Number | Date | Country | Kind |
---|---|---|---|
59-250869 | Nov 1984 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4161743 | Yonezawa et al. | Jul 1979 |
Entry |
---|
J. Appl. Phys., "Microstructure and Properties of Rf-Sputtered Amorphous Hydrogenated Silicon Films", vol. 52, No. 8, pp. 5329-5339 (Aug., 1981). |