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and methods for preparing silicon-containing films
- Patent number 12,071,688
- Issue date Aug 27, 2024
- Entegris, Inc.
- SangJin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SILICON PRECURSOR COMPOUND IN ASYMMETRIC STRUCTURE, METHOD FOR PREP...
- Publication number 20250230176
- Publication date Jul 17, 2025
- Merck Patent GmbH
- BYEONG-IL YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS
- Publication number 20250232992
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Ming-Yao HSIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL
- Publication number 20250230540
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Supriya Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20250226177
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TREATING SILICON NITRIDE BASED DIELECTRIC FILMS
- Publication number 20250218763
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Dongjoon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT TO BE USED FOR PLASMA PROCESSING DEVICE, METHOD FOR MANUF...
- Publication number 20250201537
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Taisei SEGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ONO FILMS AND METHODS OF MAKING THEREOF
- Publication number 20250185263
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smoothing Surface Roughness Using Atomic Layer Deposition
- Publication number 20250179631
- Publication date Jun 5, 2025
- Eagle Technology, LLC
- James THROCKMORTON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH QUALITY NITRIDE AND OXIDE FABRICATION AND SYSTEM
- Publication number 20250174455
- Publication date May 29, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPONGE-LIKE POROUS BODY, POLISHING PAD, LIQUID ABSORBING PAD, CLEAN...
- Publication number 20250108478
- Publication date Apr 3, 2025
- Canon Kabushiki Kaisha
- SHINJI FUKUI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR SEMICONDUCTOR PROCESSING
- Publication number 20250105002
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Hunter Frost
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20250087480
- Publication date Mar 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Haifeng QIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Increasing Skin Depth and Reducing Eddy Cu...
- Publication number 20250087417
- Publication date Mar 13, 2025
- Atlas Magnetics
- John Othniel McDonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DECORATIVE ANTIQUE COPPER COATING WITH HTL COMPATIBILITY AND NOVEL...
- Publication number 20250084537
- Publication date Mar 13, 2025
- MOTHERSON INNOVATIONS COMPANY LIMITED
- Simon David FIELD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS
- Publication number 20250076550
- Publication date Mar 6, 2025
- Modulight Corporation
- Timo Aho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR SELECTIVE DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20250074927
- Publication date Mar 6, 2025
- Entegris, Inc.
- Drew Michael Hood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-ALIGNED THREE-DIMENSIONAL OPTICAL PHASED ARRAY AND FABRICATION...
- Publication number 20250067928
- Publication date Feb 27, 2025
- The Regents of the University of Michigan
- Dachuan WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER COATING FOR CORROSION RESISTANCE
- Publication number 20250069857
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...
- Publication number 20250054752
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dustin Zachary Austin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20250051911
- Publication date Feb 13, 2025
- AIR WATER INC.
- Fumio KAWASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...
- Publication number 20250051914
- Publication date Feb 13, 2025
- Merck Patent GmbH
- Byeong-IL Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE
- Publication number 20250043422
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATE AND MANUFACTURING METHOD OF LAMINATE
- Publication number 20250018697
- Publication date Jan 16, 2025
- FUJIFILM CORPORATION
- Yoshihiko MOCHIZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...
- Publication number 20250011928
- Publication date Jan 9, 2025
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Songtao Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS
- Publication number 20250006474
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Naomi YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...
- Publication number 20240417882
- Publication date Dec 19, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALUMINA MEMBRANE, PREPARATION METHOD AND USE THEREOF
- Publication number 20240408551
- Publication date Dec 12, 2024
- SHENZHEN ASIA KIDNEY REBUILDING MEDICAL TECHNOLOGY LTD.
- Zhonghui CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...
- Publication number 20240410052
- Publication date Dec 12, 2024
- Picosun Oy
- Jesse KALLIOMÄKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...
- Publication number 20240395541
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED GLASS BUBBLES, COMPOSITES THEREFROM, AND METHODS OF MAKING T...
- Publication number 20240384069
- Publication date Nov 21, 2024
- Adam D. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Silicon dioxide

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of forming dielectric layers through deposition and anneal...

Substrate processing method and substrate processing apparatus

Methods and systems for topography-selective depositions

Silicon precursor compounds and method for forming silicon-containi...

Anti-reflective optical coatings and methods of forming the same

Substrate processing method and substrate processing device

Thin film deposition process

Liquid discharge head, liquid discharge device, liquid discharge ap...

Compositions and methods using same for thermal deposition silicon-...

Method and apparatus for filling gap using atomic layer deposition

Method for forming metal silicon oxide and metal silicon oxynitride...

Substrate processing apparatus, elevator and method of manufacturin...

Method for plasma deposition of anti-fog coatings

Film deposition apparatus for fine pattern forming

Gapfill of variable aspect ratio features with a composite PEALD an...

Substrate supporting apparatus, substrate processing apparatus incl...

Cutting tool

Smoothing surface roughness using atomic layer deposition

Multilayer coating for corrosion resistance

Method of depositing silicon oxide films

Soft-magnetic powder comprising coated particles

Nano robotic system for high throughput single cell DNA sequencing

Thermal atomic layer deposition of silicon-containing films

Method of forming structures using a neutral beam

Selective liquid sliding surface and method of fabricating the same

Method of post-deposition treatment for silicon oxide film

Method of processing substrate, method of manufacturing semiconduct...

Metal-doped boron films

Air data probe corrosion protection

Precursors and methods for preparing silicon-containing films

Patents Applicationslast 30 patents

SILICON PRECURSOR COMPOUND IN ASYMMETRIC STRUCTURE, METHOD FOR PREP...

DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS

SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

TREATING SILICON NITRIDE BASED DIELECTRIC FILMS

COMPONENT TO BE USED FOR PLASMA PROCESSING DEVICE, METHOD FOR MANUF...

ROBUST ONO FILMS AND METHODS OF MAKING THEREOF

Smoothing Surface Roughness Using Atomic Layer Deposition

HIGH QUALITY NITRIDE AND OXIDE FABRICATION AND SYSTEM

SPONGE-LIKE POROUS BODY, POLISHING PAD, LIQUID ABSORBING PAD, CLEAN...

METHOD FOR SEMICONDUCTOR PROCESSING

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF

Method and Apparatus for Increasing Skin Depth and Reducing Eddy Cu...

DECORATIVE ANTIQUE COPPER COATING WITH HTL COMPATIBILITY AND NOVEL...

SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS

PRECURSORS FOR SELECTIVE DEPOSITION OF SILICON-CONTAINING FILMS

SELF-ALIGNED THREE-DIMENSIONAL OPTICAL PHASED ARRAY AND FABRICATION...

MULTILAYER COATING FOR CORROSION RESISTANCE

METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...

FILM FORMING METHOD

SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SIL...

METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE

LAMINATE AND MANUFACTURING METHOD OF LAMINATE

ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...

INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS

SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...

ALUMINA MEMBRANE, PREPARATION METHOD AND USE THEREOF

MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...

FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...

COATED GLASS BUBBLES, COMPOSITES THEREFROM, AND METHODS OF MAKING T...